JPS60239040A - ウエハのブレーキング方法 - Google Patents

ウエハのブレーキング方法

Info

Publication number
JPS60239040A
JPS60239040A JP60090498A JP9049885A JPS60239040A JP S60239040 A JPS60239040 A JP S60239040A JP 60090498 A JP60090498 A JP 60090498A JP 9049885 A JP9049885 A JP 9049885A JP S60239040 A JPS60239040 A JP S60239040A
Authority
JP
Japan
Prior art keywords
jig
wafer
groove
breaking
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60090498A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6112378B2 (en:Method
Inventor
Yukio Goto
幸生 後藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seikosha KK
Original Assignee
Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seikosha KK filed Critical Seikosha KK
Priority to JP60090498A priority Critical patent/JPS60239040A/ja
Publication of JPS60239040A publication Critical patent/JPS60239040A/ja
Publication of JPS6112378B2 publication Critical patent/JPS6112378B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P50/00—

Landscapes

  • Dicing (AREA)
JP60090498A 1985-04-26 1985-04-26 ウエハのブレーキング方法 Granted JPS60239040A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60090498A JPS60239040A (ja) 1985-04-26 1985-04-26 ウエハのブレーキング方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60090498A JPS60239040A (ja) 1985-04-26 1985-04-26 ウエハのブレーキング方法

Publications (2)

Publication Number Publication Date
JPS60239040A true JPS60239040A (ja) 1985-11-27
JPS6112378B2 JPS6112378B2 (en:Method) 1986-04-08

Family

ID=14000165

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60090498A Granted JPS60239040A (ja) 1985-04-26 1985-04-26 ウエハのブレーキング方法

Country Status (1)

Country Link
JP (1) JPS60239040A (en:Method)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014082301A (ja) * 2012-10-16 2014-05-08 Mitsuboshi Diamond Industrial Co Ltd 脆性材料基板のブレイク用治具及びブレイク方法
JP2015062257A (ja) * 2014-12-24 2015-04-02 三星ダイヤモンド工業株式会社 脆性材料基板のブレイク用治具及びブレイク方法
JP2016184650A (ja) * 2015-03-26 2016-10-20 三星ダイヤモンド工業株式会社 ブレイク装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014082301A (ja) * 2012-10-16 2014-05-08 Mitsuboshi Diamond Industrial Co Ltd 脆性材料基板のブレイク用治具及びブレイク方法
JP2015062257A (ja) * 2014-12-24 2015-04-02 三星ダイヤモンド工業株式会社 脆性材料基板のブレイク用治具及びブレイク方法
JP2016184650A (ja) * 2015-03-26 2016-10-20 三星ダイヤモンド工業株式会社 ブレイク装置

Also Published As

Publication number Publication date
JPS6112378B2 (en:Method) 1986-04-08

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