JPS60174855U - ポ−ラロセンサ - Google Patents

ポ−ラロセンサ

Info

Publication number
JPS60174855U
JPS60174855U JP6368684U JP6368684U JPS60174855U JP S60174855 U JPS60174855 U JP S60174855U JP 6368684 U JP6368684 U JP 6368684U JP 6368684 U JP6368684 U JP 6368684U JP S60174855 U JPS60174855 U JP S60174855U
Authority
JP
Japan
Prior art keywords
polaro
insulating
sensor
semiconductor substrate
peripheral part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6368684U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0320768Y2 (enExample
Inventor
永田　保広
照雄 木戸
秀夫 片山
向井　藤司
吉明 吉田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daikin Industries Ltd
Original Assignee
Daikin Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daikin Industries Ltd filed Critical Daikin Industries Ltd
Priority to JP6368684U priority Critical patent/JPS60174855U/ja
Publication of JPS60174855U publication Critical patent/JPS60174855U/ja
Application granted granted Critical
Publication of JPH0320768Y2 publication Critical patent/JPH0320768Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
JP6368684U 1984-04-27 1984-04-27 ポ−ラロセンサ Granted JPS60174855U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6368684U JPS60174855U (ja) 1984-04-27 1984-04-27 ポ−ラロセンサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6368684U JPS60174855U (ja) 1984-04-27 1984-04-27 ポ−ラロセンサ

Publications (2)

Publication Number Publication Date
JPS60174855U true JPS60174855U (ja) 1985-11-19
JPH0320768Y2 JPH0320768Y2 (enExample) 1991-05-07

Family

ID=30594068

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6368684U Granted JPS60174855U (ja) 1984-04-27 1984-04-27 ポ−ラロセンサ

Country Status (1)

Country Link
JP (1) JPS60174855U (enExample)

Also Published As

Publication number Publication date
JPH0320768Y2 (enExample) 1991-05-07

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