JP2005075543A - Transport device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a transport device, switching the transport direction of transported article at a comparatively simply constituted switching transport part while the device includes a thrust applying means for applying thrust to the end in the lateral width direction of the transported article. <P>SOLUTION: This transport device includes: a blower type support means for feeding clean air to support the transported article 2 in the horizontal attitude or the substantially horizontal attitude in non-contact state; and the thrust applying means 34A. 34B for applying thrust in the transport direction to the transported article 2. The transport direction of the transported article 2 is switched so that the transported article 2 transported in the main transport direction X at a main thrust applying part 34Baa constructed in one side drive type in which thrust is applied to one end part in the lateral width of the transported article 2 in the main transport direction X is transported in the sub-transport direction where the main thrust applying means 34Ba is not provided at a sub-thrust applying part 34Bd constituted in one drive type in which the thrust in the sub-transport direction Y is applied to one end part in the longitudinal width of the transported article 2. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention supplies the clean air toward the lower surface of the conveyed product, and supports the conveyed product in a non-contact state in a horizontal posture or a substantially horizontal posture, and is supported by the blower-type supporting device. The present invention relates to a transport device provided with propulsive force applying means for applying a propulsive force in the transport direction to the transported object.

Such a transport device is used for transporting a transported object such as a glass substrate for liquid crystal. In a conventional transport apparatus, the propelling force applying means is arranged at both ends in the width direction perpendicular to the transport direction of the transported object. It is configured to be a double-sided drive type that applies a propulsive force to the side, and is configured to convey a conveyed product in a horizontal posture or a substantially horizontal posture (see, for example, Patent Document 1).
In addition, in a conventional transport device that switches the transport direction of a transported object, an upstream transport unit that transports the transported object in the main transport direction, and a downstream side that transports the transported object in a sub-transport direction that intersects the main transport direction. The transfer unit and a switching transfer unit that switches the transfer direction of the transfer object transported to the transport lower end of the upstream transport unit from the main transport direction to the sub transport direction and delivers it to the transport upper end of the downstream transport unit There was something that was equipped with.
The switching conveyance unit includes a holding mechanism that holds the conveyed product, a rotation driving unit that rotates the holding mechanism around the vertical axis, and an air cylinder that raises and lowers the holding mechanism. The transported material transported to the lower end is held by the holding mechanism, the holding mechanism is raised by the air cylinder, and rotated around the vertical axis by the rotation drive unit to transport the transported material downstream. It is configured to switch the transport direction from the main transport direction to the sub transport direction so as to be positioned above the section, lowered by the air cylinder, and transferred to the transport upper end of the downstream transport section ( For example, see Patent Document 2.)

JP 2002-321820 A JP 2000-62951 A

In the above-mentioned Patent Document 1, since the propulsive force is applied to both ends in the width direction orthogonal to the main conveyance direction in the conveyed product by the propulsive force applying means, the propulsion positioned on both sides in the width direction of the conveyed item. The force imparting means becomes an obstacle, and the conveyed product cannot be conveyed in the sub conveying direction intersecting the main conveying direction.
Further, Patent Document 2 includes a holding mechanism that holds a conveyed product in the switching conveyance unit, an air cylinder that raises the holding mechanism, and a rotation drive unit that rotates the holding mechanism. In the horizontal direction perpendicular to the main transport direction, the mechanism is located on the downstream transport unit side, and is configured to switch the transport direction of the transported object from the main transport direction to the sub transport direction and deliver it to the downstream transport unit. However, the switching mechanism must be equipped with a holding mechanism, an air cylinder, a rotational drive unit, etc., and transport the transported object beyond the mechanism located on the downstream transport unit side in the lateral width direction. It was complicated.

  An object of the present invention is to provide a propulsive force applying means for applying a propulsive force to an end portion in the lateral width direction of a conveyed product, but with a relatively simple configuration of a switched conveying unit. It is in the point which provides the conveying apparatus which can switch a conveyance direction.

The transport apparatus of the present invention supplies clean air toward the lower surface of the transported object, and supports the transported object in a non-contact state in a horizontal posture or a substantially horizontal posture, and the blower support unit. A conveying device provided with a propulsive force applying means for applying a propulsive force in the conveying direction to the conveyed product supported by
The first characteristic configuration includes an upstream conveyance unit that conveys the conveyance object in a main conveyance direction, a downstream conveyance unit that conveys the conveyance object in a sub conveyance direction that intersects the main conveyance direction, and the upstream conveyance unit. A switching conveyance unit that switches the conveyance direction of the conveyance received from the main conveyance direction to the sub conveyance direction and delivers it to the downstream conveyance unit,
The switching conveyance unit is a one-side drive type that applies a propulsive force in the main conveyance direction to a lateral width one end portion on the side away from the downstream conveyance unit in the lateral width direction orthogonal to the main conveyance direction in the conveyed product. Propulsive force in the sub-transport direction with respect to the configured main propelling force imparting section and the front-rear width end portion on the side away from the upstream-side transport section in the front-rear width direction orthogonal to the sub-transport direction of the conveyed product A sub-propulsion force applying unit configured to be applied to the one-side drive system, and the sub-conveyed material is transferred in the main transport direction with the propulsive force applied by the main propelling force applying unit. The present invention is characterized in that it is configured to switch the transport direction of the transported object so that a propelling force is applied by the imparting unit and transported in the sub transport direction.

  That is, the transported material is transported in the main transport direction by the upstream transport unit and is transferred to the switching transport unit. The switching transport unit transfers the transported product delivered from the upstream transport unit to the downstream transport device by switching the transport direction of the transported product from the main transport direction to the sub transport direction. Then, the downstream side transport device transports the transported material delivered from the switching transport unit in the sub transport direction.

The switching transport unit is provided with a main propulsive force applying means, and the main propulsive force applying means is provided at one end of the lateral width on the side away from the downstream transport unit in the lateral width direction orthogonal to the main transport direction of the conveyed product. On the other hand, it is configured as a one-side drive type that imparts a propulsive force in the main transport direction. Therefore, there is no propulsive force applying means on the side where the downstream conveyance unit in the lateral width direction of the conveyed product is located, and the conveyed product is movable to the side where the downstream conveyance unit is located in the lateral width direction.
Further, the switching transport unit is also provided with a sub-propulsion force applying means, and the sub-propulsion force applying means is one end of the front-rear width on the side away from the upstream-side transport unit in the front-rear width direction orthogonal to the sub-transport direction of the conveyed product. It is configured as a one-side drive type that imparts a propulsive force in the sub-transport direction to the part. Therefore, there is no propulsive force imparting means on the side where the upstream conveyance section in the front-rear width direction of the conveyed product is located, and the conveyance object is movable from the side where the upstream conveyance unit is positioned in the front-rear width direction. .

  That is, the sub-propulsive force imparting unit is configured to impart propulsive force to the lateral width one end portion on the side away from the upstream conveying unit in the front-rear width direction orthogonal to the sub-conveying direction of the conveyed product. When the conveyed product is conveyed in the main conveying direction by the main propelling force applying unit, the configuration is obstructed by the configuration in which the propelling force is applied to the other end portion of the front and rear width opposite to the one end portion of the front and rear width of the conveyed item. Can be conveyed without being transferred to the auxiliary propulsion force applying unit. In addition, since the main propulsive force imparting portion is configured to impart propulsive force to the lateral width one end portion on the side away from the downstream conveying portion in the lateral width direction orthogonal to the main transport direction in the conveyed product, When transporting a transported object in the sub-transport direction in the sub-propelling force applying unit, transporting without being obstructed by the configuration that applies a propulsive force to the other width end opposite to the width one end of the transported object Can be transported downstream in the sub-transport direction.

  Therefore, while having a propulsive force imparting means for imparting a propulsive force to the end in the lateral width direction with respect to the conveyed product, the main propulsive force imparting portion in the propulsive force imparting means is Constructed in a single-sided drive system that imparts propulsive force in the main conveying direction to the lateral width one end on the side away from the downstream conveying unit, and the auxiliary propulsive force applying unit in the propelling force applying means is upstream in the front-rear width direction of the conveyed product By constructing a one-side drive type that applies propulsive force in the sub-conveying direction to the front-rear width end on the side away from the side transport unit, the lateral width other end on the opposite side of the lateral width end and the front-rear width one end Since a mechanism for applying a propulsive force to the other side of the opposite front-rear width is not required, a mechanism for applying a propulsive force to the other end of the lateral width or the other end of the front-rear width is not required. Propulsion is applied to the end side and the other side of the front / rear width No need to convey the conveyed object beyond that mechanism. Therefore, it is possible to provide a transport device that can configure the switching transport unit relatively simply.

  In addition to the first feature configuration described above, the second feature configuration is configured such that the sub-propulsion force applying unit includes a contact-type sub-drive unit that supports the lower surface of the transported object and applies a propulsive force, In addition, it is configured to be able to ascend and descend to a support position for supporting the conveyed product in contact with the sub-driving unit and a retreat position retracted downward to avoid contact between the conveyed product and the sub-driving unit. It is characterized by.

  That is, since the sub-propulsive force applying portion is configured to be movable up and down to the support position and the retracted position, the main propulsive force applying means can generate the propulsive force by positioning the sub-propulsive force applying portion at the retracted position. The transported material that is applied and transported in the main transport direction does not come into contact with the drive unit in the sub-propulsion force imparting unit, so that the transported material can be prevented from being damaged. Then, when transporting the transported object with the sub-propulsion force applying means, the sub-propulsion force applying unit is raised to the support position, thereby supporting the lower surface of the transport object in contact with the sub-drive unit of the sub-propulsion force applying unit. The conveyed product can be conveyed while being conveyed.

  Therefore, by supporting the conveyed product in cooperation with the sub-propulsive force applying means and the blower type supporting means, the conveyed product can be conveyed in the auxiliary conveying direction while supporting the conveyed item in a more stable state, and When transporting the transported object in the main transport direction, it is possible to avoid contact between the transported object and the sub-driving unit in the sub-propulsion force applying unit, so that the transported object can be transported smoothly while avoiding damage to the transported object. Can do.

  In the third feature configuration, in addition to the second feature configuration, the switching transport unit can apply a propulsive force in the direction opposite to the main transport direction to the transported object in the main propulsion force applying unit, The sub-propulsive force imparting unit is configured to be able to impart a propulsive force to the transported object in a direction opposite to the sub-transport direction, and the transport direction of the transported object received from the downstream transport unit is changed from the sub-transport direction. It is also configured to switch to the main conveyance direction and deliver it to the upstream conveyance unit, and the main propulsive force applying unit includes a contact-type main drive unit that supports and supports the lower surface of the conveyed object to apply a propulsive force. It is configured to be movable up and down to a support position for contacting and supporting the conveyed product by the main drive unit and a retreat position retracted downward to avoid contact between the conveyed product and the main drive unit. It is characterized in that it is configured.

  That is, the main propelling force applying unit applies a propulsive force to the conveyed product in the main conveying direction, and the auxiliary propelling force applying means applies the propelling force to the conveyed item in the sub conveying direction. Can be transported in the forward direction from the upstream transport section side to the downstream transport section side, and a propulsive force is applied to the transported object in the direction opposite to the main transport direction at the main propulsion force imparting section. Then, by applying a propulsive force to the transported object in the direction opposite to the sub-transport direction by the sub-propulsion force applying means, the transport object is transported in the reverse direction from the downstream transport unit side to the upstream transport unit side. Can be transported, and the usability of the transport device is improved.

  In addition, since the main propulsive force applying portion is configured to be movable up and down between the support position and the retracted position, the auxiliary propulsive force applying means can provide the propulsive force by positioning the main propelling force applying portion at the retracted position. The transported object that is applied and transported in the direction opposite to the sub-transport direction does not come into contact with the drive unit in the main propelling force imparting unit, and the transported object is prevented from being damaged even when transported in the reverse direction. be able to. When transporting the transported object by the main propelling force applying means, the lower surface of the transported object is contact-supported by the main driving unit in the main propelling force applying part by raising the main propelling force applying part to the support position. The conveyed product can be conveyed while being conveyed.

  Therefore, by supporting the transported object in cooperation with the main propelling force applying means and the blower support means, the transported object can be supported in a more stable state, and the transported object can be transported smoothly in the main transport direction. In addition, when the conveyed product is conveyed in the direction opposite to the main conveying direction, it is possible to avoid contact between the conveyed product and the sub-driving unit in the main propelling force applying unit.

  In addition to any one of the first to third feature configurations described above, the fourth feature configuration is in contact with the side surface of the lateral width one end side to which the propulsive force is applied in the main propulsion force applying portion of the conveyed product. And a main receiving portion for receiving the conveyed product moving in the lateral width direction, and a side surface on the side of the one end portion of the front and rear width to which a propulsive force is applied by the sub-propulsive force applying portion of the conveyed product. And a secondary receiving portion for receiving the conveyed product moving in the front-rear width direction, wherein the blower-type support means applies the propulsive force to the conveyed product by the main propulsive force applying portion. A main conveying posture that is inclined such that the other width side in the horizontal width direction is located above the side, and one end side in the front-rear width direction in which a propulsive force is applied to the conveyed product by the sub-propulsive force applying unit. The other side of the front-rear width in the front-rear width direction is positioned above Cormorant characterized that it is the attitude capable of changing the posture to become a sub-carrier for posture tilted.

That is, when transporting the transported object in the main transport direction, the blowing support means is set to the main transport posture, and the transported object is placed in the lateral width direction from the lateral width one end side to which the propulsive force is applied by the main propelling force applying means. By supporting in an inclined position so that the other width side is positioned at the upper side, the transported object is given a propulsive force obliquely downward by the weight of the transported object, and moves downward diagonally along the tilt of the transported object. However, it is possible to catch the downward movement of the transported object when the main receiving part comes into contact with the side surface of the transported object.
Also, when transporting the transported object in the sub-transport direction, the front-and-rear width is greater than the front-rear width one end side where the propelling force is applied to the transported object by the sub-propulsion force applying means with the blowing type support means as the sub-transport posture. By supporting in an inclined posture so that the other end side in the front-rear width direction is positioned upward, the transported object is given a propulsive force obliquely downward due to the weight of the transported object, and is tilted forward and backward along the tilt of the transported object. However, it is possible to catch the movement of the conveyed item in the obliquely downward direction in the front-rear direction when the auxiliary receiving portion contacts the side surface of the conveyed item.

  Therefore, when transporting the transported object in the main transport direction, the main catching part restricts the movement of the transported object in the laterally oblique downward direction, and when transporting the transported object in the sub-transport direction, Since the sub-accepting part can regulate the downward movement of the object, the movement of the conveyed product to the other side of the lateral width and the movement to the other side of the front and rear width can be made difficult to move by the weight of the conveyed object. When the conveyed product is conveyed, the conveyed product is less likely to be displaced or inclined in the lateral width direction, and the conveyed product can be conveyed smoothly.

  In addition to any one of the first to fourth feature configurations described above, the fifth feature configuration has a lateral width opposite to the lateral width one end portion to which a propulsive force is applied in the main propulsive force imparting portion of the conveyed product. The front-rear direction in which a propulsive force is applied by a main restricting portion that contacts the side surface on the other end side and restricts movement of the conveyed product in the lateral width direction and the sub-propulsive force applying portion of the conveyed product A sub-restricting part that contacts the side surface on the front and rear other end side opposite to the width one end part side and restricts the movement of the conveyed product in the front-rear width direction is provided, and the main restriction part is Located in the transport path of the transported object transported in the sub-transport direction, retracted from the working position contacting the side surface on the other side of the lateral width and the transport path of the transported object transported in the sub-transport direction The sub-regulator is configured to freely change a position to a retreat position, and the sub-regulator is configured to move a conveyance object conveyed in the main conveyance direction. It is configured to be able to change its position between an operation position located on the feeding path and contacting the side surface on the other end side of the front-rear width and a retreat position retracted from the transport path of the transported object transported in the main transport direction. It is characterized by that.

That is, when transporting a transported object in the main transport direction, the main restricting portion is moved to the operating position by moving the main restricting portion to the working position so that the transported object moves away from the main propulsive force applying means in the lateral width direction. Can be restricted. When transporting a transported object in the sub-transport direction, the main restricting portion is moved to the retracted position so as not to interfere with transporting the transported object in the sub-transport direction.
In addition, when transporting the transported object in the sub-transport direction, the sub-regulator is moved to the working position so that the sub-control part moves the transported object away from the sub-propulsion applying means in the front-rear width direction. It is possible to restrict the movement, and when transporting a transported object in the main transport direction, the sub-regulator is moved to the retracted position so that the transported object is transported in the main transport direction. It does not get in the way.

  Therefore, the main restricting unit can convey the conveyed product in the main conveying direction in a more stable state, and the sub restricting unit can convey the conveyed item in the sub conveying direction in a more stable state. And the sub-regulatory part could be kept out of the way of transporting the transported goods.

  In addition to the fifth feature configuration, the sixth feature configuration is configured such that the main restricting portion and the sub restricting portion are repositioned to the retracted position by descending from the operating position, and the blower support The means is characterized by comprising a recess into which the main restricting portion and the sub restricting portion located at the retracted position are inserted.

  That is, by lowering the main restricting portion and the sub restricting portion from the operation position and changing the position to the retracted position, the main restricting portion and the sub restricting portion enter the recess provided in the blower-type support means. Accordingly, it is not necessary to secure the retracting position of the main restricting portion and the sub restricting portion located at the retracted position in the switching transport portion, so that the switching transport portion can be configured compactly.

  In a seventh feature configuration, in addition to any one of the first to sixth feature configurations, the blower-type support means cleans a dust filter that removes dust and a lower surface of the conveyed object through the dust filter. The present invention is characterized in that a blower unit integrally assembled with a blower for supplying air is arranged in the main transport direction and the sub-transport direction.

  In other words, just by arranging the blower unit in which the air blower and the dust filter are assembled together in the transport direction of the transported object, clean air is supplied toward the lower surface of the transported object and the transported object is in a non-contact state. Therefore, it is possible to provide a conveying apparatus that can be easily manufactured.

  Embodiments of the present invention will be described below with reference to the drawings.

[First embodiment]
As shown in FIG. 1, the transport device H transports a glass substrate 2 as a transported object in the main transport direction X, and the transport direction of the glass substrate 2 is orthogonal to the main transport direction X from the main transport direction X during the transport. The glass substrate 2 is transported in the sub-transport direction Y by switching to the sub-transport direction Y.
That is, the transport device H is configured by a plurality of transport units 1 and is configured by a plurality of transport units 1 and an upstream transport unit 1A that transports the glass substrate 2 in the main transport direction X. The downstream transport unit 1B transports in the sub transport direction Y that intersects perpendicularly to the transport direction X, and the transport direction of the glass substrate 2 received from the upstream transport unit 1A is 90 from the main transport direction X to the sub transport direction Y. An L-type transport unit 1L serving as a switching transport unit that switches and passes to the downstream transport unit 1B.

  Then, in order to transport the glass substrate 2 transferred to the transport unit 1 located on the upper transport side to the transport unit 1 located on the lower transport side via the L-type transport unit 1L, the blow type support means 3 and the L type While being supported by the blower-type support means 33, the propulsive force is imparted by the propulsive force imparting means 4 and the L-type propulsive force imparting means 34 and conveyed from the upper transport side to the lower transport side.

  As shown in FIG. 2, the transport unit 1 is configured in two upper and lower stages, and the two upper and lower transport units 1 are used side by side in the transport direction of the glass substrate 2, and the upstream transport unit 1 </ b> A and The downstream conveyance unit 1B is configured by arranging a plurality of conveyance units 1 along the conveyance direction. Then, as shown in FIG. 3, each of the transport units 1 is supplied with clean air toward the lower surface 2 a of the glass substrate 2 to support the glass substrate 2 in a non-contact state in a substantially horizontal posture. Means 3, propulsive force imparting means 4 for imparting propulsive force in the transport direction to the glass substrate 2 supported by the blower-type support means 3, and these blower-type support means 3 and propulsive force imparting means 4 The case body 7 is configured to be accommodated. The transport unit 1 is supported in a horizontal state by a horizontal support frame 19. Further, the upper transport unit 1 is configured to be swingable around a horizontal axis P along the main transport direction X in the case of the upstream transport unit 1A and in the sub transport direction Y in the case of the downstream transport unit 1B. ing.

  As shown in FIG. 3 and FIG. 4, the case body 7 is provided on both sides of the unit frame body 9 having a substantially rectangular shape in plan view for mounting and supporting the blower-type support means 3 and both sides of the unit frame body 9 in the lateral width direction. The storage frame 8 is provided along the transport direction, and the transport cover 20 is provided over the upper ends of the storage frames 8 on both sides.

  As shown in FIG. 4, each of the storage frames 8 is formed in a rectangular tube shape when viewed in the transport direction, and a storage cover 8 c that can be opened and closed on the side opposite to the side of the inner wall 8 a connected to the unit frame 9. It is composed of. A transport space A is formed by the unit frame body 9, the storage frame 8, and the transport cover 20, and a storage space B is formed in the storage frame 8. The unit frame 9 includes a support frame portion 9a assembled with a frame member, and an air introduction port 11 which is positioned below the support frame portion 9a and introduces external air into the transport space A. The plate-shaped frame portion 9b is a substantially square plate shape. The lower wall 8b of the storage frame 8 is provided with an external discharge port 21 for discharging the air in the storage space B to the outside, and a sub blower unit having a blowing function and a dust removing function so as to close the external discharge port 21 23 is provided, and the air in the storage space B is discharged to the outside by the sub blower unit 23.

  As shown in FIGS. 3 to 5, the blower-type support means 3 is provided in a transfer space A in the transfer unit 1, and a dust removing filter 12 that removes dust, and a lower surface 2 a of the glass substrate 2 through the dust removing filter 12. A fan filter unit 14 integrally assembled with a blower fan 13 serving as a blower for supplying clean air toward the head is arranged in a transport direction and a lateral width direction orthogonal to the transport direction. As shown in FIG. 6, two fan filter units 14 arranged in the width direction are arranged in three rows in the transport direction, and the blowing type support means 3 is provided with a total of six fan filter units 14. .

  The blower support means 3 will be described in detail. As shown in FIGS. 3 to 5, the fan filter unit 14 includes one blower fan 13 and one dust filter 12 that covers the top of the blower fan 13. Are assembled integrally. As shown in FIGS. 1 and 5, an air conditioning plate 15 that is located on the upper side of the fan filter unit 14 and regulates the clean air supplied to the lower surface 2 a of the glass substrate 2 includes six fan filter units 14. It is provided so that the upper part of the may be covered. That is, the blower-type support means 3 is composed of six fan filter units 14 and one air conditioning plate 15.

  And the ventilation fan 13 is comprised by the electric type which a fan rotates by the electric motor with which this ventilation fan 13 was equipped, and it forms in the air conditioning board 15 by the punching in the location located just above a fan filter unit. The vent hole 15a is provided. Further, the six blower fans 13 provided in the blower-type support means 3 are configured to be driven at the same rotational speed, and the clean air supplied to the back surface 2a of the glass substrate 2 through the air conditioning plate 15 is configured. The blower-type support means 3 is configured so as to supply substantially the same amount of clean air in both the transport direction and the width direction.

  Next, the propulsion force applying means 4 will be described. As shown in FIG. 3, the driving force applying means 4 for applying a driving force in the conveying direction to the glass substrate 2 is a double-sided drive type that applies a driving force to both ends of the glass substrate 2 in the lateral width direction. The driving force applying means 4 is provided with a driving roller 24 as a contact type driving unit that supports the lower surface 2a of the glass substrate 2 and applies a driving force. As shown in FIGS. 4 and 8, the driving roller 24 is in contact with the side surfaces of both end portions in the lateral width direction of the glass substrate 2 and serves as a receiving portion for receiving the glass substrate 2 moving in the lateral width direction. The large-diameter portion 24a is provided.

  The propulsive force applying mechanism 4 will be described in detail. The propulsive force applying mechanism 4 is provided on each of the pair of storage frames 8 and is configured to be driven on both sides. Each of the propulsive force applying mechanisms 4 is shown in FIGS. As shown in FIG. 2, the electric motor 25, a transmission shaft 27 having a spur gear 28 that meshes with the output gear of the electric motor 25, and a number of input gears 30 that mesh with an output gear 29 provided on the transmission shaft 27. An output shaft 26 is provided. The transmission motor 25 and the transmission shaft 27 are disposed in the transport space B, and the output shaft 26 is rotatably supported on the inner wall 8a in a state of projecting to the storage space B side and the transport space A side. Has been. The input gear 30 is provided in a portion of the output shaft 26 protruding into the storage space B, and the drive roller 24 is provided in a portion of the output shaft 26 protruding into the transport space A.

  Accordingly, the air that is sucked from the lower side of the blower fan 13 by the blower fan 13 by the blower support means 3 passes through the dust filter 12 and passes through the ventilation holes 16a of the air conditioning plate 16 as clean air. 2 is supplied to the lower surface 2a of the glass substrate 2, and substantially the entire area of the lower surface 2a of the glass substrate 2 is supported by the supplied clean air. Further, the lower surface of both end portions of the glass substrate 2 in the lateral width direction is supported by the driving roller 24 by the driving force applying means 4. Then, the driving roller 24 that contacts and supports the glass substrate 2 is driven and rotated by the electric motor 25, so that a propulsive force in the conveying direction is applied to both ends in the width direction of the glass substrate 2. The glass substrate 2 is conveyed.

  Next, the L-type transport unit 1L will be described in detail. As shown in FIGS. 10 and 11, the L-type transport unit 1L configured in two upper and lower stages is a blow-type support means for the L-type transport unit 1L. An L-type blower support means 33, an L-type propulsive force applying means 34 that is a propulsive force applying means for the L-type transport unit 1L, and an L-type case body 37 that is a case body for the L-type transport unit 1L. It is prepared for. The L-type transport unit 1L is also supported in a horizontal state by the horizontal support frame 19. Further, as shown in FIG. 13, the upper L-type transport unit 1 </ b> L is configured to be swingable around the horizontal axis Q along the main transport direction X.

  As shown in FIG. 11, the L-type case body 37 is substantially L-shaped in plan view, and has an L-type unit frame 39 provided with the air introduction port 11 on which the L-type air blowing support means 33 is placed and supported. And an L-type storage frame 38 provided on both sides of the L-type unit frame 39 along the transfer path of the glass substrate 2 and an L-type transfer cover 40 provided over the upper ends of the storage frames 8 on both sides. Has been.

  As shown in FIGS. 10 and 14, the L-shaped storage frame 38 includes both side frame portions 43 provided so as to face each other with an L-shaped unit frame 39 interposed therebetween, and the upstream conveying portion. 1 side frame part 44 provided in the location which opposes 1A, and the location which opposes the said downstream conveyance part 1B, and was provided only in the outer side of the frame 39 for L type | mold units. And the main one side frame part 44a provided in the location facing the downstream conveyance part 1B in the one side frame part 44 is connected and fixed with respect to the frame 39 for L type | mold units. Moreover, the sub one side frame part 44b provided in the location facing 1 A of upstream conveyance parts in the one side frame part 44 is comprised so that raising / lowering is possible.

  The sub-side frame portion 44b will be described. As shown in FIG. 16, the fixed side wall 42 is connected and fixed to the portion connecting the sub-side frame portion 44b in the one-side case body 37, and the conveyance space A is closed. The sub-side frame portion 44b is structured to move up and down with respect to the fixed side wall 42. That is, a gear groove 42b is formed on the outer surface of the fixed side wall 42, and the output gear 36a of the elevating motor 36 is engaged with the gear groove. The frame body portion 44b is configured to move up and down. Note that an insertion hole 42a is formed in the fixed side wall 42 so that each of the drive shafts 26 in the sub-side frame portion 44b can be raised and lowered.

  As shown in FIGS. 11-13, the said L type ventilation type support means 33 is provided in the conveyance space A in L type conveyance unit 1L, and assembled | attached the said dust removal filter 12 and the said ventilation fan 13 integrally. The fan filter units 14 are arranged in the main transport direction X and the sub transport direction Y. Then, as shown in FIG. 14, the fan filter unit group in which two fan filter units 14 arranged in the width direction are arranged in three rows in the transport direction, and the lower side of the fan filter unit group in the sub transport direction are provided. Two fan filter units 14 are provided, and eight fan filter units 14 are provided in the L-type air blowing support means 33 in total. Further, an L-shaped air conditioning plate 41 having an L shape in plan view, which is configured in the same manner as the air conditioning plate 15, is provided so as to cover the top of the eight fan filter units 14. That is, the L-type air blowing support means 33 includes eight fan filter units 14 and one L-type air conditioning plate 41. Further, the eight blower fans provided in the L-type blower support means 33 are configured to be driven at the same rotational speed, and the amount of clean air supplied to the back surface 2a of the glass substrate 2 is also in the horizontal width direction. The blower support means 3 is configured to supply substantially the same amount of clean air in the front-rear width direction. The L-type air conditioning plate 41 is also formed with a vent hole 41 a as with the air conditioning plate 15.

  The L-type propulsive force applying mechanism 34 will be described. As shown in FIG. 14, the L-type propulsive force applying means 34 supports and supports one end of the lateral width or the other end of the lateral width of the lower surface 2 a of the glass substrate 2. A contact-type main transport driving roller 45 that imparts a propulsive force in the main transport direction X and the front-rear width one end portion or the front-rear width other end portion of the lower surface 2a of the glass substrate 2 are contacted and supported in the sub-transport direction Y. And a contact-type sub-conveying drive roller 46 for applying a propulsive force. Further, the L-type propulsive force applying means 34 is provided in each of the pair of both side frame portions 43 and cooperates with a pair of opposing L-type propulsive force applying means 34 so that both lateral ends or front and rear widths of the glass substrate 2 are combined. The glass substrate 2 is composed of a double-sided driving force applying unit 34A configured to be driven on both sides for applying a driving force in the main transport direction X or the sub-transport direction Y to both ends, and one L-type propulsive force applying unit 34. The one-side propulsive force applying portion 34B configured to be a one-side drive type that applies a propulsive force in the main conveying direction X or the sub-conveying direction Y to the one end portion of the lateral width or the one end portion of the front-rear width.

  The one-side propulsive force imparting section 34B imparts propulsive force in the main transport direction X to the lateral width one end portion on the side away from the downstream transport section 1B in the lateral width direction orthogonal to the main transport direction X in the glass substrate 2. The main propulsive force imparting portion 34Ba configured in a single-side drive type, and the front-rear width end portion on the side away from the upstream-side transport portion 1A in the front-rear width direction orthogonal to the sub-transport direction Y in the glass substrate 2 A glass substrate that is provided with a sub-propulsion applying portion 34Bb configured to be driven on one side for applying a propulsive force at Y, and that is supplied with a propulsive force by the main propelling force applying portion 34Ba and is conveyed in the main conveyance direction X 2 is configured to switch the transport direction of the glass substrate 2 so as to be transported in the sub transport direction Y by applying a propulsive force by the sub propulsion force imparting section 34Bb.

  The main propulsive force applying portion 34Ba is configured to include a main drive roller 45A as a contact type main drive portion that contacts and supports one end of the lateral width of the lower surface 2a of the glass substrate 2 to apply a propulsive force, The sub-propulsion force applying unit 34Bb includes a sub-drive roller 46B as a contact-type sub-drive unit that contacts and supports the lower surface 2a of the glass substrate 2 and applies a propulsive force. That is, the main driving force applying unit 34Ba included in the main conveying drive roller 45 corresponds to the main driving roller 45A, and the auxiliary driving force applying unit 34Bb included in the sub conveying driving roller 46 is provided. This corresponds to the auxiliary drive roller 46A. Further, the main propulsion force applying portion 34Ba is provided in the main piece side frame portion 44a, and the sub propulsion force applying portion 34Bb is provided in the elevating piece side frame portion 44b.

  The main drive roller 45A is in contact with the side surface of the glass substrate 2 on which the driving force is applied by the main driving force applying unit 34Ba, and receives the glass substrate 2 moving in the width direction. A main large-diameter portion 45a (see FIG. 13) is formed as a portion, and a side surface on one end portion side of the front-rear width to which the sub driving roller 46B is given propulsive force by the sub propulsive force applying portion 34Bb in the glass substrate 2. A sub large-diameter portion 46a (see FIG. 12) is formed as a sub receiving portion for receiving the glass substrate 2 moving in the front-rear width direction. The main propulsive force applying unit 34Ba and the sub propulsive force applying unit 34Bb are both configured in the same manner as the propulsive force applying mechanism 4.

  The sub-propulsion force imparting portion 34Bb is moved up and down to a support position where the glass substrate 2 is contacted and supported by the sub drive roller 46 and a retreat position where the glass substrate 2 is retracted downward to avoid contact between the glass substrate 2 and the sub drive roller 46. It is configured freely. That is, as shown in FIG. 16, the elevating piece side frame portion 44b that supports the sub-propulsion force applying means 34Bb is moved up and down, so that the sub-propulsion force applying means 34Bb is moved up and down between the support position and the retracted position. ing.

  As shown in FIGS. 10, 14, and 15, the L-type transport unit 1 </ b> L has the other lateral width end opposite to the lateral width one end portion to which the propulsive force is imparted by the main propulsive force imparting portion 34 </ b> Ba in the glass substrate 2. The propulsive force is brought into contact with the side surface of the portion side and a plurality of main restricting rollers 47 as main restricting portions that restrict the movement of the glass substrate 2 in the lateral width direction, and the sub propulsive force applying portion 34Bb in the glass substrate 2. A plurality of sub-regulator rollers 48 as sub-regulators that abut against the side surfaces of the front and rear other ends opposite to the applied front and rear width one end and regulate the movement of the glass substrate 2 in the front and rear width direction. And are provided.

  As shown in FIGS. 15 and 17, the main regulating roller 47 is located on the transport path of the glass substrate 2 transported in the sub-transport direction and is in contact with the side surface on the other side of the lateral width. By being lowered from this operating position, the position can be freely changed to the retracted position retracted from the transport path of the glass substrate 2 transported in the sub-transport direction. Further, the sub-regulating roller 48 is located on the transport path of the glass substrate 2 transported in the main transport direction, and comes into contact with the side surface on the other side of the front and rear width, and descends from this work position. The position of the glass substrate 2 that is transported in the main transport direction can be changed to a retracted position that is retracted from the transport path.

Next, the position change structure of the main restriction roller 47 and the sub restriction roller 48 will be described. However, since the position change structure of the main restriction roller 47 and the sub restriction roller 48 is the same, the position change structure of the main restriction roller 47 will be described. A description of the position changing structure of the sub-regulating roller 48 will be omitted.
As shown in FIG. 17, each of the main regulating rollers 47 is supported on the upper end portion of the roller support frame 49 so as to be rotatable around the vertical axis, and the roller support frame 34 is mounted on the L-type unit frame 39. It is configured to move up and down in the vertical direction by an electric motor 50 that is placed and supported. Accordingly, when the roller support 49 is moved up and down by the motor 50, the position of the main regulating roller 47 is adjusted in the up and down direction and moved up and down between the lifted position and the retracted position.

  The L-type blower support means 33 is formed with a recess 33a into which the main restricting roller 47 and the sub restricting roller 48 positioned at the retracted position and a through hole 33b through which the roller support frame 34 passes. . Depending on the size of the fan filter unit 14, the size of the glass substrate 2 to be conveyed, etc., only a part of the main regulating roller 47 or the sub regulating roller 48 may enter, or the through hole 33b may not be formed. .

Next, a procedure for transporting the glass substrate 2 in the L-type transport unit 1L will be described.
As shown in FIG. 15 (a), the sub-propulsive force imparting portion 34Bb is lowered to the retracted position so that the glass substrate 2 and the sub-propulsive force imparting portion 34Bb do not come into contact with each other in a stable state. In order to transport in the main transport direction X, the main regulating roller 47 is raised to the operating position, and the sub-regulating roller 48 is lowered to the retracted position so as not to interfere when the glass substrate 2 is transported in the main transport direction X. .
And the substantially whole surface of the lower surface 2a of the glass substrate 2 is supported by the clean air supplied by the L-type blowing type support means 33, and the glass substrate 2 is supported by the both-side propulsive force applying portion 34A of the L-type propulsive force applying means 34. The glass substrate 2 is transported in the main transport direction X by contacting and supporting the lower surfaces 2 a at both ends in the horizontal width direction by the main drive roller 45 and driving and rotating the main drive roller 45 by the electric motor 25. When being transported by the both-side propulsive force imparting portion 34A, the glass substrate 2 is transported while the displacement of the glass substrate 2 in the lateral width direction is regulated by the main large diameter portions 45a of the main drive rollers 45 on both sides in the lateral width direction. The
Thereafter, the main driving force applying portion 34Ba of the one-side driving force applying portion 34B in the L-type propelling force applying means 34 is in contact with and supported by the main driving roller 45 on the lower surface 2a on one side of the lateral width of the glass substrate 2, and main driving is performed. The glass substrate 2 is transported in the main transport direction X by the roller 45 being driven and rotated by the electric motor 25. When transported by the main propelling force applying portion 34Ba, the glass substrate 2 is glass substrate by cooperation of the main large diameter portion 45a of the main drive roller 45 on one side of the width and the main regulating roller 47 on the other side of the width. 2 is transported while being restricted from shifting in the lateral direction.

When the glass substrate 2 is conveyed to the end in the main conveyance direction, as shown in FIG. 15B, the auxiliary driving force is applied so that the lower surface 2a on one end side of the front and rear width of the glass substrate 2 is contacted and supported by the auxiliary driving roller 46. The imparting portion 34Bb is raised to the support position, and the main regulating roller 47 is lowered to the retracted position so as not to interfere when the glass substrate 2 is transported in the sub-transport direction Y, and the glass substrate 2 is kept in a stable state in the sub-transport direction. In order to convey to Y, the sub-regulating roller 48 is raised to the operating position, and the conveyance direction of the glass substrate 2 is switched from the main conveyance direction to the sub conveyance direction.
The substantially whole surface of the lower surface 2a of the glass substrate 2 is supported by the clean air supplied by the L-type blowing type support means 33, and the sub-propulsive force imparting part of the one-side propulsive force imparting part 34B in the L-type propulsive force imparting means 34 is supported. At 34Bb, the lower surface 2a of the glass substrate 2 at one end in the front-rear width is contacted and supported by the sub drive roller 46, and the sub drive roller 46 is driven and rotated by the electric motor 25, whereby the glass substrate 2 is sub-conveyed. It is conveyed in the direction Y. When the glass substrate 2 is transported by the sub-propulsion force applying portion 34Bb, the glass substrate 2 is cooperated by the sub large diameter portion 46a of the sub driving roller 46 on one side of the front and rear width and the sub regulating roller 48 on the other side of the front and rear width. The glass substrate 2 is conveyed while its displacement in the front-rear width direction is regulated.
After that, the lower surface 2a of both end portions in the front-rear width direction of the glass substrate 2 is contacted and supported by the sub drive roller 46 at the both-side propulsion force application unit 34A of the L-type propulsive force application means 34. The glass substrate 2 is transported in the sub-transport direction Y by being driven and rotated at 25. When the glass substrate 2 is transported by the both-side propulsion force applying portion 34A, the glass substrate 2 is transported while the shift in the lateral width direction of the glass substrate 2 is restricted by the sub large-diameter portions 46a of the sub drive rollers 46 on both sides in the front-rear width direction. Is done.

[Second Embodiment]
In the first embodiment, the L-type propulsive force applying means is partially configured as a one-side drive type, but the entire L-type propulsive force applying means may be configured as a one-side drive type. In addition, about the thing comprised similarly to 1st Embodiment, the code | symbol same as 1st Embodiment is attached | subjected and description is abbreviate | omitted.

  As shown in FIG. 19, the one-side case body 52 in the transport unit 1 is transported in the lateral direction of the unit frame body 9 and the unit frame body 9 that are substantially rectangular in plan view for mounting and supporting the blower-type support means 3. The storage frame 8 provided along the transport direction outside the path, the case side wall 53 provided along the transport path inside in the lateral width direction of the unit frame 9, and the case side wall 53 from the upper end of the storage frame 8 A transport cover 20 provided over the upper end portion is provided. Therefore, the transport space A is formed by the unit frame 9, the storage frame 8, the case side wall 53, and the transport cover 20.

  The transport unit 1 is supported in an inclined state by the support frame 51 for tilting so that the side having the storage frame 8 in the lateral width direction is positioned downward, and the transport unit 1 is supported in the tilted state. Thus, the blower-type support means 3 is also supported by the unit frame 9 in an inclined posture. In FIG. 19, in order to make it easy to understand the inclination of the one-side case body 52, the transport unit 52 is shown tilted by 5 ° so as to be positioned downward as the side having the storage frame 8 is viewed in the transport direction. When carrying out the present invention, the transport unit 1 may have a slight inclination of about 0.5 °.

  Next, the propulsive force applying means 4 will be described. The propulsive force applying mechanism 4 is provided in one storage frame 8 and is configured as a one-side drive type. And the substantially whole area of the lower surface 2a of the glass substrate 2 is supported by the clean air supplied by the blast type support means 3. Further, the lower surface 2 a of the lateral width one end portion in the lateral width direction of the glass substrate 2 is supported and supported by the driving roller 24 by the propulsive force applying means 4.

Next, the L-type transport unit 1L will be described.
As shown in FIG. 20, the L-type one-side case body 54 in the L-type transport unit 1 </ b> L extends along the outer side of the transport path of the glass substrate 2 in the L-type unit frame 39 and the L-type unit frame 39. The L-shaped one-side storage frame 55, the L-shaped case side wall 56 provided along the inner side of the conveyance path of the glass substrate 2 in the L-shaped unit frame 39, and the L-shaped one-side storage frame 55 from the upper end portion. An L-shaped transport cover 40 provided over the upper end of the mold case side wall 56 is provided.

  Then, the L-type blowing type support means 33 is in a posture in which the glass substrate 2 is tilted so that the other width side is positioned higher than the one width side where the driving force is applied by the main driving force applying unit 34Ba. A main transport posture, and a sub-transport posture in which the glass substrate 2 is tilted such that the other end side in the front-rear width is positioned higher than the front-rear one end side to which the propulsive force is applied by the sub-propulsion force applying unit 34Bb. The posture can be changed.

  That is, the L-type transport unit 1L is supported by the tilt posture changing frame body 58 so that the tilt posture can be changed, and the plurality of extendable portions 58a in the tilt posture changing frame body 58 are configured to be extendable and contractable. As shown in FIG. 23 (b), the side with the L-shaped one-side storage frame 55 in the main transport direction is inclined downward, and is expanded and contracted so as to be in the horizontal state in the sub-transport direction. By extending and contracting each of the portions 58a, the L-type air blowing support means 33 can be set to the main transport posture. Further, the telescopic portion 58a has a horizontal state when viewed in the main transport direction, and is inclined downwardly toward the side having the L-shaped one-side storage frame 55 as viewed in the sub-transport direction as shown in FIG. By extending and contracting each of them, the L-type blowing support means 33 can be set to the sub-transport posture.

  The L-shaped one-side storage frame 55 will be described in detail. As shown in FIGS. 21 and 22, the L-shaped one-side storage frame 55 is provided only on the outer side of the L-type unit frame 39. 44 only. And the raising / lowering one side frame part 44b located in the location facing 1 A of upstream conveyance parts in the one side frame part 44 is comprised so that raising / lowering is possible.

  The L-type propulsive force imparting mechanism 34 will be described. As shown in FIG. 21, the L-type propulsive force imparting means 34 is provided on the one-side frame portion 44 and is configured as a one-side drive type. It consists of only the part 34B.

  And the part with which the said main piece side frame part 44a in alignment with the said main conveyance direction X in the one side propulsion force provision part 34B was made into the main propulsion force provision part 34Ba, and the said main conveyance direction Y in the one side propulsion force provision part 34B A portion provided on the sub-frame portion 44b along the side is used as a sub-propulsive force imparting portion 34Bb. The sub-propulsion force applying portion 34Bb is configured to be movable up and down between a support position and a retracted position as in the first embodiment.

  In the second embodiment, the L-type transport unit 1L is not provided with a main restricting portion or a sub restricting portion. Therefore, neither the recessed part 33a nor the through-hole 33b of the L-type blowing type support means 33 is formed.

Next, a procedure for transporting the glass substrate 2 in the L-type transport unit 1L will be described.
As shown in FIG. 23 (a), the sub-propulsive force applying portion 34Bb is lowered to the retracted position so that the glass substrate 2 and the sub-propulsive force applying portion 34Bb do not come into contact with each other, as shown in FIG. In addition, in order to transport the glass substrate 2 in the main transport direction X in a stable state, the posture of the L-type blowing support means 33 is changed to the main transport posture.
And the substantially whole surface of the lower surface 2a of the glass substrate 2 is supported by the clean air supplied by the L-type blowing type support means 33, and the glass substrate 2 is supported by the main propulsive force applying portion 34Ba in the L-type propulsive force applying means 34. The glass substrate 2 is transported in the main transport direction X by contacting and supporting the lower surfaces 2 a at both ends in the horizontal width direction by the main drive roller 45 and driving and rotating the main drive roller 45 by the electric motor 25. When the glass substrate 2 is transported by the main propelling force applying portion 34Ba, the movement of the glass substrate 2 to one side of the lateral width is restricted by the main large diameter portion 45a of the main drive roller 45, and the other width side of the glass substrate 2 is measured. Is moved in a state where it is difficult to move due to its own weight.

When the glass substrate 2 is conveyed to the end in the main conveying direction, as shown in FIG. 24 (a), the auxiliary driving force is applied so that the lower surface 2a on one end side of the front and rear width of the glass substrate 2 is contacted and supported by the auxiliary driving roller 46. The applying portion 34Bb is raised to the support position, and as shown in FIG. 24 (b), the L-type blower support means 33 is brought into the sub-transport posture in order to transport the glass substrate 2 in the sub-transport direction Y in a stable state. The posture is changed, and the transport direction of the glass substrate 2 is switched from the main transport direction to the sub transport direction.
And the substantially whole surface of the lower surface 2a of the glass substrate 2 is supported by the clean air supplied by the L-type blowing type support means 33, and the glass substrate 2 is supported by the sub-propulsion force applying portion 34Bb in the L-type propulsive force applying means 34. The glass substrate 2 is conveyed in the sub-conveying direction Y by contacting and supporting the lower surface 2a on the one end side of the front and rear widths by the sub-driving roller 46 and driving and rotating the sub-driving roller 46 by the electric motor 25. When the glass substrate 2 is transported by the sub-propulsion force applying portion 34Bb, the movement of the glass substrate 2 to the one side in the front-rear width is restricted by the sub-large diameter portion 46a of the sub-drive roller 46, and the glass substrate 2 is moved to the other side of the front-rear width. The movement is carried in a state where it is difficult to move due to its own weight of the glass substrate 2.

[Third Embodiment]
In the first embodiment and the second embodiment, the sub-propulsion force applying unit is configured to be freely lowered to the retracted position in order to avoid contact between the glass substrate conveyed in the main conveyance direction and the sub-propulsion force applying unit. However, you may comprise so that a glass substrate may be raised, without lowering a sub propulsive force provision part. Since the transport unit is configured in the same manner as in the second embodiment, the description thereof is omitted, and the L-type transport unit is configured in the same manner as in the first embodiment and the second embodiment. The same reference numerals as those in the first embodiment and the second embodiment are given, and the description thereof is omitted.

  The L-type transport unit 1L is basically configured in the same manner as in the second embodiment, and is different in configuration from the second embodiment in the following two points.

Clean air supplied to the lower surface 2a of the glass substrate 2 by the two fan filter units 14 on the lower side in the main transport direction in the fan filter unit group in which two fan filter units 14 arranged in the width direction are arranged in three rows in the transport direction The variable fan filter unit 14a can supply a larger amount than the other six fan filter units.
The sub-one-side frame portion 44 b provided at a location facing the upstream-side transport unit 1 </ b> A in the one-side frame portion 44 is not configured to be movable up and down with respect to the L-type unit 39.
It is supported in a horizontal state by a horizontal support frame 19.

  The variable fan filter unit 14a will be described in detail. The variable blower fan 13a included in the variable fan filter unit 14a includes the other six fan filter units 14 including the two fan filter units 14 provided on the lower side in the sub-transport direction of the fan filter unit group. The fan filter units 14 are configured to be able to be changed to a constant rotational speed equivalent to that of the blower fan 13 and a high rotational speed that is faster than the blower fans 13 of the six fan filter units 14. Therefore, the variable fan filter unit 14a can supply substantially the same amount of clean air as the other fan filter units 14 to the lower surface 2a of the glass substrate 2 by setting the variable blower fan 13a to a constant rotational speed. By setting the variable blower fan 13a to a high rotational speed, the variable fan filter unit 14a can supply a larger amount of clean air to the lower surface 2a of the glass substrate 2 than the other fan filter units 14.

Next, a procedure for transporting the glass substrate 2 in the L-type transport unit 1L will be described.
In advance, the variable blower fan unit 13a in the variable fan filter unit 14a is set to a high rotational speed so that the glass substrate 2 and the sub-propulsive force imparting portion 34Bb do not contact each other, and the glass substrate 2 is transported in the main transport direction X in a stable state. Therefore, the posture of the L-type blowing type support means 33 is changed to the main conveyance posture.
And the substantially whole surface of the lower surface 2a of the glass substrate 2 is supported by the clean air supplied by the L-type blowing type support means 33, and the glass substrate 2 is supported by the main propulsive force applying portion 34Ba in the L-type propulsive force applying means 34. The glass substrate 2 is transported in the main transport direction X by contacting and supporting the lower surfaces 2 a at both ends in the horizontal width direction by the main drive roller 45 and driving and rotating the main drive roller 45 by the electric motor 25. When the glass substrate 2 is transported by the main propelling force applying portion 34Ba, the movement of the glass substrate 2 to one side of the lateral width is restricted by the main large diameter portion 45a of the main drive roller 45, and the other width side of the glass substrate 2 is measured. Is moved in a state where it is difficult to move due to its own weight.
In the vicinity of the end portion in the main transport direction X, a large amount of clean air is supplied to the lower surface 2a of the glass substrate 2 by the variable fan filter 14a, so that the lower end of the transport lower side which is one end side of the front and rear width of the glass substrate 2 is large. Lifted. Accordingly, as shown in FIG. 24 (b), the lower end of the transport side of the glass substrate 2 is largely lifted to avoid contact between the glass substrate 2 and the auxiliary propulsive force applying means 34Bb, and the auxiliary propulsive force. The glass substrate 2 can be transported in the main transport direction until the one end side in the front-rear width direction of the glass substrate 2 is positioned on the sub drive roller 46 of the applying portion 34Bb.

As shown in FIG. 23, when the glass substrate 2 is transported to the end of the main transport direction, when the glass substrate 2 is transported to the end of the main transport direction, as shown in FIG. In order to convey the glass substrate 2 in the sub-conveying direction Y in a stable state, with the variable blower fan 13a in the variable fan filter unit 14a at the same rotational speed so as to contact and support the lower surface 2a on one end side of the front and rear width of the glass substrate 2. Then, the L-type blowing support means 33 is changed to the sub-transport posture to switch the transport direction of the glass substrate 2 from the main transport direction to the sub-transport direction.
And the substantially whole surface of the lower surface 2a of the glass substrate 2 is supported by the clean air supplied by the L-type blowing type support means 33, and the glass substrate 2 is supported by the sub-propulsion force applying portion 34Bb in the L-type propulsive force applying means 34. The glass substrate 2 is conveyed in the sub-conveying direction Y by contacting and supporting the lower surface 2a on the one end side of the front and rear widths by the sub-driving roller 46 and driving and rotating the sub-driving roller 46 by the electric motor 25. When the glass substrate 2 is transported by the sub-propulsion force applying portion 34Bb, the movement of the glass substrate 2 to the one side in the front-rear width is restricted by the sub-large diameter portion 46a of the sub-drive roller 46, and the glass substrate 2 is moved to the other side of the front-rear width. The movement is carried in a state where it is difficult to move due to its own weight of the glass substrate 2.

[Another embodiment]
(1) In the first to third embodiments, the glass substrate 2 is configured to be transported only in the forward direction from the upstream side of the upstream side transport unit 1A to the downstream side of the downstream side transport unit 1B. You may comprise so that the board | substrate 2 may be conveyed also to the reverse direction from the lower side of the downstream conveyance part 1B to the upper side of the upstream conveyance part 1A.

  That is, the L-type transport unit 1L can be imparted with a propulsive force in the direction opposite to the main transport direction X with respect to the glass substrate 2 at the main propulsive force imparting portion 34Ba, and the glass substrate 2 at the auxiliary propulsive force imparting portion 34Bb. On the other hand, a propulsive force can be applied in the direction opposite to the sub-transport direction Y, and the transport direction of the glass substrate received from the downstream transport unit 1B is switched from the sub-transport direction Y to the main transport direction X to perform upstream transport. It is also configured to pass to the part 1A. In other words, the propulsive force applying means 4 including the L-type propulsive force applying means 34 is configured to be able to be conveyed in the forward and reverse directions with respect to the conveying direction.

  And in the conveying apparatus comprised like 1st Embodiment or 2nd Embodiment, the main propulsive force provision part 34Ba, the support position which contacts and supports the glass substrate 2 with the main drive roller 45, and a glass substrate In order to avoid contact between the main drive roller 45 and the main drive roller 45, it can be moved up and down to a retracted position retracted downward. That is, the main piece side frame portion 44a is configured to be movable up and down like the sub piece side frame portion 44b, and the main propulsive force is raised and lowered by raising and lowering the elevating piece side frame portion 44a that supports the main propelling force applying means 34Ba. The applying means 34Ba is configured to move up and down between the support position and the retracted position.

  Further, in the transport apparatus configured as in the third embodiment, in the eight fan filter units 14 of the L-type air blowing support means, the two fan filter unit groups located on the lower side in the main transport direction of the fan filter unit group described above. In addition, a total of three fan filter units 14, that is, the second one from the upper side in the main conveyance direction on the one side of the width of the fan filter unit group, are configured as the variable fan filter unit 14 a.

  In the transfer apparatus configured as in the first embodiment or the second embodiment, the main case in which the L-type propulsive force applying unit 34 is configured to be able to transfer in the forward and reverse directions with respect to the transfer direction as described above. The raising / lowering operation | movement of propulsion-force provision part 34Ba and subpropulsion-force provision part 34Bb is demonstrated. In addition, the raising / lowering operation | movement at the time of conveying the glass substrate 2 to a reverse direction with respect to a conveyance direction is demonstrated, and since the procedure of an raising / lowering operation is only reversed when conveying the glass substrate 2 in a conveyance direction, description is abbreviate | omitted. Further, FIG. 27 shows a change in position of the main regulating roller 47 and the sub regulating roller 48 in the case of the same configuration as in the first embodiment, and the explanation will be given based on FIG. The illustration of the posture change of the L-type blowing type support means 33 when configured in the same manner as in the second embodiment is omitted.

First, as shown in FIG. 27 (a), the main propelling force applying portion 34Ba is lowered to the retracted position so that the glass substrate 2 and the main propelling force applying portion 34Ba do not come into contact with each other. The sub-propulsive force imparting portion 34Bb is raised to the support position so as to contact and support the lower surface 2a on one end side of the lateral width 2 and the glass substrate 2 is transported in the direction opposite to the sub-transport direction Y.
When the glass substrate 2 is transported to the end in the main transport direction, as shown in FIG. 27 (B), the main propulsion is performed so that the main drive roller 45 contacts and supports the lower surface 2a on one side of the lateral width of the glass substrate 2. The glass substrate 2 is moved in the main transport direction while the force applying portion 34Ba is raised to the support position and the sub-propulsive force applying portion 34Bb is lowered to the retracted position so that the glass substrate 2 and the sub-propulsive force applying portion 34Bb do not contact each other. Transport in the opposite direction of X.

  Next, in the transport apparatus configured as in the third embodiment, three variable fans in the case where the L-type propulsion force applying means 34 is configured to be transportable in the forward and reverse directions with respect to the transport direction as described above. The rotation speed change adjustment of the filter unit 14a will be described. In addition, the raising / lowering operation | movement at the time of conveying the glass substrate 2 to a reverse direction with respect to a conveyance direction is demonstrated, and since the procedure of an raising / lowering operation is only reversed when conveying the glass substrate 2 in a conveyance direction, description is abbreviate | omitted. Moreover, the attitude | position change of the L-type ventilation type support means 33 at the time of comprising similarly to 3rd Embodiment is changed in the reverse procedure at the time of conveying the glass substrate 2 of 3rd Embodiment in the forward direction.

First, as shown in FIG. 28, two variable fan filter units 14a arranged in the main transport direction X of the three variable fan filter units 14a so that the glass substrate 2 and the main propulsion force imparting portion 34Bb do not contact each other. One fan filter unit remaining in order to make the variable blower fan 13a in FIG. 5 have a high rotational speed and to apply a sufficient propulsive force to one end side of the front and rear width of the glass substrate 2 by the sub drive roller 46 of the sub propulsion force applying unit 34Bb. The glass substrate 2 is transported in the direction opposite to the sub-transport direction Y with the variable blower fan 13a in 14a at a constant rotational speed.
And the variable ventilation fan 13a in the two variable fan filter units 14a arranged in the sub conveyance direction Y of the three variable fan filter units 14a is operated at a high speed so that the glass substrate 2 and the sub propulsion force applying unit 34Bb do not contact each other. The variable blower fan 13a in one remaining fan filter unit 14a is set so as to have a rotational speed, and the main driving roller 45 of the main propelling force applying unit 34Ba applies sufficient propulsive force to one end of the lateral width of the glass substrate 2. The glass substrate 2 is transported in the direction opposite to the main transport direction X as a high rotational speed.

(2) In the first to third embodiments, the drive unit is configured by a plurality of drive rollers. However, the drive unit may be configured by an endless belt such as a timing belt. Further, in the first embodiment, the restricting portion is constituted by a plurality of main restricting rollers and sub restricting rollers, but each of the main restricting roller and the sub restricting rollers may also be constituted in an endless belt state. The restricting portion may be supported by the L-shaped transport cover so as to be movable up and down.

(3) In the said 1st Embodiment and 2nd Embodiment, you may comprise a main piece side frame part so that raising / lowering is possible like another embodiment (1), and the said 3rd Embodiment. However, as in another embodiment (1), three variable fan filter units may be provided.
In other words, even when the glass substrate is transported only in the positive direction of the transport direction, the main propelling force applying unit contacts the lower surface of the glass substrate when transporting the transport direction by switching the transport direction from the main transport direction to the sub transport direction. It is possible to make the state not to be performed, and it is possible to smoothly start transport in the sub-transport direction.

(4) In the first and second embodiments and each of the other embodiments, the switching transport unit is the L-type transport unit 1L, and the transport direction of the glass substrate 2 received from the upstream transport unit 1A is the main transport direction X. The transport direction of the glass substrate 2 is always switched, such as switching from the first transport direction to the sub-transport direction Y and then passing to the downstream transport unit 1B. However, the transport direction of the glass substrate 2 is not necessarily switched.

  For example, instead of the L-type transport unit 1L in the first embodiment, a T-type transport unit 1T as shown in FIG. 29 may be provided. The T-type transport unit 1T is configured to be capable of transporting the glass substrate 2 in the main transport direction X beyond the sub-propulsion force applying portion 34Bb lowered to the retracted position. Note that the T-type transport unit 1T may be configured to be a one-side drive type as a whole as in the second embodiment.

That is, the T-type transport unit 1T is not provided with the fixed side wall 42, and the both-side propulsive force that imparts a propulsive force toward the transport unit 1C on the glass substrate 2 beyond the auxiliary propulsive force imparting unit 34Bb. A granting part 34A is provided. In the state in which the elevating piece side frame portion 44b is lowered and the auxiliary propulsion force applying portion 34Bb is in the retracted position, the upper end of the elevating piece side frame portion is from the lower surface of the glass substrate 2 supported by the fan filter unit 14. It is comprised so that it may be located below. Accordingly, it is possible to carry the sheet further in the main conveyance direction X beyond the sub-propulsion force applying portion 34Bb from the portion (the main conveyance direction end in the first embodiment) where the conveyance direction is switched from the main conveyance direction X to the sub conveyance direction Y. It is configured.
A gap is formed between the elevating piece side frame portion 44b and the frame portions located on both sides thereof so that the main conveying drive roller 45 is provided.

Therefore, in the T-type transport unit 1T, as shown by an arrow a in FIG. 30, the downstream transport unit is switched by switching the transport direction of the glass substrate 2 received from the upstream transport unit 1A from the main transport direction X to the sub transport direction Y. In addition to the transfer to 1B, as shown by the arrow e in FIG. 30, the transfer direction of the glass substrate 2 received from the upstream transfer unit 1A can be transferred to the transfer unit 1C without changing the main transfer direction X. .
And when conveying as shown by the arrow e in a T-type conveyance unit, the glass substrate 2 and the sub-propulsive force imparting portion 34Bb are not in contact with each other, and the glass substrate 2 can be conveyed beyond the sub-propulsive force imparting portion 34Bb. As described above, the sub-propulsion force applying portion 34Bb is lowered to the retracted position, and the main regulating roller 47 is raised to the operating position in order to convey the glass substrate 2 in the main conveying direction X in a stable state. The sub-regulating roller 48 is lowered to the retracted position so as not to interfere with the conveyance in the conveyance direction X.

  Further, as in another embodiment (1), the glass substrate 2 can be transported in the direction opposite to the main transport direction X, or the glass substrate 2 can be transported in the direction opposite to the sub transport direction Y. Further, the glass substrate 2 can be transported as indicated by arrows b, c, d, and f in FIG.

  In addition, when the conveyance part 1C conveys the glass substrate 2 as shown by arrows e and f, it becomes a downstream conveyance part that is the downstream side with respect to the upstream conveyance part 1A, and the glass substrate 2 is indicated by arrows c and d. When transporting in this manner, it becomes an upstream transport unit that is upstream of the downstream transport unit 1B.

Furthermore, for example, instead of the L-shaped transport unit 1L in the first embodiment, a ten-shaped transport unit 1G as shown in FIG. 31 may be provided. This ten-shaped transport unit 1G is configured to be capable of transporting the glass substrate 2 in the sub transport direction Y beyond the main propulsion force applying unit 34Ba and transporting the glass substrate 2 in the main transport direction X beyond the sub propulsion force applying unit 34Bb. In this case, as in another embodiment (1), the glass substrate 2 is transported in the direction opposite to the main transport direction X, or the glass substrate 2 is transported in the direction opposite to the sub-transport direction Y. By being configured to be able to do so, the glass substrate 2 can be delivered as shown by arrows a to l in FIG.
Note that the entire ten-shaped transport unit 1G may be configured as a one-side drive type as in the second embodiment.

(5) In each of the above embodiments, the air blowing unit in which the dust removal filter and the air blowing means are integrally assembled has been exemplified. However, it is not always necessary to attach the dust removal filter and the air blowing fan integrally. It is also possible to provide a guide path or the like for guiding the air to be blown to the dust filter, and to implement the dust filter and the blower fan separately.

(6) In the said embodiment, although the glass substrate for liquid crystals was used as a conveyed product, a semiconductor wafer etc. may be sufficient and the shape and magnitude | size of a conveyed product are not limited to embodiment.

The top view of the conveying apparatus in 1st Embodiment The perspective view of the upstream conveyance part in 1st Embodiment Front sectional view of the transport unit in the first embodiment Partial enlarged view of the front cross section of the transport unit in the first embodiment Side surface sectional drawing of the conveyance unit in 1st Embodiment The top view of the conveyance unit in 1st Embodiment Sectional drawing of the storage frame in 1st Embodiment Front sectional view of the propulsive force applying means in the first embodiment Partially enlarged side view of the propulsive force applying means in the first embodiment The perspective view of the L-type conveyance unit in 1st Embodiment Right side view of the L-type transport unit in the first embodiment Partially enlarged right side view of the L-type transport unit in the first embodiment Cross-sectional view of the back surface of the L-type transport unit in the first embodiment The top view of the L-type conveyance unit in a 1st embodiment Operational diagram of L-type transport unit in the first embodiment Sectional drawing of the sub propulsion force provision part in 1st Embodiment The figure which shows the position adjustment structure of the control part in 1st Embodiment. The top view of the conveying apparatus in 2nd Embodiment Front sectional view of the transport unit in the second embodiment Right side view of the L-type transport unit in the second embodiment The top view of the L-type conveyance unit in a 2nd embodiment The perspective view of the L-type conveyance unit in 2nd Embodiment Operational diagram of L-type transport unit in the second embodiment Operational diagram of L-type transport unit in the second embodiment The perspective view of the L-type conveyance unit in 3rd Embodiment The figure which shows the support state of the glass substrate in 3rd Embodiment. Operational diagram of L-type transport unit in another embodiment (1) Operational diagram of L-type transport unit in another embodiment (1) The top view of the T type conveyance unit in another embodiment (4) Operational diagram of T-type transport unit in another embodiment (4) The top view of the ten type | mold conveyance unit in another embodiment (4) Operational diagram of the ten-shaped transport unit in another embodiment (4)

Explanation of symbols

1A Upstream conveying unit 1B Downstream conveying unit 1L Switching conveying unit 2 Glass substrate (conveyed item)
DESCRIPTION OF SYMBOLS 3 Fan type support means 4 Propulsion force provision means 12 Dust removal filter 13 Blower fan (blower means)
14 Fan filter unit (Blower unit)
33 L-type blower support means (fan support means)
33a Concave portion 34 L-type propulsive force applying means (propulsive force applying means)
34Ba Main driving force application unit 34Bb Sub driving force application unit 45 Main drive roller (main drive unit)
45a Main large diameter part (main receiving part)
46 Sub drive roller (sub drive unit)
46a Sub large diameter part (sub receiving part)
47 Main Regulation Department (Main Regulation Roller)
48 Sub-regulatory section (sub-regulatory roller)
X Main transport direction Y Sub transport direction

Claims (7)

Blower-type support means for supplying clean air toward the lower surface of the conveyed product to support the conveyed product in a non-contact state in a horizontal posture or a substantially horizontal posture, and the conveyed product supported by the blow-type support means A propulsion force applying means for applying a propulsive force in the conveying direction to the conveying device,
An upstream transport unit that transports the transported material in the main transport direction, a downstream transport unit that transports the transported material in a sub transport direction that intersects the main transport direction, and a transported material received from the upstream transport unit. A switching transport unit that switches the transport direction from the main transport direction to the sub-transport direction and delivers it to the downstream transport unit, and
The switching conveyance unit is a one-side drive type that applies a propulsive force in the main conveyance direction to a lateral width one end portion on the side away from the downstream conveyance unit in the lateral width direction orthogonal to the main conveyance direction in the conveyed product. Propulsive force in the sub-transport direction with respect to the configured main propelling force imparting section and the front-rear width end portion on the side away from the upstream-side transport section in the front-rear width direction orthogonal to the sub-transport direction of the conveyed product A sub-propulsion force applying unit configured to be applied to the one-side drive system, and the sub-conveyed material is transferred in the main transport direction with the propulsive force applied by the main propelling force applying unit. A transport device configured to switch a transport direction of the transported object so as to transport the transport object in the sub transport direction by applying a propulsive force in the applying unit.   The sub-propulsion force applying unit is configured to include a contact-type sub-drive unit that supports and supports the lower surface of the conveyed product, and supports the conveyed product in contact with the sub-drive unit. The transport apparatus according to claim 1, wherein the transport apparatus is configured to be movable up and down to a support position and a retracted position retracted downward to avoid contact between the transported object and the sub-driving unit. The switching transport unit can apply a propulsive force to the transported object in a direction opposite to the main transport direction at the main propulsive force applying unit, and the sub-propulsive force applying unit can apply a propulsive force to the transported object. It is configured to be able to apply a propulsive force in a direction opposite to the transport direction, and the transport direction of the transported material received from the downstream transport unit is switched from the sub transport direction to the main transport direction and delivered to the upstream transport unit. Is also composed of
The main propelling force applying unit is configured to include a contact-type main driving unit that supports and supports the lower surface of the transported object, and supports the transported object by the main driving unit. The transport apparatus according to claim 2, wherein the transport apparatus is configured to be movable up and down to a support position and a retracted position retracted downward to avoid contact between the transported object and the main drive unit. A main receiving portion that contacts the side surface of the lateral width one end side to which propulsive force is applied in the main propulsive force imparting portion in the conveyed product and receives the conveyed product that moves in the lateral width direction, and the conveyed product A sub-receiving portion that contacts the side surface on the side of the one end of the front-rear width to which propulsive force is applied in the sub-propulsive force applying portion, and receives the transported object that moves in the front-rear width direction,
The posture in which the blow type support means tilts the conveyed product so that the width width other end side in the width direction is located above the width width one end side to which the propulsive force is applied by the main propulsion force applying unit. A posture for main conveyance, and a posture in which the other width side in the front-rear width direction is positioned higher than one end side in the front-rear width direction where the propulsive force is applied to the transported object by the sub-propulsion force applying unit. The transport apparatus according to claim 1, wherein the transport apparatus is configured to be capable of changing a posture to a sub-transport posture. The transported object moves in the lateral width direction in contact with the side surface of the lateral width other end side opposite to the lateral width one end part to which propulsive force is applied in the main propulsive force imparting part in the transported object. A main regulating part that regulates the side and the side face on the front and rear other end side opposite to the front and rear width one end side to which the propulsive force is given by the sub propulsive force giving part in the conveyed product, A sub-regulator that regulates movement of the conveyed product in the front-rear width direction, and
The main restricting portion is positioned on the transport path of the transported material transported in the sub-transport direction, and is in contact with the side surface on the other side of the lateral width, and transported in the sub-transport direction. It is configured to be freely changeable to the retracted position retracted from the object transport path,
The sub-regulator is located in the transport path of the transported material that is transported in the main transport direction and is in contact with the side surface on the other end of the front-rear width, and transported in the main transport direction The transport apparatus according to any one of claims 1 to 4, wherein the transport apparatus is configured to be freely changeable to a retracted position retracted from an object transport path. The main restricting portion and the sub restricting portion are configured to change positions to the retracted position by descending from the operating position,
The conveying apparatus according to claim 5, wherein the blower-type support means includes a recess into which the main restricting portion and the sub restricting portion located at the retracted position enter.   The blower-type support means integrally includes a dust removal filter that removes dust and a blower unit that supplies clean air through the dust removal filter toward the lower surface of the transported object. The conveyance apparatus of any one of Claims 1-6 arranged side by side in the said sub conveyance direction.

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