JPS60110685U - タ−ボ分子ポンプを用いた排気系 - Google Patents

タ−ボ分子ポンプを用いた排気系

Info

Publication number
JPS60110685U
JPS60110685U JP20190583U JP20190583U JPS60110685U JP S60110685 U JPS60110685 U JP S60110685U JP 20190583 U JP20190583 U JP 20190583U JP 20190583 U JP20190583 U JP 20190583U JP S60110685 U JPS60110685 U JP S60110685U
Authority
JP
Japan
Prior art keywords
pump
exhaust system
molecular pump
valve
turbo
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20190583U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6325340Y2 (enrdf_load_stackoverflow
Inventor
平野　治男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP20190583U priority Critical patent/JPS60110685U/ja
Publication of JPS60110685U publication Critical patent/JPS60110685U/ja
Application granted granted Critical
Publication of JPS6325340Y2 publication Critical patent/JPS6325340Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP20190583U 1983-12-28 1983-12-28 タ−ボ分子ポンプを用いた排気系 Granted JPS60110685U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20190583U JPS60110685U (ja) 1983-12-28 1983-12-28 タ−ボ分子ポンプを用いた排気系

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20190583U JPS60110685U (ja) 1983-12-28 1983-12-28 タ−ボ分子ポンプを用いた排気系

Publications (2)

Publication Number Publication Date
JPS60110685U true JPS60110685U (ja) 1985-07-26
JPS6325340Y2 JPS6325340Y2 (enrdf_load_stackoverflow) 1988-07-11

Family

ID=30764124

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20190583U Granted JPS60110685U (ja) 1983-12-28 1983-12-28 タ−ボ分子ポンプを用いた排気系

Country Status (1)

Country Link
JP (1) JPS60110685U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01118190U (enrdf_load_stackoverflow) * 1988-02-03 1989-08-09
JP2003258077A (ja) * 2002-02-28 2003-09-12 Tokyo Electron Ltd 被処理体収納容器体及び処理システム

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01118190U (enrdf_load_stackoverflow) * 1988-02-03 1989-08-09
JP2003258077A (ja) * 2002-02-28 2003-09-12 Tokyo Electron Ltd 被処理体収納容器体及び処理システム

Also Published As

Publication number Publication date
JPS6325340Y2 (enrdf_load_stackoverflow) 1988-07-11

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