JPS5987825A - ダイ・ボンデイング方法 - Google Patents
ダイ・ボンデイング方法Info
- Publication number
- JPS5987825A JPS5987825A JP19675882A JP19675882A JPS5987825A JP S5987825 A JPS5987825 A JP S5987825A JP 19675882 A JP19675882 A JP 19675882A JP 19675882 A JP19675882 A JP 19675882A JP S5987825 A JPS5987825 A JP S5987825A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor laser
- bonding
- submount
- heating element
- capillary
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims description 22
- 238000010438 heat treatment Methods 0.000 claims abstract description 49
- 239000004065 semiconductor Substances 0.000 claims abstract description 37
- 239000000463 material Substances 0.000 claims abstract description 18
- 238000002844 melting Methods 0.000 claims description 3
- 230000008018 melting Effects 0.000 claims description 3
- 239000007789 gas Substances 0.000 abstract description 9
- 239000011261 inert gas Substances 0.000 abstract description 5
- 229910015363 Au—Sn Inorganic materials 0.000 abstract description 4
- 238000003466 welding Methods 0.000 abstract description 4
- 229910000679 solder Inorganic materials 0.000 abstract 4
- 229910015365 Au—Si Inorganic materials 0.000 abstract 1
- 229910020816 Sn Pb Inorganic materials 0.000 abstract 1
- 229910020922 Sn-Pb Inorganic materials 0.000 abstract 1
- 229910008783 Sn—Pb Inorganic materials 0.000 abstract 1
- 238000005219 brazing Methods 0.000 description 8
- 239000002184 metal Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 238000005485 electric heating Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000000945 filler Substances 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 241000270281 Coluber constrictor Species 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- OQZCSNDVOWYALR-UHFFFAOYSA-N flurochloridone Chemical compound FC(F)(F)C1=CC=CC(N2C(C(Cl)C(CCl)C2)=O)=C1 OQZCSNDVOWYALR-UHFFFAOYSA-N 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000005201 scrubbing Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
Classifications
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- H01L24/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
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- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L24/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
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Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Semiconductor Lasers (AREA)
- Die Bonding (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19675882A JPS5987825A (ja) | 1982-11-11 | 1982-11-11 | ダイ・ボンデイング方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19675882A JPS5987825A (ja) | 1982-11-11 | 1982-11-11 | ダイ・ボンデイング方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5987825A true JPS5987825A (ja) | 1984-05-21 |
JPH0554260B2 JPH0554260B2 (enrdf_load_stackoverflow) | 1993-08-12 |
Family
ID=16363123
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19675882A Granted JPS5987825A (ja) | 1982-11-11 | 1982-11-11 | ダイ・ボンデイング方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5987825A (enrdf_load_stackoverflow) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01121927U (enrdf_load_stackoverflow) * | 1988-02-12 | 1989-08-18 | ||
GB2377402A (en) * | 2001-07-12 | 2003-01-15 | Agilent Technologies Inc | Die bond strip |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54100258A (en) * | 1978-01-25 | 1979-08-07 | Hitachi Ltd | Pellet bonding method |
JPS55110048A (en) * | 1979-02-16 | 1980-08-25 | Hitachi Ltd | Pellet bonding method |
JPS5624941A (en) * | 1979-08-07 | 1981-03-10 | Mitsubishi Electric Corp | Manufacture of semiconductor device |
-
1982
- 1982-11-11 JP JP19675882A patent/JPS5987825A/ja active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54100258A (en) * | 1978-01-25 | 1979-08-07 | Hitachi Ltd | Pellet bonding method |
JPS55110048A (en) * | 1979-02-16 | 1980-08-25 | Hitachi Ltd | Pellet bonding method |
JPS5624941A (en) * | 1979-08-07 | 1981-03-10 | Mitsubishi Electric Corp | Manufacture of semiconductor device |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01121927U (enrdf_load_stackoverflow) * | 1988-02-12 | 1989-08-18 | ||
GB2377402A (en) * | 2001-07-12 | 2003-01-15 | Agilent Technologies Inc | Die bond strip |
GB2377402B (en) * | 2001-07-12 | 2004-05-12 | Agilent Technologies Inc | Improved diebond strip |
US7559455B2 (en) | 2001-07-12 | 2009-07-14 | Avago Technologies Fiber Ip (Singapore) Pte. Ltd. | Diebond strip |
Also Published As
Publication number | Publication date |
---|---|
JPH0554260B2 (enrdf_load_stackoverflow) | 1993-08-12 |
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