JPS5963580A - 半導体光位置検出器の位置補正装置 - Google Patents

半導体光位置検出器の位置補正装置

Info

Publication number
JPS5963580A
JPS5963580A JP57174174A JP17417482A JPS5963580A JP S5963580 A JPS5963580 A JP S5963580A JP 57174174 A JP57174174 A JP 57174174A JP 17417482 A JP17417482 A JP 17417482A JP S5963580 A JPS5963580 A JP S5963580A
Authority
JP
Japan
Prior art keywords
signal
detector
optical position
position detector
terminals
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57174174A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0156390B2 (cg-RX-API-DMAC7.html
Inventor
Toshiro Miyake
俊郎 三宅
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp, Nippon Kogaku KK filed Critical Nikon Corp
Priority to JP57174174A priority Critical patent/JPS5963580A/ja
Publication of JPS5963580A publication Critical patent/JPS5963580A/ja
Publication of JPH0156390B2 publication Critical patent/JPH0156390B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S3/00Direction-finders for determining the direction from which infrasonic, sonic, ultrasonic, or electromagnetic waves, or particle emission, not having a directional significance, are being received
    • G01S3/78Direction-finders for determining the direction from which infrasonic, sonic, ultrasonic, or electromagnetic waves, or particle emission, not having a directional significance, are being received using electromagnetic waves other than radio waves
    • G01S3/782Systems for determining direction or deviation from predetermined direction
    • G01S3/783Systems for determining direction or deviation from predetermined direction using amplitude comparison of signals derived from static detectors or detector systems
    • G01S3/784Systems for determining direction or deviation from predetermined direction using amplitude comparison of signals derived from static detectors or detector systems using a mosaic of detectors

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Image Processing (AREA)
  • Measurement Of Optical Distance (AREA)
  • Automatic Focus Adjustment (AREA)
  • Image Input (AREA)
JP57174174A 1982-10-04 1982-10-04 半導体光位置検出器の位置補正装置 Granted JPS5963580A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57174174A JPS5963580A (ja) 1982-10-04 1982-10-04 半導体光位置検出器の位置補正装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57174174A JPS5963580A (ja) 1982-10-04 1982-10-04 半導体光位置検出器の位置補正装置

Publications (2)

Publication Number Publication Date
JPS5963580A true JPS5963580A (ja) 1984-04-11
JPH0156390B2 JPH0156390B2 (cg-RX-API-DMAC7.html) 1989-11-29

Family

ID=15973996

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57174174A Granted JPS5963580A (ja) 1982-10-04 1982-10-04 半導体光位置検出器の位置補正装置

Country Status (1)

Country Link
JP (1) JPS5963580A (cg-RX-API-DMAC7.html)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60250270A (ja) * 1984-05-28 1985-12-10 Takashi Mori 太陽光方向センサ
JPS62116912A (ja) * 1985-11-18 1987-05-28 Canon Inc 自動焦点検知装置
JPS62182612A (ja) * 1986-02-06 1987-08-11 Toshiba Corp 試料面位置測定装置
JPH06208617A (ja) * 1992-03-31 1994-07-26 Nippon Steel Corp 画像データの位置歪み補正方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60250270A (ja) * 1984-05-28 1985-12-10 Takashi Mori 太陽光方向センサ
JPS62116912A (ja) * 1985-11-18 1987-05-28 Canon Inc 自動焦点検知装置
JPS62182612A (ja) * 1986-02-06 1987-08-11 Toshiba Corp 試料面位置測定装置
JPH06208617A (ja) * 1992-03-31 1994-07-26 Nippon Steel Corp 画像データの位置歪み補正方法

Also Published As

Publication number Publication date
JPH0156390B2 (cg-RX-API-DMAC7.html) 1989-11-29

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