JPS5979547A - 微小部品吸着装置 - Google Patents
微小部品吸着装置Info
- Publication number
- JPS5979547A JPS5979547A JP57191510A JP19151082A JPS5979547A JP S5979547 A JPS5979547 A JP S5979547A JP 57191510 A JP57191510 A JP 57191510A JP 19151082 A JP19151082 A JP 19151082A JP S5979547 A JPS5979547 A JP S5979547A
- Authority
- JP
- Japan
- Prior art keywords
- nozzle
- negative pressure
- outer nozzle
- suction
- collar
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
- H10P72/78—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using vacuum or suction, e.g. Bernoulli chucks
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/50—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment
Landscapes
- Supply And Installment Of Electrical Components (AREA)
- Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
- Manipulator (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57191510A JPS5979547A (ja) | 1982-10-28 | 1982-10-28 | 微小部品吸着装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57191510A JPS5979547A (ja) | 1982-10-28 | 1982-10-28 | 微小部品吸着装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5979547A true JPS5979547A (ja) | 1984-05-08 |
| JPS635900B2 JPS635900B2 (https=) | 1988-02-05 |
Family
ID=16275849
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57191510A Granted JPS5979547A (ja) | 1982-10-28 | 1982-10-28 | 微小部品吸着装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5979547A (https=) |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61112830U (https=) * | 1984-12-26 | 1986-07-17 | ||
| JPS61199697A (ja) * | 1985-03-01 | 1986-09-04 | 日本電気株式会社 | チツプ部品搭載機 |
| JPS61267656A (ja) * | 1985-05-20 | 1986-11-27 | Matsushita Electric Ind Co Ltd | 電子部品の突上げ装置 |
| JPS6215891A (ja) * | 1985-07-12 | 1987-01-24 | 松下電器産業株式会社 | 電子部品移載装置 |
| JPS63107544U (https=) * | 1986-12-27 | 1988-07-11 | ||
| JPH01246899A (ja) * | 1988-03-29 | 1989-10-02 | Toshiba Corp | 部品装着装置 |
| JPH0627067U (ja) * | 1992-09-05 | 1994-04-12 | 九州コマツ電子株式会社 | 真空チャック |
| WO2009056468A1 (en) * | 2007-10-31 | 2009-05-07 | Oerlikon Assembly Equipment Ag, Steinhausen | Pick-up tool and method for grasping and mounting small dies |
| CN103872191A (zh) * | 2014-02-26 | 2014-06-18 | 九江嘉远科技有限公司 | 一种led系列smt吸嘴及其制作工艺 |
| WO2016001720A1 (en) * | 2014-07-03 | 2016-01-07 | Daems Giovanni Bvba | Handling device for picking up a stone from a holder and for setting this stone in a workpiece |
| CN110733892A (zh) * | 2015-12-01 | 2020-01-31 | 耐克创新有限合伙公司 | 制造的拾取工具 |
| US12612267B2 (en) | 2023-12-18 | 2026-04-28 | Nike, Inc. | Manufacturing pickup tool |
-
1982
- 1982-10-28 JP JP57191510A patent/JPS5979547A/ja active Granted
Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61112830U (https=) * | 1984-12-26 | 1986-07-17 | ||
| JPS61199697A (ja) * | 1985-03-01 | 1986-09-04 | 日本電気株式会社 | チツプ部品搭載機 |
| JPS61267656A (ja) * | 1985-05-20 | 1986-11-27 | Matsushita Electric Ind Co Ltd | 電子部品の突上げ装置 |
| JPS6215891A (ja) * | 1985-07-12 | 1987-01-24 | 松下電器産業株式会社 | 電子部品移載装置 |
| JPS63107544U (https=) * | 1986-12-27 | 1988-07-11 | ||
| JPH01246899A (ja) * | 1988-03-29 | 1989-10-02 | Toshiba Corp | 部品装着装置 |
| JPH0627067U (ja) * | 1992-09-05 | 1994-04-12 | 九州コマツ電子株式会社 | 真空チャック |
| WO2009056468A1 (en) * | 2007-10-31 | 2009-05-07 | Oerlikon Assembly Equipment Ag, Steinhausen | Pick-up tool and method for grasping and mounting small dies |
| CN103872191A (zh) * | 2014-02-26 | 2014-06-18 | 九江嘉远科技有限公司 | 一种led系列smt吸嘴及其制作工艺 |
| CN103872191B (zh) * | 2014-02-26 | 2017-04-05 | 九江嘉远科技有限公司 | 一种led系列smt吸嘴的制造方法 |
| WO2016001720A1 (en) * | 2014-07-03 | 2016-01-07 | Daems Giovanni Bvba | Handling device for picking up a stone from a holder and for setting this stone in a workpiece |
| CN110733892A (zh) * | 2015-12-01 | 2020-01-31 | 耐克创新有限合伙公司 | 制造的拾取工具 |
| US11078033B2 (en) | 2015-12-01 | 2021-08-03 | Nike, Inc. | Manufacturing pickup tool |
| CN110733892B (zh) * | 2015-12-01 | 2021-09-03 | 耐克创新有限合伙公司 | 制造的拾取工具 |
| US11884496B2 (en) | 2015-12-01 | 2024-01-30 | Nike, Inc. | Manufacturing pickup tool |
| US12612267B2 (en) | 2023-12-18 | 2026-04-28 | Nike, Inc. | Manufacturing pickup tool |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS635900B2 (https=) | 1988-02-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS5979547A (ja) | 微小部品吸着装置 | |
| US6394940B1 (en) | Chip suction type machine tool | |
| EP2261520A2 (en) | Vacuum pad device | |
| US4703965A (en) | Integrated circuit placement device vacuum head | |
| EP3471527B1 (en) | Electronic component mounter and electronic component separating method | |
| US20060088625A1 (en) | Vacuum gripper for handling small components | |
| JP2002368065A (ja) | 位置合わせ装置 | |
| JPH0656864B2 (ja) | 半導体ウエハの搬送位置決め方式 | |
| JP2009076773A (ja) | チャックテーブル機構 | |
| JPH0951029A (ja) | 半導体製造方法および装置ならびに搬送装置 | |
| TWI760076B (zh) | 真空夾持吸嘴 | |
| JP2016128352A (ja) | 電子部品搬送装置 | |
| JPH09246790A (ja) | 電子部品装着装置 | |
| CN108568689A (zh) | 一种工件方向调整设备 | |
| JPH01140739A (ja) | 半導体ウエハ搬送機器のウエハセンタリング位置決め装置 | |
| KR20220025644A (ko) | 실장 헤드 | |
| JPS63202032A (ja) | 電気または電子部品用吸引ピックアップ装置 | |
| JP2877755B2 (ja) | ネジ締め装置 | |
| JPS59181634A (ja) | ウエハチヤツク | |
| JP4049721B2 (ja) | ボンディング方法、ボンディングプログラム及びボンディング装置 | |
| JPS636291B2 (https=) | ||
| JPS62274800A (ja) | チツプ部品装着装置 | |
| US12195286B2 (en) | Negative pressure-generating structure and actuator | |
| JPH0682745B2 (ja) | 部品吸着装置 | |
| JPH04363099A (ja) | チップ部品装着装置 |