JPS60180964A - 窒化アルミニウム焼結体の製造方法 - Google Patents

窒化アルミニウム焼結体の製造方法

Info

Publication number
JPS60180964A
JPS60180964A JP59032548A JP3254884A JPS60180964A JP S60180964 A JPS60180964 A JP S60180964A JP 59032548 A JP59032548 A JP 59032548A JP 3254884 A JP3254884 A JP 3254884A JP S60180964 A JPS60180964 A JP S60180964A
Authority
JP
Japan
Prior art keywords
aluminum nitride
sintered body
powder
weight
nitride sintered
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59032548A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0512299B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
倉元　信行
谷口　人文
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokuyama Corp
Original Assignee
Tokuyama Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokuyama Corp filed Critical Tokuyama Corp
Priority to JP59032548A priority Critical patent/JPS60180964A/ja
Publication of JPS60180964A publication Critical patent/JPS60180964A/ja
Publication of JPH0512299B2 publication Critical patent/JPH0512299B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Ceramic Products (AREA)
JP59032548A 1984-02-24 1984-02-24 窒化アルミニウム焼結体の製造方法 Granted JPS60180964A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59032548A JPS60180964A (ja) 1984-02-24 1984-02-24 窒化アルミニウム焼結体の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59032548A JPS60180964A (ja) 1984-02-24 1984-02-24 窒化アルミニウム焼結体の製造方法

Publications (2)

Publication Number Publication Date
JPS60180964A true JPS60180964A (ja) 1985-09-14
JPH0512299B2 JPH0512299B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-02-17

Family

ID=12361983

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59032548A Granted JPS60180964A (ja) 1984-02-24 1984-02-24 窒化アルミニウム焼結体の製造方法

Country Status (1)

Country Link
JP (1) JPS60180964A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6461361A (en) * 1987-09-01 1989-03-08 Sumitomo Electric Industries Aluminum nitride sintered compact having high heat conductivity
US6017485A (en) * 1996-03-28 2000-01-25 Carborundum Corporation Process for making a low electrical resistivity, high purity aluminum nitride electrostatic chuck
CN108863366A (zh) * 2018-07-11 2018-11-23 无锡市惠诚石墨烯技术应用有限公司 一种基于石墨烯制备高导热氮化铝粉末的方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5023411A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1973-06-30 1975-03-13
JPS5734232A (en) * 1980-08-07 1982-02-24 Toshiba Corp Information processor

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5023411A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1973-06-30 1975-03-13
JPS5734232A (en) * 1980-08-07 1982-02-24 Toshiba Corp Information processor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6461361A (en) * 1987-09-01 1989-03-08 Sumitomo Electric Industries Aluminum nitride sintered compact having high heat conductivity
US6017485A (en) * 1996-03-28 2000-01-25 Carborundum Corporation Process for making a low electrical resistivity, high purity aluminum nitride electrostatic chuck
CN108863366A (zh) * 2018-07-11 2018-11-23 无锡市惠诚石墨烯技术应用有限公司 一种基于石墨烯制备高导热氮化铝粉末的方法

Also Published As

Publication number Publication date
JPH0512299B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-02-17

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