JPS60206477A - 溶剤による洗浄装置 - Google Patents

溶剤による洗浄装置

Info

Publication number
JPS60206477A
JPS60206477A JP6398984A JP6398984A JPS60206477A JP S60206477 A JPS60206477 A JP S60206477A JP 6398984 A JP6398984 A JP 6398984A JP 6398984 A JP6398984 A JP 6398984A JP S60206477 A JPS60206477 A JP S60206477A
Authority
JP
Japan
Prior art keywords
solvent
cleaning
cleaned
chamber
bath
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6398984A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6353873B2 (https=
Inventor
敦資 坂井田
鈴木　正徳
柴田　忠彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
NipponDenso Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NipponDenso Co Ltd filed Critical NipponDenso Co Ltd
Priority to JP6398984A priority Critical patent/JPS60206477A/ja
Publication of JPS60206477A publication Critical patent/JPS60206477A/ja
Publication of JPS6353873B2 publication Critical patent/JPS6353873B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
JP6398984A 1984-03-30 1984-03-30 溶剤による洗浄装置 Granted JPS60206477A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6398984A JPS60206477A (ja) 1984-03-30 1984-03-30 溶剤による洗浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6398984A JPS60206477A (ja) 1984-03-30 1984-03-30 溶剤による洗浄装置

Publications (2)

Publication Number Publication Date
JPS60206477A true JPS60206477A (ja) 1985-10-18
JPS6353873B2 JPS6353873B2 (https=) 1988-10-25

Family

ID=13245198

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6398984A Granted JPS60206477A (ja) 1984-03-30 1984-03-30 溶剤による洗浄装置

Country Status (1)

Country Link
JP (1) JPS60206477A (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03293072A (ja) * 1990-04-11 1991-12-24 Chiyoda Manufacturing Co Ltd 有機溶剤を使用する洗浄装置の運転方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51135185A (en) * 1975-05-20 1976-11-24 Fujitsu Ltd Washing device
JPS55159791U (https=) * 1979-05-02 1980-11-17

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51135185A (en) * 1975-05-20 1976-11-24 Fujitsu Ltd Washing device
JPS55159791U (https=) * 1979-05-02 1980-11-17

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03293072A (ja) * 1990-04-11 1991-12-24 Chiyoda Manufacturing Co Ltd 有機溶剤を使用する洗浄装置の運転方法

Also Published As

Publication number Publication date
JPS6353873B2 (https=) 1988-10-25

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees