JP2010017836A - Substrate transfer device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a substrate transfer device having no slider base below the substrate when the substrate is transferred near the device. <P>SOLUTION: The substrate transfer device 1 includes: a first slider base 20 supported by a body 10; a second slider base 30 movable along a first guide rail 22 of the first slider base 20; a hand member 40 movable along a second guide rail 32 of the second slider base 30; and an interlock mechanism 50 for transferring the hand member 40 in conjunction with the second slider base 30. The interlock mechanism 50 includes a first interlock gear 51 rotating in conjunction with the second slider base 20, and a second interlock 53 whose gear ratio is smaller relative to the first interlock gear 51. The second slider base 20 has the first interlock gear 51 and the second interlock gear 53, mounted thereto, and the hand member 40 is transferred by the second interlock gear 53 in conjunction with the first interlock gear 51. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a substrate transfer apparatus for transferring a substrate.

  As a substrate transfer apparatus 100 for transferring a flat circular substrate such as a silicon wafer used in a semiconductor manufacturing process or a glass substrate used in a liquid crystal panel manufacturing process to a predetermined position, as shown in FIG. The main body 110, the first slider base 120 supported by the main body 110 so as to be able to rotate and move up and down, and the first guide rail attached to the first slider base 120 are movable in the horizontal direction. A second slider base 130, a hand member 140 that can move laterally along a second guide rail attached to the second slider base 130, and a second slider base 130 that moves in conjunction with the lateral movement. And an interlocking mechanism that moves the hand member 140 in the same direction (for example, see Patent Document 1).

  In the conventional substrate transfer apparatus 100 described above, the circular substrate W is sucked and held at the tip of the hand member 140, the first slider base 120 is rotated and lifted up and down with respect to the main body 110, and the second slider base 130 and The circular substrate W can be transported to a predetermined position by moving the hand members 140 in the horizontal direction. Such a multi-stage slide substrate transport apparatus 100 has a simple structure and high transport accuracy.

  In the conventional substrate transfer apparatus 100 described above, when the hand member 140 moves in conjunction with the second slider base 130, the amount of movement of the second slider base 130 relative to the first slider base 120, The amount of movement with respect to the second slider base 130 is equal. Since the hand member 140 moves in conjunction with the second slider base 130, the hand member 140 moves on the second guide rail at the same distance as the second slider base 130 moves on the first guide rail. Thus, the second guide rail and the first guide rail are required to have the same length.

JP 2007-095740 (paragraph 0015, FIG. 2)

  When the circular substrate W is transferred to a predetermined position using the conventional substrate transfer apparatus 100 described above, the tip of the second slider base 130 exists below the circular substrate W held by the hand member 140. In addition, it is difficult to deliver the circular substrate W, and it is difficult to dispose the receiving container below the circular substrate W. Therefore, it is desirable to transport the circular substrate W to the outside of the second slider base 130. .

Therefore, in the conventional substrate transfer apparatus 100 described above, the circular substrate W held at the distal end portion of the hand member 140 is disposed on the front side of the second slider base 130 by projecting the hand member 140 greatly toward the distal end side. Even when the circular substrate W is transported to the vicinity of the substrate transport apparatus 100, the second slider base 130 can be made not to exist below the circular substrate W, but the hand member 140 becomes larger, and the clean room There is a problem that the occupied space of the substrate transfer apparatus 100 becomes larger.
In addition, when a large circular substrate W such as a glass substrate used in a liquid crystal panel manufacturing process is transported by the hand member 140 having the tip portion protruding greatly in the transport direction, the moment acting on the hand member 140 is large. Therefore, it is necessary to increase the rigidity of the hand member 140, and there is a problem that the manufacturing cost increases.

  In the present invention, when the substrate is transported to the vicinity of the apparatus, the slider base does not exist below the substrate, and the space occupied by the apparatus can be reduced and the manufacturing can be performed. It is an object of the present invention to provide a substrate transfer device that can reduce costs.

  In order to solve the above-mentioned problem, the present invention is a substrate transport apparatus, and is attached to the main body part, a first slider base supported by the main body part so as to be capable of lateral rotation and raising and lowering, and the first slider base. A second slider base that is movable laterally along the first guide rail; a hand member that is movable laterally along the second guide rail attached to the second slider base; An interlocking mechanism for moving the hand member in the same direction in conjunction with the lateral movement of the second slider base, the interlocking mechanism interlocking with the lateral movement of the second slider base. A first interlocking gear that rotates in rotation, a second interlocking gear that has a small gear ratio with respect to the first interlocking gear, and a rotary shaft that is rotatably supported by the second slider base, The first interlocking gear and the second interlocking gear are respectively attached to both ends of the rolling shaft, and the hand member is fed out in the lateral direction by the second interlocking gear that rotates in conjunction with the first interlocking gear. It is characterized by that.

In this configuration, by setting the gear ratio of the second interlocking gear to be smaller than that of the first interlocking gear, the movement of the hand member relative to the second slider base compared to the amount of movement of the second slider base relative to the first slider base. The amount becomes smaller. Accordingly, since the distance that the hand member moves on the second guide rail is shorter than the distance that the second slider base moves on the first guide rail, the second guide rail is made shorter than the first guide rail. be able to.
Therefore, since the amount by which the second slider base to which the second guide rail is attached projects toward the front end side can be reduced, the second slider base does not exist below the substrate when the substrate is transported to the vicinity of the apparatus. Can be.
In addition, it is not necessary to project the hand member greatly toward the distal end side, and the hand member can be made small and simple in structure, so that the space occupied by the apparatus can be reduced and the manufacturing cost can be reduced.

  In addition, by adjusting the gear ratio of the second interlocking gear to the first interlocking gear, the ratio of the movement amount of the second slider base to the first slider base and the movement amount of the hand member to the second slider base can be simplified. Can be changed.

In the substrate transport apparatus described above, the first interlocking gear rolls on the upper surface of the interlocking belt provided on the first slider base when the second slider base moves in the lateral direction, It can be configured to rotate in conjunction with the lateral movement of the second slider base.
In this configuration, the first interlocking gear can be rotated in conjunction with the second slider base with a simple configuration.

  According to the substrate transfer apparatus of the present invention, the amount by which the second slider base protrudes toward the tip side can be reduced, so that when the substrate is transferred to the vicinity of the apparatus, the slider base does not exist below the substrate. Can be. In addition, the space occupied by the apparatus can be reduced, and the manufacturing cost can be reduced. Furthermore, the ratio between the amount of movement of the second slider base relative to the first slider base and the amount of movement of the hand member relative to the second slider base can be easily changed.

Next, embodiments of the present invention will be described in detail with reference to the drawings as appropriate.
In the present embodiment, a substrate positioning apparatus for transporting a circular substrate, which is a silicon wafer used in a semiconductor manufacturing process, to a predetermined position will be described as an example. In the following description, the front-rear and left-right directions correspond to the front-rear and left-right directions shown in the drawings.

  As shown in FIG. 1, the substrate transfer apparatus 1 includes a main body 10 installed on a floor surface, a first slider base 20 supported on the main body 10 so as to be able to rotate and move up and down, and the first slider. A second slider base 30 that is movable in the front-rear direction along the first guide rail 22 provided on the base 20 and a second slider base 30 that is movable in the front-rear direction along the second guide rail 32 provided on the second slider base 30. And a hand member 40 that sucks and holds the circular substrate W and an interlocking mechanism 50 that moves the hand member 40 in the front-rear direction in conjunction with the movement of the second slider base 30 in the front-rear direction.

The main body 10 includes a rectangular parallelepiped cover 11 fixed on the floor surface. As shown in FIG. 3, a column cylinder 12 is provided in the cover 11.
The column cylinder 12 is a known cylinder in which a rod 12a, which is a vertical axis, can rotate laterally around an axis, and the rod 12a can expand and contract in the vertical direction. The upper end portion of the rod 12 a protrudes from an opening (not shown) formed in the center portion of the upper surface of the cover 11.

  As shown in FIG. 1, the first slider base 20 includes a first base member 21, a first guide rail 22 attached to the upper surface of the first base member 21, and a horizontal direction along the first guide rail 22. A first slider 23 that moves in a direction, and a drive mechanism 24 that moves a second slider base 30 to be described later along the first guide rail 22 in the lateral direction.

  The first base member 21 is a flat plate-like member, is formed in a rectangular shape in plan view, and the longitudinal direction is arranged in the front-rear direction. As shown in FIG. 3, the upper end surface of the rod 12 a of the column cylinder 12 is attached to the center portion of the lower surface of the first base member 21, and the first slider base 20 is provided in the main body portion 10. The column cylinder 12 is supported so as to be able to rotate and move up and down.

As shown in FIG. 2, the first guide rail 22 is a member having a rectangular axial cross section, and the left side of the top surface of the first base member 21 with respect to the center in the width direction in a state where the axial direction is arranged in the front-rear direction. Is attached.
As shown in FIG. 1, the first slider 23 is a gate-shaped member having a groove portion in the front-rear direction formed on the lower surface, and the groove portion is assembled to the upper portion of the first guide rail 22, whereby the first guide rail 22. Can be moved in the front-rear direction.
The first guide rail 22 and the first slider 23 are known linear guides in which the first slider 23 slides laterally along the first guide rail 22.

  The drive mechanism 24 includes a drive motor 24a attached to the upper surface of the first base member 21, and a drive gear 24c attached to the tip of the drive shaft 24b of the drive motor 24a.

  The drive motor 24a is a known electric motor attached to the right side of the center in the width direction at the rear surface of the upper surface of the first base member 21, and the drive shaft 24b projects toward the left. A drive gear 24c, which is a pinion gear having a tooth surface formed around the axis of the drive shaft 24b, is attached to the left end portion of the drive shaft 24b.

  A first support member 24f is provided upright at a substantially central portion in the width direction at the upper surface front portion of the first base member 21. A first driven gear 24d, which is a pinion gear having tooth surfaces formed around the left and right axis, is attached to the upper end of the first support member 24f so as to be rotatable about the left and right axis. The first driven gear 24d has the same diameter as the drive gear 24c and is disposed at the same height as the drive gear 24c.

  An annular driving belt 24e is stretched between the driving gear 24c and the first driven gear 24d. A tooth surface is formed on the inner peripheral surface of the drive belt 24e and meshes with the tooth surfaces of the drive gear 24c and the first driven gear 24d. As the drive gear 24c rotates, the drive belt 24e rotates in the circumferential direction (clockwise and counterclockwise as viewed from the right side).

  The second slider base 30 includes a second base member 31 attached to the upper surface of the first slider 23, a second guide rail 32 attached to the side surface of the second base member 31, and the second guide rail 32. And a second slider 33 that moves in the front-rear direction.

  The second base member 31 is an L-shaped member in which a horizontal bottom plate portion 31a and a side plate portion 31b raised vertically from the right edge portion of the bottom plate portion 31a are formed, It extends in the front-rear direction.

  The bottom surface of the bottom plate portion 31 a is attached to the top surface of the first slider 23. Further, a connecting portion 31c, which is a horizontal flat plate-like member, projects from the right side surface of the side plate portion 31b. The lower surface of the connecting portion 31 c is attached to a portion exposed on the upper side of the outer peripheral surface of the driving belt 24 e of the driving mechanism 24. When the second base member 31 is located at the rear part of the first guide rail 22 (the state shown in FIG. 1), the connecting part 31c is located at the rear part of the driving belt 24e.

When the driving belt 24e rotates clockwise as viewed from the right side, the second base member 31 connected to the driving belt 24e via the connecting portion 31c moves forward along the first guide rail 22. The drive motor 24a is controlled to stop the rotation of the drive belt 24e when the connecting portion 31c moves to the front end portion of the drive belt 24e (the state shown in FIG. 2).
On the other hand, as shown in FIG. 2, when the driving belt 24 e rotates counterclockwise when viewed from the right side from the state where the second base member 31 has moved to the front portion of the first guide rail 22, the second base member 31. Moves rearward along the first guide rail 22, and when the connecting portion 31c moves to the rear end of the driving belt 24e (the state shown in FIG. 1), the rotation of the driving belt 24e stops.

As shown in FIG. 1, the second guide rail 32 is a member having a rectangular cross section, and the height of the second guide rail 32 on the left side surface of the side plate portion 31 b of the second base member 31 in a state where the axial direction is disposed in the front-rear direction. It is attached at the approximate center of the direction (see FIG. 3).
The second slider 33 is a gate-shaped member in which a groove portion in the front-rear direction is formed on the right side surface, and the groove portion is assembled to the left side portion of the second guide rail 32, thereby causing the front-rear direction along the second guide rail 32. Can be moved to.
The second guide rail 32 and the second slider 33 are known linear guides in which the second slider 33 slides in the lateral direction along the second guide rail 32.

  The interlocking mechanism 50 is a mechanism for moving the hand member 40 described later in the front-rear direction in conjunction with the movement of the second slider base 30 in the front-rear direction. The interlocking mechanism 50 includes a first interlocking gear 51 that rotates in conjunction with the longitudinal movement of the second base member 31, a second interlocking gear 53 that rotates in conjunction with the rotation of the first interlocking gear 51, A rotating shaft 52 rotatably supported by the second base member 31 of the two slider base 30, and a first interlocking gear 51 and a second interlocking gear 53 are attached to both ends of the rotating shaft 52.

The rotation shaft 52 is a horizontal shaft whose axial direction is arranged in the left-right direction, passes through the rear part of the side plate part 31b of the second base member 31, and protrudes to the left and right sides of the side plate part 31b. It is supported rotatably.
A first interlocking gear 51 that is a pinion gear having a tooth surface formed around the axis of the rotation shaft 52 is attached to the right end portion of the rotation shaft 52. A second interlocking gear 53 that is a pinion gear having a tooth surface formed around the axis of the rotating shaft 52 is attached to the left end portion of the rotating shaft 52.

  The first interlocking gear 51 rolls on the upper surface of the first interlocking belt 51d that is erected on the second support member 51b and the third support member 51c that are erected on the front and rear portions of the upper surface of the first base member 21, respectively. By moving, the second slider base 30 is configured to rotate in conjunction with the movement in the front-rear direction.

  The second support member 51b is erected at the center in the width direction at the front portion of the upper surface of the first base member 21, and the third support member 51c is erected at the center in the width direction at the rear portion of the upper surface of the first base member 21. It is installed. Note that the upper end portion of the third support member 51c is lower than the upper end portion of the second support member 51b.

Between the upper end portion of the second support member 51b and the upper end portion of the third support member 51c, a first interlocking belt 51d having a tooth surface formed on the upper surface is installed, and this first interlocking belt 51d. The first interlocking gear 51 meshes with the tooth surface.
On the right side surface of the side plate portion 31 b of the second base member 31, an auxiliary roller 51 a having a circumferential surface formed around the left and right axis is attached in front of the first interlocking gear 51 in a rotatable state. The first interlocking belt 51d is guided obliquely upward along the upper peripheral surface of the auxiliary roller 51a on the front side of the first interlocking gear 51. Therefore, the first interlocking belt 51d contacts the first interlocking gear 51 with the first interlocking gear 51 because the first interlocking belt 51d comes into contact with about a quarter of the circumferential direction from the lower end of the tooth surface of the first interlocking gear 51 to the front side. The meshing area with the belt 51d is increased.

Then, from the state where the second base member 31 is located at the rear portion of the first guide rail 22 (the state shown in FIG. 1), the second base member 31 extends along the first guide rail 22 as shown in FIG. When moved forward, the first interlocking gear 51 and the auxiliary roller 51a attached to the second base member 31 also move forward. At this time, the first interlocking gear 51 moves forward while rolling on the upper surface of the first interlocking belt 51d fixed to the first base member 21, and the first interlocking gear 51 is moved to the second base member. In conjunction with the forward movement of 31, it rotates clockwise as viewed from the right side.
On the other hand, from the state where the second base member 31 is located at the front portion of the first guide rail 22 (the state shown in FIG. 2), the second base member 31 extends along the first guide rail 22 as shown in FIG. 1. The first interlocking gear 51 moves backward while rolling on the upper surface of the first interlocking belt 51d, and the first interlocking gear 51 moves backward of the second base member 31. Rotates counterclockwise when viewed from the right side.

The second interlocking gear 53 is attached to the left end portion of the rotating shaft 52 and rotates around the axis of the rotating shaft 52 together with the first interlocking gear 51 attached to the right end portion of the rotating shaft 52.
In this embodiment, the gear ratio of the second interlocking gear 53 to the first interlocking gear 51 is set by setting the number of teeth of the first interlocking gear 51 to 32 and the number of teeth of the second interlocking gear 53 to 24. The second interlocking gear 53 is set to have a smaller gear ratio than the first interlocking gear 51.

  A second driven gear 53a is attached at the same height as the second interlocking gear 53 at the front portion of the left side surface of the side plate portion 31b of the second base member 31 so as to be rotatable about a left-right axis. . The second driven gear 53a is a pinion gear having the same diameter as the second interlocking gear 53 and having a tooth surface formed around the left and right axis.

  An annular second interlocking belt 53b is stretched between the second interlocking gear 53 and the second driven gear 53a, and the tooth surface formed on the inner peripheral surface of the second interlocking belt 53b is the second interlocking belt 53b. It meshes with the tooth surfaces of the interlocking gear 53 and the second driven gear 53a. Then, as the second interlocking gear 53 rotates, the second interlocking belt 53b rotates in the circumferential direction.

  The hand member 40 is formed with a support portion 41 attached to the second slider 33 and a holding portion 42 that holds the circular substrate W by suction.

  The support part 41 is a flat plate-like member, is formed in a rectangular shape in a side view, and the longitudinal direction is arranged in the vertical direction. The lower end portion of the right side surface of the support portion 41 is attached to the left side surface of the second slider 33 (see FIG. 3). Further, the upper end portion of the support portion 41 projects upward from the second interlocking belt 53 b of the interlocking mechanism 50.

  On the upper part of the right side surface of the support portion 41, a flat plate-like connecting portion 41a protrudes horizontally. The lower surface of the connecting portion 41a is attached to a portion exposed to the upper side on the outer peripheral surface of the second interlocking belt 53b of the interlocking mechanism 50. When the second slider 33 is located at the rear part of the second guide rail 32 (state of FIG. 1), the connecting part 41a is located at the rear part of the second interlocking belt 53b.

When the second interlocking belt 53b rotates clockwise as viewed from the right side, the hand member 40 connected to the second interlocking belt 53b via the connecting part 41a moves forward along the second guide rail 32. To do.
On the other hand, as shown in FIG. 2, when the second interlocking belt 53 b rotates counterclockwise when viewed from the right side from the state where the hand member 40 has moved to the front portion of the second guide rail 32, the hand member 40 is moved to the first position. It moves backward along the two guide rails 32.

The holding portion 42 is a flat plate-like portion that protrudes horizontally from the upper end of the support portion 41 toward the front, and is formed in a rectangular shape in plan view. The rear portion of the right edge of the holding portion 42 is the support portion 41. It is connected to the upper end of the.
Piping (not shown) for evacuation is provided inside the holding portion 42, and holding is performed by evacuating from a number of fine suction holes 42a formed in the tip region on the upper surface of the holding portion 42. The circular substrate W can be sucked and held at the tip of the portion 42.

The substrate transport apparatus 1 configured as described above operates as follows to achieve the effects of the present invention.
Here, as shown in FIG. 1, the second slider base 30 is located at the rear part of the first slider base 20 and the hand member 40 is located at the rear part of the second slider base 30. As shown, a case will be described in which the second slider base 30 and the hand member 40 are moved forward to extend the multistage slide structure including the second slider base 30 and the hand member 40 forward.

  When the drive motor 24a of the first slider base 20 is driven to rotate the drive gear 24c and the drive belt 24e is rotated clockwise as viewed from the right side, the second slider base 30 connected to the drive belt 24e The second base member 31 moves forward along the first guide rail 22 (see FIG. 2).

When the second base member 31 moves forward along the first guide rail 22, the first interlocking gear 51 attached to the second base member 31 moves forward while rolling on the upper surface of the first interlocking belt 51d. The first interlocking gear 51 rotates clockwise as viewed from the right side.
Further, the second interlocking gear 53 rotates together with the first interlocking gear 51, whereby the second interlocking belt 53b rotates clockwise as viewed from the right side, and the hand member 40 connected to the second interlocking belt 53b is moved. It moves forward along the second guide rail 32.

  In this way, by extending the multi-stage slide structure including the second slider base 30 and the hand member 40 toward the front, as shown in FIG. Can be transported to a predetermined position set in front of the main body 10.

  Here, in the substrate transfer apparatus 1 of the present embodiment, the first member for moving the hand member 40 in the front-rear direction with respect to the first interlocking gear 51 that rotates in conjunction with the movement of the second slider base 30 in the front-rear direction. The gear ratio of the two interlocking gears 53 is set to 0.75. That is, in the substrate transfer apparatus 1 of this embodiment, the movement amount of the hand member 40 relative to the second slider base 30 is smaller than the movement amount of the second slider base 30 relative to the first slider base 20.

  In the present embodiment, when the amount of movement of the second slider base 30 relative to the first slider base 20 is 1, the amount of movement of the hand member 40 relative to the second slider base 30 is a ratio of 0.75. Therefore, if the distance that the second slider base 30 moves on the first guide rail 22 is assumed to be 100, the distance that the hand member 40 moves on the second guide rail 32 becomes 75, so that the second guide rail 32 can be shorter than the first guide rail 22. In the substrate transport apparatus 1 of the present embodiment, when the length of the first guide rail 22 in the front-rear direction is 1, the length of the second guide rail 32 in the front-rear direction is 0.75.

In the substrate transfer apparatus 1 of the present embodiment, as shown in FIG. 4A, the second guide rail 32 can be made shorter than the first guide rail 22, and the second slider to which the second guide rail 32 is attached. Since the amount by which the base 30 protrudes to the front end side (front side) can be reduced, the second slider base 30 exists below the circular substrate W when the circular substrate W is transferred to the vicinity of the substrate transfer apparatus 1. You can avoid it.
In addition, it is not necessary to project the hand member 40 greatly toward the tip side, and the hand member 40 can be made small and simple in structure, so that the occupied space of the substrate transport apparatus 1 can be reduced and the manufacturing cost can be reduced. Can do.

As a comparative example, in the substrate transfer apparatus 1 ′ shown in FIG. 4B, the movement amount of the second slider base 30 ′ relative to the first slider base 20 and the movement amount of the hand member 40 relative to the second slider base 30 ′. And are equal. In this configuration, the second guide rail 32 ′ needs to have the same length as the length of the first guide rail 22 in the front-rear direction, and the second slider base 30 ′ corresponds to the front-rear direction of the second guide rail 32 ′. The length of is set. Therefore, in the substrate transfer apparatus 1 ′ of the comparative example, the second slider base 30 ′ is larger in the front-rear direction than the second slider base 30 of the substrate transfer apparatus 1 (see FIG. 4A) of the present embodiment. Yes.
Then, as shown in FIGS. 4A and 4B, when the center of the circular substrate W is transported to the position A that is in the vicinity of the substrate transport devices 1 and 1 ′, the substrate transport device 1 of the present embodiment has the following structure. The second slider base 30 does not exist below the circular substrate W. However, in the substrate transfer apparatus 1 ′ of the comparative example, the second slider base 30 ′ is more than the second slider base 30 of the substrate transfer apparatus 1 of the present embodiment. Is large in the front-rear direction, and therefore, the second slider base 30 ′ exists below the circular substrate W.

The embodiments of the present invention have been described above. However, the present invention is not limited to the above-described embodiments, and various design changes can be made without departing from the spirit of the present invention.
In the substrate transfer apparatus 1 of the present embodiment shown in FIG. 1, when the movement amount of the second slider base 30 relative to the first slider base 20 is 1, the movement amount of the hand member 40 relative to the second slider base 30 is 0.75. The gear ratio of the second interlocking gear 53 to the first interlocking gear 51 is set to 0.75 so that the ratio of the second slider base 30 moves relative to the first slider base 20. The gear ratio of the second interlocking gear 53 to the first interlocking gear 51 may be set so that the amount of movement of the hand member 40 relative to the second slider base 30 is small. For example, when the gear ratio of the second interlocking gear 53 to the first interlocking gear 51 is set to 0.5, the length of the second guide rail 32 is made smaller than the length of the first guide rail 22. Therefore, even if the circular substrate W is transported closer, the second slider base 30 does not exist below the circular substrate W.

  In the substrate transfer apparatus 1 of the present embodiment, a known linear slider is used for the movement of the second slider base 30 relative to the first slider base 20 and the movement of the hand member 40 relative to the second slider base 30. The configuration is not limited as long as the second slider base 30 slides relative to the first slider base 20 and the hand member 40 can slide relative to the second slider base 30. For example, a rack and pinion mechanism can be used.

  Further, when a box-shaped cover that covers the first slider base 20 and the second slider base 30 is provided and an exhaust fan that exhausts the air in the cover into the main body 10 is provided, Particles generated as the hand member 40 moves can be discharged into the main body 10.

In the board | substrate conveyance apparatus of this embodiment, it is the perspective view which showed the state which the multistage slide structure degenerated. In the substrate transfer apparatus of this embodiment, it is the perspective view which showed the state which the multistage slide structure extended | stretched. It is the side view which showed the board | substrate conveyance apparatus of this embodiment. It is the figure which showed the board | substrate conveyance apparatus of this embodiment, and the board | substrate conveyance apparatus of a comparative example, (a) is a side view of the board | substrate conveyance apparatus of this embodiment, (b) is a side view of the board | substrate size apparatus of a comparative example. is there. It is the perspective view which showed the conventional board | substrate conveyance apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Substrate conveyance apparatus 10 Main-body part 12a Column cylinder 20 1st slider base 21 1st base member 22 1st guide rail 23 1st slider 24 Drive mechanism 24a Drive motor 24c Drive gear 24d 1st driven gear 24e Drive belt 30 2nd Slider base 31 Second base member 32 Second guide rail 33 Second slider 40 Hand member 50 Interlocking mechanism 51 First interlocking gear 51d First interlocking belt 52 Rotating shaft 53 Second interlocking gear 53a Second driven gear 53b Second interlocking Belt W Circular substrate

Claims (2)

The main body,
A first slider base supported by the main body so as to be able to rotate and move up and down;
A second slider base movable laterally along a first guide rail attached to the first slider base;
A hand member that is movable laterally along a second guide rail attached to the second slider base, and holds the substrate;
An interlocking mechanism for moving the hand member in the same direction in conjunction with the lateral movement of the second slider base;
The interlocking mechanism is
A first interlocking gear that rotates in conjunction with the lateral movement of the second slider base;
A second interlocking gear having a small gear ratio with respect to the first interlocking gear;
A rotating shaft rotatably supported by the second slider base,
The first interlocking gear and the second interlocking gear are respectively attached to both ends of the rotating shaft, and the hand member is moved laterally by the second interlocking gear that rotates in conjunction with the first interlocking gear. A substrate transfer apparatus which is sent out.   The first interlocking gear rolls on the upper surface of the interlocking belt provided on the first slider base when the second slider base moves in the lateral direction, so that the lateral direction of the second slider base The substrate transfer apparatus according to claim 1, wherein the substrate transfer device rotates in conjunction with the movement of the substrate.

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