JPS60130702A - 合成樹脂基板の反射防止膜 - Google Patents

合成樹脂基板の反射防止膜

Info

Publication number
JPS60130702A
JPS60130702A JP58238812A JP23881283A JPS60130702A JP S60130702 A JPS60130702 A JP S60130702A JP 58238812 A JP58238812 A JP 58238812A JP 23881283 A JP23881283 A JP 23881283A JP S60130702 A JPS60130702 A JP S60130702A
Authority
JP
Japan
Prior art keywords
film
layer
synthetic resin
thickness
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58238812A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0461321B2 (en:Method
Inventor
Mitsuo Kakehi
筧　光夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP58238812A priority Critical patent/JPS60130702A/ja
Publication of JPS60130702A publication Critical patent/JPS60130702A/ja
Publication of JPH0461321B2 publication Critical patent/JPH0461321B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/113—Anti-reflection coatings using inorganic layer materials only
    • G02B1/115—Multilayers

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Surface Treatment Of Optical Elements (AREA)
JP58238812A 1983-12-20 1983-12-20 合成樹脂基板の反射防止膜 Granted JPS60130702A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58238812A JPS60130702A (ja) 1983-12-20 1983-12-20 合成樹脂基板の反射防止膜

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58238812A JPS60130702A (ja) 1983-12-20 1983-12-20 合成樹脂基板の反射防止膜

Publications (2)

Publication Number Publication Date
JPS60130702A true JPS60130702A (ja) 1985-07-12
JPH0461321B2 JPH0461321B2 (en:Method) 1992-09-30

Family

ID=17035651

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58238812A Granted JPS60130702A (ja) 1983-12-20 1983-12-20 合成樹脂基板の反射防止膜

Country Status (1)

Country Link
JP (1) JPS60130702A (en:Method)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6258201A (ja) * 1985-09-09 1987-03-13 Mitsubishi Shindo Kk 反射防止フイルタ
JPS63113502A (ja) * 1986-10-31 1988-05-18 Canon Inc 反射防止膜
JPH06234294A (ja) * 1993-02-09 1994-08-23 Atsumi Komori レタリング用プレート

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6258201A (ja) * 1985-09-09 1987-03-13 Mitsubishi Shindo Kk 反射防止フイルタ
JPS63113502A (ja) * 1986-10-31 1988-05-18 Canon Inc 反射防止膜
JPH06234294A (ja) * 1993-02-09 1994-08-23 Atsumi Komori レタリング用プレート

Also Published As

Publication number Publication date
JPH0461321B2 (en:Method) 1992-09-30

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