CN101020539B - Suspending conveyer - Google Patents

Abstract

The suspending conveyer for conveying semiconductor chip, liquid crystal glass or other plate articles includes one blower and filter unit below the conveying path. The blower and filter unit jets airflow to the conveyed article in the conveying path for the conveyed article to be suspended while being shifted in certain direction and surrounded by the clean airflow.

Description

Suspending conveyer

Technical field

The present invention relates to a suspending conveyer, especially for the suspending conveyer in quartz conductor and the liquid crystal panel manufacturing.

Background technology

Development along with semi-conductor industry, in manufacturing process, clean level to processed semiconductor wafer requires more and more higher, and in the course of processing, usually need transferring semiconductor chip, for this reason, it is general in traditional technology that what adopt is to utilize the injection of pure air to make to be transmitted article to be under the suspended state to transmit, accompanying drawing 1 has provided the method for the suspension semiconductor wafer in the traditional handicraft: the porous body 53 that is provided with pory pottery or metal quality on plenum chamber 52, pressure air from Air compressor 51 enters into plenum chamber 52, again by the spouting formation fluid film 54 in hole on the porous body 53, make that being transmitted article 55 is suspended state, though adopt this method can reach the effect of suspension wafer, but porous body 53 exists the loss of pressure height, and the easy shortcoming of stopping up, thereby make and changed by the hoverheight of suspension article 55; And, also need to be equipped with pressure devices such as Air compressor, so airline is also very complicated for pure air is provided.In addition, anticipate as shown in Figure 2, also be provided with the roller 57 that is used to lead in the both sides that are transmitted article 55, when being transmitted article 55 and above blower fan filtering unit 56, passing through, if transmission distance is very long, and when being transmitted article and being elements such as glass, roller 57 tends to scratch the end face of glass elements.

Summary of the invention

Purpose of the present invention is exactly in order to overcome above-mentioned shortcoming, a kind of suspending conveyer is provided, it can be so that constant by the hoverheight of suspension article, can around quilt suspension article, form clean air barrier, thereby and can produce directional tagging the end face air blowing that is transmitted article.

In order to achieve the above object, the technical solution used in the present invention is: a kind of suspending conveyer, be used for the tabular article that are transmitted such as semiconductor wafer and liquid-crystalline glasses are implemented the transmission that suspends, it comprises the fan filter unit that is arranged on the transmission path below, this blower fan filtering unit is transmitted the article jet-stream wind on the transmission path, described jet-stream wind makes that not only being transmitted article suspends, and make and moved along certain orientation by the suspension article, described blower fan filtering unit can also be transmitted article in the process that suspension is moved, and the clean windstream of ejection surrounds and is transmitted article.

Be provided with flase floor or R-joining plate on the top of described fan filter unit.

Described suspending conveyer also comprises filter, and described filter is converted into for thin filter paper and is continuous v-shaped structure, and one side of described v-shaped structure is than an other length of side, and the limit of continuous v-shaped structure is that length is staggered.

Described suspending conveyer also comprises the guard shield that surrounds described fan filter unit, transmission path and be transmitted the article surrounding space.

The present invention has following advantage:

Be transmitted article below be provided with blower fan filtering unit, blower fan filtering unit is towards being transmitted the article jet-stream wind, make that not only being transmitted article suspends, but also along the moving direction jet-stream wind that is transmitted article, make that being transmitted article moves uniformly and stably, simultaneously, this blower fan filtering unit can also eject clean gas flow and surround and to be transmitted article, prevents to be transmitted in the moving process of article contaminated.

Description of drawings

Accompanying drawing 1 is traditional air transfer schematic representation of apparatus;

Accompanying drawing 2 is the structural representation of traditional roller guidance mode;

Accompanying drawing 3 is a schematic perspective view of the present invention;

Accompanying drawing 4 is the section drawing of blower fan filtering unit;

Accompanying drawing 5 is the instruction diagram of the type of transmission of employing R-joining plate;

Accompanying drawing 6 is the scheme drawing of the type of transmission of the oblique filter paper high efficiency particle air filter of employing;

Accompanying drawing 7 is the air-pollution control scheme drawing of transmission space;

Accompanying drawing 8 is the sketch that is provided with the blower fan filtering unit of pressure differential indicator;

Wherein: 1, suspending conveyer; 2, be transmitted article; 3, blower fan filtering unit; 4, support; 5, blower fan; 6, high efficiency particle air filter; 7, V-arrangement space; 8, opening; 9; Filter paper; 10, ball bearing of main shaft; 11, R-joining plate; 12, slit; 16, end stone; 17, middle link stopper; 18, baffle plate; 19, guard shield; 20, pure air; 21, pressure differential indicator.

The specific embodiment

Below in conjunction with accompanying drawing embodiments of the present invention are described.

As 3,4 signals of accompanying drawing, on support 4, length is being arranged several blower fan filtering units 3 continuously according to the rules, also direction transmission glass substrate, wafer etc. are transmitted article 2 according to the rules to be used for carrying, inside at described blower fan filtering unit 3, be provided with the blower fan 5 that is used for aspirated air beyond the blower fan filtering unit 3, and be used for blower fan 5 suction airs are filtered, thus the high efficiency particle air filter 6 that produces pure air and beyond blower fan filtering unit 3, spray.

Above blower fan filtering unit 3, be provided with punching web plate (not showing among the figure), produce by boasting from the punching web plate by the pure air of inner high efficiency particle air filter 6.In the both sides of blower fan filtering unit 3, along the transmission direction that is transmitted article, be provided with ball bearing of main shaft 10, described ball bearing of main shaft 10 is used to prevent to be transmitted article 2 and comes off from blower fan filtering unit 3.

Anticipate as shown in Figure 5, above blower fan filtering unit 3, be provided with a plurality of R-joining plates 11, the slit 12 that between two adjacent R-joining plates 11, has same widths, its direction and the cross-shaped attitude of transmission direction that is transmitted article 2, the pure air that blows out from slit 12 and be transmitted between the article 2 and have certain included angle moves along certain orientation thereby can promote to be transmitted article 2.

Also can change the folding angle that places blower fan filtering unit 3 in-to-in high efficiency particle air filters 6, when come making air by high efficiency particle air filter 6 flow out and be transmitted between the article 2 and have certain included angle, accompanying drawing 6 is section drawings of high efficiency particle air filter 6, described high efficiency particle air filter 6 is to be converted into continuous v-shaped structure with very thin filter paper, and the air that filter paper can filter by this v-shaped structure makes it to become clean; Generally speaking, the both sides equal in length of above-mentioned v-shaped structure, but, if be converted into as shown in Figure 5 meaning have the v-shaped structure of two different edge lengths the time, the centre line L in V-arrangement space 7 is horizontal by heeling condition, the distance on the both sides of a bit arriving v-shaped structure arbitrarily on the described centre line L equates, the pure air of the opening 8 by high efficiency particle air filter 6, the direction of illustrating as arrow A in the accompanying drawing 6, long side direction towards v-shaped structure flows out obliquely, promotes towards the right side thereby will be transmitted article 2.

As previously mentioned, according to the transmission length of regulation, connect and use several blower fan filtering units 3, still, sometimes also need to be transmitted the situation that article must stop in the transmission way, and, also must stop at the end that transmits, therefore, on the two ends of the transmission route that blower fan filtering unit 3 is constituted and middle appropriate location, be provided with end stone 16 and middle link stopper 17, block is inserted to being transmitted route with forms such as Electromagnetic bolts, just stops when article 2 are in contact with it when being transmitted.

In addition, for make blower fan filtering unit 3 around become the cleaningization space, anticipate as shown in Figure 7, the top of blower fan filtering unit 3 is provided with baffle plate 18, and, the most handy guard shield 19 entirely is surrounded blower fan filtering unit 3 and transmission path, owing to adopted this structure, the promotion of flowing out from blower fan filtering unit 3 is transmitted the pure air 20 of article 2 from outwards flowing out between baffle plate 18 and the guard shield 19, make extraneous dirty air can not enter in the guard shield 19, polluted by outside air thereby avoided being transmitted article 2.

For the hoverheight that is transmitted article 2 is controlled, in blower fan filtering unit 3, be provided with pressure differential indicator 21, the pure air that described pressure differential indicator 21 is arranged on blower fan filtering unit 3 blows out position and the below that is transmitted article 2, pressure differential indicator 21 can be measured the difference of pressure P that is transmitted between article surface and the high efficiency particle air filter surface, by measuring and adjustment pressure difference P, can the hoverheight h that be transmitted article 2 be controlled.

Pass between difference of pressure P and the hoverheight h is:

$P=\frac{\mathrm{Mg}*\mathrm{\ρ}}{h}---\left(1\right)$

Pass between weight Mg and the wind speed v is:

$\frac{\mathrm{Mg}}{A}=\frac{{\mathrm{\ρv}}^2}{2}---\left(2\right)$

Here: P represents difference of pressure, the Pa of unit,

M is the quality that is transmitted article 2, unit K g,

G is an acceleration due to gravity, the m/s of unit ²,

A is the face area that is transmitted article 2, the m of unit ²,

ρ is a density of air, units/m ²,

The mean wind speed of v for upwards blowing out, the m/s of unit,

By (1) formula as can be known, under same weight condition (promptly when Mg one timing), difference of pressure P and hoverheight h are inversely proportional to, and by (2) formula as can be known, under the same area condition (promptly when A is certain), wind speed v is directly proportional with the weight of support.

The foregoing description only is explanation technical conceive of the present invention and characteristics; its purpose is to allow the personage that is familiar with this technology can understand content of the present invention and is implemented; can not limit protection scope of the present invention with this; all equivalences that spirit is done according to the present invention change or modify, and all should be encompassed in protection scope of the present invention.

Claims (3)

1. suspending conveyer, be used for the tabular article that are transmitted that comprise semiconductor wafer and liquid-crystalline glasses are implemented the transmission that suspends, it is characterized in that: described suspending conveyer comprises the fan filter unit that is arranged on the transmission path below, the article that are transmitted that described fan filter unit is used on transmission path spray pure air stream, utilize pure air stream to surround simultaneously and be transmitted article, filter in the described fan filter unit is converted into for thin filter paper and is continuous v-shaped structure, one side of described v-shaped structure is than an other length of side, and the limit of continuous v-shaped structure is that length is staggered.

2. suspending conveyer as claimed in claim 1, it is characterized in that: be provided with flase floor or R-joining plate on the top of described fan filter unit, air-flow that from the slit of flase floor or R-joining plate, sprays and the cross-shaped attitude of transmission direction that is transmitted article.

3. suspending conveyer as claimed in claim 1 is characterized in that: described suspending conveyer also comprises the guard shield that surrounds described fan filter unit, transmission path and be transmitted the article surrounding space.

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