JP2005145651A - Transporting apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a transporting apparatus capable of switching a posture of a transported object by small power. <P>SOLUTION: The transporting apparatus switches a relay transporting portion 5c between a transporting state wherein the transported object 2 is contacted with a driving force applying means 4 and a rotating state wherein the transported object 2 is not contacted with the driving force applying means 4, by relative ascending/descending of the driving force applying means 4 and a blowing-type supporting member 3 equipped by a relay transporting portion 5c. In the carrying state, the transported object 2 is transported between the relay transporting portion 5c and a main transporting portion 5a or a sub transporting portion 5b with driving force by the driving force applying means 4. In the rotating state, by a posture changing means 6 equipped so as to rotate the transported object 2 about a vertical shaft, rotation force is applied to the transported object 2 to be switched between a main transporting posture and a sub transporting posture. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention provides a blower-type support means for supplying clean air toward the lower surface of a conveyed product to support the conveyed product in a horizontal posture or a substantially horizontal posture in a non-contact state, and a conveyed product supported by the blower-type support device. It is related with the conveying apparatus provided with the conveyance part provided with the propulsive force provision means which contacts the lower surface of this and provides the propulsive force of a conveyance direction to a conveyed product.

  Such a conveying device is configured to support the conveyed object in a non-contact state by the blower-type support means and apply a propulsive force in the conveying direction to the conveyed object in a contact state by the propelling force applying means. Yes, for example, in the case of transporting a glass substrate for liquid crystal as a transported object, the portion to be commercialized in the glass substrate is supported in a non-contact state by the blower-type support means, and cut when being commercialized on the glass substrate. The propelling force is applied in the contact state by the propelling force applying means, and the propelling force is applied in the contact state while supporting the portion where the contact support in the transported object is not preferable. Suitable for doing.

And a main transport unit that transports the transported object in the main transport posture, and a sub transport unit that transports the transported object in the sub transport posture rotated around the vertical axis by a predetermined angle from the main transport posture. When transporting an object in the main transport position in the main transport section and transporting the transported object in the sub transport position in the sub transport section, when transferring the transported object from the main transport section to the sub transport section, It is necessary to switch the posture from the main transport posture to the sub-transport posture.
Therefore, the transfer-type transport unit is configured by supporting the blower-type support means for supporting the transported object in a cantilevered manner on the rotating plate, and the transfer-use transport unit is connected to the main transport unit and the sub-transport unit. Conveying when transferring from the main transport unit to the sub transport unit by rotating the vertical support center located at the center of the rotary plate and raising / lowering the blowing type support means provided in the transport unit for transfer There is one that switches the posture of an object from a main transport posture to a sub-transport posture (see, for example, Patent Document 1).

JP 2000-62951 A

  However, in the transport device having this configuration, when the posture of the transported object is switched from the main transport position to the sub-transport position, the blower-type support means for supporting the transported object is rotated around the vertical axis positioned at the center of the rotating plate. Since the operation is performed, there is a disadvantage that a large amount of power is required when the posture of the conveyed product is switched to the main conveyance posture or the sub-conveyance posture.

  The present invention has been made in view of the above circumstances, and is to provide a transport device that does not require a large amount of power when switching the posture of a conveyed product to a main transport posture or a sub-transport posture.

The transport device of the present invention is supported by a blower-type support unit that supplies clean air toward the lower surface of the transported object and supports the transported object in a horizontal posture or a substantially horizontal posture in a non-contact state and the blower-type support unit. A conveying device provided with a conveying unit provided with a propelling force applying means for contacting the lower surface of the conveyed item and applying a propulsive force in the conveying direction to the conveyed item,
The first characteristic configuration includes a main transport unit that transports a transported object in a main transport posture as the transport unit, and a sub transport unit that transports the transported object in a sub-transport posture rotated by a predetermined angle around the vertical axis from the main transport posture. And a relay conveyance unit that is located at a connection point between the main conveyance unit and the sub conveyance unit, and conveys a conveyance between the main conveyance unit and the sub conveyance unit, A relay conveyance unit includes a conveyance state in which a conveyed product is brought into contact with the propulsive force applying unit by the relative elevation of the propulsive force applying unit and the blower-type supporting unit included in the relay conveying unit, and the conveyed item is provided to the propulsive force applying unit. On the other hand, the state is switched to a non-contact state for rotation, and in the transport state, the transported object is transported between the main transport unit and the sub transport unit by the propulsive force by the propulsive force applying means. In the state for rotation and transport A point that is configured to apply a rotational force to the conveyed product by the attitude changing means provided for rotating the axis around the vertical axis to switch the conveyed object between the main conveying attitude and the sub conveying attitude. Features.

  In other words, the relay conveyance unit switches the conveyance state to a state where the conveyance object is in contact with the propulsion force applying means, and the main conveyance posture is conveyed by the propulsion force applied by the propulsion force application means. It is possible to convey the object in the sub-transport position with the propulsive force applied by the propelling force applying means, and to convey the object in the sub-transport position with the sub-transport part. Then, by switching to the rotation state, the transported object is brought into a non-contact state with respect to the propulsion force applying means, and the transported object can be switched between the main transport posture and the sub transport posture by the rotational force applied by the posture changing means. it can.

  That is, the propelling force applying means and the air blowing support means are relatively moved up and down to switch the relay conveyance portion from the conveying state to the rotating state, and the posture changing means for the conveyed object supported by the air blowing support means. Thus, a rotational force is applied to switch the conveyed product between a main conveyance posture and a sub-conveyance posture. Therefore, since the conveyed product at the time of changing the posture is supported in a non-contact state by the blow type support means, when switching the posture of the conveyed product between the main conveying posture and the sub conveying posture, It is only necessary to apply a minute rotational force by the posture changing means, so that it is possible to provide a transport device that does not require a large amount of power when switching the posture of the conveyed product to the main transport posture or the sub-transport posture. It was.

  The second feature configuration is the above-described first feature configuration, wherein the posture changing means includes a suction portion that can suck and hold the lower surface of the transported object so that it can be rotated about a vertical axis and can be lifted and lowered. In the use state, the transported object is sucked and held by the suction portion and rotated, and in the transport state, the contact of the suction portion with the transport portion is released. To do.

  That is, in the state for rotation, the transported object is sucked and held by the suction part, and the suction part is rotated to give a rotational force to the transported object, and the transported object is rotated to change the posture of the transported object to the main transport. It is possible to switch between the posture and the sub-transport posture, and in the transport state, the contact of the suction portion with the transport portion is released, so that the transported object can be transported without being obstructed by the suction portion.

  The blower support means, the propulsion force applying means, and the posture changing means are all configured to act on the lower surface of the conveyed product, and the blower support means, the propulsive force applying means, and the posture change means are distributed vertically. Since it can arrange | position collectively below the conveyed product conveyed without being able to carry out, a conveying apparatus can be comprised compactly in an up-down direction.

  In the third feature configuration, in addition to the first or second feature configuration described above, transport that deviates from the main transport posture or the sub-transport posture by contacting the relay transport unit from a lateral side with the transport object. It is characterized in that posture correcting means for correcting the posture of the object to the main transport posture or the sub-transport posture is provided.

  That is, even if the posture of the transported object is changed from the main transport posture or the sub-transport posture after switching the posture of the transported object by the posture changing means, the posture correction means contacts the transported object from the lateral side. Can be corrected to the main transport posture or the sub-transport posture, and the posture of the conveyed product can be carried out in a posture suitable for the main transport portion or the sub-transport portion.

  In addition to any one of the first to third feature configurations described above, the fourth feature configuration includes the blower-type support unit and the sub-portion in which the relay transport unit includes the blower-type support unit in the main transport unit. Providing a propulsive force that is provided at a height that supports the conveyed product at the same or substantially the same height as the blower-type support means provided in the transport unit, and that provides the propulsive force applying means to the main transport unit in the main transport state. And a propulsive force applying means provided in the main transport portion in the sub-transport state at the upper position where the transported object is contacted and supported at the same or substantially the same height as the propelling force applying means provided in the sub-transport portion. And it is characterized by the point which is comprised so that raising / lowering operation can be freely carried out so that it may become a lower position located rather than the propulsion force provision means with which the said sub conveyance part is equipped.

  That is, the raising / lowering operation of the blow type support means can be switched between the main conveyance state and the sub conveyance state without raising / lowering the propelling force applying means, so that the main conveyance unit, the sub conveyance unit, and the relay conveyance unit respectively. The height relationship of the propelling force applying means provided does not change in the main transport state or the sub-transport state, and the propulsive force applying means provided for each of the above can be configured in a series of transmission structures, so that the propulsive force is applied. The complication of the transmission structure of the means can be suppressed.

  In the fifth feature configuration, in addition to any one of the first to fourth feature configurations described above, the blower-type support means has a dust filter for removing dust and a bottom surface of the transported object through the dust filter. The present invention is characterized in that blower units integrally assembled with blower means for supplying clean air are arranged in the transport direction.

  In other words, by simply arranging the air blowing units in which the air blowing means and the dust filter are integrally assembled in the transport direction, clean air is supplied toward the lower surface of the transported object to support the transported object in a non-contact state. Since the blower-type support means can be installed, the blower-type support means can be easily installed, thereby providing a transport device that can be manufactured easily.

  Hereinafter, the case where the transport device according to the present invention is configured to transport a rectangular glass substrate for liquid crystal as a transport object will be described with reference to the drawings.

  As shown in FIG. 1, the transport device H includes a main transport unit 5 a that transports the glass substrate 2 in a main transport posture along the longitudinal direction of the glass substrate 2, and a predetermined angle around the vertical axis from the main transport posture to the glass substrate 2. The sub-transport section 5b transported in the sub-transport posture rotated 90 °, and the connection position between the main transport section 5a and the sub-transport section 5b, between the main transport section 5a and the sub-transport section 5b A relay conveyance unit 5c that conveys the glass substrate 2 between them is provided as a conveyance unit.

As shown in FIG. 2 and FIG. 7, each transport unit supports the glass substrate 2 with the blower-type support means 3 that is supported in a non-contact state and the propulsive force imparting means 4 that is supported in a contact state. The glass substrate 2 is configured so that a propulsive force in the conveying direction is applied by the propelling force applying means 4 and the glass substrate 2 is conveyed in the conveying direction, and the blowing support means 3 and the propelling force applying means 4 are stored. Housed in case 7.
The main transport unit 5a is configured by arranging one or a plurality of main transport units, the sub transport unit 5b is configured by arranging one or a plurality of sub transport units, and the relay transport unit 5c includes: It is composed of one relay transport unit. That is, the transport apparatus H is configured by combining a main transport unit, a sub transport unit, and a relay transport unit.

The relay conveyance unit 5c will be described.
As shown in FIGS. 2 and 3, the relay transport unit 5 c is provided in the blower-type support means 3 provided in the relay transport unit 5 c and the relay transport unit 5 c that imparts a propulsive force in the transport direction to the glass substrate 2. Propulsive force applying means 4, attitude changing means 6 for switching the glass substrate 2 between a main transport attitude and a sub-transport attitude, an attitude correcting means 41 for correcting a deviation of the attitude of the glass substrate 2, and these blowing type support means 3 And the case body 7 provided in the relay conveyance unit 5c that houses the propelling force applying means 4, the attitude changing means 6 and the attitude correcting means 41.

As shown in FIG. 3, the case body 7 provided in the relay conveyance section 5 c includes a unit frame body 9 having a substantially rectangular shape in plan view for mounting and supporting the blower-type support means 3, and a unit frame body 9. And a transport cover 20 provided over the side walls 10 on both sides.
As shown in FIGS. 4 and 5, the unit frame body 9 includes a support frame portion 9 a assembled with a frame member, and an air introduction port 11 that is positioned below the support frame portion 9 a and introduces external air. And a plate-like plate-shaped frame portion 9b having a rectangular shape.

  The blower-type support means 3 provided in the relay conveyance unit 5c will be described. As shown in FIG. 4, the blower-type support means 3 includes a plurality of clean air supplied toward the lower surface 2a of the glass substrate 2. A fan filter unit (an example of a blower unit) 14 and an air conditioning plate 15 that is placed on and supported by the fan filter unit 14 and regulates the clean air supplied to the lower surface 2a of the glass substrate 2 are configured. . The fan filter unit 14 is connected and fixed to the support frame portion 9a, and a dust removal filter 12 that removes dust, and a blower fan 13 that supplies clean air to the lower surface 2a of the glass substrate 2 through the dust removal filter 12 ( An example of a blowing means) is integrally assembled.

The blower support means 4 includes a total of six fan filter units in which two fan filter units 14 are arranged in the front-rear direction and three in the lateral width direction. The two fan filter units arranged in the horizontal width direction are provided sideways, and a space in which the posture changing means 6 can be raised and lowered is formed at the center of the blower-type support means 4. Further, the air conditioning plate 15 is formed with a changing means hole 15 c formed so that the posture changing means 6 can protrude upward from the blower-type support means 3.
In addition to the changing means hole 15 c, the air conditioning plate 15 is provided with a vent hole 15 a formed by punching and the propelling force applying means 4 so as to protrude upward from the blower-type support means 3. A recess 15d into which a part of the hole 15b and the posture correcting means 41 enters is formed.

  Next, the propulsive force imparting means 4 provided in the relay conveyance unit 5c will be described. As shown in FIGS. 2 and 3, the propulsive force applying means 4 includes a pair of belt-type propulsive force applying portions (an example of a propulsive force applying portion) 4 a that contacts and supports both ends of the glass substrate 2 in the lateral width direction. And is configured to be driven on both sides. As shown in FIG. 3, the pair of belt-type propulsive force imparting portions 4 a are provided by being distributed in two front and rear gaps formed by arranging three fan filter units 14 in the lateral width direction. When supporting the glass substrate 2 with a narrow main transport posture, the center of the both ends of the glass substrate 2 is supported, and when supporting the glass substrate 2 with a narrow sub-transport posture, both end portions of the glass substrate 2 are supported. It is comprised so that the outer end side may be supported.

  As shown in FIG. 6, each of the belt-type propulsive force applying means 4 a includes a drive wheel 34 that is positioned on the upper side in the transport direction and is rotated by an electric drive motor 33, and a rotatable wheel that is positioned on the upper side of the transport. The driven wheel 35, the timing belt 36 wound around the drive wheel 34 and the driven wheel 35, and supporting and supporting the lower surface 2 a of the glass substrate 2, and a feed path portion in the timing belt 36 are provided. It is comprised from the inner support ring 37 supported from the inner peripheral surface side, and the support frame 40 which supports these.

  As shown in FIGS. 4 and 6, the support frame 40 is provided with an electric lifting motor 39 for moving the belt-type propulsive force applying portion 4 a up and down. The output gear 39a and the gear groove 14a formed on the side surface of the fan filter unit 14 are meshed with each other. Accordingly, the belt-type propulsive force applying portion 4a is moved up and down by driving and rotating the propulsion means motor 39 in the forward and reverse directions.

Next, the posture changing means 6 will be described. As shown in FIG. 5, the posture changing means 6 is mounted and supported on the unit frame body 9, and a plurality of suction pads 19 (suction portions) that can suck and hold the lower surface of the glass substrate 2 on the upper surface of the rotating portion 18. 1) is provided so as to be rotatable and freely movable up and down around the vertical axis.
That is, as shown in FIG. 3, the posture changing means 6 includes an extendable portion 17 configured to be vertically extendable by a cylinder mechanism 17 a mounted and supported on the unit frame body 9, and the extension and contraction. The rotating portion 18 is provided at the upper end portion of the portion 17 and can be rotated by a rotating motor 18a, and the suction pad 19. Therefore, the suction pad 19 is rotated by rotating the rotating portion 18, and the suction pad 19 is lifted and lowered by expanding / contracting the expansion / contraction portion 17.
Then, by rotating the suction pad 19 while holding the glass substrate 2 by suction, a rotational force is applied to the glass substrate 2 so that the glass substrate 2 can be switched between the main transport posture and the sub-transport posture. Has been.

Next, the posture correcting means 41 will be described. As shown in FIG. 4, the posture correcting means 41 is composed of a pair of contact mechanisms 42 that are movable inward and outward of the relay conveyance unit 5 a, and the pair of contact mechanisms 42 are obliquely formed on the glass substrate 2. It is comprised so that it may contact | connect in the state pinched | interposed into the corner | angular part which opposes from the side. The correction mechanism 42 includes a pair of pressing members 43 that can come into contact with one side surface in the front-rear direction and one side surface in the left-right direction of the glass substrate 2, and a main body portion 44 that connects and supports the pair of pressing members 43. And a drive unit 45 that moves the main body 44 in the inward / outward direction.
Accordingly, the main body 44 is moved in the inward and outward directions by the drive mechanism 45, and the glass substrate 2 is brought into contact with the four pushing members 43 so as to sandwich the glass substrate 2 from the lateral side, whereby the glass deviated from the sub-transport posture. The posture of the substrate 2 is configured to be corrected to the sub-transport posture.

Next, the main transport unit 5a and the sub transport unit 5b will be described. However, the main transport unit 5a and the sub transport unit 5b are configured in substantially the same manner except that the width is different, so the main transport unit 5a will be described. The description of the sub-transport unit 5b is omitted. In addition, about the thing comprised similarly to the relay conveyance part 5c, the code | symbol same as the relay conveyance part 5c is attached | subjected and description is abbreviate | omitted.
The main transport unit 5a will be described. As shown in FIG. 7, the main transport unit 5a is provided with a main support unit 3 provided in the main transport unit 5a and a main substrate that imparts a propulsive force in the transport direction to the glass substrate 2. A propulsive force applying means 4 provided in the transport section 5a and a case body 7 provided in the main transport section 5a that houses the blower support means 3 and the propelling force applying means 4 are configured.

As shown in FIG. 7, the case body 7 provided in the main transport portion 5 a is provided in a fixed state along the transport direction on both sides of the unit frame body 9 and the lateral width direction of the unit frame body 9. The storage frame 8 and a transport cover 20 provided over the storage frames 8 on both sides are provided.
As shown in FIG. 10, each of the storage frames 8 is formed in a rectangular tube shape when viewed in the transport direction, and a storage cover 8 c that can be opened and closed on the side opposite to the side of the inner wall 8 a connected to the unit frame 9. As shown in FIG. 8, the lower wall 8b of the storage frame 8 is provided with an external outlet 21 for discharging the air in the storage frame to the outside. And the sub ventilation unit 23 which has a ventilation function and a dust removal function is provided so that the external discharge port 21 may be obstruct | occluded, The air in the storage frame 8 is cleaned in this sub ventilation unit 23, and it discharges | emits outside. It is configured to be.

The blower-type support means 3 provided in the main transport portion 5a will be described. As shown in FIG. 8, the blower-type support means 4 includes a plurality of the fan filter units 14 and the air conditioning plate 15. A total of four fan filter units 14 are provided, two in the front-rear direction and two in the width direction.
The air conditioning plate 15 is formed with a vent hole 15a formed by punching, and the applying means hole 15b, the changing means hole 15c, and the recess 15d are not formed.

Next, the propelling force applying means 4 provided in the main transport unit 5a will be described. As shown in FIGS. 1 and 7, the propulsive force applying means 4 includes a pair of roller-type propulsive force applying portions (an example of a propulsive force applying portion) 4 b that contacts and supports both ends of the glass substrate 2 in the lateral width direction. The pair of roller-type propulsive force imparting portions 4b are provided on the pair of storage frames 8 in a distributed manner.
As shown in FIGS. 9 to 11, each of the roller-type propulsive force applying portions 4 b includes an electric motor 25, a transmission shaft 27 having a spur gear 28 that meshes with an output gear of the electric motor 25, and a transmission shaft 27. And a plurality of output shafts 26 each having an input gear 30 that meshes with the output gear 29. The transmission motor 25 and the transmission shaft 27 are provided in the storage frame 8, and the output shaft 26 is rotatably supported on the inner wall 8 a in a state of protruding from the storage frame 8. The portion of the output shaft 26 that protrudes from the storage frame 8 is provided with the drive roller 24 that contacts and supports the lower surface 2a of the glass substrate 2 and applies a propulsive force. As shown in FIG. 8, large-diameter portions 24 a that are in contact with the side surfaces of both end portions of the glass substrate 2 in the widthwise direction and receive movement of the glass substrate 2 in the widthwise direction are provided.

Explaining the height relationship of the blower-type support means and the propulsion force applying means in the main transport section, sub-transport section and relay transport section, as shown in FIG. 12, the blow-type support means 3 provided in the main transport section 5a and The blower-type support means 3 provided in the sub-transport section 5b and the blow-type support means 3 provided in the relay transport section 5c are provided so as to support the transported object at the same or substantially the same height.
The propulsive force applying means 4 provided in the relay conveying unit 5c is the same as or substantially the same height as the propelling force applying means 4 provided in the main conveying unit 5a and the propulsive force applying means 4 provided in the sub conveying unit 5b. The glass substrate 2 can be moved up and down at an upper position where the glass substrate 2 is contacted and supported, and a lower position located below the propulsive force applying means 4 provided in the main transfer portion 5a and the propulsive force applying means 4 provided in the sub-transport portion 5b. It has been.

  The transport device H includes a detection sensor (not shown) that detects the presence or absence of a glass substrate, and a control (not shown) that controls the operation of the propelling force applying means 4, the attitude changing means 6, and the attitude correcting means 41 based on the detection result. Means are provided.

Next, switching of the conveyance posture of the conveyed product in the relay conveyance unit 5c will be described.
As described above, the propulsion force applying means 4 provided in the relay conveyance unit 5c is configured to be movable up and down. As shown in FIG. 12, the relay conveyance unit 5c moves the propulsion force application means 4 to the upper position. The glass substrate 2 is brought into contact with the propelling force applying means 4 by being raised, and the propelling force applying means 4 is lowered to the lower position so that the glass substrate 2 is not in contact with the propelling force applying means 4. It is comprised so that it may be in the state for rotation used as a state.
And in the state for conveyance, it conveys between the main conveyance parts 5a so that the glass substrate 2 may be carried in from the main conveyance part 5a with the propulsive force by the thrust provision means 4, and the glass substrate 2 carried in is sub- The posture changing means provided for transporting the transported object to and from the sub-transporting part 5b so as to be carried out to the transporting part 5b, and rotating the glass substrate 2 around the vertical axis in the rotation state. 6, a rotational force is applied to the glass substrate 2 to switch the glass substrate 2 from the main transport posture to the sub-transport posture.

The operation of the relay conveyance unit when the glass substrate carried in from the main conveyance unit 5a in the main conveyance posture is switched to the sub conveyance posture and carried out to the sub conveyance unit 5b will be described.
First, as shown in FIG. 12 (a), the propulsive force applying means 4 is raised to the ascending position so that the glass substrate 2 is supported by the blower-type support means 3 and the propulsive force applying means 4 in the conveying state. In this state, the posture changing means 6 is lowered so as to release the contact with the glass substrate 2 to which the suction pad 19 is conveyed, and the posture correcting means 41 is not in contact with the glass substrate 2 to be conveyed. It moves to the outside in the said inside and outside direction, and is evacuated. In this state, the driving force applying means 4 provided in the main transfer unit 5a and the driving force applying means 4 provided in the relay transfer unit 5c are operated to apply a driving force in the main transfer direction to the glass substrate 2, When the detection sensor detects that the relay transport unit 5c has been transported to a predetermined position, the operation of the propulsion force applying means 4 is stopped.

Thereafter, as shown in FIG. 12B, the propelling force applying means 4 is lowered to the lowered position, and the glass substrate 2 is brought into a rotating state in which it is supported in a non-contact state only by the blower-type support means 3. Then, the posture changing means 6 extends the expansion / contraction part 17 to raise the suction pad 19, and the suction pad 19 holds the lower surface 2 c of the glass substrate 2 by suction, and rotates the rotating part 18 to rotate the glass substrate 2. The posture is changed from the main transport posture to the sub transport posture. Thereafter, the suction holding by the suction pad 19 is released, the expansion / contraction part 17 is shortened, the suction pad 19 is lowered, and the contact of the suction pad 19 with the glass substrate 2 is released.
Then, the posture correcting means 41 moves the contact mechanism 42 inwardly in the inward / outward direction so as to contact the corners facing the oblique side of the glass substrate 2 in a state of being sandwiched from the lateral side, and deviates from the sub-transport posture. The posture of the glass substrate 2 is corrected to the sub-transport posture.

And after switching the attitude | position of the glass substrate 2 to a sub conveyance attitude | position, the propelling force provision means 4 is raised to the said upper position, and it is set as the said state for conveyance, and the attitude | position correction means 41 is not contacted with the glass substrate 2 conveyed In this way, it is moved outwardly in the inward / outward direction and retracted.
In this state, the driving force applying means 4 provided in the relay transfer section 5c and the driving force applying means 4 provided in the sub-transport section 5b are actuated to apply a driving force in the transfer direction to the glass substrate 2. The board | substrate 2 is carried out to the sub conveyance part 5b.

[Another embodiment]
(1) In the above-described embodiment, the main transport unit 5a and the sub transport unit 5b are configured separately. However, a single transport unit may be used as both the main transport unit and the sub transport unit.
That is, for example, as shown in FIG. 14, as the sub-transport section, a dual-purpose transport section 5 d that serves as both the main transport position and the sub-transport section for transporting the glass substrate 2 in the main transport posture and the sub-transport position may be provided. .

  The dual-purpose transport unit 5d will be described. As shown in FIG. 15, the dual-purpose transport unit 5c is a dual-purpose transport unit 5d provided with the dual-purpose transport unit 5d and the glass substrate 2 that imparts a propulsive force in the transport direction. The propulsion force applying means 4 provided in the transport section 5d, and the case body 7 provided in the relay transport section 5c that houses the blower-type support means 3 and the propulsion force applying means 4 are configured. In addition, about the thing comprised similarly to another conveyance part, the same code | symbol as another conveyance part is attached | subjected and description is abbreviate | omitted.

  Explaining the propulsive force applying means 4 provided in the dedicated conveying portion 5d, a pair of main propelling force applying portions 4B for applying a propelling force in the main conveying direction which is the same direction as the main conveying portion 5a to the glass substrate 2, and glass The substrate 2 is composed of a pair of sub-propulsive force applying units 4A that apply a propulsive force in the sub-conveying direction that is the same direction as the relay conveying unit 5c. The sub propulsive force applying unit 4A is configured in the same manner as the unit 4b, and is configured in the same manner as the belt type propulsive force applying unit 4a.

As shown in FIG. 15, the pair of main propulsive force imparting units 4 </ b> B is configured such that the main propulsive force imparting unit 4 </ b> B on the lower side in the sub-transport direction can freely move up and down, and the pair of sub propulsive force imparting units 4 </ b> A both move up and down. It is configured to be freely operable.
The dual-purpose transport unit 5d operates to raise one side of the main propelling force applying unit 4B and to operate both of the sub propulsive force applying units 4A to be supported in a non-contact state by the blower-type support means 3. In the main transport state in which the lower surface 2a of the substrate 2 is contacted and supported by the pair of main propelling force applying portions 4B, the glass substrate 2 is carried in from the main transport portion 5a on the upper transport side, and the glass substrate 2 that has been transported is transported lower. Carry out to the main transfer section 5b on the side. One of the main propulsive force imparting portions 4B is lowered, both the sub propulsive force imparting portions 4A are raised, and the lower surface 2a of the glass substrate 2 supported in a non-contact state by the blower-type support means 3 is paired. As a sub-transport state in which the sub-propulsion force applying unit 4A contacts and supports, the glass substrate 2 that has been carried in is carried out to the sub-transport unit 5b on the lower transport side.
Accordingly, the dual-purpose transport unit 5d functions as a main transport unit in the main transport state, and functions as a sub transport unit in the sub transport state.

(2) In each of the above embodiments, the switching between the conveyance state and the rotation state can be performed by moving the propelling force applying means 4 up and down. However, the blowing type support means 3 is moved up and down. It may be configured to be switched by this, or may be configured to be switched by raising and lowering both the blowing type support means 3 and the propulsion force applying means 4.

(3) In each of the above-described embodiments, the relay conveyance unit 5a carries in the glass substrate 2 from the main conveyance unit 5a and carries out the carried glass substrate 2 to the sub conveyance unit 5b. The glass substrate 2 is carried in from the carrying part), and the carried glass substrate 2 is carried into the main carrying part 5a. However, the auxiliary propulsion means 6 is propelled in the forward / reverse direction of the sub-carrying direction. You may comprise so that force can be provided and it can perform both above-mentioned conveyance.

(4) In each of the above embodiments, the propulsive force applying means provided in the main conveying unit is configured by a roller type propulsive force applying unit, and the propulsive force applying means provided in the relay conveying unit is belt type propulsion. Although configured with a force applying unit, the propulsive force applying means provided in the main conveying unit is configured with a belt type propulsive force applying unit, or the propulsive force applying means provided in the relay conveying unit is configured as a roller type propulsion. Each propulsion force applying unit, such as a force applying unit, may be configured using either a belt type or a roller type.

(5) In each of the above embodiments, the fan filter unit 14 in which the dust filter 12 and the blower fan 13 are integrally assembled is illustrated. However, the dust filter 12 and the blower fan 13 are not necessarily attached integrally. Alternatively, it is possible to provide a guide path for guiding the air blown by the blower fan 13 to the dust filter 12 and the like, and the dust filter 12 and the blower fan 13 may be configured separately.

(6) In the said embodiment, although it was set as the glass substrate 2 for liquid crystals as a conveyed product, a semiconductor wafer etc. may be sufficient and the shape and magnitude | size of a conveyed product are not limited to embodiment.

Plan view of transfer device Perspective view of relay transfer section Front view of relay transfer section Partially enlarged front view of relay transfer section Side view of relay transfer section Side view of belt-type propulsion unit Perspective view of main transfer section Front view of main transfer unit Side view of roller-type propulsion unit Front view of roller-type propulsion unit Partially enlarged side view of roller-type propulsion unit Side view showing the state for conveyance and the state for rotation The top view of the conveying apparatus of another embodiment (1) Perspective view of dual-purpose transport unit Front view showing main transport state and sub-transport state

Explanation of symbols

2 Glass substrate (conveyance)
2a Lower surface 3 Blower-type support means 4 Propulsion force applying means 5a Main transport section 5b Sub-transport section 5c Relay transport section 6 Attitude change means 12 Dust removal filter 13 Blower fan (blower means)
14 Fan filter unit (Blower unit)
19 Adsorption pad (adsorption part)
41 Posture correction means

Claims (5)

Blow-type support means for supplying clean air toward the lower surface of the conveyed product and supporting the conveyed product in a non-contact state in a horizontal or substantially horizontal posture, and the lower surface of the conveyed product supported by the blow-type support means And a conveying device provided with a conveying unit provided with a propulsive force applying means for applying a propulsive force in the conveying direction to the conveyed object,
As the transport unit, a main transport unit that transports a transported object in a main transport posture, a sub transport unit that transports the transported object in a sub transport posture rotated about a vertical axis from the main transport posture by a predetermined angle, and the main transport A relay transport unit that transports a transported object between the main transport unit and the sub transport unit, and is located at a connection point between the main transport unit and the sub transport unit;
The relay transport unit includes a transport state in which a transported object is brought into contact with the propulsive force applying means by the relative raising and lowering of the propelling force applying means and the blower-type support means, and the propelling force applying means. In the transporting state, the object to be transported between the main transport unit and the sub transport unit is driven by the propulsive force by the propulsion force applying means. In the state for rotation, a rotational force is applied to the conveyed product by the posture changing means provided for rotating the conveyed product around the vertical axis, and the conveyed product is set to the main conveying posture and the A conveying device configured to be switched to a sub conveying posture.   The posture changing means includes an adsorption portion that can adsorb and hold the lower surface of the conveyed product so that it can be rotated around the vertical axis and can be moved up and down. The transport apparatus according to claim 1, wherein the transport device is configured to suck and hold and rotate, and to release contact of the suction unit with the transport unit in the transport state.   Posture correction that corrects the posture of the transported object that deviates from the main transport posture or the sub-transport posture to the main transport posture or the sub-transport posture by contacting the relay transport unit from the lateral side. The conveying apparatus according to claim 1 or 2, wherein means are provided. The relay transport unit is
The blower support means is provided at a height that supports the conveyed product at the same or substantially the same height as the blower support means provided in the main transport unit and the blower support means provided in the sub-transport part,
In the main transport state, the propelling force applying means is contacted and supported at the same or substantially the same height as the propelling force applying means provided in the main transport portion and the propelling force applying means provided in the sub-transport portion. In the sub-conveying state, it can be moved up and down so that it is in a lower position located below the propulsive force applying means provided in the main conveying portion and the propelling force applying means provided in the sub-transporting portion. The conveying apparatus according to any one of claims 1 to 3, wherein the conveying apparatus is configured to be provided in the apparatus.   The blower-type support means includes a blower unit in which a dust removal filter for removing dust and a blower means for supplying clean air through the dust removal filter toward the lower surface of the transported object are arranged in the transport direction. The conveyance apparatus of any one of Claims 1-4 comprised.

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