JPS6010022Y2 - 酸化物半導体膜製造装置 - Google Patents

酸化物半導体膜製造装置

Info

Publication number
JPS6010022Y2
JPS6010022Y2 JP1981042143U JP4214381U JPS6010022Y2 JP S6010022 Y2 JPS6010022 Y2 JP S6010022Y2 JP 1981042143 U JP1981042143 U JP 1981042143U JP 4214381 U JP4214381 U JP 4214381U JP S6010022 Y2 JPS6010022 Y2 JP S6010022Y2
Authority
JP
Japan
Prior art keywords
substrate
evaporation
oxide semiconductor
semiconductor film
electron beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1981042143U
Other languages
English (en)
Japanese (ja)
Other versions
JPS56148811U (enExample
Inventor
秀雄 吉田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP1981042143U priority Critical patent/JPS6010022Y2/ja
Publication of JPS56148811U publication Critical patent/JPS56148811U/ja
Application granted granted Critical
Publication of JPS6010022Y2 publication Critical patent/JPS6010022Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Non-Insulated Conductors (AREA)
  • Manufacturing Of Electric Cables (AREA)
JP1981042143U 1981-03-24 1981-03-24 酸化物半導体膜製造装置 Expired JPS6010022Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981042143U JPS6010022Y2 (ja) 1981-03-24 1981-03-24 酸化物半導体膜製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981042143U JPS6010022Y2 (ja) 1981-03-24 1981-03-24 酸化物半導体膜製造装置

Publications (2)

Publication Number Publication Date
JPS56148811U JPS56148811U (enExample) 1981-11-09
JPS6010022Y2 true JPS6010022Y2 (ja) 1985-04-06

Family

ID=29637527

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981042143U Expired JPS6010022Y2 (ja) 1981-03-24 1981-03-24 酸化物半導体膜製造装置

Country Status (1)

Country Link
JP (1) JPS6010022Y2 (enExample)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1446848A (en) * 1972-11-29 1976-08-18 Triplex Safety Glass Co Sputtered metal oxide coatings articles comprising transparent electrically-conductive coatings on non-conducting substrates

Also Published As

Publication number Publication date
JPS56148811U (enExample) 1981-11-09

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