JPH0577179B2 - - Google Patents

Info

Publication number
JPH0577179B2
JPH0577179B2 JP60008953A JP895385A JPH0577179B2 JP H0577179 B2 JPH0577179 B2 JP H0577179B2 JP 60008953 A JP60008953 A JP 60008953A JP 895385 A JP895385 A JP 895385A JP H0577179 B2 JPH0577179 B2 JP H0577179B2
Authority
JP
Japan
Prior art keywords
thickness
flatness
sample
wafer
station
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP60008953A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60170241A (ja
Inventor
Shii Eibu Robaato
Esu Hodaju Noeru
Eichi Juderu Neiru
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EI DEII II CORP
Original Assignee
EI DEII II CORP
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by EI DEII II CORP filed Critical EI DEII II CORP
Publication of JPS60170241A publication Critical patent/JPS60170241A/ja
Publication of JPH0577179B2 publication Critical patent/JPH0577179B2/ja
Granted legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
    • Y02T10/00—Road transport of goods or passengers
    • Y02T10/60—Other road transportation technologies with climate change mitigation effect
    • Y02T10/62—Hybrid vehicles

Landscapes

  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP60008953A 1984-01-20 1985-01-21 平坦度ステーション及び平坦度を求める方法 Granted JPS60170241A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US57269584A 1984-01-20 1984-01-20
US572695 1984-01-20

Publications (2)

Publication Number Publication Date
JPS60170241A JPS60170241A (ja) 1985-09-03
JPH0577179B2 true JPH0577179B2 (enrdf_load_stackoverflow) 1993-10-26

Family

ID=24288957

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60008953A Granted JPS60170241A (ja) 1984-01-20 1985-01-21 平坦度ステーション及び平坦度を求める方法

Country Status (1)

Country Link
JP (1) JPS60170241A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19826319B4 (de) * 1997-06-11 2011-08-11 Kuroda Precision Industries Ltd., Kanagawa Optische Vorrichtungen zur Messung von Profilen eines Wafers

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6233533B1 (en) * 1998-06-04 2001-05-15 Performance Friction Corporation Turning center with integrated non-contact inspection system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19826319B4 (de) * 1997-06-11 2011-08-11 Kuroda Precision Industries Ltd., Kanagawa Optische Vorrichtungen zur Messung von Profilen eines Wafers

Also Published As

Publication number Publication date
JPS60170241A (ja) 1985-09-03

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees