JPS60238834A - 画線比率測定装置 - Google Patents
画線比率測定装置Info
- Publication number
- JPS60238834A JPS60238834A JP59094118A JP9411884A JPS60238834A JP S60238834 A JPS60238834 A JP S60238834A JP 59094118 A JP59094118 A JP 59094118A JP 9411884 A JP9411884 A JP 9411884A JP S60238834 A JPS60238834 A JP S60238834A
- Authority
- JP
- Japan
- Prior art keywords
- light
- original film
- regions
- detected
- column
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005192 partition Methods 0.000 claims abstract description 7
- 238000006243 chemical reaction Methods 0.000 claims description 8
- 238000009792 diffusion process Methods 0.000 abstract description 4
- 238000010276 construction Methods 0.000 abstract 1
- 230000004907 flux Effects 0.000 abstract 1
- 230000001678 irradiating effect Effects 0.000 abstract 1
- 230000035945 sensitivity Effects 0.000 description 9
- 238000002834 transmittance Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 230000007423 decrease Effects 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000013459 approach Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Inking, Control Or Cleaning Of Printing Machines (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59094118A JPS60238834A (ja) | 1984-05-11 | 1984-05-11 | 画線比率測定装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59094118A JPS60238834A (ja) | 1984-05-11 | 1984-05-11 | 画線比率測定装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS60238834A true JPS60238834A (ja) | 1985-11-27 |
JPS6322579B2 JPS6322579B2 (enrdf_load_stackoverflow) | 1988-05-12 |
Family
ID=14101510
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP59094118A Granted JPS60238834A (ja) | 1984-05-11 | 1984-05-11 | 画線比率測定装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60238834A (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02150505U (enrdf_load_stackoverflow) * | 1989-05-26 | 1990-12-26 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0443775U (enrdf_load_stackoverflow) * | 1990-08-16 | 1992-04-14 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5218608A (en) * | 1975-08-01 | 1977-02-12 | Morimasa Tanaka | Apparatus for fitting tyre chain |
-
1984
- 1984-05-11 JP JP59094118A patent/JPS60238834A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5218608A (en) * | 1975-08-01 | 1977-02-12 | Morimasa Tanaka | Apparatus for fitting tyre chain |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02150505U (enrdf_load_stackoverflow) * | 1989-05-26 | 1990-12-26 |
Also Published As
Publication number | Publication date |
---|---|
JPS6322579B2 (enrdf_load_stackoverflow) | 1988-05-12 |
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