JPS60198445A - 湿度センサ− - Google Patents

湿度センサ−

Info

Publication number
JPS60198445A
JPS60198445A JP5359684A JP5359684A JPS60198445A JP S60198445 A JPS60198445 A JP S60198445A JP 5359684 A JP5359684 A JP 5359684A JP 5359684 A JP5359684 A JP 5359684A JP S60198445 A JPS60198445 A JP S60198445A
Authority
JP
Japan
Prior art keywords
electrode
humidity sensor
moisture absorbing
change
piezoelectric element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5359684A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0345782B2 (enExample
Inventor
Yukio Kagawa
加川　幸雄
Hidekazu Ando
英一 安藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SPC Electronics Corp
Shimada Rika Kogyo KK
Original Assignee
SPC Electronics Corp
Shimada Rika Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SPC Electronics Corp, Shimada Rika Kogyo KK filed Critical SPC Electronics Corp
Priority to JP5359684A priority Critical patent/JPS60198445A/ja
Publication of JPS60198445A publication Critical patent/JPS60198445A/ja
Publication of JPH0345782B2 publication Critical patent/JPH0345782B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/121—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
JP5359684A 1984-03-22 1984-03-22 湿度センサ− Granted JPS60198445A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5359684A JPS60198445A (ja) 1984-03-22 1984-03-22 湿度センサ−

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5359684A JPS60198445A (ja) 1984-03-22 1984-03-22 湿度センサ−

Publications (2)

Publication Number Publication Date
JPS60198445A true JPS60198445A (ja) 1985-10-07
JPH0345782B2 JPH0345782B2 (enExample) 1991-07-12

Family

ID=12947258

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5359684A Granted JPS60198445A (ja) 1984-03-22 1984-03-22 湿度センサ−

Country Status (1)

Country Link
JP (1) JPS60198445A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009534651A (ja) * 2006-04-20 2009-09-24 ヴェクトロン インターナショナル，インク 高圧環境用の電気音響センサ
WO2013161559A1 (ja) * 2012-04-24 2013-10-31 株式会社村田製作所 湿度センサ素子およびその製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS577538A (en) * 1980-06-18 1982-01-14 Agency Of Ind Science & Technol Piezo-electric humidity sensor

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS577538A (en) * 1980-06-18 1982-01-14 Agency Of Ind Science & Technol Piezo-electric humidity sensor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009534651A (ja) * 2006-04-20 2009-09-24 ヴェクトロン インターナショナル，インク 高圧環境用の電気音響センサ
WO2013161559A1 (ja) * 2012-04-24 2013-10-31 株式会社村田製作所 湿度センサ素子およびその製造方法

Also Published As

Publication number Publication date
JPH0345782B2 (enExample) 1991-07-12

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