JPS60195860A - 動的観察表示装置 - Google Patents

動的観察表示装置

Info

Publication number
JPS60195860A
JPS60195860A JP59050568A JP5056884A JPS60195860A JP S60195860 A JPS60195860 A JP S60195860A JP 59050568 A JP59050568 A JP 59050568A JP 5056884 A JP5056884 A JP 5056884A JP S60195860 A JPS60195860 A JP S60195860A
Authority
JP
Japan
Prior art keywords
signal
stress
scanning
sample
display
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59050568A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0574183B2 (enExample
Inventor
Ryuichi Shimizu
志水　隆一
Takashi Ikuta
孝 生田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Science and Technology Agency
Shingijutsu Kaihatsu Jigyodan
Original Assignee
Research Development Corp of Japan
Shingijutsu Kaihatsu Jigyodan
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Research Development Corp of Japan, Shingijutsu Kaihatsu Jigyodan filed Critical Research Development Corp of Japan
Priority to JP59050568A priority Critical patent/JPS60195860A/ja
Publication of JPS60195860A publication Critical patent/JPS60195860A/ja
Publication of JPH0574183B2 publication Critical patent/JPH0574183B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP59050568A 1984-03-16 1984-03-16 動的観察表示装置 Granted JPS60195860A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59050568A JPS60195860A (ja) 1984-03-16 1984-03-16 動的観察表示装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59050568A JPS60195860A (ja) 1984-03-16 1984-03-16 動的観察表示装置

Publications (2)

Publication Number Publication Date
JPS60195860A true JPS60195860A (ja) 1985-10-04
JPH0574183B2 JPH0574183B2 (enExample) 1993-10-15

Family

ID=12862604

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59050568A Granted JPS60195860A (ja) 1984-03-16 1984-03-16 動的観察表示装置

Country Status (1)

Country Link
JP (1) JPS60195860A (enExample)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57196465A (en) * 1981-05-28 1982-12-02 Nichidenshi Tekunikusu:Kk Scanning electron microscope

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57196465A (en) * 1981-05-28 1982-12-02 Nichidenshi Tekunikusu:Kk Scanning electron microscope

Also Published As

Publication number Publication date
JPH0574183B2 (enExample) 1993-10-15

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term