JPH08186047A - Production of multilayer inductor - Google Patents

Abstract

PURPOSE: To form a series of green sheet only through printing by printing a ceramic green sheet having through holes such that the end part of conductor pattern for coil is located at the position of the through hole. CONSTITUTION: A magnetic paste is printed thickly in solid film shape onto a base film, i.e., a PET film 1, having one side subjected to mold release processing thus producing a ceramic green sheet. A plurality of conductor patterns 5 for coil having one or more turn principally comprising Ag are then printed at the upper part of a solid film-like ceramic green sheet printed through a mask pattern onto a PET film 1 using a magnetic paste such that a plurality of through holes 3 are made. The plurality of conductor patterns 5 are printed such that the end part of the conductor pattern 5 for coil is located at the position of the through hole 3 thus producing a ceramic green sheet.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a laminated inductor component which is surface-mounted on a high-density mounting circuit board of a small digital electronic device.

[0002]

2. Description of the Related Art In recent years, multilayer inductor components have been widely used as noise suppression components in interfaces and the like in order to suppress noise from high-density mounting circuit boards accompanying the miniaturization and thinning of digital equipment. Hereinafter, a method of manufacturing the laminated inductor component will be described.

A manufacturing process for an example of a conventional green sheet laminated inductor component will be described with reference to FIG.

First, as a raw material for a magnetic material, NiO, Z
Powders of nO, CuO and Fe ₂ O ₃ are prepared, weighed predetermined amounts, wet-mixed with a ball mill, dried with a spray dryer, temporarily calcined, and wet-ground with a ball mill. After that, it is dried with a spray dryer to obtain magnetic powder. A binder is added to this and kneaded to prepare a slurry, and then the slurry is applied onto a releasable film by a doctor blade method and dried to prepare a ceramic green sheet I.

Using this ceramic green sheet I,
Solid film-like ceramic green sheet J cut out to a predetermined size and solid film-like ceramic green sheet J cut out to a predetermined size from ceramic green sheet I
A ceramic green sheet K in which through holes are formed at predetermined positions by using and a green sheet L in which a conductor pattern for a coil is formed by printing on a PET film are prepared.

The ceramic green sheet J prepared in this manner is thermocompression bonded to a predetermined thickness, and the conductor pattern of the green sheet L is transferred to the upper part of the ceramic green sheet J and laminated and
Crimp. Further, the ceramic green sheet K is transferred onto the top of the ceramic green sheet K so that the end of the conductor pattern is located at the position of the through hole of the ceramic green sheet K. In this way, the green sheet L and the ceramic green sheet K are laminated and pressure-bonded so that the through holes and the end portions of the conductor patterns are connected to each other until a predetermined number of turns is obtained so as to form a spiral coil shape in the lamination direction. Are alternately laminated, and a ceramic green sheet J is further laminated and pressure-bonded on the ceramic green sheet J to a predetermined thickness to obtain a sheet-shaped integrated laminate.

As another method, another conventional method of manufacturing a printed laminated inductor component will be described with reference to FIG.

First, a ferrite paste is printed and formed on a plastic base film, which is a support for printing, in the form of a solid film, and a solid film of ferrite is sequentially and repeatedly printed and laminated thereon to secure a predetermined thickness. Next, a conductor pattern for a coil of about a half turn at the beginning of winding is printed and laminated on the upper portion of this laminate with a conductor paste. Next, leave one end of the conductor pattern for the coil on top of this laminated body, and
A ferrite pattern covering only the area of 2 is printed and laminated using the ferrite paste. Then, a conductor pattern for coil of about half a turn is printed and laminated on the upper part of the laminated body by using the conductor paste so as to be connected to an end of the conductor pattern for coil. After that, the ferrite pattern and the coil conductor pattern are alternately printed on the upper portion of the laminated body by printing to be laminated until a predetermined number of coil turns is reached. Next, a coil conductor pattern of about a half turn at the end of winding is printed and laminated with a conductor paste on the top of the laminated body,
Finally, a solid ferrite film is repeatedly printed and laminated on the upper portion of the laminated body until it has a predetermined thickness.

This sheet-shaped integrated laminate is cut into a predetermined shape, fired as an individual piece, and an end face electrode is formed to produce a product, which is useful as a method for producing a laminated inductor component which can be produced at low cost. .

[0010]

However, the conventional manufacturing method described above has a serious problem.

That is, a method generally used as a method of forming a through hole at a predetermined position of a ceramic green sheet is to punch a hole together with the film using a puncher. For this reason, one die is required for each chip shape, which is not versatile and is a factor to increase the cost. Further, in order to reduce the number of man-hours for making holes, it is necessary to make dozens or hundreds of holes at a time, and if the machining accuracy of the mold is not sufficient, the yield will be reduced and maintenance will be difficult. In addition, when transferring and stacking the coil conductor pattern through the through holes, it is very difficult to connect without applying pressure to the through holes during the stacking process, resulting in poor connection and reduced yield. Had problems with.

In the second method, the paste is directly printed on the dry film when the laminated body is formed, and some connection mistakes such as print faint or misalignment are reached by the time the predetermined number of coil turns is reached. In the case of column processing that requires printing to continue to the end, even if
One mistake is also a factor that amplifies the reduction in yield each time printing is repeated. In addition, if the step connection by printing is not less than 50 μm, it is difficult to form stably,
When the step is made small, that is, when the ferrite layer is made thin, there is a manufacturing problem that a short circuit occurs between the conductors during firing and the yield is reduced.

The present invention solves the above-mentioned conventional problems, and provides a method of manufacturing a laminated inductor component which is excellent in terms of manufacturing and which can be manufactured at a low cost, which cannot be realized by a conventional laminated inductor component. With the goal.

[0014]

In order to achieve this object, a method of manufacturing a laminated inductor component according to the present invention comprises a ceramic green sheet A formed by printing a ceramic paste on a base film in the form of a solid film, and the same as the above. Ceramic green sheet B in which a conductor pattern for a coil is formed by printing on a printed ceramic green sheet formed on the base film in the form of a solid film by the ceramic paste.
A, the conductor pattern for coil is placed on the printed ceramic green sheet having a through hole formed by the ceramic paste on the same base film as described above, and the end of the conductor pattern for coil is located at the position of the through hole. A ceramic green sheet CA formed by printing is prepared, and the ceramic green sheet CA having the through holes is formed on the ceramic green sheet A transferred onto a support so that the coil conductor pattern faces the ceramic green sheet A. By transferring and laminating the ceramic green sheet BA so that the end portion of the coil conductor pattern of the ceramic green sheet BA is located in the through hole portion of the ceramic green sheet CA. After facing the BA and transferring and laminating to form an integrated laminate, the integrated laminate is cut into individual pieces and fired, and both end portions of the integrated laminate at the start and end of the coil conductor pattern are wound. The end face electrode is formed so as to be connected to.

[0015]

According to the method for manufacturing a laminated inductor component of the present invention, by forming the through holes, which is a problem in the conventional green sheet lamination method, by printing, it is possible to rely on mechanical work for forming the through holes. Since a series of green sheets can be formed only by printing, it can be manufactured at low cost and is excellent in mass productivity. Further, in connection of the conductors through the through-holes, since the through-holes are filled with the conductors by printing, open defects due to the connection are reduced, and the product yield is improved. Furthermore, a method of manufacturing a laminated inductor component, which has a reduction in yield due to column processing, which has been a problem in the conventional printing lamination method, and has parallel processing in which the required number of green sheets that have already been prepared are sequentially transferred and laminated. Can be provided.

[0016]

【Example】

(Embodiment 1) Hereinafter, a method of manufacturing a laminated inductor component according to an embodiment of the present invention will be described with reference to the drawings.

First, as a raw material of the magnetic material, NiO, Z
The particle size of nO, CuO and Fe ₂ O ₃ is 0.1 to 1.0 μ
m powder is prepared, and each predetermined amount is weighed, wet-mixed for a predetermined time in a ball mill, dried by a spray drier, and then calcinated, ground to some extent into powder, and then wet-milled by a ball mill. Then, it was dried with a spray dryer to obtain magnetic powder.

Next, these powders are kneaded with a vehicle in which a polyvinyl butyral resin is dissolved in an organic solvent to prepare a ceramic paste (magnetic paste) shown in FIG.
Create

First, as a step of preparing a ceramic green sheet, as shown in FIG. 2, the above-mentioned magnetic paste is thickly coated and printed in a solid film form on a PET film 1 having one side serving as a base film and subjected to a release treatment. This is referred to as a ceramic green sheet A2.

Next, as shown in FIG. 4, which is shown as one piece as a whole, the above-mentioned magnetic paste is used on the PET film 1,
The conductor pattern 5 for coil having one or more turns mainly composed of Ag is formed on the solid green ceramic sheet 4 formed by printing using a mask pattern in which a plurality of through holes 3 are formed. A plurality of print formations are made so that the end portions of the coil conductor pattern 5 are located at the positions, and these are used as ceramic green sheets CA6.

Next, as shown in FIG. 6, which is also shown as a whole piece, a ceramic green sheet 7 formed by printing the magnetic paste on the PET film 1 in the form of a solid film.
A plurality of coil conductor patterns 5 containing Ag as a main component and having one or more turns are printed and formed on the upper part of the above to form a ceramic green sheet BA8.

Next, as a step of transferring and laminating the prepared ceramic green sheets, the ceramic green sheets A2 are transferred to the support 9 as shown in FIG. 3, and the upper part thereof is shown as a whole piece in FIG. As described above, the coil conductor pattern 5 is opposed to the ceramic green sheet A2, and the ceramic green sheet CA6 is transferred and laminated from the PET film 1 to form the laminated body 10.

Next, as shown in FIG. 7, which is also shown as one piece of the whole, a ceramic green sheet C is provided on top of the laminated body 10.
The ceramic green sheet BA8 is transferred and laminated from the PET film 1 so that the ends of the coil conductor patterns 5 of the ceramic green sheet BA8 are located in the through holes 3 formed by A6, and the finally transferred laminated body 10
The conductor pattern 5 for a coil is made to face the ceramic green sheet BA8 on the upper part of the above, and the ceramic green sheet A2 is transferred and laminated to obtain an integrated laminate 11.

The ceramic green sheets BA and C having a coil conductor pattern of about 3/4 turn are formed.
It is also possible to use A.

Thereafter, as shown in FIG. 8, it is cut into chip-shaped pieces of a prescribed size, and main firing is performed at about 900 ° C. to obtain chip-shaped pieces as shown in FIG. As shown in FIG. 5, the end face electrode 12 containing Ag as a main component is formed so as to be electrically connected to both ends of each individual call conductor pattern 5 to obtain a laminated inductor component.

(Embodiment 2) Hereinafter, a method of manufacturing a laminated inductor component according to a second embodiment of the present invention will be described with reference to the drawings.

First, as in Example 1, the magnetic powder was kneaded with a vehicle prepared by dissolving polyvinyl butyral resin in an organic solvent to prepare a ceramic paste (magnetic paste) shown in FIG. As a step of producing a ceramic green sheet, as shown in FIG. 12, the magnetic paste is printed and formed in a solid film shape on the PET film 1 having a release treatment on one surface as a base film. To do.

Next, as shown in FIG. 14 which is shown as a whole piece in FIG. 14, a plurality of coil conductive patterns 5 mainly composed of Ag and formed on the PET film 1 by one or more turns are formed on the PET film 1. A solid film-shaped ceramic green sheet 7 is formed on the above-mentioned magnetic paste to form a ceramic green sheet BB8a.

Next, FIG. 16 similarly shown as a whole piece.
A, which is printed on the PET film 1 as shown in
Ceramic green having through holes 3 by printing so that the through holes 3 are located at the ends of the conductor patterns for coils with the magnetic paste on the conductor patterns 5 for coils having g or more as a main component and having one or more turns. A sheet 4 is formed and this is used as a ceramic green sheet CB6.
a.

Next, as a step of transferring and laminating the prepared ceramic green sheets, as shown in FIG.
Is transferred from the PET film to the support 9, and the ceramic green sheet A2 is transferred and laminated on the transferred upper portion several times to form the laminated body 10a. A ceramic green sheet BB8a is transferred and laminated to face the ceramic green sheet A2 to the ceramic green sheet A2 as shown in FIG. To form.

Next, FIG. 17 which is also shown as a whole piece
As described above, the ceramic green sheet 4 is formed on the ceramic green sheet BB8a so that the end of the coil conductor pattern 5 formed of the ceramic green sheet BB8a is located in the through hole portion 3 of the ceramic green sheet CB6a. The ceramic green sheets CB6a are opposed to each other and transferred and laminated from the PET film 1 to form a laminated body 10c.

The ceramic green sheets BB and C on which a conductor pattern for a coil having about 3/4 turns is formed.
B can also be used.

Finally, as shown in FIG. 18, which is shown as one piece as a whole, the ceramic green sheet A is provided on top of the laminated body 10c.
Repeat step 2 several times to obtain the desired thickness,
After the integrated laminate 11 is obtained, it is cut into chip-shaped pieces of a specified size in the same manner as in Example 1, and main firing is performed at about 900 ° C. to start and end winding of the coil conductor pattern 5 of each piece. The end face electrode 12 containing Ag as a main component is formed so as to be electrically connected to both ends of the laminated inductor component.

(Embodiment 3) A method of manufacturing a laminated inductor component according to a third embodiment of the present invention will be described below with reference to the drawings.

First, in the same manner as in Example 1, the magnetic powder is kneaded with a vehicle in which polyvinyl butyral resin is dissolved in an organic solvent to prepare a ceramic paste (magnetic paste) shown in FIG. As a step of producing a ceramic green sheet, as shown in FIG. 20, the magnetic paste is printed and formed in a solid film shape on a PET film 1 having one surface as a base film, which is subjected to a mold release treatment. To do.

Next, as shown in FIG. 22, which is shown as a whole piece, bump-shaped conductors 13 containing Ag as a main component are formed by printing on the PET film 1, and as a whole piece is shown in FIG. As described above, the ceramic green sheet 4 having the through holes 3 is formed by printing such that the plurality of through holes 3 are located on the bump-shaped conductor 13 with the magnetic paste, and Ag is the main component above the ceramic green sheet 4. A plurality of coil conductor patterns 5 of one turn or more are printed and formed at the positions of the through holes 3 so that the ends of the coil conductor patterns 5 are located, and this is used as a ceramic green sheet CC6b.

Next, as shown in FIG. 25 which is shown as one piece as a whole, the main component is Ag on the upper part of the ceramic green sheet 7 formed by printing the magnetic paste on the PET film 1 to form a solid film. A plurality of coil conductor patterns 5 of turns or more are printed and formed to form a ceramic green sheet BA8.

Next, as a step of transferring and laminating the prepared ceramic green sheets, as shown in FIG. 21 which shows one piece of the whole ceramic green sheet A2.
Is transferred from the PET film 1 to the support 9, and the transfer lamination is repeated several times so that the ceramic green sheet A2 has a predetermined thickness on the transferred upper part. As shown in FIG. 24, which is shown as a whole piece on the laminated body 10d thus obtained, the conductor pattern 5 for the coil is opposed to the ceramic green sheet A2, and the ceramic green sheet CC6b is transferred from the PET film 1. Stack.

Next, as shown in FIG. 26, which is shown as one piece as a whole, a ceramic green sheet CC is provided on the top of the laminated body 10e.
The conductor pattern 5 for coil is made to face the ceramic green sheet CC6b so that the end of the conductor pattern 5 for coil of the ceramic green sheet BA8 is located in the bump-shaped conductor 13 and the through hole portion 3 formed by 6b, and the ceramic green sheet CC6b is formed. The sheet BA8 is transferred and laminated to form a laminated body 10f. In addition, a ceramic green sheet BA using a conductor pattern for a coil of about 3/4 turns
And CC can also be used. Finally, as shown in FIG. 27, the ceramic green sheet A2 is repeatedly laminated on the top of the laminated body 10f so as to have a predetermined thickness several times to obtain an integrated laminated body 11, and then, the same size as the first embodiment is applied. The chip-shaped individual pieces are cut and subjected to main firing at about 900 ° C., and Ag is used as a main component so as to be electrically connected to both ends of the coil conductor pattern 5 at the winding start and winding end of each piece. The end face electrode 12 is formed to obtain a laminated inductor component.

(Embodiment 4) A method of manufacturing a laminated inductor component according to a fourth embodiment of the present invention will be described below with reference to the drawings.

First, as in Example 1, the magnetic powder was kneaded with a vehicle prepared by dissolving polyvinyl butyral resin in an organic solvent to prepare a ceramic paste (magnetic paste) shown in FIG. 28. As a step of producing a ceramic green sheet, as shown in FIG. 29, the magnetic paste is applied as a solid film on a PET film 1 having one side serving as a base plate, which is subjected to a mold release process. And

Next, as shown in FIG. 31, which is shown as one piece as a whole, the ceramic green sheet 7 in which the above-mentioned magnetic paste is formed on the PET film 1 by printing in a solid film shape.
A plurality of coil conductor patterns 5 containing Ag as a main component and having one or more turns are printed and formed on the upper part of the above to form a ceramic green sheet BA8.

Further, as shown in FIG. 33, a ceramic green sheet BB8a is obtained by changing the printing order of the magnetic paste printing of the ceramic green sheet BA8 and the coil conductor pattern printing of one turn or more.

Next, as shown in FIG. 32, which is shown as a whole piece, a through hole of a ceramic green sheet 4 having a through hole in which a plurality of through holes 3 are formed on the PET film 1 by the magnetic paste. A ceramic green sheet in which the bump-shaped conductor 13 is embedded in 3 will be referred to as a ceramic green sheet D14.

Next, as a step of transferring and laminating the prepared ceramic green sheets, as shown in FIG. 30 showing one piece of the whole ceramic green sheet A2.
34 is transferred from the PET film 1 to the support 9, and the ceramic green sheet BB8a transferred to another support 9 is placed on the upper portion of the PET film 1 so that the coil conductor pattern 5 faces the ceramic green sheet A2. And transferred from the PET film 1, and the coil conductor pattern 5 formed of the ceramic green sheet BB8a on the upper surface thereof.
Of the ceramic green sheet D1 so that the end portions of the ceramic green sheet D1 are located in the through holes 3 of the ceramic green sheet D14.
4 is transferred and laminated from the PET film 1, and further, the coil conductor pattern 5 is arranged so that the end of the coil conductor pattern 5 of the ceramic green sheet BA8 is located in the through hole portion 3 formed by the ceramic green sheet D14. Is opposed to the ceramic green sheet D14, the ceramic green sheet BA8 is transferred and laminated from the PET film 1, and as shown in FIG.
Get.

Finally, as shown in FIG. 36 which is shown as one piece as a whole, the ceramic green sheet A is provided on the upper surface of the laminate 10e.
2 is transferred and laminated from the PET film 1 to form an integrated laminate 11
After obtaining the above, it is cut into chip-shaped pieces of a specified size in the same manner as in Example 1, and main firing is performed at about 900 ° C., and both ends of the coil conductor pattern 5 at the beginning and end of winding End face electrode 1 containing Ag as a main component so as to be electrically connected to
2 is formed to obtain a laminated inductor component.

The ceramic green sheets BA and BB using the conductor pattern for the coil of about 3/4 turn.
Can also be used.

(Embodiment 5) Hereinafter, a method of manufacturing a laminated inductor component according to Embodiment 5 of the present invention will be described with reference to the drawings.

As in Example 1, the magnetic powder was kneaded with a vehicle in which polyvinyl butyral resin was dissolved in an organic solvent to prepare a ceramic paste (magnetic paste) shown in FIG. 37. First, a ceramic green sheet was prepared. As a step of producing the above, as shown in FIG. 38, the magnetic paste is printed and formed in a solid film shape on the PET film 1 having one surface as a base film subjected to a release treatment, and this is used as a ceramic green sheet A2. Next, as shown in FIGS. 40 to 43, Ag is the main component on the upper part of the ceramic green sheet 4 having through holes in which the plurality of through holes 3 are formed by the magnetic paste on the same PET film 1 as described above. A plurality of coil conductor patterns 5 of about 3/4 turn are printed and formed to be a ceramic green sheet CA6. Although not shown, a ceramic green sheet CB6a is obtained by changing the printing order of the magnetic paste printing and the coil conductor pattern printing of the ceramic green sheet CA6. Next, as shown in FIG. 44, a coil of about 3/4 turns containing Ag as a main component is provided on the top of the ceramic green sheet 7 formed by printing the magnetic paste on the same PET film 1 as described above to form a solid film. A plurality of conductor patterns 5 for printing are formed by printing to form a ceramic green sheet BA8. Although not shown, a ceramic green sheet BB8a is obtained by changing the printing order of the magnetic paste printing and the coil conductor pattern printing of the ceramic green sheet BA8 (both shown in FIG. 40 to FIG. 44 show one unit pattern). ).

Next, as a step of transferring and laminating the prepared ceramic green sheets, the ceramic green sheets A2 are transferred to the support 9 as shown in FIG.
Transfer lamination is repeated several times so that the ceramic green sheet A2 has a predetermined thickness on the transferred upper part.

As shown in FIG. 45, the conductor pattern 5 for coil is made to face the ceramic green sheet A2, and the ceramic green sheet CA6 is transferred and laminated on the upper portion of the thus obtained laminated body 10h. The ceramic green sheet CA6 is transferred and laminated a predetermined number of times so that the end of the coil conductor pattern 5 of the ceramic green sheet CA6 is located in the through hole portion 3 formed of the ceramic green sheet CA6, and the ceramic green sheet CA6 is formed on top of this. Through hole part 3 formed
The coil conductor pattern 5 so that the end of the coil conductor pattern 5 of the ceramic green sheet BA8 is located in
To the ceramic green sheet CA6, and the ceramic green sheet BA8 is transferred and laminated to form a laminated body 10i. Finally, as shown in FIG. 46, the transfer and lamination of the ceramic green sheet A2 on the upper part of the laminated body 10i is repeated several times so as to have a predetermined thickness to obtain the integral laminated body 11, or as shown in the second embodiment. The ceramic green sheet A2 is transferred to another support 9, and the ceramic green sheet A2 is transferred and laminated on the transferred upper part several times so as to have a predetermined thickness.
The ceramic green sheet 7 is placed on the upper part of a to face the ceramic green sheet A2, and the ceramic green sheet BB8a is transferred and laminated to form a laminated body 10b. The ceramic green sheet BB on the upper portion of the laminated body 10b.
The ceramic green sheet CB6a is made to face the ceramic green sheet BB8a so that the through hole portion 3 of the ceramic green sheet 4 of the ceramic green sheet CB6a is located at the end of the coil conductor pattern 5 of 8a. The layers are transferred and laminated a predetermined number of times to form a laminated body, and the ceramic green sheet CB6a is formed such that the end portions of the coil conductor pattern of the ceramic green sheet CB6a are located in the through holes 3 formed in the upper portion of the laminated body. The green sheet 4 is positioned on the upper side and the ceramic green sheets CB6a are transferred and laminated to form a laminated body.

The ceramic green sheets BA, BB, CA using the coil conductor pattern of one turn or more.
And CB can also be used.

Finally, the transfer and lamination of the ceramic green sheet A2 on the upper surface of this laminated body is repeated several times to obtain a predetermined thickness, and an integrated laminated body 11 is obtained. Cut into pieces and perform main firing at about 900 ° C. Ag so as to be electrically connected to both ends of the coil conductor pattern 5 of each piece at the beginning and end of winding.
The end face electrode 12 containing as a main component is formed to obtain a laminated inductor component.

(Embodiment 6) A method of manufacturing a laminated inductor component according to Embodiment 6 of the present invention will be described below with reference to the drawings.

First, as in Example 1, the magnetic powder was kneaded with a vehicle dissolved in an organic solvent of polyvinyl butyral resin to prepare a ceramic paste (magnetic paste) shown in FIG. 47. As a process of making a body green sheet, as shown in FIG. 48, a PET film 1 as a base film having a release treatment on one side.
The magnetic paste is printed and formed in the form of a solid film on the top, and this is used as a ceramic green sheet A2.

Next, as shown in FIG. 50, which is shown as one piece as a whole, a plurality of coil conductive patterns 5 having one or more turns, which is mainly composed of Ag at the beginning of winding, are formed on the PET film 1 by printing. Ceramic green having a through hole in which a plurality of through holes 3 are formed in the magnetic paste so that the through hole 3 is located at the end of the coil conductive pattern 5 at the beginning of winding of the coil conductive pattern 5. A sheet 4 is formed, and a plurality of coil conductive patterns 5 of one turn or more mainly containing Ag are printed and formed on the top of the sheet 4 so that the ends of the coil conductive patterns 5 at the end of winding are located in the through holes 3. This is designated as a ceramic green sheet E15.

Next, as a step of transferring and laminating the prepared ceramic green sheets, the ceramic green sheets A2 are transferred to the support 9 as shown in FIG.
Transfer lamination from the PET film 1 is repeated several times so that the ceramic green sheet A2 has a predetermined thickness on the transferred upper part. As shown in FIG. 51, the conductor pattern 5 for coiling at the beginning of winding is made to face the ceramic green sheet A2 on the top of the laminated body 10j of FIG. 49 thus obtained, and the ceramic green sheet E15 of FIG. Then, the layers are transferred and laminated to form a laminated body 10k.

Next, as shown in FIG. 52, the laminate 1 of FIG.
A ceramic green sheet A2 having a predetermined thickness is formed on another support 9 on the upper part of 0k, and a laminated body 101 formed by repeating transfer lamination several times is transfer laminated as shown in FIG. After obtaining 11 in the same manner as in Example 1, it was cut into chip-shaped pieces of a prescribed size, and main firing was performed at about 900 ° C., and both end portions of the coil conductor pattern 5 at the beginning and end of winding The end face electrode 12 containing Ag as a main component is formed so as to be electrically connected to the above, and a laminated inductor component is obtained.

(Embodiment 7) A laminated inductor component according to a seventh embodiment of the present invention will be described below with reference to the drawings.

First, as shown in FIG. 54, the support 9 obtained by the method for manufacturing a laminated inductor component according to the first to sixth embodiments.
As shown in FIG. 58, as shown in FIG. 58, a PET film 1 as a base film having a release treatment on one side is formed on the upper part of the integrated laminate 11 formed above, and a powder such as barium titanate or strontium titanate is mainly used. A ceramic green sheet F16 formed by printing a dielectric paste having a composition of the following composition on a solid film is repeatedly transferred and laminated several times until a predetermined thickness is obtained, and then, on top of that, on the PET film 1 as a base film, Ag or Pd or Ni
56 and a ceramic green sheet GA18 of FIG. 56 and a counter electrode 17 in which a plurality of capacitor-use counter electrodes 17 whose main components are The ceramic green sheets GB18a shown in FIG. 57 having different terminal shapes are alternately transferred and laminated a predetermined number of times.

Further, on the upper part thereof, the ceramic green sheet F16 made of the solid film-shaped dielectric material is repeatedly laminated several times until a predetermined thickness is obtained, thereby forming a capacitor component. The laminated inductor composite integrated laminate 19 obtained by thus forming the laminated inductor component and the capacitor component shown in FIG. 58 as an LC filter is cut into chip-shaped pieces of a prescribed size, and the temperature is about 900 ° C. 1100
Main firing is carried out at a temperature of .degree. C., the external terminal electrode 20 containing Ag as a main component is formed so as to be electrically connected to the terminal portion of each individual piece, and a laminated inductor composite component is obtained as shown in FIG.

The ceramic green sheets CA, C
When the thickness of the ceramic green sheets of B, DA and E is set to 40 to 60 μm, a short circuit does not occur between the conductors sandwiching the ceramic green sheets, and conversely, the dropping of the conductor paste into the through holes is insufficient. The connection between conductors was good and the yield was improved.

In addition, in Examples 1 to 6, after obtaining an integrated laminate, it was cut into chip-shaped pieces of a prescribed size, and about 9
The main electrodes were formed by performing main firing at 00 ° C. and electrically connecting to both ends of each individual coil conductor pattern, but the present invention is not limited to this, and an integrated laminate is also possible. Cut into pieces and form end face electrodes so that they are electrically connected to both ends of the coil conductor pattern, which are the beginning and end of winding, and then obtain the integrated laminate and end face electrodes by simultaneous firing. You can also

In addition, in Examples 1 to 6, the solid green ceramic green sheet A was formed by printing, but the same can be done by using a slurry obtained by applying and drying a slurry on a film by a doctor blade method or the like. It goes without saying that a laminated body can be obtained.

[0065]

As is apparent from the above description, according to the method for manufacturing a laminated inductor component of the present invention, through holes are formed by printing, which could not be realized by the conventional green sheet laminated method, so that Since a series of green sheets can be formed only by printing without relying on mechanical work for forming holes, the work flow is efficient, inexpensive manufacturing is possible, and mass productivity is excellent.

Also, in the case of connection through a through hole,
Since the through holes are filled with the conductor, open defects due to the connection are reduced, and the product yield is improved. Further, by sequentially transferring and laminating the required number of green sheets that have already been prepared, it is possible to realize a yield reduction in the laminating process, which cannot be realized by the conventional printing laminating method.

The laminated inductor component of the present invention is a coil component obtained by the manufacturing method as described above and a capacitor component in which a ceramic green sheet printed with a dielectric paste and a counter electrode are laminated a predetermined number of times. By being formed, it is possible to provide a compact and high-performance LC filter.

[Brief description of drawings]

FIG. 1 is a process diagram of a method for manufacturing a laminated inductor component according to a first embodiment of the present invention.

FIG. 2 is a perspective view showing a manufacturing process of the laminated inductor component according to the first embodiment of the present invention.

FIG. 3 is a perspective view of the same.

FIG. 4 is a perspective view of the same.

FIG. 5 is a perspective view of the same.

FIG. 6 is a perspective view of the same.

FIG. 7 is a perspective view of the same.

FIG. 8 is a perspective view of the same.

FIG. 9 is a perspective view of the same.

FIG. 10 is a perspective view of the same.

FIG. 11 is a process drawing of the method for manufacturing a laminated inductor component according to the second embodiment of the present invention.

FIG. 12 is a perspective view showing a manufacturing process of a laminated inductor component according to a second embodiment of the present invention.

FIG. 13 is a perspective view of the same.

FIG. 14 is a perspective view of the same.

FIG. 15 is a perspective view of the same.

FIG. 16 is a perspective view of the same.

FIG. 17 is a perspective view of the same.

FIG. 18 is a perspective view of the same.

FIG. 19 is a process chart of a method for manufacturing a laminated inductor component according to a third embodiment of the present invention.

FIG. 20 is a perspective view showing a manufacturing process of a laminated inductor component according to a third embodiment of the present invention.

FIG. 21 is a perspective view of the same.

FIG. 22 is a perspective view of the same.

FIG. 23 is a perspective view of the same.

FIG. 24 is a perspective view of the same.

FIG. 25 is a perspective view of the same.

FIG. 26 is a perspective view of the same.

FIG. 27 is a perspective view of the same.

FIG. 28 is a process drawing of the method for manufacturing a laminated inductor component according to the fourth embodiment of the present invention.

FIG. 29 is a perspective view showing a manufacturing process of a laminated inductor component according to a fourth embodiment of the present invention.

FIG. 30 is a perspective view of the same.

FIG. 31 is a perspective view of the same.

FIG. 32 is a perspective view of the same.

FIG. 33 is a perspective view of the same.

FIG. 34 is a perspective view of the same.

FIG. 35 is a perspective view of the same.

FIG. 36 is a perspective view of the same.

FIG. 37 is a process chart of the method for manufacturing the laminated inductor component in the fifth embodiment of the present invention.

FIG. 38 is a perspective view showing the manufacturing process of the laminated inductor component in the fifth embodiment of the present invention.

FIG. 39 is a perspective view of the same.

FIG. 40 is a perspective view of the same.

FIG. 41 is a perspective view of the same.

FIG. 42 is a perspective view of the same.

FIG. 43 is a perspective view of the same.

FIG. 44 is a perspective view of the same.

FIG. 45 is a perspective view of the same.

FIG. 46 is a perspective view of the same.

FIG. 47 is a process chart of the method for manufacturing a laminated inductor component in the sixth embodiment of the present invention.

FIG. 48 is a perspective view showing a manufacturing process of a laminated inductor component according to a sixth embodiment of the present invention.

FIG. 49 is a perspective view of the same.

FIG. 50 is a perspective view of the same.

FIG. 51 is a perspective view of the same.

FIG. 52 is a perspective view of the same.

FIG. 53 is a perspective view of the same.

FIG. 54 is a perspective view showing the manufacturing process of the laminated inductor component of Example 7 of the present invention.

FIG. 55 is a perspective view of the same.

FIG. 56 is a perspective view of the same.

FIG. 57 is a perspective view of the same.

FIG. 58 is a perspective view of the same.

FIG. 59 is a perspective view of the same.

FIG. 60 is a process diagram of a conventional method for manufacturing a green sheet laminated inductor component.

FIG. 61 is a process diagram of a method for manufacturing a conventional printed multilayer inductor component.

[Explanation of reference signs] 1 PET film 2 Ceramic green sheet A 3 Through hole 4,7,16 Ceramic green sheet 5 Coil conductor pattern 6 Ceramic green sheet CA 6a Ceramic green sheet CB 6b Ceramic green sheet CC 8 Ceramic green sheet BA 8a Ceramic green sheet BB 9 support 10, 10a, 10b, 10c, 10d, 10e, 10
f, 10g, 10h, 10i, 10j, 10k, 10l
Laminated body 11 Integrated laminated body 12 End surface electrode 13 Bump-shaped conductor 14 Ceramic green sheet D 15 Ceramic green sheet E 17 Counter electrode for capacitor 18 Ceramic green sheet GA 18a Ceramic green sheet GB 19 Composite integrated laminated body 20 External terminal electrode

Claims (26)

[Claims] 1. A ceramic green sheet A formed by printing a ceramic paste in a solid film on a base film.
And a ceramic green sheet BA formed by printing a coil conductor pattern on a ceramic green sheet printed in a solid film by the ceramic paste on the same base film as described above, and the same on the same base film as the above. A ceramic green sheet CA is prepared by printing the coil conductor pattern on a ceramic green sheet having a through hole formed by printing a ceramic paste so that the end of the coil conductor pattern is located at the position of the through hole. The ceramic green sheet CA having the through holes is transferred and laminated on the ceramic green sheet A transferred onto a support so that the coil conductor pattern faces the ceramic green sheet A. Through After the transfer of the ceramic green sheet BA with the coil conductor pattern facing the ceramic green sheet BA such that the end of the coil conductor pattern of the ceramic green sheet BA is located in the roll portion, A laminated inductor, characterized in that the integrated laminate is cut into individual pieces, fired, and end face electrodes are formed so as to be connected to both ends of the conductor pattern for coil of the integrated laminate, which are the start and end of winding. Manufacturing method of parts. 2. A ceramic green sheet A formed by printing a ceramic paste on a base film in the form of a solid film.
A ceramic green sheet BB formed by printing a conductor pattern for a coil on a base film similar to the above and then forming a ceramic green sheet by the ceramic paste, and the conductor pattern for a coil on the same base film as the above. After printing and forming, a ceramic green sheet CB having through holes is printed by the ceramic paste so that the through holes are located at the end portions of the coil conductor patterns. The ceramic green sheet BB is transferred and laminated on the transferred ceramic green sheet A such that the ceramic green sheet faces the ceramic green sheet A, and the conductor pattern for coil of the ceramic green sheet BB is formed. The ceramic green sheet CB is transferred and laminated by facing the ceramic green sheet to the ceramic green sheet BB so that the portion is located in the through hole portion of the ceramic green sheet CB, and finally the ceramic green sheet A is transferred. To form an integrated laminate, the integrated laminate is cut into individual pieces and fired, and end face electrodes are connected so as to be connected to both ends of a coil conductor pattern of the integrated laminate, which are the winding start and winding end. A method of manufacturing a laminated inductor component, the method comprising: forming. 3. A ceramic green sheet A formed by printing a ceramic paste on a base film in the form of a solid film.
A ceramic green sheet BA formed by printing a coil conductor pattern on a solid film-shaped ceramic green sheet formed by printing the ceramic paste on the same base film as described above, and bumps formed on the same base film as described above. -Shaped conductor is formed by printing, a ceramic green sheet having a through hole is formed on the upper portion of the ceramic paste by printing with the ceramic paste, and the coil conductor is provided on the ceramic green sheet having the through hole. A ceramic green sheet C formed by printing a plurality of patterns so that the ends of the coil conductor patterns are located at the positions of the through holes.
C is prepared, and a ceramic green sheet CC having the through holes is transferred and laminated on the ceramic green sheet A transferred onto a support with the coil conductor pattern facing the ceramic green sheet A, and The ceramic green sheet BA is made to face the ceramic green sheet CC so that the end of the coil conductive pattern of the ceramic green sheet BA is located in the through hole in the upper part of the ceramic green sheet CC. After transferring and laminating to form an integrated laminate, the integrated laminate is cut into individual pieces and fired so as to be connected to both ends of the integrated conductor, which are the winding start and winding ends, of the coil conductor pattern. A method for manufacturing a laminated inductor component, comprising forming an end face electrode. 4. A ceramic green sheet A formed by printing a ceramic paste in a solid film on a base film.
And a ceramic green sheet BA formed by printing a coil conductor pattern on a ceramic green sheet printed in a solid film by the ceramic paste on the same base film as described above, and the same on the same base film as the above. A ceramic green sheet BB in which the above-mentioned ceramic green sheet is formed by printing after forming a coil conductor pattern, and the above-mentioned through hole of a ceramic green sheet having through holes formed by printing in the above-mentioned ceramic paste on the same base film as described above. A ceramic green sheet D filled with bump-shaped conductors is prepared, the ceramic green sheet BB is placed on the ceramic green sheet A transferred onto a support, and the coil conductor pattern is formed on the ceramic green sheet. And transfer and laminate the ceramic green sheet D so that the through hole portion of the ceramic green sheet D having the through hole is located at the end of the coil conductor pattern on the upper part of the ceramic green sheet BB. Transfer and stack the ceramic green sheet BA so that the end portions of the coil conductor pattern of the ceramic green sheet BA are located in the through holes in the upper portion of the ceramic green sheet D. After being transferred and laminated so as to face the sheet D to form an integral laminate, the integral laminate is cut into individual pieces and baked.
A method of manufacturing a laminated inductor component, wherein end face electrodes are formed so as to be connected to both ends of a coil conductor pattern of the integrated laminate, which are the beginning and end of winding. 5. A ceramic green sheet A formed by printing a ceramic paste on a base film in the form of a solid film.
And a ceramic green sheet BA on which a conductor pattern for a coil is printed and formed on a ceramic green sheet that is printed and formed in a solid film on the same base film as above by a ceramic paste or a coil on a base film similar to the above A ceramic green sheet BB in which a conductor pattern is printed and then the ceramic green sheet is formed, and a conductor pattern for a coil on a ceramic green sheet having through holes printed and formed by the ceramic paste on the same base film as described above. Or a ceramic green sheet CA formed by printing and forming the coil conductor pattern on the same base film as described above, and then forming a ceramic green sheet having the through holes with the ceramic paste. A printed ceramic green sheet CB is prepared, and the ceramic green sheet CA is formed on a laminated body of the ceramic green sheets A which are transferred and laminated several times on a support so as to have a predetermined thickness. The ceramic green sheet A
And is transferred and laminated so as to face each other, and the ceramic green sheets CA are transferred and laminated a predetermined number of times so that the end portions of the coil conductor patterns of the ceramic green sheets CA are located in the through holes in the upper portion of the ceramic green sheets CA, The ceramic green sheet BA is provided on the top through hole portion of the ceramic green sheet CA.
The ceramic green sheet BA is transferred and laminated with the coil conductor pattern facing the ceramic green sheet CA so that the end of the coil conductor pattern is positioned, and finally the ceramic green sheet A is formed to a predetermined thickness. The ceramic green sheet BB is transferred and laminated to form an integrated laminate, or the ceramic green sheet BB is formed on the laminated body of the ceramic green sheets A transferred to another support so as to have a predetermined thickness. The ceramic green sheet BB is formed by transferring and laminating the sheet so as to face the ceramic green sheet A.
The ceramic green sheet CB is transferred and laminated a predetermined number of times with the ceramic green sheet facing the ceramic green sheet BB so that the through hole portion of the ceramic green sheet CB is located at the end of the upper coil conductor pattern. Finally, the ceramic green sheets A are transferred and laminated to form an integrated laminate, and then the integrated laminate is cut into individual pieces and fired, and the winding start and winding end of the coil conductor pattern of the integrated laminate are performed. A method for manufacturing a laminated inductor component, comprising forming an end face electrode so as to be connected to both ends of the laminated inductor component. 6. A ceramic green sheet A formed by printing a ceramic paste in a solid film on a base film.
And a ceramic having a through hole formed by the ceramic paste so that a winding start coil conductor pattern is formed by printing on a base film similar to the above and the through hole is located at an end of the winding start coil conductor pattern. A green sheet is formed by printing, and a ceramic green sheet E on which a conductor pattern for a coil at the end of winding is printed and formed so as to fill the end of the conductor pattern for a coil at the end of the through hole is prepared and supported. The ceramic green sheet E is transferred onto the ceramic green sheet A on the body so that the conductor pattern for the coil at the beginning of winding faces the ceramic green sheet A to form an integrated laminate, and then the integrated laminate is formed. Cutting into individual pieces and firing, and winding start and winding of the conductor pattern for coil of the integrated laminate Method of manufacturing a multilayer inductor component and forming an end face electrode so as to be connected to the both end portions to be comparatively. 7. The method for manufacturing a laminated inductor component according to claim 1, wherein the ceramic green sheet is a green sheet made of a magnetic material. 8. Ceramic green sheets BA and C
2. The method for manufacturing a laminated inductor component according to claim 1, wherein the coil conductor pattern A has about 3/4 turns. 9. Ceramic green sheets BB and C
The method for manufacturing a laminated inductor component according to claim 2, wherein the coil conductor pattern B has about 3/4 turns. 10. The method for manufacturing a multilayer inductor component according to claim 3, wherein the coil conductor patterns of the ceramic green sheets BA and CC have about 3/4 turns. 11. The method for manufacturing a laminated inductor component according to claim 4, wherein the coil green conductor patterns of the ceramic green sheets BA and BB have about 3/4 turns. 12. Ceramic green sheets BA, B
B, CA and CB coil conductor patterns are about 3/4
It is a turn, The manufacturing method of the laminated inductor component of Claim 5 characterized by the above-mentioned. 13. The method for manufacturing a laminated inductor component according to claim 1, wherein the conductor patterns for the coils of the ceramic green sheets BA and CA have one or more turns. 14. The method for manufacturing a laminated inductor component according to claim 2, wherein the coil conductor patterns of the ceramic green sheets BB and CB have one or more turns. 15. The method for manufacturing a laminated inductor component according to claim 3, wherein the coil conductor patterns of the ceramic green sheets BA and CC have one or more turns. 16. The method for manufacturing a laminated inductor component according to claim 4, wherein the coil conductor patterns of the ceramic green sheets BA and BB have one or more turns. 17. A ceramic green sheet BA, B
The method for manufacturing a laminated inductor component according to claim 5, wherein the B, CA, and CB coil conductor patterns have one or more turns. 18. The method of manufacturing a laminated inductor component according to claim 6, wherein the coil conductor pattern of the ceramic green sheet E has one or more turns. 19. The ceramic green sheets BA and CA having a ceramic green sheet thickness of 40 to 60 μm.
2. The method for manufacturing a laminated inductor component according to claim 1, wherein m is m. 20. The thickness of the ceramic green sheets CB and CB is 40 to 60 μm.
3. The method for manufacturing a laminated inductor component according to claim 2, wherein m is m. 21. The thickness of the ceramic green sheets BA and CC is 40 to 60 μm.
4. The method for manufacturing a laminated inductor component according to claim 3, wherein m is m. 22. Ceramic green sheets BA, BB
And the thickness of the ceramic green sheet of D is 40 to 6
The method for manufacturing a laminated inductor component according to claim 4, wherein the thickness is 0 μm. 23. Ceramic green sheets BA, B
The method for manufacturing a laminated inductor component according to claim 5, wherein the ceramic green sheets of B, CA and CB have a thickness of 40 to 60 µm. 24. The method for manufacturing a laminated inductor component according to claim 6, wherein the ceramic green sheet of the ceramic green sheet E has a thickness of 40 to 60 μm. 25. The monolithic laminate is cut into individual pieces, and end face electrodes are formed so as to be connected to both ends of the coil conductor pattern of the monolithic laminate, which are the winding start and winding ends. The method for manufacturing a laminated inductor component according to claim 1, wherein the end face electrode and the end face electrode are simultaneously fired. 26. A ceramic green sheet is used as a dielectric green sheet made of a dielectric material, and a conductor pattern to be a counter electrode of a capacitor is formed by printing on or below the dielectric green sheet, and the dielectric green sheet and the conductor pattern are formed. 7. A method of manufacturing a laminated inductor component according to claim 1, wherein a capacitor component obtained by alternately transferring and laminating a predetermined number of times is integrally formed into an LC filter.