JPS60229359A - 高周波半導体装置 - Google Patents

高周波半導体装置

Info

Publication number
JPS60229359A
JPS60229359A JP59086414A JP8641484A JPS60229359A JP S60229359 A JPS60229359 A JP S60229359A JP 59086414 A JP59086414 A JP 59086414A JP 8641484 A JP8641484 A JP 8641484A JP S60229359 A JPS60229359 A JP S60229359A
Authority
JP
Japan
Prior art keywords
field effect
effect transistor
gate
oxide film
gate oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59086414A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0241909B2 (enrdf_load_stackoverflow
Inventor
Osamu Ishikawa
修 石川
Takeya Ezaki
豪弥 江崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP59086414A priority Critical patent/JPS60229359A/ja
Publication of JPS60229359A publication Critical patent/JPS60229359A/ja
Publication of JPH0241909B2 publication Critical patent/JPH0241909B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D89/00Aspects of integrated devices not covered by groups H10D84/00 - H10D88/00
    • H10D89/60Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD]
    • H10D89/601Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD] for devices having insulated gate electrodes, e.g. for IGFETs or IGBTs
    • H10D89/611Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD] for devices having insulated gate electrodes, e.g. for IGFETs or IGBTs using diodes as protective elements

Landscapes

  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
JP59086414A 1984-04-27 1984-04-27 高周波半導体装置 Granted JPS60229359A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59086414A JPS60229359A (ja) 1984-04-27 1984-04-27 高周波半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59086414A JPS60229359A (ja) 1984-04-27 1984-04-27 高周波半導体装置

Publications (2)

Publication Number Publication Date
JPS60229359A true JPS60229359A (ja) 1985-11-14
JPH0241909B2 JPH0241909B2 (enrdf_load_stackoverflow) 1990-09-19

Family

ID=13886208

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59086414A Granted JPS60229359A (ja) 1984-04-27 1984-04-27 高周波半導体装置

Country Status (1)

Country Link
JP (1) JPS60229359A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0241909B2 (enrdf_load_stackoverflow) 1990-09-19

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