JPH07302728A - Multilayered ceramic capacitor and its manufacture - Google Patents

Multilayered ceramic capacitor and its manufacture

Info

Publication number
JPH07302728A
JPH07302728A JP11386894A JP11386894A JPH07302728A JP H07302728 A JPH07302728 A JP H07302728A JP 11386894 A JP11386894 A JP 11386894A JP 11386894 A JP11386894 A JP 11386894A JP H07302728 A JPH07302728 A JP H07302728A
Authority
JP
Japan
Prior art keywords
green sheet
printed
inner electrode
ceramic capacitor
ceramic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11386894A
Other languages
Japanese (ja)
Inventor
Hiroshi Ishikawa
石川  浩
Shinichi Iwata
伸一 岩田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokin Corp
Original Assignee
Tokin Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokin Corp filed Critical Tokin Corp
Priority to JP11386894A priority Critical patent/JPH07302728A/en
Publication of JPH07302728A publication Critical patent/JPH07302728A/en
Pending legal-status Critical Current

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  • Ceramic Capacitors (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)

Abstract

PURPOSE:To improve the thermal compression-bonding of a green sheet, and prevent the generation of delamination while the step-difference of an inner electrode is relieved, by printing ceramic slurry composed of the same dielectrics as the green sheet, so as to cover the inner electrode printed on the green sheet. CONSTITUTION:An inner electrode of a plurality of patterns is printed on a green sheet together with markers for alignment. Dielectric ceramic slurry which has been used for forming the green sheet is printed on the green sheet, so as to cover the inner electrode except the marker parts. Thereby a green sheet wherein the inner electrode is buried in the ceramic sheet is formed. The green sheet is punched, and laminated to form a laminate of a multilayered ceramic capacitor. Since the inner electrode is not exposed in the case of heat press molding, heat press compression-bonding is improved. Further the step- difference due to the thickness of the inner electrode can be decreased.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、積層セラミックコンデ
ンサに係り、又、積層セラミックコンデンサの積層体形
成に使用されるグリーンシートに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laminated ceramic capacitor, and a green sheet used for forming a laminated body of a laminated ceramic capacitor.

【0002】[0002]

【従来の技術】積層セラミックコンデンサは、小型大容
量、半永久的な寿命、高周波低インピーダンス等、優れ
た特性から広い分野で使用されているが、近年は使用さ
れるデバイスの小型化、表面実装化に対応するため、チ
ップ化が急速に進んでいる。
2. Description of the Related Art Monolithic ceramic capacitors have been used in a wide range of fields due to their excellent characteristics such as small size and large capacity, semi-permanent life, high frequency and low impedance, etc. In order to deal with the above, chip formation is rapidly progressing.

【0003】積層セラミックコンデンサは、材料となる
高誘電体セラミック粉末と有機樹脂を用いて、分散、混
練したセラミックスラリーを、ドクターブレード法等に
より剥離処理を施したフィルム上に、一定の厚みで成膜
したグリーンシート上に、銀やパラジウム等の低抵抗金
属粉と有機樹脂を溶剤を用いて分散、混練した内部電極
用ペーストを、後に1個の積層体から複数個のコンデン
サ素子が得られるように、複数パターンを印刷する。こ
うして得られたグリーンシートを一定形状に打ち抜き、
積層を繰り返し、熱プレス成形を行って形成した積層体
を内部電極パターンにそってコンデンサ素子個々の形状
に切り出し、脱バインダ、焼成を行った後、内部に積層
された内部電極を取り出し、端子電極となる外部電極を
形成し、コンデンサ素子を得る。
A monolithic ceramic capacitor is composed of a ceramic slurry which is dispersed and kneaded by using a high dielectric ceramic powder as a material and an organic resin, and is formed with a certain thickness on a film which is peeled by a doctor blade method or the like. On the filmed green sheet, a low resistance metal powder such as silver and palladium and an organic resin are dispersed and kneaded in a solvent, and an internal electrode paste is obtained so that a plurality of capacitor elements can be obtained from one laminated body later. Then, multiple patterns are printed. Punching the green sheet thus obtained into a certain shape,
Repeated stacking, hot press molding the stack to cut into individual capacitor element shapes along the internal electrode pattern, remove the binder, and fire, then take out the internal electrodes stacked inside and remove the terminal electrodes. An external electrode is formed to obtain a capacitor element.

【0004】ここで、グリーンシートを作製するための
有機樹脂と溶剤に対し、グリーンシート上に印刷する内
部電極ペーストに使用する有機樹脂と溶剤は、印刷され
た内部電極ペーストが乾燥するまでの間、内部電極ペー
ストに使用した有機樹脂および溶剤がグリーンシートを
侵すことがないように、異なった成分を持つ有機樹脂と
溶剤を使用するのが、一般的である。そのため、グリー
ンシートを一定形状に打ち抜き、積層を繰り返し、熱プ
レス成形を行う際に、グリーンシートの裏面(内部電極
が印刷されていない面)と内部電極部分とでは熱圧着す
るが、使用されるそれぞれの有機樹脂が異なるため、熱
圧着性が悪く、脱バインダ・焼結前の生の積層体での圧
着不良が発生し、結果として、デラミネーションの発生
の原因となる。更に、内部電極を印刷したグリーンシー
トを積層していく場合、内部電極の厚みに由来する段差
が生じてしまい、内部電極の部分と、周辺の内部電極を
保護するセラミックマージン部分との間で、焼結の際の
収縮によるストレスが発生し、甚だしい場合、マイクロ
クラックやデラミネーションを発生させる恐れがある。
Here, the organic resin and the solvent used for the internal electrode paste printed on the green sheet are different from the organic resin and the solvent for producing the green sheet until the printed internal electrode paste is dried. It is common to use an organic resin and a solvent having different components so that the organic resin and the solvent used for the internal electrode paste do not attack the green sheet. Therefore, when the green sheet is punched out into a certain shape, and the lamination is repeated and hot press molding is performed, thermocompression bonding is performed between the back surface of the green sheet (the surface on which the internal electrodes are not printed) and the internal electrode portion. Since the organic resins are different from each other, the thermocompression bonding property is poor, resulting in defective compression bonding in the raw laminate before binder removal / sintering, resulting in delamination. Furthermore, when stacking the green sheets on which the internal electrodes are printed, a step due to the thickness of the internal electrodes occurs, and between the internal electrode portion and the ceramic margin portion that protects the peripheral internal electrodes, When the stress due to shrinkage during sintering is extremely large, microcracks and delamination may occur.

【0005】[0005]

【発明が解決しようとする課題】本発明の技術的課題
は、グリーンシートの熱圧着の際に圧着不良が発生せ
ず、また、内部電極の厚みによる段差を緩和して、デラ
ミネーションが発生しないグリーンシートの製造方法お
よびその方法により作製されたグリーンシート、並びに
そのグリーンシートを用いた積層セラミックコンデンサ
の製造方法を提供することである。
The technical problem of the present invention is to prevent the occurrence of a crimping failure during the thermocompression bonding of a green sheet, and to reduce the step due to the thickness of the internal electrodes to prevent delamination. A method for manufacturing a green sheet, a green sheet manufactured by the method, and a method for manufacturing a laminated ceramic capacitor using the green sheet.

【0006】[0006]

【課題を解決するための手段】本発明は、複数個のセラ
ミックコンデンサ素子が得られるように、グリーンシー
ト上に複数のパターンの内部電極を位置合わせ用のマー
カーと共に印刷したグリーンシートに、位置合わせ用の
マーカー部分を除く内部電極印刷部分を覆うように、グ
リーンシート作製に使用した誘電体セラミックスラリー
を一定の厚みで印刷して、内部電極をセラミックシート
に埋め込んだグリーンシートを作製し、そのグリーンシ
ートを打ち抜き、積層し、積層セラミックコンデンサの
積層体を作製したことを特徴とする積層セラミックコン
デンサの製造方法である。
According to the present invention, a plurality of patterns of internal electrodes are printed on a green sheet together with a positioning marker so that a plurality of ceramic capacitor elements can be obtained. The dielectric ceramic slurry used to make the green sheet is printed with a certain thickness so as to cover the internal electrode printed area except for the marker area, and a green sheet with the internal electrodes embedded in the ceramic sheet is made. A method for manufacturing a monolithic ceramic capacitor is characterized in that a laminated body of a monolithic ceramic capacitor is manufactured by punching out and stacking sheets.

【0007】また、複数個のセラミックコンデンサ素子
が得られるように、複数の内部電極パターンを位置合わ
せ用のマーカーと共に印刷したグリーンシートに、前記
位置合わせ用のマーカー部分を除く前記内部電極の印刷
部分を覆うように、前記グリーンシートと同一の誘電体
からなるセラミックスラリーを一定の厚みで印刷して、
内部電極をこのセラミックシートに埋め込んだグリーン
シートの製造方法である。
Further, in order to obtain a plurality of ceramic capacitor elements, a green sheet on which a plurality of internal electrode patterns are printed together with a positioning marker is provided on a printed portion of the internal electrode excluding the positioning marker portion. , A ceramic slurry made of the same dielectric material as the green sheet is printed with a constant thickness,
This is a method for manufacturing a green sheet in which internal electrodes are embedded in this ceramic sheet.

【0008】また、上述の製造方法によって得られた、
積層セラミックコンデンサを作製するためのグリーンシ
ートである。
Further, obtained by the above manufacturing method,
It is a green sheet for producing a laminated ceramic capacitor.

【0009】[0009]

【作用】内部電極印刷後にグリーンシートと同一材質の
誘電体セラミックからなるスラリーによる印刷工程を入
れてグリーンシートを作製することで、グリーンシート
に内部電極が埋まる構造となるため、熱プレス成形を行
う際に、内部電極が露出していないので、同じ有機樹脂
を使用したグリーンシートどうしの表面と裏面が重なり
合い、熱プレス圧着が良好となり、圧着不良が発生しな
い。更に、内部電極印刷部分がセラミックに覆われてい
るので、内部電極の厚みによる段差を緩和することがで
きる。
[Function] After the internal electrodes are printed, a printing process using a slurry made of a dielectric ceramic of the same material as that of the green sheets is added to produce the green sheets, so that the internal electrodes are embedded in the green sheets, and thus hot press molding is performed. At this time, since the internal electrodes are not exposed, the front surface and the back surface of the green sheets using the same organic resin are overlapped with each other, and the hot press-bonding becomes good, and the crimping failure does not occur. Furthermore, since the printed portion of the internal electrodes is covered with ceramic, it is possible to reduce the step due to the thickness of the internal electrodes.

【0010】[0010]

【実施例】本発明の実施例を以下に図面を用いて説明す
る。本実施例では、誘電体セラミック粉末に鉛系の複合
ペロブスカイト構造を持つ誘電率が14000の高誘電
率材料を用い、内部電極に銀80%、パラジウム20%
の混合粉末を使用した。
Embodiments of the present invention will be described below with reference to the drawings. In this embodiment, a high dielectric constant material having a lead-based composite perovskite structure and a dielectric constant of 14000 is used for the dielectric ceramic powder, and silver is 80% and palladium is 20% for the internal electrodes.
The mixed powder of was used.

【0011】セラミック粉末と有機樹脂および溶剤を表
1に示す割合で高速ホモミキサを用いて分散、混練した
セラミックスラリーを、ドクターブレード法にて乾燥上
がりの厚さ25μmになるように成膜したグリーンシー
トに、銀、パラジウムの混合粉末と有機樹脂および溶剤
を表2に示す割合で3本ロールで混練した内部電極用ペ
ーストを、スクリーン印刷で乾燥上がりの厚さ3.5μ
mでコンデンサ素子の断面形状が3mm×4mmの大き
さになるように印刷を行った。更に、その上に位置合わ
せ用のマーカーを除く部分について、グリーンシート用
のセラミックスラリーを乾燥上がりの厚みで5μmにな
るように印刷し、本発明によるグリーンシートを作製し
た。
The ceramic powder, the organic resin, and the solvent were dispersed and kneaded in a ratio shown in Table 1 using a high-speed homomixer, and a ceramic slurry was formed into a film by a doctor blade method to a dry thickness of 25 μm. The internal electrode paste prepared by kneading the mixed powder of silver and palladium, the organic resin and the solvent in the ratio shown in Table 2 with a three-roll mill was dried by screen printing to a thickness of 3.5 μm.
Printing was performed so that the capacitor element had a cross-sectional shape of 3 mm × 4 mm in m. Further, a ceramic slurry for a green sheet was printed on the portion excluding the alignment marker so that the thickness after drying became 5 μm to produce a green sheet according to the present invention.

【0012】[0012]

【表1】 [Table 1]

【0013】[0013]

【表2】 [Table 2]

【0014】一方、比較のため、先のセラミックスラリ
ーをドクターブレード法にて乾燥上がりの厚さ30μm
に成膜したグリーンシートに、先の内部電極ペーストを
スクリーン印刷で乾燥上がりの厚さ3.5μmで、コン
デンサ素子の形状3mm×4mmの大きさになるように
印刷を行ったグリーンシートを作製した。
On the other hand, for comparison, the above ceramic slurry was dried to a thickness of 30 μm by the doctor blade method.
A green sheet was formed by printing the above internal electrode paste by screen printing on the formed green sheet so as to have a dry thickness of 3.5 μm and a capacitor element shape of 3 mm × 4 mm. .

【0015】こうして作製したグリーンシートを72層
積層し、熱プレスにて115℃、280kg/cm2
熱圧着成形し、個々の素子形状に切断した。450℃で
脱バインダ、950℃で焼成後、積層した内部電極を取
り出すように端子電極を成形し、静電容量で3.3μF
の積層セラミックコンデンサを作製した。
Seventy-two layers of the green sheets thus produced were laminated and thermocompression-bonded at 115 ° C. and 280 kg / cm 2 by hot pressing, and cut into individual element shapes. After removing the binder at 450 ° C and firing at 950 ° C, shape the terminal electrodes so that the laminated internal electrodes can be taken out, and have a capacitance of 3.3 μF.
The multilayer ceramic capacitor of was produced.

【0016】こうして得られた積層セラミックコンデン
サを超音波探傷機にて非接触検査を行った後、幅方向に
研磨し、積層断面の観察を行ってデラミネーションの発
生率の検査を行った結果を表3に示す。
The laminated ceramic capacitor thus obtained was subjected to a non-contact inspection with an ultrasonic flaw detector, then polished in the width direction, and the laminated cross section was observed to examine the result of the delamination occurrence rate. It shows in Table 3.

【0017】[0017]

【表3】 [Table 3]

【0018】表3は、積層セラミックコンデンサのデラ
ミネーション率が改善されたことを示している。
Table 3 shows that the delamination rate of the monolithic ceramic capacitor was improved.

【0019】[0019]

【発明の効果】以上、説明したように、本発明によれ
ば、熱プレス成形を行う際に、同じ有機樹脂を使用した
グリーンシートどうしでの熱プレス圧着となるため、圧
着不良が発生せず、又、内部電極の厚みによる段差を緩
和することができる積層体の作製が可能となり、結果と
して、デラミネーションの発生しにくい積層セラミック
コンデンサとそれに使用されるグリーンシートの製造方
法の提供が可能となった。
As described above, according to the present invention, when the hot press molding is performed, since the green sheets using the same organic resin are hot press-bonded, no crimping defect occurs. Further, it becomes possible to manufacture a laminated body capable of reducing the step due to the thickness of the internal electrodes, and as a result, it is possible to provide a laminated ceramic capacitor in which delamination is unlikely to occur and a method for manufacturing a green sheet used for the laminated ceramic capacitor. became.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明による積層セラミックコンデンサの概略
の製造工程を示す説明図。図1(a)は製造工程を示す
フローチャート。図1(b)は成膜工程を示す図。図1
(c)は内部電極印刷工程を示す図。図1(d)はスラ
リー印刷工程を示す図。図1(e)は熱プレス成形工程
を示す図。図1(f)は積層体を示す図。
FIG. 1 is an explanatory view showing a schematic manufacturing process of a multilayer ceramic capacitor according to the present invention. FIG. 1A is a flowchart showing a manufacturing process. FIG. 1B is a diagram showing a film forming process. Figure 1
(C) is a figure which shows an internal electrode printing process. FIG. 1D is a diagram showing a slurry printing process. FIG.1 (e) is a figure which shows a hot press molding process. FIG.1 (f) is a figure which shows a laminated body.

【図2】従来構造の積層セラミックコンデンサの概略の
製造工程を示す説明図。図2(a)は製造工程を示すフ
ローチャート。図2(b)は成膜工程を示す図。図2
(c)は内部電極印刷工程を示す図。図2(d)は熱プ
レス成形工程を示す図。図2(e)は積層体を示す図。
FIG. 2 is an explanatory diagram showing a schematic manufacturing process of a conventional laminated ceramic capacitor. FIG. 2A is a flowchart showing the manufacturing process. FIG. 2B is a diagram showing a film forming process. Figure 2
(C) is a figure which shows an internal electrode printing process. FIG.2 (d) is a figure which shows a hot press molding process. FIG.2 (e) is a figure which shows a laminated body.

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 誘電体セラミックスの内部に、層状に互
いに対向する複数の平行な内部電極を設け、該内部電極
引出し部に端子電極を設ける積層セラミックコンデンサ
の製造方法において、前記誘電体セラミックスを構成す
る複数のグリーンシートの各々に内部電極を印刷した
後、この内部電極印刷部分を覆うように、前記グリーン
シートと同じ誘電体からなるセラミックスラリーを所定
の厚みで印刷し、打ち抜き、積層することを特徴とする
積層セラミックコンデンサの製造方法。
1. A method for manufacturing a laminated ceramic capacitor, wherein a plurality of parallel internal electrodes facing each other in layers are provided inside a dielectric ceramic, and a terminal electrode is provided at the internal electrode lead-out portion. After printing the internal electrodes on each of the plurality of green sheets to be printed, a ceramic slurry made of the same dielectric material as the green sheets is printed to a predetermined thickness so as to cover the printed portions of the internal electrodes. A method for manufacturing a characteristic multilayer ceramic capacitor.
【請求項2】 複数個のセラミックコンデンサ素子が得
られるように、複数の内部電極パターンを印刷したグリ
ーンシートに、前記内部電極の印刷部分を覆うように、
前記グリーンシートと同一の誘電体からなるセラミック
スラリーを所定の厚みで印刷することを特徴とするグリ
ーンシートの製造方法。
2. A green sheet having a plurality of internal electrode patterns printed thereon, so as to cover a printed portion of the internal electrodes, so as to obtain a plurality of ceramic capacitor elements.
A method for producing a green sheet, which comprises printing a ceramic slurry having the same dielectric material as that of the green sheet with a predetermined thickness.
【請求項3】 複数個のセラミックコンデンサ素子が得
られるように、複数の内部電極パターンを印刷したグリ
ーンシートに、前記内部電極の印刷部分を覆うように、
前記グリーンシートと同一の誘電体からなるセラミック
スラリーが所定の厚みで印刷されてなることを特徴とす
るグリーンシート。
3. A green sheet having a plurality of internal electrode patterns printed thereon, so as to cover a printed portion of the internal electrodes, so as to obtain a plurality of ceramic capacitor elements.
A green sheet, characterized in that a ceramic slurry made of the same dielectric material as the green sheet is printed with a predetermined thickness.
JP11386894A 1994-04-28 1994-04-28 Multilayered ceramic capacitor and its manufacture Pending JPH07302728A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11386894A JPH07302728A (en) 1994-04-28 1994-04-28 Multilayered ceramic capacitor and its manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11386894A JPH07302728A (en) 1994-04-28 1994-04-28 Multilayered ceramic capacitor and its manufacture

Publications (1)

Publication Number Publication Date
JPH07302728A true JPH07302728A (en) 1995-11-14

Family

ID=14623123

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11386894A Pending JPH07302728A (en) 1994-04-28 1994-04-28 Multilayered ceramic capacitor and its manufacture

Country Status (1)

Country Link
JP (1) JPH07302728A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008141212A (en) * 2001-08-10 2008-06-19 Murata Mfg Co Ltd Manufacture of laminated ceramic electronic component
US20170057880A1 (en) * 2014-05-07 2017-03-02 Morgan Advanced Ceramics, Inc. Method for manufacturing large ceramic co-fired articles

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008141212A (en) * 2001-08-10 2008-06-19 Murata Mfg Co Ltd Manufacture of laminated ceramic electronic component
JP4650486B2 (en) * 2001-08-10 2011-03-16 株式会社村田製作所 Manufacturing method of multilayer ceramic electronic component
US20170057880A1 (en) * 2014-05-07 2017-03-02 Morgan Advanced Ceramics, Inc. Method for manufacturing large ceramic co-fired articles
US11091398B2 (en) * 2014-05-07 2021-08-17 Morgan Advanced Ceramics, Inc. Method for manufacturing large ceramic co-fired articles
US11673842B2 (en) 2014-05-07 2023-06-13 Morgan Advanced Ceramics, Inc. Method for manufacturing large ceramic co-fired articles

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