JPS60206046A - 多層配線を有する半導体集積回路 - Google Patents
多層配線を有する半導体集積回路Info
- Publication number
- JPS60206046A JPS60206046A JP6249384A JP6249384A JPS60206046A JP S60206046 A JPS60206046 A JP S60206046A JP 6249384 A JP6249384 A JP 6249384A JP 6249384 A JP6249384 A JP 6249384A JP S60206046 A JPS60206046 A JP S60206046A
- Authority
- JP
- Japan
- Prior art keywords
- electrode layer
- region
- wiring
- cross
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6249384A JPS60206046A (ja) | 1984-03-29 | 1984-03-29 | 多層配線を有する半導体集積回路 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6249384A JPS60206046A (ja) | 1984-03-29 | 1984-03-29 | 多層配線を有する半導体集積回路 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS60206046A true JPS60206046A (ja) | 1985-10-17 |
JPH0222539B2 JPH0222539B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-05-18 |
Family
ID=13201748
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6249384A Granted JPS60206046A (ja) | 1984-03-29 | 1984-03-29 | 多層配線を有する半導体集積回路 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60206046A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5321584A (en) * | 1976-08-12 | 1978-02-28 | Toshiba Corp | Wiring system of semiconductor device |
JPS5512639U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1978-07-12 | 1980-01-26 |
-
1984
- 1984-03-29 JP JP6249384A patent/JPS60206046A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5321584A (en) * | 1976-08-12 | 1978-02-28 | Toshiba Corp | Wiring system of semiconductor device |
JPS5512639U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1978-07-12 | 1980-01-26 |
Also Published As
Publication number | Publication date |
---|---|
JPH0222539B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-05-18 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |