JPS60161524A - 光学式変位検出装置 - Google Patents

光学式変位検出装置

Info

Publication number
JPS60161524A
JPS60161524A JP1746484A JP1746484A JPS60161524A JP S60161524 A JPS60161524 A JP S60161524A JP 1746484 A JP1746484 A JP 1746484A JP 1746484 A JP1746484 A JP 1746484A JP S60161524 A JPS60161524 A JP S60161524A
Authority
JP
Japan
Prior art keywords
scale
light
main scale
index
main
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1746484A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0374769B2 (enrdf_load_stackoverflow
Inventor
Hiroshi Hanaoka
花岡　浩
Sadayuki Matsumiya
貞行 松宮
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsutoyo Manufacturing Co Ltd
Original Assignee
Mitsutoyo Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsutoyo Manufacturing Co Ltd filed Critical Mitsutoyo Manufacturing Co Ltd
Priority to JP1746484A priority Critical patent/JPS60161524A/ja
Priority to US06/693,658 priority patent/US4684257A/en
Publication of JPS60161524A publication Critical patent/JPS60161524A/ja
Publication of JPH0374769B2 publication Critical patent/JPH0374769B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
JP1746484A 1984-02-02 1984-02-02 光学式変位検出装置 Granted JPS60161524A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP1746484A JPS60161524A (ja) 1984-02-02 1984-02-02 光学式変位検出装置
US06/693,658 US4684257A (en) 1984-02-02 1985-01-22 Measuring instrument

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1746484A JPS60161524A (ja) 1984-02-02 1984-02-02 光学式変位検出装置

Publications (2)

Publication Number Publication Date
JPS60161524A true JPS60161524A (ja) 1985-08-23
JPH0374769B2 JPH0374769B2 (enrdf_load_stackoverflow) 1991-11-28

Family

ID=11944741

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1746484A Granted JPS60161524A (ja) 1984-02-02 1984-02-02 光学式変位検出装置

Country Status (1)

Country Link
JP (1) JPS60161524A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8141265B2 (en) 2008-06-17 2012-03-27 Renishaw Plc Scale track
JP2021021683A (ja) * 2019-07-30 2021-02-18 株式会社ミツトヨ スケールおよびその製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8141265B2 (en) 2008-06-17 2012-03-27 Renishaw Plc Scale track
JP2021021683A (ja) * 2019-07-30 2021-02-18 株式会社ミツトヨ スケールおよびその製造方法

Also Published As

Publication number Publication date
JPH0374769B2 (enrdf_load_stackoverflow) 1991-11-28

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees