JPS60211179A - 真空バルブ - Google Patents

真空バルブ

Info

Publication number
JPS60211179A
JPS60211179A JP6672384A JP6672384A JPS60211179A JP S60211179 A JPS60211179 A JP S60211179A JP 6672384 A JP6672384 A JP 6672384A JP 6672384 A JP6672384 A JP 6672384A JP S60211179 A JPS60211179 A JP S60211179A
Authority
JP
Japan
Prior art keywords
valve
arm
link
open
shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6672384A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0212312B2 (enrdf_load_stackoverflow
Inventor
Mitsuo Tezuka
手塚 光雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
DIA SHINKU GIKEN KK
Original Assignee
DIA SHINKU GIKEN KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by DIA SHINKU GIKEN KK filed Critical DIA SHINKU GIKEN KK
Priority to JP6672384A priority Critical patent/JPS60211179A/ja
Publication of JPS60211179A publication Critical patent/JPS60211179A/ja
Publication of JPH0212312B2 publication Critical patent/JPH0212312B2/ja
Granted legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Lift Valve (AREA)
  • Details Of Valves (AREA)
JP6672384A 1984-04-05 1984-04-05 真空バルブ Granted JPS60211179A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6672384A JPS60211179A (ja) 1984-04-05 1984-04-05 真空バルブ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6672384A JPS60211179A (ja) 1984-04-05 1984-04-05 真空バルブ

Publications (2)

Publication Number Publication Date
JPS60211179A true JPS60211179A (ja) 1985-10-23
JPH0212312B2 JPH0212312B2 (enrdf_load_stackoverflow) 1990-03-19

Family

ID=13324102

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6672384A Granted JPS60211179A (ja) 1984-04-05 1984-04-05 真空バルブ

Country Status (1)

Country Link
JP (1) JPS60211179A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05302677A (ja) * 1992-04-27 1993-11-16 Kureha Chem Ind Co Ltd ダンパー装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05302677A (ja) * 1992-04-27 1993-11-16 Kureha Chem Ind Co Ltd ダンパー装置

Also Published As

Publication number Publication date
JPH0212312B2 (enrdf_load_stackoverflow) 1990-03-19

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