JPH0129242Y2 - - Google Patents

Info

Publication number
JPH0129242Y2
JPH0129242Y2 JP1982165617U JP16561782U JPH0129242Y2 JP H0129242 Y2 JPH0129242 Y2 JP H0129242Y2 JP 1982165617 U JP1982165617 U JP 1982165617U JP 16561782 U JP16561782 U JP 16561782U JP H0129242 Y2 JPH0129242 Y2 JP H0129242Y2
Authority
JP
Japan
Prior art keywords
substrate
holder
recess
liquid phase
sectional
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982165617U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5969968U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16561782U priority Critical patent/JPS5969968U/ja
Publication of JPS5969968U publication Critical patent/JPS5969968U/ja
Application granted granted Critical
Publication of JPH0129242Y2 publication Critical patent/JPH0129242Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP16561782U 1982-10-29 1982-10-29 液相エピタキシヤル成長装置 Granted JPS5969968U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16561782U JPS5969968U (ja) 1982-10-29 1982-10-29 液相エピタキシヤル成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16561782U JPS5969968U (ja) 1982-10-29 1982-10-29 液相エピタキシヤル成長装置

Publications (2)

Publication Number Publication Date
JPS5969968U JPS5969968U (ja) 1984-05-12
JPH0129242Y2 true JPH0129242Y2 (enrdf_load_stackoverflow) 1989-09-06

Family

ID=30362794

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16561782U Granted JPS5969968U (ja) 1982-10-29 1982-10-29 液相エピタキシヤル成長装置

Country Status (1)

Country Link
JP (1) JPS5969968U (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5913697A (ja) * 1982-07-12 1984-01-24 Fujitsu Ltd 液相エピタキシヤル成長装置

Also Published As

Publication number Publication date
JPS5969968U (ja) 1984-05-12

Similar Documents

Publication Publication Date Title
JPH0129242Y2 (enrdf_load_stackoverflow)
JPH0625955Y2 (ja) 液相エピタキシヤル成長装置
JPH0516222Y2 (enrdf_load_stackoverflow)
JPS59111995A (ja) 液相エピタキシヤル成長装置
JPH0278233A (ja) 液相エピタキシャル成長方法およびその成長装置
JPH02159719A (ja) 液相エピタキシャル成長装置
JPH034028Y2 (enrdf_load_stackoverflow)
JPS5913697A (ja) 液相エピタキシヤル成長装置
JPH02143538A (ja) 液相エピタキシャル成長装置
JPS5918644A (ja) 液相エピタキシヤル成長装置
JPH0624894A (ja) 多元半導体結晶の液相エピタキシャル成長装置
JPS62158192A (ja) 液相エピタキシヤル成長装置
JPH01122993A (ja) 液相エピタキシャル成長装置
JPS6123010Y2 (enrdf_load_stackoverflow)
JPH01270589A (ja) 液相エピタキシャル成長装置
JPH05160051A (ja) Ｍｃｔ薄膜結晶の製造方法
JPS5976433A (ja) 液相エピタキシヤル成長装置
JPH0451970B2 (enrdf_load_stackoverflow)
JPH02156524A (ja) 液相エピタキシャル成長法
JPS5918194A (ja) 液相エピタキシヤル成長方法
JPS59147439A (ja) アンプルの封止方法
JPH0218382A (ja) 液相エピタキシャル成長装置
JPH02135726A (ja) 液相エピタキシャル成長装置
JPS62163334A (ja) 液相エピタキシヤル成長装置
JPH0475652B2 (enrdf_load_stackoverflow)