JPS60154671A - 半導体装置 - Google Patents

半導体装置

Info

Publication number
JPS60154671A
JPS60154671A JP59010065A JP1006584A JPS60154671A JP S60154671 A JPS60154671 A JP S60154671A JP 59010065 A JP59010065 A JP 59010065A JP 1006584 A JP1006584 A JP 1006584A JP S60154671 A JPS60154671 A JP S60154671A
Authority
JP
Japan
Prior art keywords
region
substrate
type
conductivity type
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59010065A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0560266B2 (enrdf_load_stackoverflow
Inventor
Kazuo Nakazato
和郎 中里
Toru Nakamura
徹 中村
Masataka Kato
正高 加藤
Takao Miyazaki
隆雄 宮崎
Takahiro Okabe
岡部　隆博
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP59010065A priority Critical patent/JPS60154671A/ja
Publication of JPS60154671A publication Critical patent/JPS60154671A/ja
Publication of JPH0560266B2 publication Critical patent/JPH0560266B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/63—Vertical IGFETs

Landscapes

  • Electrodes Of Semiconductors (AREA)
JP59010065A 1984-01-25 1984-01-25 半導体装置 Granted JPS60154671A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59010065A JPS60154671A (ja) 1984-01-25 1984-01-25 半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59010065A JPS60154671A (ja) 1984-01-25 1984-01-25 半導体装置

Publications (2)

Publication Number Publication Date
JPS60154671A true JPS60154671A (ja) 1985-08-14
JPH0560266B2 JPH0560266B2 (enrdf_load_stackoverflow) 1993-09-01

Family

ID=11739975

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59010065A Granted JPS60154671A (ja) 1984-01-25 1984-01-25 半導体装置

Country Status (1)

Country Link
JP (1) JPS60154671A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0616371A3 (en) * 1993-03-18 1995-08-02 Canon Kk Silicon on semiconductor insulator assembly and method of manufacture.
US11227925B2 (en) 2017-04-14 2022-01-18 Ptek Technology Co., Ltd. Semiconductor device and charging system using the same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0616371A3 (en) * 1993-03-18 1995-08-02 Canon Kk Silicon on semiconductor insulator assembly and method of manufacture.
US11227925B2 (en) 2017-04-14 2022-01-18 Ptek Technology Co., Ltd. Semiconductor device and charging system using the same

Also Published As

Publication number Publication date
JPH0560266B2 (enrdf_load_stackoverflow) 1993-09-01

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