JPS60176272A - 半導体記憶装置の製造方法 - Google Patents

半導体記憶装置の製造方法

Info

Publication number
JPS60176272A
JPS60176272A JP59032828A JP3282884A JPS60176272A JP S60176272 A JPS60176272 A JP S60176272A JP 59032828 A JP59032828 A JP 59032828A JP 3282884 A JP3282884 A JP 3282884A JP S60176272 A JPS60176272 A JP S60176272A
Authority
JP
Japan
Prior art keywords
film
oxide film
silicon film
crystal silicon
inert gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59032828A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0587992B2 (OSRAM
Inventor
Yuichi Mikata
見方　裕一
Kazuyoshi Shinada
品田　一義
Seiichi Mori
誠一 森
Koichi Kanzaki
神崎　晃一
Toshiro Usami
俊郎 宇佐美
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP59032828A priority Critical patent/JPS60176272A/ja
Publication of JPS60176272A publication Critical patent/JPS60176272A/ja
Publication of JPH0587992B2 publication Critical patent/JPH0587992B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates

Landscapes

  • Non-Volatile Memory (AREA)
JP59032828A 1984-02-23 1984-02-23 半導体記憶装置の製造方法 Granted JPS60176272A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59032828A JPS60176272A (ja) 1984-02-23 1984-02-23 半導体記憶装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59032828A JPS60176272A (ja) 1984-02-23 1984-02-23 半導体記憶装置の製造方法

Publications (2)

Publication Number Publication Date
JPS60176272A true JPS60176272A (ja) 1985-09-10
JPH0587992B2 JPH0587992B2 (OSRAM) 1993-12-20

Family

ID=12369685

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59032828A Granted JPS60176272A (ja) 1984-02-23 1984-02-23 半導体記憶装置の製造方法

Country Status (1)

Country Link
JP (1) JPS60176272A (OSRAM)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6267877A (ja) * 1985-09-20 1987-03-27 Seiko Epson Corp 不揮発性半導体記憶装置の製造方法
JPS6317551A (ja) * 1986-04-01 1988-01-25 テキサス　インスツルメンツ　インコ−ポレイテツド 集積回路の製造方法
US7445096B2 (en) 2004-12-15 2008-11-04 Stabilus Gmbh Piston-cylinder unit and process for producing a piston-cylinder unit

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6267877A (ja) * 1985-09-20 1987-03-27 Seiko Epson Corp 不揮発性半導体記憶装置の製造方法
JPS6317551A (ja) * 1986-04-01 1988-01-25 テキサス　インスツルメンツ　インコ−ポレイテツド 集積回路の製造方法
US7445096B2 (en) 2004-12-15 2008-11-04 Stabilus Gmbh Piston-cylinder unit and process for producing a piston-cylinder unit

Also Published As

Publication number Publication date
JPH0587992B2 (OSRAM) 1993-12-20

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term