JPS6019614A - 搬送装置 - Google Patents

搬送装置

Info

Publication number
JPS6019614A
JPS6019614A JP12917283A JP12917283A JPS6019614A JP S6019614 A JPS6019614 A JP S6019614A JP 12917283 A JP12917283 A JP 12917283A JP 12917283 A JP12917283 A JP 12917283A JP S6019614 A JPS6019614 A JP S6019614A
Authority
JP
Japan
Prior art keywords
pallet
transport
conveyance
linear motor
compressed air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12917283A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0144610B2 (enrdf_load_stackoverflow
Inventor
Takehisa Nitta
雄久 新田
Yoshio Saito
斉藤　由雄
Ichiro Fukuwatari
一郎 福渡
Seiju Watanabe
渡辺　清樹
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Kiden Kogyo Ltd
Hitachi Ltd
Original Assignee
Hitachi Kiden Kogyo Ltd
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Kiden Kogyo Ltd, Hitachi Ltd filed Critical Hitachi Kiden Kogyo Ltd
Priority to JP12917283A priority Critical patent/JPS6019614A/ja
Publication of JPS6019614A publication Critical patent/JPS6019614A/ja
Publication of JPH0144610B2 publication Critical patent/JPH0144610B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Non-Mechanical Conveyors (AREA)
JP12917283A 1983-07-14 1983-07-14 搬送装置 Granted JPS6019614A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12917283A JPS6019614A (ja) 1983-07-14 1983-07-14 搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12917283A JPS6019614A (ja) 1983-07-14 1983-07-14 搬送装置

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP24748785A Division JPS61150924A (ja) 1985-11-05 1985-11-05 搬送装置
JP24748885A Division JPS61150925A (ja) 1985-11-05 1985-11-05 ウエハ−のリニアモ−タ搬送装置

Publications (2)

Publication Number Publication Date
JPS6019614A true JPS6019614A (ja) 1985-01-31
JPH0144610B2 JPH0144610B2 (enrdf_load_stackoverflow) 1989-09-28

Family

ID=15002921

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12917283A Granted JPS6019614A (ja) 1983-07-14 1983-07-14 搬送装置

Country Status (1)

Country Link
JP (1) JPS6019614A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61150924A (ja) * 1985-11-05 1986-07-09 Hitachi Ltd 搬送装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61150924A (ja) * 1985-11-05 1986-07-09 Hitachi Ltd 搬送装置

Also Published As

Publication number Publication date
JPH0144610B2 (enrdf_load_stackoverflow) 1989-09-28

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