JPS60201877A - 析出生成人工ダイヤモンド粒で構成されたダイヤモンド研磨砥石 - Google Patents

析出生成人工ダイヤモンド粒で構成されたダイヤモンド研磨砥石

Info

Publication number
JPS60201877A
JPS60201877A JP6034884A JP6034884A JPS60201877A JP S60201877 A JPS60201877 A JP S60201877A JP 6034884 A JP6034884 A JP 6034884A JP 6034884 A JP6034884 A JP 6034884A JP S60201877 A JPS60201877 A JP S60201877A
Authority
JP
Japan
Prior art keywords
polishing
reaction layer
diamond
artificial diamond
grinding wheel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6034884A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0474145B2 (enrdf_load_stackoverflow
Inventor
Noribumi Kikuchi
菊池　則文
Takayuki Shingyouchi
新行内　隆之
Hiroaki Yamashita
山下　博明
Akio Nishiyama
昭雄 西山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Metal Corp
Original Assignee
Mitsubishi Metal Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Metal Corp filed Critical Mitsubishi Metal Corp
Priority to JP6034884A priority Critical patent/JPS60201877A/ja
Publication of JPS60201877A publication Critical patent/JPS60201877A/ja
Publication of JPH0474145B2 publication Critical patent/JPH0474145B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/04—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic
    • B24D3/06—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic metallic or mixture of metals with ceramic materials, e.g. hard metals, "cermets", cements
    • B24D3/10—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic metallic or mixture of metals with ceramic materials, e.g. hard metals, "cermets", cements for porous or cellular structure, e.g. for use with diamonds as abrasives

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP6034884A 1984-03-28 1984-03-28 析出生成人工ダイヤモンド粒で構成されたダイヤモンド研磨砥石 Granted JPS60201877A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6034884A JPS60201877A (ja) 1984-03-28 1984-03-28 析出生成人工ダイヤモンド粒で構成されたダイヤモンド研磨砥石

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6034884A JPS60201877A (ja) 1984-03-28 1984-03-28 析出生成人工ダイヤモンド粒で構成されたダイヤモンド研磨砥石

Publications (2)

Publication Number Publication Date
JPS60201877A true JPS60201877A (ja) 1985-10-12
JPH0474145B2 JPH0474145B2 (enrdf_load_stackoverflow) 1992-11-25

Family

ID=13139564

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6034884A Granted JPS60201877A (ja) 1984-03-28 1984-03-28 析出生成人工ダイヤモンド粒で構成されたダイヤモンド研磨砥石

Country Status (1)

Country Link
JP (1) JPS60201877A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60255366A (ja) * 1984-05-29 1985-12-17 Sumitomo Electric Ind Ltd ダイヤモンド研磨紙の製造法
JPH03251370A (ja) * 1990-03-01 1991-11-08 Mitsubishi Materials Corp 超精密研削用ダイヤモンド砥石およびその製造法
JPH04141372A (ja) * 1990-09-28 1992-05-14 Mitsubishi Materials Corp ダイヤモンド砥石
JPH04348028A (ja) * 1991-05-24 1992-12-03 Kyushu Electron Metal Co Ltd 半導体試料の斜研磨法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5855562A (ja) * 1981-09-28 1983-04-01 Hitachi Ltd 研磨皿とその製造方法
JPS58135117A (ja) * 1982-01-29 1983-08-11 Natl Inst For Res In Inorg Mater ダイヤモンドの製造法
JPS6086096A (ja) * 1983-10-18 1985-05-15 Natl Inst For Res In Inorg Mater 膜状ダイヤモンドの析出法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5855562A (ja) * 1981-09-28 1983-04-01 Hitachi Ltd 研磨皿とその製造方法
JPS58135117A (ja) * 1982-01-29 1983-08-11 Natl Inst For Res In Inorg Mater ダイヤモンドの製造法
JPS6086096A (ja) * 1983-10-18 1985-05-15 Natl Inst For Res In Inorg Mater 膜状ダイヤモンドの析出法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60255366A (ja) * 1984-05-29 1985-12-17 Sumitomo Electric Ind Ltd ダイヤモンド研磨紙の製造法
JPH03251370A (ja) * 1990-03-01 1991-11-08 Mitsubishi Materials Corp 超精密研削用ダイヤモンド砥石およびその製造法
JPH04141372A (ja) * 1990-09-28 1992-05-14 Mitsubishi Materials Corp ダイヤモンド砥石
JPH04348028A (ja) * 1991-05-24 1992-12-03 Kyushu Electron Metal Co Ltd 半導体試料の斜研磨法

Also Published As

Publication number Publication date
JPH0474145B2 (enrdf_load_stackoverflow) 1992-11-25

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