JPS60207344A - 回路基板等の検査装置 - Google Patents

回路基板等の検査装置

Info

Publication number
JPS60207344A
JPS60207344A JP59064238A JP6423884A JPS60207344A JP S60207344 A JPS60207344 A JP S60207344A JP 59064238 A JP59064238 A JP 59064238A JP 6423884 A JP6423884 A JP 6423884A JP S60207344 A JPS60207344 A JP S60207344A
Authority
JP
Japan
Prior art keywords
elastic body
probe
contact
contact probe
support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59064238A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0260067B2 (enExample
Inventor
Ko Nakajima
中島　鋼
Katsutoshi Saida
斉田　勝利
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokowo Co Ltd
Original Assignee
Yokowo Mfg Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokowo Mfg Co Ltd filed Critical Yokowo Mfg Co Ltd
Priority to JP59064238A priority Critical patent/JPS60207344A/ja
Publication of JPS60207344A publication Critical patent/JPS60207344A/ja
Publication of JPH0260067B2 publication Critical patent/JPH0260067B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Electric Properties And Detecting Electric Faults (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP59064238A 1984-03-31 1984-03-31 回路基板等の検査装置 Granted JPS60207344A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59064238A JPS60207344A (ja) 1984-03-31 1984-03-31 回路基板等の検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59064238A JPS60207344A (ja) 1984-03-31 1984-03-31 回路基板等の検査装置

Publications (2)

Publication Number Publication Date
JPS60207344A true JPS60207344A (ja) 1985-10-18
JPH0260067B2 JPH0260067B2 (enExample) 1990-12-14

Family

ID=13252352

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59064238A Granted JPS60207344A (ja) 1984-03-31 1984-03-31 回路基板等の検査装置

Country Status (1)

Country Link
JP (1) JPS60207344A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE112014006308T5 (de) 2014-01-31 2016-11-17 Hitachi Automotive Systems, Ltd. Bremssystem

Also Published As

Publication number Publication date
JPH0260067B2 (enExample) 1990-12-14

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