JPS5969968U - 液相エピタキシヤル成長装置 - Google Patents

液相エピタキシヤル成長装置

Info

Publication number
JPS5969968U
JPS5969968U JP16561782U JP16561782U JPS5969968U JP S5969968 U JPS5969968 U JP S5969968U JP 16561782 U JP16561782 U JP 16561782U JP 16561782 U JP16561782 U JP 16561782U JP S5969968 U JPS5969968 U JP S5969968U
Authority
JP
Japan
Prior art keywords
liquid phase
epitaxial growth
phase epitaxial
growth equipment
holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16561782U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0129242Y2 (enrdf_load_stackoverflow
Inventor
研二 丸山
伊藤　道春
知史 上田
吉河　満男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP16561782U priority Critical patent/JPS5969968U/ja
Publication of JPS5969968U publication Critical patent/JPS5969968U/ja
Application granted granted Critical
Publication of JPH0129242Y2 publication Critical patent/JPH0129242Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP16561782U 1982-10-29 1982-10-29 液相エピタキシヤル成長装置 Granted JPS5969968U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16561782U JPS5969968U (ja) 1982-10-29 1982-10-29 液相エピタキシヤル成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16561782U JPS5969968U (ja) 1982-10-29 1982-10-29 液相エピタキシヤル成長装置

Publications (2)

Publication Number Publication Date
JPS5969968U true JPS5969968U (ja) 1984-05-12
JPH0129242Y2 JPH0129242Y2 (enrdf_load_stackoverflow) 1989-09-06

Family

ID=30362794

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16561782U Granted JPS5969968U (ja) 1982-10-29 1982-10-29 液相エピタキシヤル成長装置

Country Status (1)

Country Link
JP (1) JPS5969968U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5913697A (ja) * 1982-07-12 1984-01-24 Fujitsu Ltd 液相エピタキシヤル成長装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5913697A (ja) * 1982-07-12 1984-01-24 Fujitsu Ltd 液相エピタキシヤル成長装置

Also Published As

Publication number Publication date
JPH0129242Y2 (enrdf_load_stackoverflow) 1989-09-06

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