JPS60179040U - 半導体ペレツト搭載装置 - Google Patents

半導体ペレツト搭載装置

Info

Publication number
JPS60179040U
JPS60179040U JP6664984U JP6664984U JPS60179040U JP S60179040 U JPS60179040 U JP S60179040U JP 6664984 U JP6664984 U JP 6664984U JP 6664984 U JP6664984 U JP 6664984U JP S60179040 U JPS60179040 U JP S60179040U
Authority
JP
Japan
Prior art keywords
wafer
turntable
semiconductor pellet
pellet loading
loading equipment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6664984U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0110932Y2 (enEXAMPLES
Inventor
隆一郎 森中
Original Assignee
関西日本電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 関西日本電気株式会社 filed Critical 関西日本電気株式会社
Priority to JP6664984U priority Critical patent/JPS60179040U/ja
Publication of JPS60179040U publication Critical patent/JPS60179040U/ja
Application granted granted Critical
Publication of JPH0110932Y2 publication Critical patent/JPH0110932Y2/ja
Granted legal-status Critical Current

Links

JP6664984U 1984-05-07 1984-05-07 半導体ペレツト搭載装置 Granted JPS60179040U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6664984U JPS60179040U (ja) 1984-05-07 1984-05-07 半導体ペレツト搭載装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6664984U JPS60179040U (ja) 1984-05-07 1984-05-07 半導体ペレツト搭載装置

Publications (2)

Publication Number Publication Date
JPS60179040U true JPS60179040U (ja) 1985-11-28
JPH0110932Y2 JPH0110932Y2 (enEXAMPLES) 1989-03-29

Family

ID=30599750

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6664984U Granted JPS60179040U (ja) 1984-05-07 1984-05-07 半導体ペレツト搭載装置

Country Status (1)

Country Link
JP (1) JPS60179040U (enEXAMPLES)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6231137A (ja) * 1985-08-02 1987-02-10 Matsushita Electric Ind Co Ltd ダイスボンデイング装置
JP2009188306A (ja) * 2008-02-08 2009-08-20 Panasonic Corp チップ供給装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6231137A (ja) * 1985-08-02 1987-02-10 Matsushita Electric Ind Co Ltd ダイスボンデイング装置
JP2009188306A (ja) * 2008-02-08 2009-08-20 Panasonic Corp チップ供給装置

Also Published As

Publication number Publication date
JPH0110932Y2 (enEXAMPLES) 1989-03-29

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