1276595 - (1) 玖、發明說明 【發明所屬的技術領域】 本發明，是關於藉由空氣來使液晶基板等的運送物上 浮來將其運送的裝置。 【先前技術】 伴隨著液晶玻璃基板等的大型化，以往用匣盒單元的 違送動作已產生了不合理性。例如基板的尺寸是2m X 2 m 的話’用來進行操作的匣盒或機械手臂也會成爲2mx2m 左右的尺寸，會讓運送設備巨大化。 作爲不使用匣盒的運送裝置，是考慮使用空氣的上浮 運送裝置。在上浮運送裝置，會在壓縮機產生高壓空氣， 將其儲存在槽體，將其從複數的噴嘴朝向運送物的底面浮 出’使物品上浮。可是在上浮運送過程中，空氣的消耗量 很大’要從很大的壓縮機將高壓空氣供給到槽體，需要在 周圍配設很多的配管，來將空氣供給到噴嘴。而從壓縮機 或噴嘴噴出高壓空氣時的噪音也很大。 【發明內容】 〔發明欲解決的課題〕 本發明的基本課題，是要簡化上浮運送裝置的構造， 不需要用來執行上浮運送的壓縮機或配管、空氣槽等。在 第2發明所追加的課題，是要能使運送物進行直線前進以 外的各種動作。第3、4發明所追加的課題，是要抑制運 (2) (2)1276595 送物朝左右擺動或方向錯亂，讓運送容易進行。 〔用以解決課題的手段〕 該發明，是藉由將朝上方排送空氣的複數個風扇或鼓 風機組織性地進行配置，來構成運送物的運送通路，是藉 由來自於上述風扇或鼓風機的空氣流來使運送物上浮的上 浮運送裝置。 最好是在上述風扇或鼓風機的空氣吹出口側，設置用 來調整送氣方向的通氣縫來作爲單元，組合配置不同送氣 方向的複數單元，藉由配合運送物的位置來控制上述各單 元，則可自由轉換運送方向。 最好是在運送通路的中央部設置沿著運送方向送氣的 推進用的風扇或鼓風機，並且在其左右方向兩側設置朝上 方迭氣的上浮用的風扇或鼓風機’且在上述上浮用的風扇 或鼓風機的左右方向兩外側，設置了朝向運送通路的中央 側送氣的定中心用的風扇或鼓風機。 〔發明效果〕 在該發明，由於是以來自於風扇或鼓風機的送氣來進 行上浮運送，而不需要壓縮機或槽體、或連結槽體與噴嘴 的配管，而能夠簡化上浮運送裝置的設備。並且也解除了 來自於壓縮機或噴嘴的噪音，由於不需要配管，所以容易 進行設備的增設或設計變更。而在上浮運送過程中所需要 的空氣流，可以藉由風扇或鼓風機產生。不需要高壓空氣 (3) 1276595 ，所以可以顯著減少運轉成本。 在第2發明，藉由改變通氣縫的方向，則可以準備上 浮用、推進用、方向轉換用的各種單元，藉由將其適當地 組合，藉由因應運送物的位置進行控制，則可以轉換運遂 方向。1276595 - (1) Technical Field of the Invention The present invention relates to an apparatus for transporting a transported object such as a liquid crystal substrate by air. [Prior Art] With the increase in size of liquid crystal glass substrates and the like, conventionally, the illegal operation of the cassette unit has been unreasonable. For example, if the size of the substrate is 2m X 2 m, the cassette or the robot arm used for operation will also be about 2mx2m, which will make the transport equipment huge. As a transport device that does not use a cassette, it is a floating transport device that considers the use of air. In the floating transport device, high-pressure air is generated in the compressor, stored in the tank, and floated from the plurality of nozzles toward the bottom surface of the transport object to cause the article to float. However, during the floating transport, the amount of air consumed is large. To supply high-pressure air from a large compressor to the tank, a large number of pipes are required to supply air to the nozzle. The noise is also high when high pressure air is ejected from the compressor or nozzle. [Problem to be Solved by the Invention] A basic problem of the present invention is to simplify the structure of the floating transport device, and it is not necessary to use a compressor, a pipe, an air tank, or the like for performing the floating transport. The additional problem in the second invention is to perform various operations other than straight forward of the transported object. The additional problem of the third and fourth inventions is to suppress the transport (2) (2) 1276595. The object is swung left and right or the direction is disordered, so that the transport is easy. [Means for Solving the Problem] According to the invention, a plurality of fans or air blowers that discharge air upward are arranged in a structured manner to constitute a transport path for the transported object, which is derived from the fan or the blower. An air floating device that floats the transport object. Preferably, a venting slit for adjusting the air supply direction is provided as a unit on the air outlet side of the fan or the blower, and a plurality of units in different air supply directions are combined, and the units are controlled by the position of the transported object. Freely transfer directions. It is preferable to provide a fan or a blower for propelling air which is supplied in the transport direction in the center of the transport path, and to provide a fan or a blower for floating upwards on both sides in the left-right direction and to float the fan for the above-mentioned floating A fan or a blower for centering that supplies air toward the center side of the transport path is provided on both outer sides of the blower in the left-right direction. [Effect of the Invention] In the present invention, since the air is supplied from the fan or the air blower to perform the floating transport, the compressor or the tank body or the piping connecting the tank body and the nozzle is not required, and the equipment of the floating transport apparatus can be simplified. Also, noise from the compressor or the nozzle is released, and since piping is not required, it is easy to add equipment or design changes. The air flow required during the floating transport can be generated by a fan or a blower. High pressure air (3) 1276595 is not required, so operating costs can be significantly reduced. According to the second aspect of the invention, by changing the direction of the venting slit, various units for the floating, propelling, and direction switching can be prepared, and by appropriately combining them, it is possible to switch by controlling the position of the transported object. Direction of movement.
在弟3、4發明’如果運送物朝左右擺動或方向錯亂 的話’則藉由來自於外側的定中心用的風扇或鼓風機的遂 氣’則可以修正運送物的位置或方向。由於推進用的風扇 或噴嘴是位於運送物的左右方向（寬度方向）的中央，所以 不容易從推進用的風扇或鼓風機產生改變運送物的方向或 使其朝左右偏離的力矩。 【實施方式】 以下顯示用來實施本發明的較佳實施例。 〔實施例〕 Φ 在第1圖〜第5圖，是顯示使用風扇或鼓風機的較佳 實施例。在第1圖，顯示上浮用單元2與推進用單元4的 例子’都內設有風扇10，在其筐體6、7的上部形成有吹 出□ 8、9。在上浮用單元2的情況，空氣的吹出方向例 如是朝向正上方。而在推進用單元4的情況，空氣的吹出 - 方向是朝向斜上方，是安裝有通氣縫12、13。 在單元2、4，是設置有風扇1 〇 ’在利用通氣縫1 2、 1 3進行吹出方向的調整以外，來自於風扇1 〇的送氣會到 -6 - (4) (4)1276595 達直線狀的吹出口 8、9，在筐體6、7與風扇1 0之間沒 有送氣通路沒有彎曲部。結果，從風扇1 〇的出口的風壓 損失，除了通氣縫1 2、1 3所造成的損失之外幾乎沒有。 而風扇10是各單元2、4各設置有例如1個’讓風量可獨 立進行控制。所傳送的空氣，是藉由風扇1 0將單元2、4 下側的空氣朝向上側送出，所以不需要配管或壓縮機、或 高壓空氣槽、噴嘴等。In the case of the younger brothers 3 and 4, if the article is swayed or slanted in the direction of the vehicle, the position or direction of the article of transport can be corrected by the enthalpy of the fan or blower for centering from the outside. Since the fan or the nozzle for propulsion is located at the center in the left-right direction (width direction) of the article to be transported, it is not easy to generate a torque for changing the direction of the object or the vehicle to the left and right from the fan or the blower for propulsion. [Embodiment] The following shows a preferred embodiment for carrying out the invention. [Embodiment] Φ In Figs. 1 to 5, a preferred embodiment using a fan or a blower is shown. In the first example, the fan 10 is provided in the example 'of the floating unit 2 and the propulsion unit 4, and the blowing ports 8 and 9 are formed in the upper portions of the casings 6, 7. In the case of the floating unit 2, the air blowing direction is, for example, directed upward. On the other hand, in the case of the propelling unit 4, the air blowing-direction is directed obliquely upward, and the venting slits 12, 13 are attached. In the units 2, 4, the fan 1 〇' is set to adjust the blowing direction by the venting slits 1, 2, and 3, and the air supply from the fan 1 会 is up to -6 - (4) (4) 1276595. In the shape of the air outlets 8, 9, there is no air passage between the casings 6, 7 and the fan 10, and there is no bent portion. As a result, the wind pressure loss from the outlet of the fan 1 几乎 was almost nothing except the loss caused by the venting slits 1, 2, and 13. On the other hand, the fan 10 is provided with, for example, one unit for each of the units 2 and 4, and the air volume can be independently controlled. The air to be sent is sent by the fan 10 to the air on the lower side of the units 2 and 4, so that no piping, a compressor, a high-pressure air tank, a nozzle, or the like is required.
風扇1 〇這裡是軸流風扇，其輸出能力以風壓換算是 0.1氣壓以下（l〇kPa以下），而也可取代風扇’用風壓爲 0.2氣壓以下的鼓風機，而最好是便宜且運轉所需要的能 量較少的風扇。單元2、4的表面尺寸，例如一邊是作成 5cmx5cm〜20cmx20cm左右’在實施例是作成表面爲 1 0 c m見方的略正方形，高度，則是用來設置通氣縫1 2、 1 3所需要的高度加上風扇1 〇的厚度。運送物也就是液晶 基板用的玻璃，例如是一邊爲1〜2m左右的長方形，質 量爲1〇 Kg左右，是沿著運送通路的左右方向（在水平面與 運送方向成直角的方向），排列5〜40個左右的單元2、4 ，在這些單元，有推進用、上浮用、定中心用等等的種類 ，藉由根據基板的位置來控制單元的風扇的開啓/關閉或 風量，則可精細地控制運送物的姿勢或速度。 在第2圖，顯示變形例的風扇單元20，22是可動通 氣縫，可以藉由沒有圖示的致動器來變更其方向，而伴隨 著朝正上方送氣作爲上浮用單元進行作動，或朝斜前方或 (5) (5)1276595 斜後方送氣作爲推進用或停止用單元進行作動。 單元2、4，雖然是沿著運送方向排列成直線狀，而 在直角於運送方向的方向，例如可相互交錯配置，將全體 配置成鋸齒狀。而單元2、4全體，是配置成格子狀，也 可藉由將上浮用單元2與推進用單元4相互交錯配置，以 各單元2、4爲單位配置成鋸齒狀也可以。而與運送方向 平行的單元的列與列之間的間隙則成爲導引通路1 5，當 藉由沒有圖示的導引器來導引基板時，是沿著導引通路 1 5使導引器移動。而間隙1 6，是用來讓單元2、4的設置 或維修動作容易進行的間隙，即使沒有特別設置也可以。 也可作成封住導引通路1 5或間隙1 6的底面，讓從單元2 、4吹出的空氣不會逸出。或者不封住導引通路1 5或間 隙1 6的底部，將從單元2、4吹出的空氣從該部分回收， 使其回到沒有圖示的風扇單元再進行供給，讓上浮用的空 氣循環而不會向外逸出。 在第3圖’是顯不在運送通路30的左右方向的單元 的配置。在運送通路30的中央部，設置有高速推進單元 3 2，例如在兩側設置有低速推進單元3 3、3 3。推進單元 3 2、3 3這裡總共有3列，而是1列或5列也可以。在設 置有3列以上時，則是例如在中央部設置1〜3列左右的 筒速推進單兀J 2 ’在其兩側各設置1〜3列左右的低速推 進單兀3 3。在低速推進單元3 3的兩外側，設置複數列上 浮用單元34，將空氣朝正上方送氣來使運送物上浮，在 其兩外側設置定中心單元36、36，將空氣朝向運送通路 -8- (6) (6)1276595 3 0的內側斜上方吹出。而在高速推進用單元3 2列、與低 速推進用單元3 3列之間，配置上浮用單元3 4列也可以’ 而在高速推進用單元32列或低速推進用單元33列之中也 可混有上浮用單元3 4。而定中心單元3 6、3 6，經常是配 置成較運送物40更偏向左右方向外側。38是導引器’是 在運送通路3 0側的表面配置緩衝材料，所以可防止運送 物超出運送通路3 0。而也可代替板狀的導引器3 8 ’設置 棒狀的導引器39，在其表面捲繞緩衝材料的話’則可避 免運送物的角部碰到沒有間隙的導引器3 8而受損。 在第4圖是顯示運送物40的左右方向的位置或方向 的矯正機構。是將用來保持左右方向的位置正確、將運送 物的方向保持爲正確的動作，稱作定中心動作。運送物 4 0在第 4圖的實線所示的狀態是正常狀態，例如其方向 變化成爲虛線狀態。則運送物4 0的右側會受到來自於定 中心單元的朝向運送通路內側的送氣，以該力量的力矩來 矯正姿勢的變化。當運送物朝左右方向偏離位置時，也可 同樣地藉由定中心單元來矯正位置偏離。 推進單元如第3圖所示，例如設置有3列，在其中央 設置有高速推進單元3 2。這裡用複數列的推進單元，如 果來自於各列的推進力不平衡的話，會成爲使運送物40 旋轉的原因。這裡是在運送通路3 0的中央部配置高速推 進單元3 2，在兩側配置低速推進單元3 3、3 3，所以中央 的高速推進單元3 2，不容易成爲改變運送物4 0的姿勢的 原因，所以可防止由於推進單元造成運送物4 0的姿勢變 -9- (7) 1276595 化。而當在左右的低速推進單元3 3、3 3之間推進力 勻時，雖然會成爲讓運送物4 0的姿勢變化的原因， 於是低速，所以其影響較小。 在桌5圖是顯不上浮運送裝置的設計。這裡是以 單元42把以運送單元41從圖下方朝上方運送的運送 變其運送方向90 °，以運送單元43將其從左邊朝右 送，以運送單元44再次改變運送方向，朝向運送單: 送出。46a〜46c是推進部，如上述是在高速推進單 兩側配置低速推進單元，4 7是定中心部，是排列著 的定中心單元的構造。4 8是停止部，是用來暫停以 單元42或運送單元44所運送的運送物。在各運送單 在適當的位置配置有運送物感應器49等，檢測運送 位置，將其輸入到控制部 5 0，因應運送物的位置， 單元的風扇的風量變化，或者藉由將風扇開啓/關閉 行上浮運送。在運送物感應器4 9，可以使用例如由 板的有無造成介電率的不同的感應器，或使用會檢測 基板所造成的超音波反射的感應器。各單元的風扇， 立於每個單元而進行控制，而也不需要個別控制所有 元，例如左右並排於運送方向的略相同位置的上浮單 將其作爲一個群組，用相同的時序進行導通/切斷控 可以。 並且在實施例中，雖然是將運送通路形成爲U ，而如果要作成朝向在第5圖的運送單元42的上方 運送物，朝向運送單元44的右側送出運送物，則可 不均 而由 運送 物改 邊運 ΐ 45 元的 上述 運送 元是 物的 使各 來進 於基 玻璃 是獨 的單 元， 制也 字型 送出 以使 -10- (8) (8)1276595 運送方向分歧。在這種情況，在運送單元4 2不使推進部 4 6 b作動，僅使推進部4 6 a作動，則朝向運送單元4 2的 上側分歧。藉由推進部4 6 a，在使運送物前進至停止部4 8 附近之後，使推進部46a停止，藉由來自於停止部48的 朝向第5圖下方的送氣來制動運送物，接著使推進部46b 作動的話，則可使運送方向改變9 0 °。將推進用單元的送 氣方向配置成圓弧狀的話，也可以使運送物旋轉，以通氣 縫來調整風扇的送氣方向，藉由配置複數種送氣方向不同 的單元，則能夠以各種路線來運送運送物。 5 2是過濾單元，使用潔淨室用的過濾單元，將淸淨 空氣供給到複數的上浮用單元或推進單元及定中心單元， 可防止在上浮運送過程污染運送物。而過濾單元5 2也可 以不設置。 〔圖式簡單說明】 第1圖是實施例的上浮運送裝置的上浮用單元與推進 用單元的顯示圖。 第2圖是示意性地顯示將通氣縫的方向作成可改變的 單元的剖面圖。 第3圖是實施例的運送通路的朝向左右方向的單元的 配置的顯示圖。 第4圖是實施例的運送物的姿勢的矯正機構的顯示圖 〇 第5圖是實施例的上浮運送裝置的設計的顯示圖。 _ 11 - 1276595 Ο) 【圖號說明】Fan 1 〇 This is an axial fan. Its output capacity is 0.1 psi or less (l kPa or less) in terms of wind pressure. It can also replace the fan's air blower with a wind pressure of 0.2 or less. It is best to operate cheaply. A fan that requires less energy. The surface dimensions of the units 2 and 4 are, for example, about 5 cm x 5 cm to 20 cm x 20 cm on one side. In the embodiment, the surface is made of a square of 10 cm square, and the height is the height required for setting the venting slits 1, 2, and 13. Plus the thickness of the fan 1 〇. The transported object is a glass for a liquid crystal substrate, for example, a rectangle having a side of about 1 to 2 m and a mass of about 1 〇Kg, and is arranged in the left-right direction of the transport path (a direction perpendicular to the transport direction in the horizontal plane). ~40 units 2, 4, in these units, there are types of propulsion, floating, centering, etc., by controlling the opening/closing or air volume of the unit according to the position of the substrate, it can be fine Control the posture or speed of the transport. In the second embodiment, the fan units 20 and 22 according to the modification are movable vents, and the direction can be changed by an actuator (not shown), and the air is supplied to the upper floating unit as the upper floating unit, or Inclined front or (5) (5) 1272595 Aspirating air at the rear is used as a propulsion or stop unit. The units 2 and 4 are arranged linearly in the transport direction, and are arranged at right angles to the transport direction, for example, so as to be arranged in a staggered manner. On the other hand, the units 2 and 4 are arranged in a lattice shape, and the floating unit 2 and the propelling unit 4 may be alternately arranged, and may be arranged in a zigzag manner in units of the units 2 and 4. The gap between the columns and columns of the cells parallel to the transport direction becomes the guide path 15 which is guided along the guide path 15 when the substrate is guided by an introducer not shown. Move. The gap 66 is a gap for facilitating the setting or maintenance operation of the units 2, 4, even if it is not particularly provided. It is also possible to seal the bottom surface of the guide passage 15 or the gap 16 so that the air blown from the units 2, 4 does not escape. Alternatively, the bottom of the guide passage 15 or the gap 16 is not sealed, and the air blown from the units 2, 4 is recovered from the portion, and returned to the fan unit (not shown) to be supplied, and the air for floating is circulated. It will not escape outward. In Fig. 3', the arrangement of the cells in the left-right direction of the transport path 30 is shown. At the central portion of the transport path 30, a high-speed propulsion unit 32 is provided, for example, low-speed propulsion units 3 3, 3 3 are provided on both sides. The propulsion unit 3 2, 3 3 has a total of 3 columns, but 1 column or 5 columns. When three or more rows are provided, for example, a tube speed pushing unit J 2 ' of about 1 to 3 columns is provided in the center portion, and a low-speed pushing unit 3 3 of about 1 to 3 columns is provided on both sides thereof. On both outer sides of the low-speed propulsion unit 33, a plurality of floating units 34 are provided, and the air is supplied upward to the air to float the objects, and the centering units 36 and 36 are disposed on both outer sides thereof to direct the air toward the conveying path -8- (6) (6) 1272595 3 0 is blown out from the inside. Further, between the high-speed propulsion unit 32 and the low-speed propulsion unit 3 3, the floating unit 34 may be arranged in the column of the high-speed propulsion unit 32 or the low-speed propulsion unit 33. The floating unit 34 is mixed. The centering units 3 6 and 3 6 are often arranged to be more outwardly oriented in the left-right direction than the transport object 40. 38 is that the guide er is provided with a cushioning material on the surface of the transport path 30 side, so that the transport object can be prevented from exceeding the transport path 30. Instead of the plate-shaped guides 38', a rod-shaped guide 39 is provided, and if the cushioning material is wound on the surface, the corner of the article can be prevented from hitting the guide 38 without the gap. Damaged. Fig. 4 is a correction mechanism for displaying the position or direction of the transport object 40 in the left-right direction. It is an operation for keeping the position in the left-right direction correct and keeping the direction of the conveyed material correct, and is called a centering operation. The state shown by the solid line in Fig. 4 is a normal state, for example, the direction change is a broken line state. Then, the right side of the transport object 40 receives air from the centering unit toward the inside of the transport path, and the change in posture is corrected by the moment of the force. When the object is displaced from the left and right direction, the positional deviation can also be corrected by the centering unit. As shown in Fig. 3, the propulsion unit is provided, for example, in three rows, and a high-speed propulsion unit 32 is provided in the center thereof. Here, the plurality of propulsion units are used, and if the propulsive forces from the respective columns are unbalanced, the propeller 40 is rotated. Here, the high-speed propulsion unit 32 is disposed at the center of the transport path 30, and the low-speed propulsion units 3 3 and 3 3 are disposed on both sides. Therefore, the central high-speed propulsion unit 32 does not easily change the posture of the transport object 40. The reason is that it is possible to prevent the posture of the transport object 40 from being changed by the propulsion unit by -9-(7) 1276595. On the other hand, when the thrust is moderately spread between the left and right low speed propulsion units 3 3 and 3 3 , the posture of the transport object 40 is changed, so that the speed is low, so the influence is small. At the table 5, the design of the floating transport device is not shown. Here, the transport by the transport unit 41 from the lower side of the figure is changed to the transport direction by 90°, and the transport unit 43 transports it from the left to the right, and the transport unit 44 changes the transport direction again, toward the transport order: Send it out. 46a to 46c are propulsion units. As described above, the low-speed propulsion unit is disposed on both sides of the high-speed propulsion unit, and the seventh centering unit is a centering unit and is a structure of the centering units arranged. 4 8 is a stop portion for suspending the transported object carried by the unit 42 or the transport unit 44. The transport sensor 49 or the like is placed at an appropriate position on each transport order, and the transport position is detected and input to the control unit 50. The air volume of the unit fan changes depending on the position of the transported object, or the fan is turned on/ Close the line to float. In the carrier sensor 49, for example, a sensor which causes a difference in dielectric ratio due to the presence or absence of the board, or an inductor which detects ultrasonic reflection caused by the substrate can be used. The fan of each unit is controlled by each unit, and it is not necessary to individually control all the elements. For example, the floating order of the same position, which is arranged side by side in the transport direction, is used as a group and is turned on with the same timing/ Cut off the control. Further, in the embodiment, the transport path is formed as U, and if the transport object is to be transported toward the transport unit 42 of Fig. 5 and the transport object is transported toward the right side of the transport unit 44, the transport object may be unevenly distributed. The above-mentioned transporting element of the 45-yuan change is the unit that makes each of the base glass into a single unit, and the system is also sent out so that the direction of the -10- (8) (8) 1276595 is different. In this case, the transport unit 42 does not move the propulsion unit 46b, and only the propulsion unit 46a is actuated, and then the upper side of the transport unit 42 is branched. After the propelling unit 4 6 a advances the transported object to the vicinity of the stopping portion 48, the propelling portion 46a is stopped, and the transported object is braked by the air supply from the stop portion 48 toward the lower side of the fifth drawing, and then the propulsion is advanced. When the portion 46b is actuated, the transport direction can be changed by 90°. When the air supply direction of the propulsion unit is arranged in an arc shape, the transported object can be rotated, the air supply direction of the fan can be adjusted by the air vent, and a plurality of units having different air supply directions can be transported by various routes. Things. 5 2 is a filter unit that supplies clean air to a plurality of floating units, propulsion units, and centering units using a filter unit for a clean room to prevent contamination of the transported material during the floating transport process. The filter unit 52 can also be omitted. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view showing the display unit and the propulsion unit of the floating transport apparatus of the embodiment. Fig. 2 is a cross-sectional view schematically showing a unit in which the direction of the vent slit is changed. Fig. 3 is a view showing the arrangement of the cells in the left-right direction of the transport path of the embodiment. Fig. 4 is a view showing the correction mechanism of the posture of the article of the embodiment. Fig. 5 is a view showing the design of the floating conveyor of the embodiment. _ 11 - 1276595 Ο) [Description of the figure]
2 :上浮用單元 4 :推進用單元 6、7 :筐體 8、9 :吹出口 1 〇 :風扇 12、1 3 :通氣縫 15 :導引通路 1 6 :間隙 2 0 :風扇單兀 22 :可動通氣縫 3 0 :運送通路2 : Floating unit 4 : Propulsion unit 6 , 7 : Housing 8 , 9 : Outlet 1 〇 : Fan 12 , 1 3 : Ventilation slit 15 : Guide passage 1 6 : Clearance 2 0 : Fan unit 22 : Movable venting seam 3 0 : transport path
3 2 :高速推進單元 3 3 :低速推進單元 34 :上浮用單元 3 6 :定中心單元 38、39 :導引器 4 0 :運送物 41〜45:運送單元 46a〜46c:推進部 4 7 ·疋中心部 4 8 :停止部 4 9 :運送物感應器 -12- (10)1276595 5 0 :控制部 5 2 :過濾單元3 2 : high-speed propulsion unit 3 3 : low-speed propulsion unit 34 : floating unit 3 6 : centering unit 38 , 39 : guide 4 0 : transporting objects 41 to 45 : transport units 46 a to 46 c : propulsion unit 4 7 ·疋 center portion 4 8 : stop portion 4 9 : transport object sensor -12- (10) 1296595 5 0 : control unit 5 2 : filter unit
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