JPS60103651U - 真空吸着台 - Google Patents
真空吸着台Info
- Publication number
- JPS60103651U JPS60103651U JP1983195273U JP19527383U JPS60103651U JP S60103651 U JPS60103651 U JP S60103651U JP 1983195273 U JP1983195273 U JP 1983195273U JP 19527383 U JP19527383 U JP 19527383U JP S60103651 U JPS60103651 U JP S60103651U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum suction
- suction table
- porous material
- firing
- adhesive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/27—Work carriers
- B24B37/30—Work carriers for single side lapping of plane surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
- B24B41/068—Table-like supports for panels, sheets or the like
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
- B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
- B24B7/228—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding thin, brittle parts, e.g. semiconductors, wafers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
- B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
- B25B11/005—Vacuum work holders
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Jigs For Machine Tools (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
め要約のデータは記録されません。
Description
図は本考案の一実施例を示す断面図である。
Claims (1)
- (1)半導体ウェハなどの被吸着部材を真空吸引により
密着させる平面状の吸着面を有する真空吸着台において
、真空吸着台本体は多孔質物質の焼成により形成されて
おり、被吸着部材の載置される平面状の吸着部を除(外
縁部は前記吸着部を包囲する如く通気孔のない接着剤又
は結合剤によって形成したことを特徴とする真空吸着(
2)外縁部は無機質の粒状物質の混在した接着剤又は結
合剤によって形成されていることを特徴とする実用新案
登録請求の範囲第1項記載の真空吸着台。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1983195273U JPS60103651U (ja) | 1983-12-19 | 1983-12-19 | 真空吸着台 |
US06/671,676 US4597228A (en) | 1983-12-19 | 1984-11-15 | Vacuum suction device |
DE8484308420T DE3476348D1 (en) | 1983-12-19 | 1984-12-04 | Vacuum suction device |
EP84308420A EP0147094B1 (en) | 1983-12-19 | 1984-12-04 | Vacuum suction device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1983195273U JPS60103651U (ja) | 1983-12-19 | 1983-12-19 | 真空吸着台 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS60103651U true JPS60103651U (ja) | 1985-07-15 |
Family
ID=16338413
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1983195273U Pending JPS60103651U (ja) | 1983-12-19 | 1983-12-19 | 真空吸着台 |
Country Status (4)
Country | Link |
---|---|
US (1) | US4597228A (ja) |
EP (1) | EP0147094B1 (ja) |
JP (1) | JPS60103651U (ja) |
DE (1) | DE3476348D1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014028418A (ja) * | 2012-07-31 | 2014-02-13 | Mitsuboshi Diamond Industrial Co Ltd | 吸着テーブルの製造方法並びに吸着テーブル |
Families Citing this family (46)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63210148A (ja) * | 1987-02-26 | 1988-08-31 | Nikko Rika Kk | 真空チヤツク用プラスチツクス焼結体 |
SE460955B (sv) * | 1987-12-18 | 1989-12-11 | Kommanditbolaget Cold Isostati | Saett vid framstaellning av en roerformig pulverpresskropp samt en foer genomfoerande av saettet avsedd anordning |
JP2719855B2 (ja) * | 1991-05-24 | 1998-02-25 | 信越半導体株式会社 | ウエーハ外周の鏡面面取り装置 |
DE4335980C2 (de) * | 1993-10-21 | 1998-09-10 | Wacker Siltronic Halbleitermat | Verfahren zum Positionieren einer Werkstückhalterung |
US5674115A (en) * | 1994-07-06 | 1997-10-07 | Sony Corporation | Apparatus for grinding a master disc |
JP3055401B2 (ja) * | 1994-08-29 | 2000-06-26 | 信越半導体株式会社 | ワークの平面研削方法及び装置 |
US5643044A (en) * | 1994-11-01 | 1997-07-01 | Lund; Douglas E. | Automatic chemical and mechanical polishing system for semiconductor wafers |
US5632667A (en) * | 1995-06-29 | 1997-05-27 | Delco Electronics Corporation | No coat backside wafer grinding process |
KR100189970B1 (ko) * | 1995-08-07 | 1999-06-01 | 윤종용 | 웨이퍼 연마장치 |
JP3072962B2 (ja) * | 1995-11-30 | 2000-08-07 | ロデール・ニッタ株式会社 | 研磨のための被加工物の保持具及びその製法 |
JP3663728B2 (ja) * | 1996-03-28 | 2005-06-22 | 信越半導体株式会社 | 薄板の研磨機 |
US6126520A (en) * | 1996-10-07 | 2000-10-03 | Raytheon Company | Fixture and methodology for coupling an optical component to a machine |
US5803797A (en) * | 1996-11-26 | 1998-09-08 | Micron Technology, Inc. | Method and apparatus to hold intergrated circuit chips onto a chuck and to simultaneously remove multiple intergrated circuit chips from a cutting chuck |
US5809987A (en) * | 1996-11-26 | 1998-09-22 | Micron Technology,Inc. | Apparatus for reducing damage to wafer cutting blades during wafer dicing |
JP3348429B2 (ja) * | 1996-12-26 | 2002-11-20 | 信越半導体株式会社 | 薄板ワーク平面研削方法 |
JPH10193260A (ja) * | 1996-12-27 | 1998-07-28 | Shin Etsu Handotai Co Ltd | ウエーハ保持治具 |
DE19722679A1 (de) * | 1997-05-30 | 1998-12-03 | Wacker Siltronic Halbleitermat | Scheibenhalter und Verfahren zur Herstellung einer Halbleiterscheibe |
US5964646A (en) * | 1997-11-17 | 1999-10-12 | Strasbaugh | Grinding process and apparatus for planarizing sawed wafers |
US6080050A (en) * | 1997-12-31 | 2000-06-27 | Applied Materials, Inc. | Carrier head including a flexible membrane and a compliant backing member for a chemical mechanical polishing apparatus |
US5993302A (en) * | 1997-12-31 | 1999-11-30 | Applied Materials, Inc. | Carrier head with a removable retaining ring for a chemical mechanical polishing apparatus |
JP2968784B1 (ja) * | 1998-06-19 | 1999-11-02 | 日本電気株式会社 | 研磨方法およびそれに用いる装置 |
US6358129B2 (en) * | 1998-11-11 | 2002-03-19 | Micron Technology, Inc. | Backing members and planarizing machines for mechanical and chemical-mechanical planarization of microelectronic-device substrate assemblies, and methods of making and using such backing members |
US6173948B1 (en) * | 1999-01-20 | 2001-01-16 | International Business Machines Corporation | Dimensional compensating vacuum fixture |
JP3623122B2 (ja) * | 1999-02-12 | 2005-02-23 | 信越半導体株式会社 | 研磨用ワーク保持盤およびワークの研磨装置ならびにワークの研磨方法 |
US6112735A (en) * | 1999-03-02 | 2000-09-05 | Micron Technology, Inc. | Complete blade and wafer handling and support system without tape |
FR2802340B1 (fr) | 1999-12-13 | 2003-09-05 | Commissariat Energie Atomique | Structure comportant des cellules photovoltaiques et procede de realisation |
US7018268B2 (en) * | 2002-04-09 | 2006-03-28 | Strasbaugh | Protection of work piece during surface processing |
JP2004022899A (ja) * | 2002-06-18 | 2004-01-22 | Shinko Electric Ind Co Ltd | 薄シリコンウエーハの加工方法 |
US20060086703A1 (en) * | 2004-08-18 | 2006-04-27 | Ling Liu | System and method for singulating a substrate |
JP4350695B2 (ja) * | 2004-12-01 | 2009-10-21 | 株式会社フューチャービジョン | 処理装置 |
US7434453B2 (en) * | 2005-07-08 | 2008-10-14 | General Electric Company | Vacuum-assisted fixture for holding a part |
CN1730239B (zh) * | 2005-08-08 | 2010-04-07 | 罗淼 | 一种窄条玻璃的磨削方法 |
US20100024968A1 (en) * | 2008-07-30 | 2010-02-04 | United Technologies Corporation | Adhesive installation tool |
JP5943742B2 (ja) * | 2012-07-04 | 2016-07-05 | 三菱電機株式会社 | 半導体試験治具およびそれを用いた半導体試験方法 |
US9227261B2 (en) * | 2013-08-06 | 2016-01-05 | Globalfoundries Inc. | Vacuum carriers for substrate bonding |
US10300569B2 (en) * | 2014-10-14 | 2019-05-28 | Technical Tooling L.L.C. | Method for fabricating vacuum fixturing using granular media |
US10933594B2 (en) * | 2014-10-14 | 2021-03-02 | Technical Tooling LLC | Method for forming a part using a layup tool |
KR20170016547A (ko) * | 2015-08-03 | 2017-02-14 | 삼성전자주식회사 | 척 테이블 및 그를 포함하는 기판 제조 장치 |
JP6792363B2 (ja) * | 2016-07-22 | 2020-11-25 | 株式会社ディスコ | 研削装置 |
JP6815138B2 (ja) * | 2016-09-06 | 2021-01-20 | 株式会社ディスコ | 吸引保持システム |
TWI613449B (zh) * | 2016-12-30 | 2018-02-01 | 致茂電子股份有限公司 | 吸附式測試裝置 |
US10780549B2 (en) * | 2017-12-26 | 2020-09-22 | Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd. | Polishing device |
KR102420162B1 (ko) * | 2018-02-09 | 2022-07-12 | 삼성전자주식회사 | 진공 척 및 이를 포함하는 반도체 제조 장치 |
US11529717B2 (en) * | 2019-03-08 | 2022-12-20 | The Boeing Company | Supporting a contoured sheet of material during machining operations |
CN114799345A (zh) * | 2021-01-18 | 2022-07-29 | 广东博智林机器人有限公司 | 切割机器人 |
TWI770906B (zh) * | 2021-03-26 | 2022-07-11 | 環球晶圓股份有限公司 | 晶圓表面缺陷檢測方法及其裝置 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5856441B2 (ja) * | 1978-12-29 | 1983-12-15 | 三菱電機株式会社 | 照明装置 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2756644A (en) * | 1953-09-04 | 1956-07-31 | Gordon N Steele | Vacuum fixture |
DE1237942B (de) * | 1962-07-19 | 1967-03-30 | Siemens Ag | Vorrichtung zum Haltern scheibenfoermiger Werkstuecke aus Halbleitermaterial durch Ansaugen |
US3294392A (en) * | 1963-05-31 | 1966-12-27 | Dunham Tool Company Inc | Vacuum chucking |
DE1291698B (de) * | 1965-06-14 | 1969-03-27 | Siemens Ag | Vorrichtung zur Halterung von Werkstuecken |
US3652075A (en) * | 1969-11-10 | 1972-03-28 | Sheldon Thompson | Vacuum chuck and related apparatus and methods |
DD145824A1 (de) * | 1979-08-10 | 1981-01-07 | Ulf Weber | Einrichtung zur vakuumaufspannung von halbleiterscheiben |
US4521995A (en) * | 1980-05-23 | 1985-06-11 | Disco Co., Ltd. | Wafer attracting and fixing device |
JPS58180026A (ja) * | 1982-04-15 | 1983-10-21 | Nippon Telegr & Teleph Corp <Ntt> | ウエハ研磨用吸着板 |
-
1983
- 1983-12-19 JP JP1983195273U patent/JPS60103651U/ja active Pending
-
1984
- 1984-11-15 US US06/671,676 patent/US4597228A/en not_active Expired - Fee Related
- 1984-12-04 DE DE8484308420T patent/DE3476348D1/de not_active Expired
- 1984-12-04 EP EP84308420A patent/EP0147094B1/en not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5856441B2 (ja) * | 1978-12-29 | 1983-12-15 | 三菱電機株式会社 | 照明装置 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014028418A (ja) * | 2012-07-31 | 2014-02-13 | Mitsuboshi Diamond Industrial Co Ltd | 吸着テーブルの製造方法並びに吸着テーブル |
Also Published As
Publication number | Publication date |
---|---|
EP0147094B1 (en) | 1989-01-25 |
EP0147094A3 (en) | 1986-09-17 |
US4597228A (en) | 1986-07-01 |
EP0147094A2 (en) | 1985-07-03 |
DE3476348D1 (en) | 1989-03-02 |
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