JPS60186406A - アルフア型窒化けい素の連続的製造方法 - Google Patents

アルフア型窒化けい素の連続的製造方法

Info

Publication number
JPS60186406A
JPS60186406A JP4069184A JP4069184A JPS60186406A JP S60186406 A JPS60186406 A JP S60186406A JP 4069184 A JP4069184 A JP 4069184A JP 4069184 A JP4069184 A JP 4069184A JP S60186406 A JPS60186406 A JP S60186406A
Authority
JP
Japan
Prior art keywords
furnace
silicon nitride
tunnel furnace
metal silicon
type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4069184A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0218284B2 (enrdf_load_stackoverflow
Inventor
Mitsuo Umemura
梅村　光雄
Yasushi Matsudaira
靖 松平
Yoshihiro Kubota
芳宏 久保田
Toshimi Kobayashi
小林　利美
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP4069184A priority Critical patent/JPS60186406A/ja
Publication of JPS60186406A publication Critical patent/JPS60186406A/ja
Publication of JPH0218284B2 publication Critical patent/JPH0218284B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/068—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with silicon
    • C01B21/0682—Preparation by direct nitridation of silicon

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Products (AREA)
JP4069184A 1984-03-03 1984-03-03 アルフア型窒化けい素の連続的製造方法 Granted JPS60186406A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4069184A JPS60186406A (ja) 1984-03-03 1984-03-03 アルフア型窒化けい素の連続的製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4069184A JPS60186406A (ja) 1984-03-03 1984-03-03 アルフア型窒化けい素の連続的製造方法

Publications (2)

Publication Number Publication Date
JPS60186406A true JPS60186406A (ja) 1985-09-21
JPH0218284B2 JPH0218284B2 (enrdf_load_stackoverflow) 1990-04-25

Family

ID=12587575

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4069184A Granted JPS60186406A (ja) 1984-03-03 1984-03-03 アルフア型窒化けい素の連続的製造方法

Country Status (1)

Country Link
JP (1) JPS60186406A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63147807A (ja) * 1986-12-11 1988-06-20 Shin Etsu Chem Co Ltd 高α型窒化けい素の製造方法
US5232677A (en) * 1990-01-31 1993-08-03 Shin-Etsu Chemical Co., Ltd. Preparation of silicon nitride powder by partially nitriding in a fluidized bed and then completing nitridation in a moving bed
JP2023149329A (ja) * 2022-03-31 2023-10-13 株式会社プロテリアル 窒化珪素基板の製造方法、窒化珪素基板の製造装置および窒化珪素基板

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5888107A (ja) * 1981-11-16 1983-05-26 Denki Kagaku Kogyo Kk α型窒化珪素の連続製造法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5888107A (ja) * 1981-11-16 1983-05-26 Denki Kagaku Kogyo Kk α型窒化珪素の連続製造法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63147807A (ja) * 1986-12-11 1988-06-20 Shin Etsu Chem Co Ltd 高α型窒化けい素の製造方法
US5232677A (en) * 1990-01-31 1993-08-03 Shin-Etsu Chemical Co., Ltd. Preparation of silicon nitride powder by partially nitriding in a fluidized bed and then completing nitridation in a moving bed
JP2023149329A (ja) * 2022-03-31 2023-10-13 株式会社プロテリアル 窒化珪素基板の製造方法、窒化珪素基板の製造装置および窒化珪素基板

Also Published As

Publication number Publication date
JPH0218284B2 (enrdf_load_stackoverflow) 1990-04-25

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Legal Events

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EXPY Cancellation because of completion of term