JPS60153137A - 半導体装置の寸法測定方法 - Google Patents

半導体装置の寸法測定方法

Info

Publication number
JPS60153137A
JPS60153137A JP59009086A JP908684A JPS60153137A JP S60153137 A JPS60153137 A JP S60153137A JP 59009086 A JP59009086 A JP 59009086A JP 908684 A JP908684 A JP 908684A JP S60153137 A JPS60153137 A JP S60153137A
Authority
JP
Japan
Prior art keywords
length
electrodes
layer
resistance
diffusion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59009086A
Other languages
English (en)
Japanese (ja)
Other versions
JPH033943B2 (enrdf_load_stackoverflow
Inventor
Masaharu Yamamoto
雅晴 山本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp, Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electronics Corp
Priority to JP59009086A priority Critical patent/JPS60153137A/ja
Publication of JPS60153137A publication Critical patent/JPS60153137A/ja
Publication of JPH033943B2 publication Critical patent/JPH033943B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Semiconductor Integrated Circuits (AREA)
JP59009086A 1984-01-20 1984-01-20 半導体装置の寸法測定方法 Granted JPS60153137A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59009086A JPS60153137A (ja) 1984-01-20 1984-01-20 半導体装置の寸法測定方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59009086A JPS60153137A (ja) 1984-01-20 1984-01-20 半導体装置の寸法測定方法

Publications (2)

Publication Number Publication Date
JPS60153137A true JPS60153137A (ja) 1985-08-12
JPH033943B2 JPH033943B2 (enrdf_load_stackoverflow) 1991-01-21

Family

ID=11710802

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59009086A Granted JPS60153137A (ja) 1984-01-20 1984-01-20 半導体装置の寸法測定方法

Country Status (1)

Country Link
JP (1) JPS60153137A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100336792B1 (ko) * 2000-05-25 2002-05-16 박종섭 실리사이드막 제조공정의 평가를 위한 시험 패턴의 구조
KR100819558B1 (ko) 2006-09-04 2008-04-07 삼성전자주식회사 반도체 저항소자들 및 그의 형성방법들
US9153260B1 (en) * 2008-03-27 2015-10-06 Western Digital (Fremont), Llc Electronic lapping guide in a magnetic recording transducer

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100336792B1 (ko) * 2000-05-25 2002-05-16 박종섭 실리사이드막 제조공정의 평가를 위한 시험 패턴의 구조
KR100819558B1 (ko) 2006-09-04 2008-04-07 삼성전자주식회사 반도체 저항소자들 및 그의 형성방법들
US7838966B2 (en) 2006-09-04 2010-11-23 Samsung Electronics Co., Ltd. Semiconductor devices including resistor elements comprising a bridge and base elements and related methods
US9153260B1 (en) * 2008-03-27 2015-10-06 Western Digital (Fremont), Llc Electronic lapping guide in a magnetic recording transducer

Also Published As

Publication number Publication date
JPH033943B2 (enrdf_load_stackoverflow) 1991-01-21

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