JPS60244014A - Method of producing laminated ceramic part - Google Patents
Method of producing laminated ceramic partInfo
- Publication number
- JPS60244014A JPS60244014A JP9848784A JP9848784A JPS60244014A JP S60244014 A JPS60244014 A JP S60244014A JP 9848784 A JP9848784 A JP 9848784A JP 9848784 A JP9848784 A JP 9848784A JP S60244014 A JPS60244014 A JP S60244014A
- Authority
- JP
- Japan
- Prior art keywords
- sheet
- sheets
- laminated
- green sheet
- internal electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Laminated Bodies (AREA)
- Ceramic Capacitors (AREA)
- Coils Or Transformers For Communication (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
〔発明の属する技術分野〕
本発明は積層型のチップ電子部品として用いられる積層
セラミックコンデンサや積層チップインダクタ等の電子
部品の製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION [Technical field to which the invention pertains] The present invention relates to a method for manufacturing electronic components such as multilayer ceramic capacitors and multilayer chip inductors used as multilayer chip electronic components.
この種の製造方法の一例を、積層セラミックコンデンサ
の例をとって第1図により説明する。An example of this type of manufacturing method will be explained with reference to FIG. 1, taking a multilayer ceramic capacitor as an example.
まず、誘電体と有機結合剤、可塑剤とを含む泥漿を、第
1図aに示すようにドクタープレイド11によシキャリ
アシート12上に成膜し、乾燥機13により乾燥してキ
ャリア付グリーンシ一ト14を作成する。その後、第1
図すに示すように。First, a slurry containing a dielectric, an organic binder, and a plasticizer is formed into a film on a carrier sheet 12 by Dr. Plaid 11 as shown in FIG. Create sheet 14. Then the first
As shown in the figure.
キャリア付グリーンシート14からグリーンシート15
を剥離し、抜き装置16で後述する積層金型より一回り
大きい形状に打ち抜きケース17にストックする。次に
、目合せマーカを含む内部電極パターンを印刷し乾燥す
る。更に、内部電極パターンが設計位置にあるよう、目
合せマーカを基準位置に合せ、第1図Cに示すように、
打ち抜き金型18内に積層してゆく。そして、第1図d
に示すように、設定枚数の積層終了後、熱プレス機19
によりプレスを行い、定形状に切断。Green sheet 14 to green sheet 15 with carrier
is peeled off and stocked in a punching case 17, which is punched out using a punching device 16 into a shape that is slightly larger than a laminated mold, which will be described later. Next, an internal electrode pattern including alignment markers is printed and dried. Furthermore, align the alignment marker with the reference position so that the internal electrode pattern is at the designed position, as shown in Figure 1C.
The layers are stacked in the punching die 18. And Figure 1 d
As shown in the figure, after the set number of sheets have been laminated, the heat press machine 19
Press and cut into regular shapes.
焼成する。最後に、外部電極を形成する。Fire. Finally, external electrodes are formed.
この場合、内部電極を印刷したシートは同一形状のもの
を規定枚数だけ準備し、一枚ずつこの内部電極印刷ノー
トを目合せし、打抜き、金型への積層を行う。しかも内
部電極印刷シートは、コンデンサ内で有効内部電極が交
互に外部電極に短絡する様積層する為、交互に向きを変
えなければ彦らない。In this case, a prescribed number of sheets with the same shape are prepared with internal electrodes printed on them, and the internal electrode printed notes are aligned one by one, punched out, and laminated into a mold. Moreover, since the internal electrode printed sheets are stacked in such a way that the effective internal electrodes are alternately short-circuited to the external electrodes within the capacitor, the sheet cannot be opened unless the orientation is changed alternately.
従来のこの方法で積層した生チップの切断面を観察する
と、内部電極のズレが切りしろ(約1關)の半分の05
咽程度有り、ズレのバラツキが非常に太きい。これは積
層枚数が多いほど顕著である。そしてこの積層ズレは積
層セラミックコンデンサに於いて、内部電極部と切りし
ろ(内部電極のない部分)との密度差の大きい部位に位
置する為、電圧印加時対向電極もしくは対向の外部電極
とのショートとなって現われ。When observing the cut surface of raw chips stacked using this conventional method, the misalignment of the internal electrodes is half of the cutting margin (approximately 1 degree).
It is about the same level as the throat, and the variation in the deviation is very large. This becomes more noticeable as the number of laminated sheets increases. In a multilayer ceramic capacitor, this lamination misalignment is located in a region where there is a large density difference between the internal electrode part and the cut margin (part without internal electrode), so when a voltage is applied, a short circuit occurs with the opposing electrode or the opposing external electrode. It appeared.
信頼性は大きく低下する。この積層ズレは目合せマーカ
の印刷精度、そして目合せ精度に起因するところが犬で
あり9両者の精度向上が印刷にじみ等により阻害され非
常に困難である。Reliability will be greatly reduced. This lamination misalignment is caused by the printing accuracy of the alignment marker and the alignment accuracy, and it is extremely difficult to improve the accuracy of both of them because printing smudges and the like hinder the improvement of the accuracy.
本発明はこの欠点を除去し、積層ズレの度合を小さくし
た信頼性の高い積層セラミック部品を提供しようとする
ものである。The present invention aims to eliminate this drawback and provide a highly reliable multilayer ceramic component in which the degree of lamination misalignment is reduced.
本発明は、セラミックシー1・の打抜き一内部電極の印
刷、乾燥−積層の一連の工程をセラミックシー1・を吸
着パッドに吸着させた−1.ま行い。In the present invention, the ceramic sheet 1 is adsorbed onto a suction pad through a series of steps of punching the ceramic sheet 1, printing internal electrodes, drying, and laminating the ceramic sheet 1. Well, go ahead.
= 3−
印刷精度、マーカの位置合せによる積層ズレをなくした
方法である。= 3- This is a method that eliminates printing accuracy and stacking misalignment due to marker alignment.
すなわち1本発明では積層ズレの誤差として(印刷精度
十積層精度)の2項目を考えればよく、〔従来はこれに
(マーカー印刷精度士マーカー位置合せ精度)をプラス
して考慮しなければならない。〕 積層ズレの要因を減
らし、その度合いを極端に小さくすることができる。That is, in the present invention, it is sufficient to consider two items (printing accuracy + lamination accuracy) as the error of lamination misalignment, whereas conventionally, (marker printing accuracy and marker alignment accuracy) must be added to this. ] The causes of lamination misalignment can be reduced and the degree of misalignment can be made extremely small.
次に、第2図を参照して本発明の詳細な説明する。 Next, the present invention will be explained in detail with reference to FIG.
誘電体磁気素材としては、 Pb(Nb 1/2. F
e 1/2)(W1/3)03を組成とする複合ペロブ
スカイト系誘電体材料を使用した。この材料を混合、予
焼。As a dielectric magnetic material, Pb (Nb 1/2. F
A composite perovskite dielectric material having a composition of e 1/2) (W 1/3) 03 was used. Mix this material and pre-fire.
湿式粉砕してポリビニルブチラールの有機結合剤と溶剤
とから泥漿を作成する。次に、第2図aに示すように、
キャリアフィルム22」二に30μのグリーンノートを
有するキャリア付グリーンシート24をドクタープレイ
ド21により作成する。A slurry is created from the polyvinyl butyral organic binder and solvent by wet grinding. Next, as shown in Figure 2a,
A green sheet 24 with a carrier having a green note of 30 μm is prepared using a doctor plaid 21.
23は乾燥機である。23 is a dryer.
4−
このキャリア付グリーンシート24は、第2図すに示す
工程でグリーンシート25が剥離され。4- The green sheet 25 is peeled off from the carrier-attached green sheet 24 in the process shown in FIG.
抜き装置26で10100X120形状に打ち抜きなが
ら保持手段としての吸着パッド30に吸着させる。While punching out a 10100x120 shape using the punching device 26, it is sucked onto a suction pad 30 serving as a holding means.
そして、第2図Cに示すように、吸着パッド30への吸
着状態のままで印刷機31によりスクリーン32を通し
てシー1−25’に内部電極パターンの印刷が行われる
。次に、第2図dに示すように。Then, as shown in FIG. 2C, an internal electrode pattern is printed on the sheet 1-25' through the screen 32 by the printing machine 31 while the suction pad 30 remains in the suction state. Next, as shown in Figure 2d.
熱風ドライヤ33により乾燥を行う。勿論、この工程も
吸着パッド30で吸着した寸まで行われる。Drying is performed using a hot air dryer 33. Of course, this step is also carried out until the suction pad 30 is able to adsorb it.
第2図eでは乾燥終了後のシート25′が吸着パッド3
0で打ち抜き金型28へ積層される。そして。In Fig. 2e, the sheet 25' after drying is attached to the suction pad 3.
It is laminated to the punching die 28 at 0. and.
所定枚数だけ積層されると、熱プレス機29により熱圧
着が行われる。When a predetermined number of sheets are laminated, a heat press machine 29 performs thermocompression bonding.
この場合の内部電極印刷シート枚数は61枚であり、内
部電極ペーストはAg粉及びPd粉と有機結合剤、可塑
剤とを混練したものである。この積層体を12X16m
+nに外周刃切断機で切断し。In this case, the number of internal electrode printed sheets was 61, and the internal electrode paste was a mixture of Ag powder, Pd powder, an organic binder, and a plasticizer. This laminate is 12x16m
+n using a peripheral blade cutting machine.
ノ\11 脱メインダー、焼成し、外部Ag電極の塗布。ノ\11 Demainder, firing, and application of external Ag electrode.
焼付けを行い、積層セラミソクコンデンザの信軸性試験
を行った。この結果を第1表に示す。After baking, the axial stability test of the laminated ceramic capacitor was conducted. The results are shown in Table 1.
なお、抜き装置26のカッター〇熱防御の為、冷却管3
4を取り付けた。印刷機31はスクリーン印刷でナイロ
ンメツシュ#200を使用し、塗布コータとしてはグラ
ビアコータの改造タイプを使用した。In addition, the cutter of the extraction device 26 is connected to the cooling pipe 3 for heat protection.
I installed 4. The printing machine 31 used nylon mesh #200 for screen printing, and the coater used was a modified type of gravure coater.
第1表
以上1本発明を積層セラミックコンデンサについて説明
したが1本発明は積層型のチップインダクタにも適用で
きる。チップインダクタの場合は、セラミックスは磁性
材(例えばフェライト)を用い、また内部電極のパター
ン形成が上下層が導通するように層の1か所に貫通孔を
形成することに差異はあるが、その他は基本的に同じプ
ロセスである。チップインダクタでも内部電極の位置決
めが高精度にでき、再現性が良くなる。Although the present invention has been described in connection with a multilayer ceramic capacitor in Table 1, the present invention can also be applied to a multilayer chip inductor. In the case of chip inductors, there are differences in that the ceramic is a magnetic material (e.g. ferrite) and the internal electrode pattern is formed by forming a through hole in one place in the layer so that the upper and lower layers are electrically conductive. is basically the same process. Even with chip inductors, the internal electrodes can be positioned with high precision, improving reproducibility.
従来方法では、工程が単一で、連続工程ではなく、内部
電極印刷シートがストックヤードに保管されていたため
位置決めに熟練を要していたが9本発明方法のようにす
れば、生産性が大幅に向上できる。また、シートの積層
ズレの度合を小さくして高信頼性の積層セラミック部品
を提供できる。In the conventional method, the process was a single process, not a continuous process, and the internal electrode printed sheets were stored in a stockyard, so positioning required skill.9 However, with the method of the present invention, productivity can be greatly increased. can be improved. Furthermore, it is possible to provide a highly reliable multilayer ceramic component by reducing the degree of sheet lamination misalignment.
7−
た図である。
図中、11,2]はドクタープレイド、12.22はキ
ャリアシート、1.3.23は乾燥機、 、 14 、
24はキャリア付グリーンシート、15.25はグリー
ンシート、16.26は抜き装置、18.28は打ち抜
き金型、19.29は熱プレス機、30は吸着パッド。
31は印刷機、32はスクリーン、33は熱風ドライヤ
。
代理人(7127)弁理士後藤洋介
8−
(b)
(C) (d)
(C)
1p#1
rρ1
紅陳
積層
熱圧煽7- is a diagram. In the figure, 11, 2] is Doctor Plaid, 12.22 is a carrier sheet, 1.3.23 is a dryer, 14,
24 is a green sheet with a carrier, 15.25 is a green sheet, 16.26 is a punching device, 18.28 is a punching die, 19.29 is a heat press machine, and 30 is a suction pad. 31 is a printing machine, 32 is a screen, and 33 is a hot air dryer. Agent (7127) Patent attorney Yosuke Goto 8- (b) (C) (d) (C) 1p#1 rρ1 Hongchen laminated heat pressure agitation
Claims (1)
印刷し積層するセラミック部品の製造方法に於いて。 (i)有機フィルムのキャリア膜にセラミックスグリー
ンシートを連続して成膜する工程と。 (11)この後、前記グリーンシートをキャリア膜から
剥離して所望寸法に打ち抜く工程と。 (iii)前記工程(11)で保持手段に前記打ち抜か
れたグリーンシートを保持させた状態で、シート背面に
スクリーンを介して導電性内部電極を印刷する工程と。 (iV)引き続き前記保持手段に保持させたままでシー
トを乾燥させる工程と。 (V)この後、金型に前記工程(iv)で得られたシー
トを挿入する工程と。 (V0以下、前記工程(11)〜(v)をくり返し、シ
ートを積層する工程と。 (Vl)前記工程(vDで積層されたシートを熱圧着す
る工程。 とを含むことを特徴とする積層セラミック部品の製造方
法。[Scope of Claims] 1. A method for manufacturing ceramic parts in which internal electrodes are printed and laminated on ceramic green sheets. (i) A step of continuously forming a ceramic green sheet on a carrier film of an organic film. (11) After this, the step of peeling the green sheet from the carrier film and punching it into a desired size. (iii) A step of printing conductive internal electrodes on the back surface of the sheet through a screen while the holding means holds the green sheet punched out in step (11). (iv) Subsequently drying the sheet while being held in the holding means. (V) After this, a step of inserting the sheet obtained in the step (iv) into the mold. (From V0 onwards, the steps (11) to (v) are repeated to laminate the sheets. (Vl) A step of thermocompression bonding the sheets laminated in the step (vD). Method of manufacturing ceramic parts.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9848784A JPS60244014A (en) | 1984-05-18 | 1984-05-18 | Method of producing laminated ceramic part |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9848784A JPS60244014A (en) | 1984-05-18 | 1984-05-18 | Method of producing laminated ceramic part |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS60244014A true JPS60244014A (en) | 1985-12-03 |
JPH0317206B2 JPH0317206B2 (en) | 1991-03-07 |
Family
ID=14221008
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9848784A Granted JPS60244014A (en) | 1984-05-18 | 1984-05-18 | Method of producing laminated ceramic part |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60244014A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1989008923A1 (en) * | 1988-03-07 | 1989-09-21 | Matsushita Electric Industrial Co., Ltd. | Method of producing laminated ceramic electronic parts |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2011096101A1 (en) * | 2010-02-02 | 2011-08-11 | 三菱重工業株式会社 | Centrifugal pump |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60189211A (en) * | 1984-03-07 | 1985-09-26 | 太陽誘電株式会社 | Method and device for machining crude sheet for laminated porcelain condenser |
-
1984
- 1984-05-18 JP JP9848784A patent/JPS60244014A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60189211A (en) * | 1984-03-07 | 1985-09-26 | 太陽誘電株式会社 | Method and device for machining crude sheet for laminated porcelain condenser |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1989008923A1 (en) * | 1988-03-07 | 1989-09-21 | Matsushita Electric Industrial Co., Ltd. | Method of producing laminated ceramic electronic parts |
Also Published As
Publication number | Publication date |
---|---|
JPH0317206B2 (en) | 1991-03-07 |
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