JPS5979547A - Sucker for minute part - Google Patents

Abstract

PURPOSE:To obtain the sucker, which can cope with the difference of the form and size of an objective part extending over a wide range, by setting up coaxial inner and outer nozzles sharing a vacuum sucking path and forming the inner nozzle to a slidable shape. CONSTITUTION:When sucking the small part 2a, a chamber 11a is pressurized P1 to push a plug 6 down, a hollow conduit 5, a nozzle chip 3a, a negative pressure introducing pipe 7 and a collar 8 are also pushed down, and the collar 8 is brought into contact with the stepped section of the outer nozzle 4 to bring the nozzle to a sucking-able state. P1 Functions as an air spring to prevent the damage of the part 2a. Negative pressure P2 is applied to evacuate the insides of the nozzle chip 3a and the pipes 5 and 7, and the part 2a is sucked to the nose of the nozzle. When sucking a large part 2b, the chamber 11a is evacuated and sucked, the plug 6, the pipe 5, the nozzle chip 3a, the pipe 7 and the collar 8 are pulled up integrally, the collar 8 is brought into contact with a spring seat 9, the inner nozzle 3 is encased in the outer nozzle 4, and the part 2b is sucked by the outer nozzle 4. Damage on the contact of the nozzle 4 and the part 2b is prevented by buffer action by the spring seat 9 and a spring 10.

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a microcomponent mounting apparatus suitable for use in microcomponents, particularly microsized electronic components such as IC chips and capacitors.

[Prior art]

Generally, a large number of electronic components such as IC chips are arranged on a board to form a predetermined electronic circuit, but the work of positioning such electronic components at predetermined locations on the board requires high speed work. Automation is being promoted due to demands for improved reliability and reduced costs.

By the way, when positioning this type of part in an automatic machine, it is first necessary to hold the part, but when holding parts with minute dimensions, it is difficult to use a so-called claw-type holding (gripping) mechanism. Therefore, the vacuum adsorption method is generally used. In this case, unless the suction surface of the suction device has an appropriate shape and area that matches the surface on which the mating part is held, it will not be possible to generate sufficient suction force, that is, holding force. be.

On the other hand, it is normal for IC chips, capacitors, etc. that form electronic circuits to have different physical shapes and dimensions for each component, and this tendency is particularly noticeable as electronic circuits become more sophisticated, as a wide variety of components are used. Become something.

Due to the above-mentioned circumstances, with conventional suction devices used for this type of purpose, if a single suction surface shape cannot cover the entire area, a suction surface that matches the shape and dimension of the target part can be created. Either prepare a plurality of suction devices and install them together on a moving element (hereinafter referred to as a head section) connected to a predetermined drive shaft system for positioning, or install the head section on each suction device. It was set up and put into practical use.

However, according to conventional devices, in the former case, the weight acting as a load on the head section, especially the inertial load, increases, and this increase in load has a negative effect on increasing the positioning speed. In the latter case, the drive 784M may deviate or increase,
There were inconveniences such as complication. In addition, if there are multiple suction devices using either of these methods, a mechanism for positioning the reference center of the suction device with respect to the target part will be required for the number of suction devices d, which is required because the parts are small. This is also related to the relatively limited positioning accuracy, which makes it difficult to provide inexpensive NUs.

[Summary of the invention]

The present invention has been made in view of the above circumstances, and specifically, the component suction portion of the micro component mounting device is constructed using an inner nozzle and an outer nozzle that are coaxially arranged and have a common vacuum suction path for component suction. The inner nozzle is made to slide in the axial direction inside the outer nozzle, and when the inner nozzle is used, a predetermined pressure is applied to the upper end surface of the inner nozzle to cause the inner nozzle to protrude, and a certain amount of buffering is applied. On the other hand, when using the outer nozzle, the upper end surface of the inner nozzle is vacuum-suctioned and the inner nozzle is housed above the outer nozzle, thereby reducing the weight of the device and positioning. While trying to simplify the attachment, the shape of the target part.

It is an object of the present invention to provide a suction device for minute parts that can deal with a wide range of differences in size.

[Example of fruitful invention]

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

FIG. 1 shows a micro parts suction A'l which is an embodiment of the present invention.
' It is an explanatory diagram including the A direct and peripheral devices. In the figure, (1) shows a micro-component suction device, and for the sake of explanation, its main part is shown in cross section to show its internal structure.

(2) is a microcomponent (hereinafter simply referred to as a component) that is the target of suction and holding. (3) and (4) are an inner nozzle and an outer nozzle, respectively, and the nozzle tip portion (3a) at the tip thereof.
The shape 1 dimension of (4a) is the shape of the part, and is joined to the nozzle tip part (3a), and the opening at the upper end is completely closed by the sliding frame (6).

In addition, negative pressure 2 is applied to the midway side of the hollow S 'tj4' (5).
An rt entry pipe (7) is attached to the hollow conduit (5) by opening into the hollow part thereof, and a collar (8) is fixed to the midway outer circumference of the hollow conduit (5). Further, (9) is a spring seat, and the spring force (9) is pressed against the two end surfaces of the outer nozzle (4) by a countermane (10).
) is adapted to restrict the upward movement of the outer nozzle (4) in the axial direction. (11) is a pressure chamber forming hole, which is slidably fitted into the sliding frame (6), and a pressure pipe (121) is connected to the side thereof.Here, (
13) is a housing, and RiJ pressure chamber forming hole (1
While forming 1) and maintaining the pressure level 12), fit the outer circumferential surface of the outer nozzle (4) with it as (A movement), and also prevent vertical movement of the inlet pipe (7) such as negative pressure. It has a notch U4) so as not to interfere with the operation.

The micro-component suction/monitoring device configured in this way is attached to the aforementioned head portion (I5), and is moved by a drive device (not shown) to remove the micro-components. The suction A position (1) will be positioned. Generally, it is necessary to move the head section (15) in the XYZ directions orthogonal to the drawing. Here, if the directionality of component (2) is a problem, the minute H1
≦With the upper end of the product suction device (1) as the rotation axis (1G),
If the head part (15) is configured to pivotally support this, this problem can be handled by rotating the parts suction device (1) in the θ direction shown in the figure.

Next, to explain the pneumatic system associated with the present invention, first, the negative pressure introduction pipe (7) is connected to the communication pipe (1η) formed using a pipe or tube, and the communication pipe (17) is connected to the communication pipe (1η) formed using a pipe or tube. is connected to the negative port of the solenoid valve (18), so that the communication pipe dη is connected to the exhaust port i1!] in the normal state (not energized) and to the vacuum generator t20+ in the energized state. ing. On the other hand, the pressure introduction pipe 02 is first connected to the flow control valve t211 through a communication pipe (17)', and then to the - port of the sulfur valve +22).

The connection state of the port of this solenoid valve (22) is such that the communication pipe (17) leads to the pressure generator (23) in the non-energized state, and to the vacuum generator (20) in the energized state.

FIGS. 2(a) and 2(b) are a more detailed internal (reconstruction) side view and a cross-sectional view drawn along the line C-C of the micro-component suction device (1) of the above embodiment. (13) is the lower housing (1) for convenience of assembly etc.
3a) and an upper housing (13b) &. Further, the hollow tube (5) is fitted into the inner wall of the outer nozzle (4) and is slidable in the axial direction. The other configurations are the same as in FIG. 1.

Next, the micro parts suction configured as above! The operation of Ahl will be explained below.

First, assume that a relatively small component (2a) is to be held by suction. In this case, pressure P is introduced into the pressure chamber (lla) through the pressure introduction pipe (12) in the direction of arrow P1 shown in FIG.
1 air is added. Such air ratio P1 is provided by the pressure generator (23) shown in FIG.
2]). As a result, the sliding powder (6) that fits into the pressure chamber forming hole (1) slides downward under the action of the air pressure 1.
A hollow conduit (5) and a nozzle tip part (3a) that are actually constructed.

Negative pressure introduction pipe (7) and collar (8) are also pushed down,
When the collar (8) hits the inner surface working part of the outer nozzle (4), it stops and the suction becomes possible. After that, the nozzle part 151 moves to the above position and the small parts are sucked. The nozzle tip (3a) of the nozzle (3) in the monitoring device (1) approaches a predetermined position near the component (2a). Due to the need to securely hold the part (2a), the nozzle tip part (3a) of the inner nozzle (3)
It is desirable to stop the tip and the component (2λ) in a state where they are in slight contact (this is desirable, but if there is no cushioning effect f:Ir) at the time of contact, there is a risk of damage to the component (2a). This is a point that must be paid special attention to when handling minute parts. In this practical example, the air pressure P of the pressure chamber (lla) in I'i11 is
, effectively prevents damage. That is, these are the forces that perform the function of an air spring. Therefore, if it is desired to adjust the buffering force between air and air, this can be easily done by adjusting the flow rate control valve +21) shown in FIG. However, the flow rate control valve (21) is not essential to the structure of the present invention, and depending on the parts,
There is no problem even if the pressure from the pressure generator 03) is used as it is.

Next, when carrying out the suction operation, an excitation (cA voltage EV+) is applied to the control valve (j8) in FIG. 1. This is generally provided by an external sequence control 'AM (not shown). When the solenoid valve (18) is excited, its action brings the negative pressure introduction pipe (7) into communication with the vacuum generating position, and the micro parts suction device'f
(Inside the hollow conduit (5) of 11, iJ
A suction negative pressure P2 is generated in the direction No.2. That is, the hollow conduit (5
) has its upper end completely blocked by the sliding powder (6), so the nozzle tip (3a), the hollow conduit (5),
The inside of the negative pressure introduction pipe (7) becomes a vacuum state, and the part (2a) that is in contact with the tip surface of the nozzle tip portion (3a) of the bar nozzle (3) is attracted to the tip surface of the nozzle tip portion (3a). , that is, it will be retained.

Next, while maintaining this suction state, move the head throat section (15) again, and place the solenoid valve tap shown in Figure 1 in a non-energized state at a predetermined position, for example, a component placement position on the board. For example, the vacuum state described in section ii is released, and the positioning and placing work of the part (2a) is completed.

Next, referring to FIG. 3, a case will be described in which a relatively large component (2b) is held by suction. FIG. 3 is a longitudinal cross-sectional view of the micro component suction device (1) shown in FIG.
2b) is sucked and held by the outer nozzle (4). In this case, suction and holding is performed by storing the inner nozzle (3) above the outer nozzle (4). That is, the pressure gauge tube (1
The sliding frame (6), which had been pushed down, moves upward as the inside of the pressure chamber (lla) becomes a vacuum state, and at this time, the hollow conduit (5),
The nozzle tip portion (3a), the negative pressure introduction pipe (7), and the collar (8) are also pulled upward together, and they stop when the collar (8) hits the spring seat (9). The suction pressure P1 related to the vacuum suction described in item 11 is determined by applying the excitation voltage EV2 to the solenoid valve (221) in FIG. The excitation voltage EV2 is generated by converting it to the vacuum generator (20) side.Also, the excitation voltage EV2 is usually supplied from an external sequence device (not shown).

Here, if the return side of the flow ft gla1 control valve (2I) is set in direction 1 as the non-control side of the 10th valve, the air pressure PI
This is convenient for performing the suction operation smoothly without being affected by the adjustment.

Through these operations, the tip of the inner nozzle (3) is pulled upward and inward than the tip of the outer nozzle (4), and the part (
2b) can be sucked and held by the outer nozzle (4). The suction operation etc. of this component (2b) are exactly the same as the case of suctioning the component (2a) shown in FIG. 2 described in 11J. In this case, the air flow path of the air having the suction pressure P2 passes through the nozzle opening of the nozzle tip portion (3a), and reaches the hollow conduit (5) and the negative pressure specialist (7).

Note that the upper end surface of the outer nozzle (4) is subjected to an elastic force by a spring 1ltl) via a spring force (9), and this is due to the elastic force of the part (2b) when the outer nozzle 14) and the part (2b) come into contact with each other.
2b) It serves as a buffer to avoid damage. In this case, the parts that are generally picked up by the outer nozzle (4) are:
Because it is larger than the part picked up by the inner nozzle (3),
As shown in the figure, it is sufficient to use a compression coil spring or the like, and there is no need to adjust the spring force.

FIGS. 4(a) and 4(fb) are a longitudinal cross-sectional view and a cross-sectional view taken along the line C--C of a micro-component suction device lt according to another embodiment of the present invention. In the above-mentioned embodiments, there was no problem with the direction of the component being picked up. However, electronic components,
For example, an IC chip has a 1!11 arrangement of connection terminals, etc.
For this reason, it is necessary to maintain the direction of the component during suction. Therefore, after detecting in advance the direction in which the part is translated by a predetermined detection f4, the direction in which the part is translated is detected. 'f
The relative relationship between the direction of the device and the direction of the parts is fixed at 1♀. This is to prevent a short circuit from occurring.

For this purpose, as shown in FIGS. 4(a) and 4(b), a guide body/circle is provided between the outer periphery of the negative pressure introduction pipe (7) and the side surface of the notch (1), and a hollow It is effective to adopt a configuration that prevents rotational movement of the conduit (5) around the axis.In other words, this configuration prevents the hollow conduit (5) from sliding slightly upward in the axial direction when picking up parts. This is because, in order to maintain the directionality of the component, it is necessary to restrict the rotational movement around the axis.Assume that the 4=n body i24+ uses a rolling bearing, for example. By holding this in the negative pressure introduction chamber (7) and forming it so that the outer ring of the rolling bearing rolls on the side surface of the notch (14), a simple and highly accurate guiding movement can be realized. .

In the above explanation, the lower end surfaces of the inner nozzle (3) and outer nozzle (4) shown in FIGS. Correspondingly, even if the nozzle tip surface is made into a curved surface, this does not impede the present invention in any way.

〔Effect of the invention〕

As described above, according to the micro component suction device according to the present invention, the outer nozzle is inserted into the housing so as to be able to move up and down at a predetermined distance, and the outer nozzle is moved from the opposite end of the housing by the biasing part. An inner nozzle is inserted into the outer nozzle so as to be able to move up and down a predetermined distance, and positive pressure or negative pressure is introduced into the pressure chamber above the inner nozzle through a pressure introduction pipe, so that the inner nozzle is connected to the lower end surface of the outer nozzle. Protrude or retract from the inner nozzle, and apply negative pressure to the inner nozzle using a negative pressure pipe. Since the gate nozzle is used to attract minute parts, the following remarkable effects can be obtained. (a) rk that can deal with a wide range of differences in the shape and dimensions of parts and that can hold the parts with precision suction.
We can provide small parts suction devices.

(b) Damage to parts can be effectively prevented.

(c) The positioning mechanism can be simplified because the same nozzle and outer nozzle located on the same axis perform adsorption.

2) It is advantageous to make the device d lighter and smaller.

09 Since the control element is mainly pneumatic, it is possible to provide an inexpensive and robust device as a whole.

[Brief explanation of the drawing]

FIG. 1 is a schematic and configuration diagram of a micro parts suction device according to an embodiment of the present invention, including peripheral devices, and FIG. 2(a)
(b) is a longitudinal side view of the micro-component rock sucking device d in an embodiment of the present invention, and a sectional view thereof drawn along the line C-C, and FIG. 3 shows the inner nozzle retracted in the above-mentioned old example Figures 1 and 4 (a) and 4 (b) are longitudinal cross-sectional views showing other embodiments of the present invention.・Minute parts neck suction device, t2+ (2a) (
2b)...Minute parts, (3)...Inner nozzle, (4)
・・・Outer nozzle, (7) ・・・Negative pressure pipe, (11)・
...Pressure chamber formation hole, (lla)...Pressure chamber, (1.
・Pressure great man ti・, t13)...Housing, f14
+... Notch, (24)... Guide body. In addition, the same name in the figure is the same or the equivalent part is represented by Bo'4゜ agent.
Kuzuno I - Figure 1 Figure 2 (b) Figure 3 Figure 4 (b) 1.

Claims (2)

[Claims] (1) Vacuum suction means holds micro parts by suction.
A micro parts suction device includes a housing having an outer nozzle sliding hole and a pressure chamber forming hole following the outer nozzle sliding hole, and an inner nozzle sliding hole that can be moved up and down a predetermined distance into the outer nozzle sliding hole of the housing. The inserted outer nozzle, a biasing part that urges the outer nozzle downward and causes the lower end surface of the outer nozzle to protrude from the lower end surface of the housing, and the outer nozzle is inserted a predetermined distance into the inner nozzle sliding hole. Introducing positive or negative pressure into a pressure chamber formed by an inner nozzle that is inserted so as to be able to move up and down and whose upper end is closed, and the pressure chamber forming hole above the inner nozzle.
(ii) a pressure introducing sparrow for causing the inner nozzle to protrude or retract from the lower end surface of the outer nozzle; and a pressure introduction sparrow for introducing negative pressure into the inner nozzle through a notch formed in the housing and the outer nozzle; What is claimed is: 1. A micro component suction device comprising: a negative pressure introduction pipe for sucking micro components; (2) The negative pressure introduction pipe includes a guide body that is inserted between the negative pressure introduction pipe and the notch of the nozzle and slides and guides the negative pressure introduction pipe along the notch. A micro component suction device according to claim 1, characterized in that: