JPS5991729U - 液相エピタキシヤル成長装置 - Google Patents

液相エピタキシヤル成長装置

Info

Publication number
JPS5991729U
JPS5991729U JP18826082U JP18826082U JPS5991729U JP S5991729 U JPS5991729 U JP S5991729U JP 18826082 U JP18826082 U JP 18826082U JP 18826082 U JP18826082 U JP 18826082U JP S5991729 U JPS5991729 U JP S5991729U
Authority
JP
Japan
Prior art keywords
crystal
liquid phase
slider
solution
raw material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18826082U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0129783Y2 (enExample
Inventor
野口　悦男
治男 永井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP18826082U priority Critical patent/JPS5991729U/ja
Publication of JPS5991729U publication Critical patent/JPS5991729U/ja
Application granted granted Critical
Publication of JPH0129783Y2 publication Critical patent/JPH0129783Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP18826082U 1982-12-13 1982-12-13 液相エピタキシヤル成長装置 Granted JPS5991729U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18826082U JPS5991729U (ja) 1982-12-13 1982-12-13 液相エピタキシヤル成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18826082U JPS5991729U (ja) 1982-12-13 1982-12-13 液相エピタキシヤル成長装置

Publications (2)

Publication Number Publication Date
JPS5991729U true JPS5991729U (ja) 1984-06-21
JPH0129783Y2 JPH0129783Y2 (enExample) 1989-09-11

Family

ID=30406177

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18826082U Granted JPS5991729U (ja) 1982-12-13 1982-12-13 液相エピタキシヤル成長装置

Country Status (1)

Country Link
JP (1) JPS5991729U (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60117616A (ja) * 1983-11-30 1985-06-25 Fujitsu Ltd 液相エピタキシヤル成長方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60117616A (ja) * 1983-11-30 1985-06-25 Fujitsu Ltd 液相エピタキシヤル成長方法

Also Published As

Publication number Publication date
JPH0129783Y2 (enExample) 1989-09-11

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