JPS60170241A - 平坦度ステーション及び平坦度を求める方法 - Google Patents

平坦度ステーション及び平坦度を求める方法

Info

Publication number
JPS60170241A
JPS60170241A JP60008953A JP895385A JPS60170241A JP S60170241 A JPS60170241 A JP S60170241A JP 60008953 A JP60008953 A JP 60008953A JP 895385 A JP895385 A JP 895385A JP S60170241 A JPS60170241 A JP S60170241A
Authority
JP
Japan
Prior art keywords
sample
points
thickness
data
predetermined
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60008953A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0577179B2 (enrdf_load_stackoverflow
Inventor
ロバート・シー・エイブ
ノエル・エス・ポダジユ
ネイル・エイチ・ジユデル
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EI DEII II CORP
Original Assignee
EI DEII II CORP
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by EI DEII II CORP filed Critical EI DEII II CORP
Publication of JPS60170241A publication Critical patent/JPS60170241A/ja
Publication of JPH0577179B2 publication Critical patent/JPH0577179B2/ja
Granted legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
    • Y02T10/00—Road transport of goods or passengers
    • Y02T10/60—Other road transportation technologies with climate change mitigation effect
    • Y02T10/62—Hybrid vehicles

Landscapes

  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP60008953A 1984-01-20 1985-01-21 平坦度ステーション及び平坦度を求める方法 Granted JPS60170241A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US57269584A 1984-01-20 1984-01-20
US572695 1984-01-20

Publications (2)

Publication Number Publication Date
JPS60170241A true JPS60170241A (ja) 1985-09-03
JPH0577179B2 JPH0577179B2 (enrdf_load_stackoverflow) 1993-10-26

Family

ID=24288957

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60008953A Granted JPS60170241A (ja) 1984-01-20 1985-01-21 平坦度ステーション及び平坦度を求める方法

Country Status (1)

Country Link
JP (1) JPS60170241A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011107143A (ja) * 1998-06-04 2011-06-02 Performance Friction Corp 一体化したターニング・センタを有する非接触検査システム
DE19826319B4 (de) * 1997-06-11 2011-08-11 Kuroda Precision Industries Ltd., Kanagawa Optische Vorrichtungen zur Messung von Profilen eines Wafers

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19826319B4 (de) * 1997-06-11 2011-08-11 Kuroda Precision Industries Ltd., Kanagawa Optische Vorrichtungen zur Messung von Profilen eines Wafers
JP2011107143A (ja) * 1998-06-04 2011-06-02 Performance Friction Corp 一体化したターニング・センタを有する非接触検査システム

Also Published As

Publication number Publication date
JPH0577179B2 (enrdf_load_stackoverflow) 1993-10-26

Similar Documents

Publication Publication Date Title
TW469483B (en) Method and apparatus for aligning a cassette
US4860229A (en) Wafer flatness station
CN111805374B (zh) 磨削装置
JPH0549042B2 (enrdf_load_stackoverflow)
JP2865711B2 (ja) 座標測定装置における被測定体の温度の検出法及び座標測定装置
JP2000340639A (ja) ディスク状素子のアライメント装置及びアライメント方法
JPH09152329A (ja) 平面度測定装置
CN209295918U (zh) 一种齿轮检测装置
JPH07101703B2 (ja) 保持装置及び非反復誤差の補償システム
JP3035690B2 (ja) ウェーハ直径・断面形状測定装置及びそれを組み込んだウェーハ面取り機
JPH10106984A (ja) 半導体ウエハー研磨装置における研磨方法及び研磨制御装置
TWI297109B (enrdf_load_stackoverflow)
JP7714253B2 (ja) 研磨ヘッドと搬送ステーションの作動位置を較正する方法
TWI789895B (zh) 載具測定裝置、載具測定方法及載具管理方法
JP2005005608A (ja) 基板搬送ロボットのティーチング装置及びティーチング方法
JPS60170241A (ja) 平坦度ステーション及び平坦度を求める方法
US2700319A (en) Optical wheel alighner with single adjustable beam reflector-deflector
JP2952331B2 (ja) プローブ装置
EP0371967A1 (en) DEVICE FOR SCANING AN UNPROCESSED LENS AND A MACHINE WITH SUCH A DEVICE.
JP7526611B2 (ja) 加工システム及び加工方法
US7068378B2 (en) Apparatus and method for measuring amount of projection of abrasive grain on grinding tool
JP2002093762A (ja) ウエハの研削装置
JP3116261B2 (ja) プローブ装置
JP5165450B2 (ja) 研削装置及び板状物の厚み算出方法
JP3648114B2 (ja) 薄膜磁気ヘッド素材研磨装置および研磨用冶具ならびにスライダの製造方法

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees