JPS60200971A - 遷移金属酸化物膜の製造方法 - Google Patents
遷移金属酸化物膜の製造方法Info
- Publication number
- JPS60200971A JPS60200971A JP5771884A JP5771884A JPS60200971A JP S60200971 A JPS60200971 A JP S60200971A JP 5771884 A JP5771884 A JP 5771884A JP 5771884 A JP5771884 A JP 5771884A JP S60200971 A JPS60200971 A JP S60200971A
- Authority
- JP
- Japan
- Prior art keywords
- transition metal
- acid
- coating
- oxide film
- transition metallic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
- C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
- C23C18/1204—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material inorganic material, e.g. non-oxide and non-metallic such as sulfides, nitrides based compounds
- C23C18/1208—Oxides, e.g. ceramics
- C23C18/1216—Metal oxides
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Surface Treatment Of Glass (AREA)
- Chemically Coating (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5771884A JPS60200971A (ja) | 1984-03-26 | 1984-03-26 | 遷移金属酸化物膜の製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5771884A JPS60200971A (ja) | 1984-03-26 | 1984-03-26 | 遷移金属酸化物膜の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS60200971A true JPS60200971A (ja) | 1985-10-11 |
JPH0349988B2 JPH0349988B2 (enrdf_load_stackoverflow) | 1991-07-31 |
Family
ID=13063722
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5771884A Granted JPS60200971A (ja) | 1984-03-26 | 1984-03-26 | 遷移金属酸化物膜の製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60200971A (enrdf_load_stackoverflow) |
-
1984
- 1984-03-26 JP JP5771884A patent/JPS60200971A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPH0349988B2 (enrdf_load_stackoverflow) | 1991-07-31 |
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