JPS5995205U - レ−ザ−干渉計 - Google Patents

レ−ザ−干渉計

Info

Publication number
JPS5995205U
JPS5995205U JP19009882U JP19009882U JPS5995205U JP S5995205 U JPS5995205 U JP S5995205U JP 19009882 U JP19009882 U JP 19009882U JP 19009882 U JP19009882 U JP 19009882U JP S5995205 U JPS5995205 U JP S5995205U
Authority
JP
Japan
Prior art keywords
lens
wavefront
optical axis
light source
test
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19009882U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6342324Y2 (enrdf_load_stackoverflow
Inventor
大野　政博
Original Assignee
旭光学工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 旭光学工業株式会社 filed Critical 旭光学工業株式会社
Priority to JP19009882U priority Critical patent/JPS5995205U/ja
Publication of JPS5995205U publication Critical patent/JPS5995205U/ja
Application granted granted Critical
Publication of JPS6342324Y2 publication Critical patent/JPS6342324Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP19009882U 1982-12-16 1982-12-16 レ−ザ−干渉計 Granted JPS5995205U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19009882U JPS5995205U (ja) 1982-12-16 1982-12-16 レ−ザ−干渉計

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19009882U JPS5995205U (ja) 1982-12-16 1982-12-16 レ−ザ−干渉計

Publications (2)

Publication Number Publication Date
JPS5995205U true JPS5995205U (ja) 1984-06-28
JPS6342324Y2 JPS6342324Y2 (enrdf_load_stackoverflow) 1988-11-07

Family

ID=30409680

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19009882U Granted JPS5995205U (ja) 1982-12-16 1982-12-16 レ−ザ−干渉計

Country Status (1)

Country Link
JP (1) JPS5995205U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6342324Y2 (enrdf_load_stackoverflow) 1988-11-07

Similar Documents

Publication Publication Date Title
JPS5995336U (ja) ビデオカメラ
JPS5995205U (ja) レ−ザ−干渉計
JPS57199909A (en) Distance measuring device
JP3040131B2 (ja) 球体表面の傷検査装置
JPS621105U (enrdf_load_stackoverflow)
JPS57186106A (en) Inspection device for surface
JP2000241344A (ja) 透明基板上の表面検査装置
JPS6134117U (ja) 距離検出装置における投光光学系
JPS5917248A (ja) 異物検査方式
JPH03130639A (ja) Ｍｔｆ測定装置の光軸整合方法
JPH01245137A (ja) ガラスディスク表面検査装置におけるレーザビーム投光方式
JPS62176709U (enrdf_load_stackoverflow)
JPH0178938U (enrdf_load_stackoverflow)
JPS5998353U (ja) レチクル面の傷の検出装置
JPH0626814A (ja) ホログラム干渉計装置
JPS6035243U (ja) 半導体レ−ザの非点隔差測定装置
JPS626111A (ja) 反射光による表面粗さ計
JPS60102606U (ja) 光点位置測定装置
JPS6082208U (ja) 被測定面の位置測定装置
JPS58138010U (ja) 寸法測定装置
JPS6025954U (ja) 欠陥検査装置
JPS62138317U (enrdf_load_stackoverflow)
JPH0198946A (ja) 光学測定器用集光光学系
JPS614601U (ja) 瞳孔反応検査装置
JPS6238414A (ja) 光軸調整方法