JP3266986B2 - Manufacturing method of ceramic multilayer substrate - Google Patents

Manufacturing method of ceramic multilayer substrate

Info

Publication number
JP3266986B2
JP3266986B2 JP14351693A JP14351693A JP3266986B2 JP 3266986 B2 JP3266986 B2 JP 3266986B2 JP 14351693 A JP14351693 A JP 14351693A JP 14351693 A JP14351693 A JP 14351693A JP 3266986 B2 JP3266986 B2 JP 3266986B2
Authority
JP
Japan
Prior art keywords
hole
ceramic multilayer
multilayer substrate
manufacturing
green sheet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP14351693A
Other languages
Japanese (ja)
Other versions
JPH077269A (en
Inventor
茂俊 瀬川
康行 馬場
賢司 中山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Panasonic Holdings Corp
Original Assignee
Panasonic Corp
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Corp, Matsushita Electric Industrial Co Ltd filed Critical Panasonic Corp
Priority to JP14351693A priority Critical patent/JP3266986B2/en
Publication of JPH077269A publication Critical patent/JPH077269A/en
Application granted granted Critical
Publication of JP3266986B2 publication Critical patent/JP3266986B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明はセラミック多層基板の製
造方法に関するものであり、特にセラミック多層基板に
比較的大きな貫通孔を設ける工程に特徴を有するもので
ある。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a ceramic multilayer substrate, and more particularly to a method for forming a relatively large through hole in a ceramic multilayer substrate.

【0002】[0002]

【従来の技術】近年電子機器の小型化及び回路のデジタ
ル化に伴い高密度なセラミック多層基板が要求されるよ
うになってきている。又、それに伴いセラミック多層基
板の形状も様々な物が要求されており、たとえば基板を
電子機器内部のメカ部の近接に実装される場合、基板実
装上セラミック基板にかなり大きな貫通孔を設けなけれ
ばならない場合もある。
2. Description of the Related Art In recent years, high-density ceramic multilayer substrates have been demanded with the miniaturization of electronic devices and the digitization of circuits. Along with this, various shapes of ceramic multilayer substrates are also required.For example, when a substrate is mounted close to a mechanical part in an electronic device, a considerably large through hole must be provided in the ceramic substrate on the substrate mounting. Sometimes not.

【0003】従来のセラミック多層基板にこのような比
較的大きな貫通孔を設ける製造工程は、図3に示すよう
にあらかじめそれぞれのセラミックグリーンシート1に
パンチピンもしくは金型により所定形状の透孔2をもう
けておいたものを複数枚積層して積層体6を作り、この
積層体を焼結させることにより製造を行っていた。また
積層する際には図4に示すような貫通孔2に合わせた特
別な治具5により積層を行っていた。
In a conventional manufacturing process for providing such a relatively large through-hole in a ceramic multilayer substrate, as shown in FIG. 3, a through-hole 2 of a predetermined shape is previously formed in each ceramic green sheet 1 by a punch pin or a mold. The laminated body 6 is made by laminating a plurality of the above-mentioned materials, and the laminate is sintered to manufacture. In addition, when laminating, lamination was performed using a special jig 5 adapted to the through hole 2 as shown in FIG.

【0004】[0004]

【発明が解決しようとする課題】しかしながら上記従来
のセラミック多層基板に貫通孔を設ける製造工程では、
積層する際にも貫通孔に合わせた特別な治具が必要とな
る。すなわち積層する際にこの貫通孔に合わせた治具を
用いなければ、貫通孔の端部に応力がかかり、貫通孔の
形状が崩れたり、基板を焼結する際にこの部分からクラ
ックが入ったりする不良が生じる。
However, in the manufacturing process of providing a through-hole in the above-mentioned conventional ceramic multilayer substrate,
When stacking, a special jig corresponding to the through hole is required. That is, if a jig that matches this through hole is not used when laminating, stress will be applied to the end of the through hole, the shape of the through hole will collapse, and cracks will occur from this part when sintering the substrate. Failure occurs.

【0005】従って、この製造方法によると貫通孔の形
状が変わる度に積層する際にもちいる貫通孔に合わした
治具をつくらなければならず基板のコストアップになっ
ていた。本発明はこの様な問題点を解決し、貫通孔を設
けたセラミック多層基板の製造工程を簡易にし、より低
コストなセラミック多層基板を提供することを目的とす
る。
Therefore, according to this manufacturing method, every time the shape of the through-hole changes, a jig must be made to match the through-hole used for lamination, resulting in an increase in the cost of the substrate. An object of the present invention is to solve such a problem and to simplify the manufacturing process of a ceramic multilayer substrate provided with a through-hole, and to provide a lower-cost ceramic multilayer substrate.

【0006】[0006]

【課題を解決するための手段】上記課題を解決するため
に本発明のセラミック多層基板の製造方法は、焼成後の
セラミック多層基板に形成されるべき貫通孔の形状に沿
って断続する所定幅の透孔を、複数枚のグリーンシート
を積層したときに前記透孔の不連続部分が互いに当接し
ないように、各平面状のグリーンシートに形成して積
層、圧着し、焼成後に、前記不連続部分を切断して前記
貫通孔となるべき部分を除去することに特徴を有する。
In order to solve the above-mentioned problems, a method of manufacturing a ceramic multilayer substrate according to the present invention is directed to a method for manufacturing a ceramic multilayer substrate having a predetermined width which is interrupted along a shape of a through hole to be formed in a fired ceramic multilayer substrate. The through-holes are formed in each planar green sheet so that the discontinuous portions of the through-holes do not come into contact with each other when a plurality of green sheets are laminated. The method is characterized in that a part is cut to remove a part to be the through hole.

【0007】[0007]

【作用】上記製造方法によれば、積層、圧着する際に
は、各グリーンシートには完全な貫通孔は形成されてお
らず、すなわち、貫通孔となるべき位置には、不連続部
分で支持された状態でグリーンシートのが存在してい
る。従って、プレス板による押圧時に、この貫通孔とな
るべき位置に存在しているグリーンシート部分にもプレ
ス板の押圧力が掛かり、貫通孔の周縁に強い応力が掛か
らなくなる。
According to the above-mentioned manufacturing method, when laminating and crimping, no complete through-hole is formed in each green sheet, that is, a position where a through-hole is to be formed is supported by a discontinuous portion. There is a green sheet in the state where it was done. Therefore, at the time of pressing by the press plate, the pressing force of the press plate is also applied to the green sheet portion existing at the position where the through hole is to be formed, and strong stress is not applied to the peripheral edge of the through hole.

【0008】また、前記の不連続部分は、積層時に互い
に重なり合うことのないように積層されているため、焼
成後において、容易に切断できるものである。このよう
に本発明によれば、従来のように貫通孔の形状に応じた
治具を準備する必要がなくなり、セラミック多層基板の
コストダウンに大いに役立つものである。
In addition, since the discontinuous portions are laminated so as not to overlap with each other during lamination, they can be easily cut after firing. As described above, according to the present invention, it is not necessary to prepare a jig corresponding to the shape of the through-hole as in the related art, which greatly contributes to the cost reduction of the ceramic multilayer substrate.

【0009】[0009]

【実施例】以下本発明のセラミック多層基板の製造方法
の一実施例を図面を参照しながら説明する。図1におい
て、1a〜1fはそれぞれ積層される6枚の200μm
厚のグリーンシートであり、それぞれのグリーンシート
には、0.2mm角のパンチピンによって、形成すべき
貫通孔の周縁に沿って、0.2mm幅の不連続な透孔2
a〜2dが形成されている。
DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the method for manufacturing a ceramic multilayer substrate according to the present invention will be described below with reference to the drawings. In FIG. 1, reference numerals 1a to 1f denote six 200 μm stacked layers, respectively.
Each green sheet is provided with a discontinuous through hole 2 having a width of 0.2 mm along a peripheral edge of a through hole to be formed by a punch pin of 0.2 mm square.
a to 2d are formed.

【0010】すなわち、各グリーンシート1a〜1fの
貫通孔となる部分には、不連続部分3a〜3dで支持さ
れたグリーンシート部分4a〜4fが存在している。そ
して、各グリーンシートに形成された前記不連続部分3
a〜3dは、これらのグリーンシートを積層したとき、
互いに当接しない位置に形成されている。
That is, the green sheet portions 4a to 4f supported by the discontinuous portions 3a to 3d are present in the portions that become the through holes of the green sheets 1a to 1f. Then, the discontinuous portion 3 formed on each green sheet is formed.
a to 3d, when these green sheets are laminated,
They are formed at positions that do not abut each other.

【0011】これらのグリーンシート1a〜1fを積層
した状態を図2に示す。この状態で上下よりプレス板に
より押圧して、一体化した後、焼成する。然る後に、前
記不連続部分3a〜3dを全て切断して前記グリーンシ
ート部分4a〜4fを除去して所定の貫通孔を形成する
ものである。
FIG. 2 shows a state in which these green sheets 1a to 1f are stacked. In this state, it is pressed from above and below by a press plate, integrated, and fired. Thereafter, all the discontinuous portions 3a to 3d are cut to remove the green sheet portions 4a to 4f to form predetermined through holes.

【0012】なお、前記透孔2a〜2dの幅は、押圧あ
るいは焼成時に、前記グリーンシート部分4a〜4fの
周辺と各グリーンシート1a〜1fの貫通孔となる部分
の周縁とが当接しない限り狭い幅が良く、また、不連続
部分の幅及び位置もグリーンシート部分4a〜4fを支
持し得る強度及び位置であれば、より幅狭でその数も少
ないほうが良い。
The width of the through holes 2a to 2d is set so long as the periphery of the green sheet portions 4a to 4f does not abut on the periphery of the portion to be a through hole of each green sheet 1a to 1f during pressing or firing. The narrower the width, the better the width and the position of the discontinuous portion as long as the strength and the position can support the green sheet portions 4a to 4f.

【0013】[0013]

【発明の効果】以上の様に本発明の製造方法によれば、
積層、圧着する際には、各グリーンシートには完全な貫
通孔は形成されておらず、貫通孔となるべき位置には、
不連続部分で支持された状態でグリーンシートの一部が
存在しているため、プレス板による押圧時に、この貫通
孔となるべき位置に存在しているグリーンシート部分に
もプレス板の押圧力が掛かり、貫通孔の周縁に強い応力
が掛からなくなる。
As described above, according to the production method of the present invention,
When laminating and crimping, complete through holes are not formed in each green sheet, and in the positions that should be through holes,
Since a part of the green sheet exists while being supported by the discontinuous portion, the pressing force of the press plate is also applied to the green sheet portion existing at a position where the through hole should be formed when pressed by the press plate. As a result, no strong stress is applied to the periphery of the through hole.

【0014】また、前記の不連続部分は、積層時に互い
に重なり合うことのないように積層されているため、焼
成後において、容易に切断できるものである。
Since the discontinuous portions are laminated so as not to overlap with each other at the time of lamination, they can be easily cut after firing.

【0015】このように本発明によれば、従来のように
貫通孔の形状に応じた治具を準備する必要がなくなり、
セラミック多層基板のコストダウンに大いに役立つもの
である。
As described above, according to the present invention, it is not necessary to prepare a jig corresponding to the shape of the through-hole unlike the related art.
This is very useful for reducing the cost of the ceramic multilayer substrate.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明のセラミック多層基板の製造方法の一実
施例の一工程におけるグリーンシートの平面図
FIG. 1 is a plan view of a green sheet in one step of an embodiment of a method for manufacturing a ceramic multilayer substrate of the present invention.

【図2】同実施例の他の工程における積層されたグリー
ンシートの平面図
FIG. 2 is a plan view of laminated green sheets in another process of the embodiment.

【図3】従来のセラミック多層基板の製造方法の一工程
を示す斜視図
FIG. 3 is a perspective view showing one step of a conventional method for manufacturing a ceramic multilayer substrate.

【図4】同製造方法の他の工程における積層されたグリ
ーンシートを示す側断面図
FIG. 4 is a side sectional view showing the laminated green sheets in another step of the manufacturing method.

【符号の説明】[Explanation of symbols]

1a〜1f グリーンシート 2a〜2d 貫通孔 3a〜3d 不連続部分 4a〜4f 除去部分 5 治具 6 グリーンシート積層体 1a to 1f Green sheet 2a to 2d Through hole 3a to 3d Discontinuous part 4a to 4f Removal part 5 Jig 6 Green sheet laminate

───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 平4−33397(JP,A) 特開 平4−288854(JP,A) 特開 平2−238642(JP,A) 特開 平3−274108(JP,A) (58)調査した分野(Int.Cl.7,DB名) H05K 3/46 H05K 3/00 ────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP-A-4-33397 (JP, A) JP-A-4-288854 (JP, A) JP-A-2-238642 (JP, A) JP-A-3-338 274108 (JP, A) (58) Fields investigated (Int. Cl. 7 , DB name) H05K 3/46 H05K 3/00

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】焼成後のセラミック多層基板に形成される
べき貫通孔の形状に沿って断続する所定幅の透孔を、複
数枚のグリーンシートを積層したときに前記透孔の不連
続部分が互いに当接しないように、各平面状のグリーン
シートに形成して積層、圧着し、焼成後に、前記不連続
部分を切断して前記貫通孔となるべき部分を除去するこ
とを特徴とするセラミック多層基板の製造方法。
1. A through hole having a predetermined width intermittently formed along the shape of a through hole to be formed in a fired ceramic multilayer substrate, and a discontinuous portion of the through hole is formed when a plurality of green sheets are laminated. A ceramic multi-layer formed by forming each of the planar green sheets so as not to contact each other, laminating, pressing, and firing, and then cutting the discontinuous portion to remove a portion to become the through hole. Substrate manufacturing method.
JP14351693A 1993-06-15 1993-06-15 Manufacturing method of ceramic multilayer substrate Expired - Fee Related JP3266986B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14351693A JP3266986B2 (en) 1993-06-15 1993-06-15 Manufacturing method of ceramic multilayer substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14351693A JP3266986B2 (en) 1993-06-15 1993-06-15 Manufacturing method of ceramic multilayer substrate

Publications (2)

Publication Number Publication Date
JPH077269A JPH077269A (en) 1995-01-10
JP3266986B2 true JP3266986B2 (en) 2002-03-18

Family

ID=15340563

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14351693A Expired - Fee Related JP3266986B2 (en) 1993-06-15 1993-06-15 Manufacturing method of ceramic multilayer substrate

Country Status (1)

Country Link
JP (1) JP3266986B2 (en)

Also Published As

Publication number Publication date
JPH077269A (en) 1995-01-10

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