JPS60232697A - 薄膜ｅｌ素子 - Google Patents
薄膜ｅｌ素子Info
- Publication number
- JPS60232697A JPS60232697A JP59087364A JP8736484A JPS60232697A JP S60232697 A JPS60232697 A JP S60232697A JP 59087364 A JP59087364 A JP 59087364A JP 8736484 A JP8736484 A JP 8736484A JP S60232697 A JPS60232697 A JP S60232697A
- Authority
- JP
- Japan
- Prior art keywords
- light
- light absorption
- layer
- thin film
- absorption layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title claims description 20
- 230000031700 light absorption Effects 0.000 claims description 46
- 239000010408 film Substances 0.000 claims description 11
- 229910052732 germanium Inorganic materials 0.000 claims description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 2
- 238000010521 absorption reaction Methods 0.000 claims 1
- 239000011521 glass Substances 0.000 description 10
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 9
- 239000001301 oxygen Substances 0.000 description 9
- 229910052760 oxygen Inorganic materials 0.000 description 9
- 239000000758 substrate Substances 0.000 description 9
- 238000005530 etching Methods 0.000 description 8
- 230000015556 catabolic process Effects 0.000 description 6
- 238000000151 deposition Methods 0.000 description 6
- 230000008021 deposition Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 230000005684 electric field Effects 0.000 description 4
- 238000001771 vacuum deposition Methods 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- 229910004813 CaTe Inorganic materials 0.000 description 2
- 229910002616 GeOx Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 241000257465 Echinoidea Species 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 229910052772 Samarium Inorganic materials 0.000 description 1
- -1 Si3N4 Chemical class 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910052771 Terbium Inorganic materials 0.000 description 1
- 239000013543 active substance Substances 0.000 description 1
- 239000005354 aluminosilicate glass Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 230000005283 ground state Effects 0.000 description 1
- 229910003437 indium oxide Inorganic materials 0.000 description 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910001120 nichrome Inorganic materials 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 239000008188 pellet Substances 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 239000005361 soda-lime glass Substances 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 230000002747 voluntary effect Effects 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
Landscapes
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59087364A JPS60232697A (ja) | 1984-04-30 | 1984-04-30 | 薄膜ｅｌ素子 |
| US06/728,595 US4634639A (en) | 1984-04-30 | 1985-04-29 | Electroluminescent panel having a light absorption layer of germanium oxide |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59087364A JPS60232697A (ja) | 1984-04-30 | 1984-04-30 | 薄膜ｅｌ素子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60232697A true JPS60232697A (ja) | 1985-11-19 |
| JPS6315718B2 JPS6315718B2 (enrdf_load_stackoverflow) | 1988-04-06 |
Family
ID=13912835
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59087364A Granted JPS60232697A (ja) | 1984-04-30 | 1984-04-30 | 薄膜ｅｌ素子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60232697A (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6113595A (ja) * | 1984-06-28 | 1986-01-21 | シャープ株式会社 | 薄膜ｅｌ素子 |
| WO1988000382A1 (fr) * | 1986-07-03 | 1988-01-14 | Kabushiki Kaisha Komatsu Seisakusho | Dispositif d'affichage en couleurs |
| JPS6310494A (ja) * | 1986-07-01 | 1988-01-18 | 株式会社小糸製作所 | 薄膜ｅｌ素子の構造 |
-
1984
- 1984-04-30 JP JP59087364A patent/JPS60232697A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6113595A (ja) * | 1984-06-28 | 1986-01-21 | シャープ株式会社 | 薄膜ｅｌ素子 |
| JPS6310494A (ja) * | 1986-07-01 | 1988-01-18 | 株式会社小糸製作所 | 薄膜ｅｌ素子の構造 |
| WO1988000382A1 (fr) * | 1986-07-03 | 1988-01-14 | Kabushiki Kaisha Komatsu Seisakusho | Dispositif d'affichage en couleurs |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6315718B2 (enrdf_load_stackoverflow) | 1988-04-06 |
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