US20190128747A1 - Sensor apparatus - Google Patents

Sensor apparatus Download PDF

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US20190128747A1
US20190128747A1 US16/231,745 US201816231745A US2019128747A1 US 20190128747 A1 US20190128747 A1 US 20190128747A1 US 201816231745 A US201816231745 A US 201816231745A US 2019128747 A1 US2019128747 A1 US 2019128747A1
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differential output
output terminal
path
circuit
output terminals
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US11402275B2 (en
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Shogo HIKOSAKA
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Denso Corp
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Denso Corp
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01KMEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/16Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
    • G01K7/18Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a linear resistance, e.g. platinum resistance thermometer
    • G01K7/20Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a linear resistance, e.g. platinum resistance thermometer in a specially-adapted circuit, e.g. bridge circuit
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D3/00Indicating or recording apparatus with provision for the special purposes referred to in the subgroups
    • G01D3/028Indicating or recording apparatus with provision for the special purposes referred to in the subgroups mitigating undesired influences, e.g. temperature, pressure
    • G01D3/036Indicating or recording apparatus with provision for the special purposes referred to in the subgroups mitigating undesired influences, e.g. temperature, pressure on measuring arrangements themselves
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/04Means for compensating for effects of changes of temperature, i.e. other than electric compensation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/04Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of resistance-strain gauges
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/04Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of resistance-strain gauges
    • G01L9/045Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of resistance-strain gauges with electric temperature compensating means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/06Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices
    • G01L9/065Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices with temperature compensating means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/14Measuring resistance by measuring current or voltage obtained from a reference source

Definitions

  • the present disclosure relates to a sensor apparatus including a sensor that includes a resistor bridge circuit.
  • a pressure sensor may include a resistor bridge circuit which uses a diffused resistor and have a temperature characteristic. When a pressure is detected by a pressure sensor, it may be necessary to perform a correction according to the temperature characteristic.
  • a constant current source may be connected between diagonal output terminals of a resistor bridge circuit to acquire temperature information of a pressure sensor,
  • a temperature detection circuit is configured to form a first path for supplying a current to one of positive-side and negative-side differential output terminals of a sensor that includes a resistor bridge circuit and a second path for draining a current from the other differential output terminal, the first path and the second path being switchable with respect to the two differential output terminals.
  • a controller may cause a voltage measurement portion to measure a voltage of each of the two differential output terminals.
  • a calculator may calculate a difference between the voltages of the two differential output terminals to acquire temperature information of the sensor.
  • FIG. 1 is a diagram illustrating a configuration of a sensor apparatus in a first embodiment
  • FIG. 2 is a diagram illustrating a state in which switch circuits SP 1 and SP 2 of a temperature detection circuit are ON;
  • FIG. 3 is a diagram illustrating a state in which switch circuits SM 1 and SM 2 of the temperature detection circuit are ON;
  • FIG. 4 is a diagram illustrating a control sequence of the sensor apparatus
  • FIG. 5 is a diagram illustrating an error relative to an approximate expression according to a resistance ratio ( ⁇ R/Rs);
  • FIG. 6 is a graph with a horizontal axis representing a logarithm of the resistance ratio ( ⁇ R/Rs) and a vertical axis representing the error;
  • FIG. 7 is a diagram illustrating the configuration of a sensor apparatus in a second embodiment
  • FIG. 8 is a diagram illustrating the configuration of a sensor apparatus in a third embodiment
  • FIG. 9 is a diagram illustrating a control sequence of a sensor apparatus in a fourth embodiment:
  • FIG. 11 is a diagram illustrating the configuration of a sensor apparatus in a fifth embodiment
  • FIG. 12 is a diagram illustrating a sample hold circuit
  • FIG. 13 is a diagram illustrating a control sequence of the sensor apparatus
  • FIG. 14 is a diagram illustrating a state in which switch circuits SP 1 and SP 2 of a temperature detection circuit are ON when there is a break on a differential output terminal Vinp side in a sensor apparatus in a sixth embodiment
  • FIG. 15 is a diagram illustrating a state in which switch circuits SM 1 and SM 2 are ON when there is a break on the differential output terminal Vinp side;
  • FIG. 16 is a diagram illustrating a state in which the switch circuits SP 1 and SP 2 of the temperature detection circuit are ON when there is a break on a differential output terminal Vinm side;
  • FIG. 17 is a diagram illustrating a state in which the switch circuits SM 1 and SM 2 are ON when there is a break on a differential output terminal Vinm side;
  • FIG. 18 is a diagram illustrating a comparative example.
  • a sensor apparatus 1 of the present embodiment includes a pressure sensor 2 that includes four resistor elements Rs configuring a resistor bridge circuit.
  • a pressure sensor 2 that includes four resistor elements Rs configuring a resistor bridge circuit.
  • one pair of the opposite corners of the resistor bridge is connected between a power source and ground.
  • Each of differential output terminals Vinp and Vinm corresponding to the other pair of the opposite corners of the resistor bridge is connected to an input terminal of a voltage measurement portion 3 .
  • the voltage measurement portion 3 measures a voltage of each of the differential output terminals Vinp and Vinm.
  • the voltage measurement portion 3 may be referred to as a voltage measurement circuit.
  • a temperature detection circuit 4 is connected between the differential output terminals Vinp and Vinm.
  • the temperature detection circuit 4 includes a series circuit which is connected between the output terminal Vinp and the power source and includes a resistor element Rd and a switch circuit SP 1 , and a series circuit which is connected between the output terminal Vinp and the ground and includes a resistor element Rd and a switch circuit SM 2 .
  • the temperature detection circuit 4 further includes a series circuit which is connected between the output terminal Vinm and the power source and includes a resistor element Rd and a switch circuit SM 1 , and a series circuit which is connected between the output terminal Vinm and the ground and includes a resistor element Rd and a switch circuit SP 2 .
  • a controller 5 performs ON/OFF control for the switch circuits SP 1 and SP 2 as well as SM 1 and SM 2 of the temperature detection circuit 4 .
  • a calculator 6 performs an operation on the voltage of each of the differential output terminals Vinp and Vinm measured by the voltage measurement portion 3 to acquire information of a pressure detected by the pressure sensor 2 and temperature information for correcting the pressure.
  • the series circuit including the switch circuit SP 1 and the resistor element Rd, the series circuit including the switch circuit SP 2 and the resistor element Rd, the series circuit including the switch circuit SM 1 and the resistor element Rd, and the series circuit including the switch circuit SM 2 and the resistor element Rd correspond to a first series circuit, a fourth series circuit, a second series circuit, and a third series circuit, respectively.
  • the controller 5 turns off all of the switch circuits SP 1 and SP 2 as well as SM 1 and SM 2 of the temperature detection circuit 4 to produce a state illustrated in FIG. 1 .
  • the controller 5 causes the voltage measurement portion 3 to measure a differential voltage for obtaining information of a pressure detected by the pressure sensor 2 .
  • This method is similar to a common method.
  • the pressure information is obtained by Expression (1) by measuring the voltage of each of the differential output terminals Vinp and Vinm of the pressure sensor 2 .
  • the controller 5 turns on the switch circuits SP 1 and SP 2 of the temperature detection circuit 4 and turns off the switch circuits SM 1 and SN/ 12 of the temperature detection circuit 4 to produce a state illustrated in FIG. 2 .
  • the controller 5 causes the voltage measurement portion 3 to measure a differential voltage for obtaining temperature information of the pressure sensor 2 .
  • a first path for drawing a sink current from the power source is formed on the output terminal Vinp side of the pressure sensor 2
  • a second path for supplying a source current to the ground is formed on the output terminal Vinm side.
  • a voltage measured in this state is denoted by a temperature P (Vinp ⁇ Vinm) which is expressed by expression (2).
  • the controller 5 turns off the switch circuits SP 1 and SP 2 of the temperature detection circuit 4 and turns on the switch circuits SM 1 and SM 2 of the temperature detection circuit 4 to produce a state illustrated in FIG. 3 .
  • the controller 5 causes the voltage measurement portion 3 to measure a differential voltage for obtaining temperature information of the pressure sensor 2 .
  • the first path and the second path are switched in such a manner that the second path is formed on the output terminal Vinp side and the first path is formed on the output terminal Vinm side.
  • a voltage measured in this state is denoted by a temperature M (Vinp ⁇ Vinm), which is expressed by expression (3).
  • the calculator 6 calculates a difference therebetween to obtain temperature information of the pressure sensor 2 .
  • the temperature information is obtained on the condition that a resistance value of the resistor element Rs of the pressure sensor 2 is sufficiently larger than a resistance value AR which changes according to pressure.
  • the resistance value ⁇ R is not included.
  • the voltage (the temperature P ⁇ the temperature M) does not include information of the pressure detected by the pressure sensor 2 and reflects the temperature characteristic of the pressure sensor 2 .
  • the pressure detected by the pressure sensor 2 can be corrected according to the temperature characteristic by acquiring the temperature information of the pressure sensor 2 in this manner.
  • the sensor apparatus 1 sequentially and repeatedly executes the phases (A), (B), and (C).
  • the calculator 6 calculates a difference between the temperature P and the temperature M measured in the previous period to obtain the voltage (the temperature P ⁇ the temperature M). An operation for correcting the pressure may be performed as needed.
  • the error relative to the approximate expression according to a resistance ratio is as illustrated in FIGS. 5 and 6 .
  • the resistance ratio ( ⁇ R/Rs) may be appropriately set within a range in which an error is allowed.
  • the temperature detection circuit 4 is configured to form the first path for supplying a current to one of the positive-side and negative-side differential output terminals Vinp and Vinm of the pressure sensor 2 which includes the resistor bridge circuit and the second path for draining a current from the other differential output terminal, the first path and the second path being switchable with respect to the two differential output terminals Vinp and Vinm.
  • the controller 5 causes the voltage measurement portion 3 to measure the voltage of each of the two differential output terminals Vinp and Vinm for a case where the first path is formed in one of the differential output terminals and the second path is formed in the other differential output terminal by the temperature detection circuit 4 and for a case where the second path is formed in the one differential output terminal and the first path is formed in the other differential output terminal by the temperature detection circuit 4 .
  • the calculator 6 calculates the difference between the voltages of the differential output terminals Vinp and Vinm to acquire temperature information of the pressure sensor 2 .
  • Such a configuration makes it possible to eliminate the necessity of a constant current source and acquire temperature information of the pressure sensor 2 with the S/N ratio maintained without lowering the sensor sensitivity as in a related art.
  • the temperature detection circuit 4 includes the first series circuit that is connected between the differential output terminal Vinp and the power source and includes the resistor element Rd and the switch circuit SP 1 , the second series circuit which is connected between the differential output terminal Vinm and the power source and includes the resistor element Rd and the switch circuit SM 1 , the third series circuit which is connected between the differential output terminal Vinp and the ground and includes the resistor element Rd and the switch circuit SM 2 , and the fourth series circuit which is connected between the differential output terminal Vinm and the ground and includes the resistor element Rd and the switch circuit SP 2 .
  • a temperature detection circuit 12 includes a series circuit 13 of resistor elements R 1 to R 3 .
  • the series circuit 13 is connected between a power source and ground.
  • a common connection point between switch circuits SP 1 and SM 1 is connected to a common connection point between the resistor elements R 1 and R 2 .
  • a common connection point between switch circuits SP 2 and SM 2 is connected to a common connection point between the resistor elements R 2 and R 3 .
  • the resistor elements R 1 to R 3 correspond to first to third resistor elements, respectively.
  • the series circuit 13 corresponds to a voltage dividing resistor circuit.
  • a voltage amplitude in temperature detection can be variably set by adjusting resistance values of the resistor elements R 1 to R 3 .
  • Each of the switch circuits SP and SM is often composed of a MOSFET. In this case, a potential difference with respect to the power source or the ground is given to both ends of the switch circuits SP and SM. Accordingly, a threshold of the FET increases by a substrate effect, and an off-leak current can be reduced.
  • the “off-leak” described herein refers to, for example, off-leak on the switch circuit SM side which is OFF when the switch circuit SP side is ON as illustrated in FIG. 2 .
  • a temperature detection circuit 22 of a sensor apparatus 21 of a third embodiment includes a first constant current source 23 and a second constant current source 24 instead of the resistor elements Rd of the temperature detection circuit 4 of the first embodiment.
  • One end of the first constant current source 23 is connected to a power source.
  • One end of the second constant current source 24 is connected to ground.
  • a common connection point between switch circuits SP 1 and SM 1 is connected to the other end of the first constant current source 23 .
  • a common connection point between switch circuits SP 2 and SM 2 is connected to the other end of the second constant current source 24 .
  • the constant current sources 23 and 24 of the third embodiment are connected in parallel to the pressure sensor 2 .
  • a voltage applied to the pressure sensor 2 is not reduced as in a related art.
  • the temperature P and the temperature M which are measured to acquire temperature information in the above embodiments, are added to also acquire information of a pressure detected by a pressure sensor 2 .
  • expression (6) also corresponds to a pressure sensitivity of a sensor apparatus 1 .
  • the temperature sensitivity is obtained by expression (7).
  • a calculator 6 acquires information of a pressure detected by the pressure sensor 2 by adding the temperature P and the temperature M. Thus, it is possible to reduce the time required for a control sequence. Further, it is possible to maximize the temperature sensitivity by setting the resistance value of the resistor element Rd to half a resistance value of a resistor element Rs of the pressure sensor 2 .
  • a sensor apparatus 31 of a fifth embodiment includes two pairs of pressure sensors 2 and temperature detection circuits 4 .
  • One of the pairs includes a pressure sensor 2 (0) and a temperature detection circuit 4 (0), and the other pair includes a pressure sensor 2 (1) and a temperature detection circuit 4 (1).
  • a voltage measurement portion 32 includes a sample hold circuit 33 which is built therein and includes a sample circuit portion 33 S and a hold circuit portion 33 H.
  • the sample hold circuit 33 includes sample circuit portions 33 S (0) and 33 S (1) which correspond to pressure sensors 2 (0) and 2 (1), respectively.
  • the sample circuit portion 33 S includes switch circuits 41 p and 41 m as well as 42 p and 42 m of the input side, and 43 p and 43 m as well as 44 p and 44 m of the output side.
  • a common connection point between the switch circuits 42 p and 42 m and a common connection point between the switch circuits 44 p and 44 m are both connected to ground.
  • Capacitors 45 p and 45 m for sampling are connected between the switch circuits 41 p and 43 p and between the switch circuits 41 m and 43 m, respectively,
  • the hold circuit portion 33 H includes a differential amplifier 46 .
  • a parallel circuit of a capacitor 47 p for holding and a switch circuit 48 p is connected between an inverting input terminal and a noninverting output terminal of the differential amplifier 46 .
  • a parallel circuit of a capacitor 47 m and a switch circuit 48 m is connected between a noninverting input terminal and an inverting output terminal of the differential amplifier 46 .
  • the switch circuits 43 p and 43 m are connected to the inverting input terminal and the noninverting input terminal of the differential amplifier 46 , respectively.
  • a controller 35 illustrated in FIG. 11 also controls ON/OFF of each of the switch circuits of the sample hold circuit 33 .
  • a voltage signal held by the sample hold circuit 33 is input to an A/D converter 34 , converted to digital data, and input to a calculator 6 .
  • a first phase (A) the voltage measurement portion 32 samples a measurement result of the pressure (0) of the pressure sensor 2 (0).
  • the voltage measurement portion 32 samples a measurement result of the pressure (1) of the pressure sensor 2 (1) in parallel with holding the measurement result of the pressure (0) of the pressure sensor 2 (0).
  • the voltage measurement portion 32 holds the measurement result of the pressure (1) of the pressure sensor 2 (1) in parallel with sampling a measurement result of the pressure (0) of the pressure sensor 2 (0).
  • the controller 35 switches each of the switch circuits of the temperature detection circuits 4 (0) and 4 (1) corresponding to the control sequence.
  • the control sequence can be shortened by performing sampling of a measurement result in one of the pairs in parallel with holding of a measurement result in the other pair.
  • the occurrence of a break between one of the differential output terminals Vinp and Vinm of the pressure sensor 2 and the voltage measurement portion 3 , for example, in the configuration of the first embodiment is detected.
  • a temperature P and a temperature M are measured, and a difference therebetween is calculated in a manner similar to the first embodiment.
  • a result of the calculation is as expressed by expressions (8) to (10).
  • FIGS. 16 and 17 illustrate a case where there is a break on the differential output terminal Vinm side.
  • a temperature P and a temperature M are measured, and a difference therebetween is calculated in a manner similar to the case where there is a break on the differential output terminal Vinp side.
  • a result of the calculation is as expressed by expressions (11) to (13).
  • a calculator 6 is capable of detecting a break in the differential output terminal of the pressure sensor 2 by recognizing that the difference between the two voltages (the temperature P and the temperature M) exceeds an upper limit value.
  • the sensor is not limited to the pressure sensor, and may be any sensor that includes a resistor bridge circuit.
  • three or more pairs of pressure sensors 2 and temperature detection circuits 4 may be provided.
  • the embodiments may be implemented in an appropriately combined manner.
  • the constant current source is connected in series between a power source and the resistor bridge circuit in actuality, as illustrated in FIG. 18 .
  • the actual circuit needs to be operated between the power source and ground.
  • the configuration should be as illustrated in FIG. 18 inevitably. Accordingly, a voltage applied to the resistor bridge circuit is reduced by an amount of a voltage drop in the constant current source. As a result, there arises a difficulty of deterioration of an S/N ratio caused by a reduction in sensor sensitivity.
  • a temperature detection circuit is configured to form a first path for supplying a current to one of positive-side and negative-side differential output terminals of a sensor that includes a resistor bridge circuit and a second path for draining a current from the other differential output terminal, the first path and the second path being switchable with respect to the two differential output terminals.
  • a controller causes a voltage measurement portion to measure a voltage of each of the two differential output terminals for a case where the first path is formed in one of the differential output terminals and the second path is formed in the other differential output terminal by the temperature detection circuit and for a case where the second path is formed in the one differential output terminal and the first path is formed in the other differential output terminal by the temperature detection circuit.
  • a calculator calculates a difference between the voltages of the two differential output terminals to acquire temperature information of the sensor.
  • the temperature detection circuit includes: a first series circuit connected between the positive-side differential output terminal and the power source and including a resistor element and a switch circuit; a second series circuit connected between the negative-side differential output terminal and the power source and including a resistor element and a switch circuit; a third series circuit connected between the positive-side differential output terminal and the ground and including a resistor element and a switch circuit; and a fourth series circuit connected between the negative-side differential output terminal and the ground and including a resistor element and a switch circuit.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

A sensor apparatus includes: a sensor that includes a resistor bridge circuit; a temperature detection circuit that provides a first path and a second path; a voltage measurement portion that measures a voltage of each of the differential output terminals; a controller that causes the voltage measurement portion to measure the voltage of each of the two differential output terminals; and a calculator that calculates a difference between the voltages of the two differential output terminals to acquire temperature information of the sensor.

Description

    CROSS REFERENCE TO RELATED APPLICATIONS
  • The present application is a continuation application of International Patent Application No. PCT/JP2017/019219 filed on May 23, 2017, which designated the U.S. and claims the benefit of priority from Japanese Patent Application No, 2016-154534 filed on Aug. 5, 2016. The entire disclosures of all of the above application are incorporated herein by reference.
  • TECHNICAL FIELD
  • The present disclosure relates to a sensor apparatus including a sensor that includes a resistor bridge circuit.
  • BACKGROUND
  • A pressure sensor may include a resistor bridge circuit which uses a diffused resistor and have a temperature characteristic. When a pressure is detected by a pressure sensor, it may be necessary to perform a correction according to the temperature characteristic. For example, a constant current source may be connected between diagonal output terminals of a resistor bridge circuit to acquire temperature information of a pressure sensor,
  • SUMMARY
  • According to one aspect of the present disclosure, a temperature detection circuit is configured to form a first path for supplying a current to one of positive-side and negative-side differential output terminals of a sensor that includes a resistor bridge circuit and a second path for draining a current from the other differential output terminal, the first path and the second path being switchable with respect to the two differential output terminals. A controller may cause a voltage measurement portion to measure a voltage of each of the two differential output terminals. A calculator may calculate a difference between the voltages of the two differential output terminals to acquire temperature information of the sensor.
  • BRIEF DESCRIPTION OF DRAWINGS
  • The above and other objects, features, and advantages of the present disclosure will become more apparent from the following detailed description with reference to the accompanying drawings. In the drawings:
  • FIG. 1 is a diagram illustrating a configuration of a sensor apparatus in a first embodiment;
  • FIG. 2 is a diagram illustrating a state in which switch circuits SP1 and SP2 of a temperature detection circuit are ON;
  • FIG. 3 is a diagram illustrating a state in which switch circuits SM1 and SM2 of the temperature detection circuit are ON;
  • FIG. 4 is a diagram illustrating a control sequence of the sensor apparatus;
  • FIG. 5 is a diagram illustrating an error relative to an approximate expression according to a resistance ratio (ΔR/Rs);
  • FIG. 6 is a graph with a horizontal axis representing a logarithm of the resistance ratio (ΔR/Rs) and a vertical axis representing the error;
  • FIG. 7 is a diagram illustrating the configuration of a sensor apparatus in a second embodiment;
  • FIG. 8 is a diagram illustrating the configuration of a sensor apparatus in a third embodiment;
  • FIG. 9 is a diagram illustrating a control sequence of a sensor apparatus in a fourth embodiment:
  • FIG. 10 is a graph illustrating results obtained by calculating Expression 6 and Expression 7 where Rs=10 kΩ by changing a resistance value of a resistor element Rd of a temperature detection circuit;
  • FIG. 11 is a diagram illustrating the configuration of a sensor apparatus in a fifth embodiment;
  • FIG. 12 is a diagram illustrating a sample hold circuit;
  • FIG. 13 is a diagram illustrating a control sequence of the sensor apparatus;
  • FIG. 14 is a diagram illustrating a state in which switch circuits SP1 and SP2 of a temperature detection circuit are ON when there is a break on a differential output terminal Vinp side in a sensor apparatus in a sixth embodiment;
  • FIG. 15 is a diagram illustrating a state in which switch circuits SM1 and SM 2 are ON when there is a break on the differential output terminal Vinp side;
  • FIG. 16 is a diagram illustrating a state in which the switch circuits SP1 and SP2 of the temperature detection circuit are ON when there is a break on a differential output terminal Vinm side;
  • FIG. 17 is a diagram illustrating a state in which the switch circuits SM1 and SM2 are ON when there is a break on a differential output terminal Vinm side; and
  • FIG. 18 is a diagram illustrating a comparative example.
  • DETAILED DESCRIPTION First Embodiment
  • As illustrated in FIG. 1, a sensor apparatus 1 of the present embodiment includes a pressure sensor 2 that includes four resistor elements Rs configuring a resistor bridge circuit. In the pressure sensor 2, one pair of the opposite corners of the resistor bridge is connected between a power source and ground. Each of differential output terminals Vinp and Vinm corresponding to the other pair of the opposite corners of the resistor bridge is connected to an input terminal of a voltage measurement portion 3. The voltage measurement portion 3 measures a voltage of each of the differential output terminals Vinp and Vinm. The voltage measurement portion 3 may be referred to as a voltage measurement circuit.
  • A temperature detection circuit 4 is connected between the differential output terminals Vinp and Vinm. The temperature detection circuit 4 includes a series circuit which is connected between the output terminal Vinp and the power source and includes a resistor element Rd and a switch circuit SP1, and a series circuit which is connected between the output terminal Vinp and the ground and includes a resistor element Rd and a switch circuit SM2. The temperature detection circuit 4 further includes a series circuit which is connected between the output terminal Vinm and the power source and includes a resistor element Rd and a switch circuit SM1, and a series circuit which is connected between the output terminal Vinm and the ground and includes a resistor element Rd and a switch circuit SP2.
  • A controller 5 performs ON/OFF control for the switch circuits SP1 and SP2 as well as SM1 and SM2 of the temperature detection circuit 4. A calculator 6 performs an operation on the voltage of each of the differential output terminals Vinp and Vinm measured by the voltage measurement portion 3 to acquire information of a pressure detected by the pressure sensor 2 and temperature information for correcting the pressure. The series circuit including the switch circuit SP1 and the resistor element Rd, the series circuit including the switch circuit SP2 and the resistor element Rd, the series circuit including the switch circuit SM1 and the resistor element Rd, and the series circuit including the switch circuit SM2 and the resistor element Rd correspond to a first series circuit, a fourth series circuit, a second series circuit, and a third series circuit, respectively.
  • Next, an action of the present embodiment will be described. As illustrated in FIG. 4, in a phase (A), the controller 5 turns off all of the switch circuits SP1 and SP2 as well as SM1 and SM2 of the temperature detection circuit 4 to produce a state illustrated in FIG. 1. In this state, the controller 5 causes the voltage measurement portion 3 to measure a differential voltage for obtaining information of a pressure detected by the pressure sensor 2. This method is similar to a common method. The pressure information is obtained by Expression (1) by measuring the voltage of each of the differential output terminals Vinp and Vinm of the pressure sensor 2.
  • Pressure ( Vinp - Vinm ) = ( Rs + 2 Rs - Rs - 2 Rs ) Vdd = R Rs Vdd Expression 1
  • Then, in a phase (B), the controller 5 turns on the switch circuits SP1 and SP2 of the temperature detection circuit 4 and turns off the switch circuits SM1 and SN/12 of the temperature detection circuit 4 to produce a state illustrated in FIG. 2. Then, the controller 5 causes the voltage measurement portion 3 to measure a differential voltage for obtaining temperature information of the pressure sensor 2. At this time, a first path for drawing a sink current from the power source is formed on the output terminal Vinp side of the pressure sensor 2, and a second path for supplying a source current to the ground is formed on the output terminal Vinm side. A voltage measured in this state is denoted by a temperature P (Vinp−Vinm) which is expressed by expression (2).
  • Temperature P ( Vinp - Vinm ) = Rs + R Rs + R + ( Rs - R ) Rd Rs - R + Rd Vdd - 1 Rs + R + ( Rs - R ) Rd Rs - R + Rd * ( Rs - R ) Rd Rs - R + Rd Vdd Expression 2
  • Then, in a phase (C), the controller 5 turns off the switch circuits SP1 and SP2 of the temperature detection circuit 4 and turns on the switch circuits SM1 and SM2 of the temperature detection circuit 4 to produce a state illustrated in FIG. 3. Then, similarly, the controller 5 causes the voltage measurement portion 3 to measure a differential voltage for obtaining temperature information of the pressure sensor 2. In this case, the first path and the second path are switched in such a manner that the second path is formed on the output terminal Vinp side and the first path is formed on the output terminal Vinm side. A voltage measured in this state is denoted by a temperature M (Vinp−Vinm), which is expressed by expression (3).
  • Temperature M ( Vinp - Vinm ) = 1 Rs - R + ( Rs + R ) Rd Rs + R + Rd * ( Rs + R ) Rd Rs + R + Rd Vdd - Rs - R Rs - R + ( Rs + R ) Rd Rs + R + Rd Vdd Expression 3
  • When the two voltages (the temperature P and the temperature M) are measured in this manner, the calculator 6 calculates a difference therebetween to obtain temperature information of the pressure sensor 2. However, the temperature information is obtained on the condition that a resistance value of the resistor element Rs of the pressure sensor 2 is sufficiently larger than a resistance value AR which changes according to pressure.
  • Temperature P - Temperature M = 2 ( Rs + R ) ( Rs - R ) Rs 2 + 2 RdRs - R 2 Vdd 2 Rs Rs + 2 R d Vdd ( Rs >> R ) Expression 4
  • In expression (4), the resistance value ΔR is not included. Thus, the voltage (the temperature P−the temperature M) does not include information of the pressure detected by the pressure sensor 2 and reflects the temperature characteristic of the pressure sensor 2. The pressure detected by the pressure sensor 2 can be corrected according to the temperature characteristic by acquiring the temperature information of the pressure sensor 2 in this manner.
  • As illustrated in FIG. 4, the sensor apparatus 1 sequentially and repeatedly executes the phases (A), (B), and (C). In the next period, the calculator 6 calculates a difference between the temperature P and the temperature M measured in the previous period to obtain the voltage (the temperature P−the temperature M). An operation for correcting the pressure may be performed as needed.
  • An error [%] between an operation result in expression (4) and an approximate expression to which a condition (Rs>>ΔR) is applied is expressed by expression (5).
  • Error relative to approximate expression [ % ] = 100 - ( 2 ( Rs + R ) ( Rs - R ) Rs 2 + 2 RdRs - R 2 Vdd ) / ( 2 Rs Rs + 2 Rd Vdd ) * 100 Expression 5
  • For example, when Rs =10 kΩ and Rd=20 kΩ, the error relative to the approximate expression according to a resistance ratio (ΔR/Rs) is as illustrated in FIGS. 5 and 6. Thus, the resistance ratio (ΔR/Rs) may be appropriately set within a range in which an error is allowed.
  • As described above, according to the present embodiment, the temperature detection circuit 4 is configured to form the first path for supplying a current to one of the positive-side and negative-side differential output terminals Vinp and Vinm of the pressure sensor 2 which includes the resistor bridge circuit and the second path for draining a current from the other differential output terminal, the first path and the second path being switchable with respect to the two differential output terminals Vinp and Vinm.
  • The controller 5 causes the voltage measurement portion 3 to measure the voltage of each of the two differential output terminals Vinp and Vinm for a case where the first path is formed in one of the differential output terminals and the second path is formed in the other differential output terminal by the temperature detection circuit 4 and for a case where the second path is formed in the one differential output terminal and the first path is formed in the other differential output terminal by the temperature detection circuit 4. The calculator 6 calculates the difference between the voltages of the differential output terminals Vinp and Vinm to acquire temperature information of the pressure sensor 2. Such a configuration makes it possible to eliminate the necessity of a constant current source and acquire temperature information of the pressure sensor 2 with the S/N ratio maintained without lowering the sensor sensitivity as in a related art.
  • Specifically, the temperature detection circuit 4 includes the first series circuit that is connected between the differential output terminal Vinp and the power source and includes the resistor element Rd and the switch circuit SP1, the second series circuit which is connected between the differential output terminal Vinm and the power source and includes the resistor element Rd and the switch circuit SM1, the third series circuit which is connected between the differential output terminal Vinp and the ground and includes the resistor element Rd and the switch circuit SM2, and the fourth series circuit which is connected between the differential output terminal Vinm and the ground and includes the resistor element Rd and the switch circuit SP2. With such a configuration, it is possible to form the first path in the positive-side differential output terminal Vinp and form the second path in the negative-side differential output terminal Vinm by simultaneously turning on only the switch circuits SP1 and SP2. Further, it is possible to form the first path and the second path with the positive and negative sides switched by simultaneously turning on only the switch circuits SM1 and SM2.
  • Second Embodiment
  • Hereinbelow, the same part as the first embodiment is designated by the same reference sign, and description thereof will be omitted. Thus, a different part from the first embodiment will be described. As illustrated in FIG. 7, in a sensor apparatus 11 of the second embodiment, a temperature detection circuit 12 includes a series circuit 13 of resistor elements R1 to R3. The series circuit 13 is connected between a power source and ground. A common connection point between switch circuits SP1 and SM1 is connected to a common connection point between the resistor elements R1 and R2. A common connection point between switch circuits SP2 and SM2 is connected to a common connection point between the resistor elements R2 and R3. The resistor elements R1 to R3 correspond to first to third resistor elements, respectively. The series circuit 13 corresponds to a voltage dividing resistor circuit.
  • In the above configuration, a voltage amplitude in temperature detection can be variably set by adjusting resistance values of the resistor elements R1 to R3. Each of the switch circuits SP and SM is often composed of a MOSFET. In this case, a potential difference with respect to the power source or the ground is given to both ends of the switch circuits SP and SM. Accordingly, a threshold of the FET increases by a substrate effect, and an off-leak current can be reduced. The “off-leak” described herein refers to, for example, off-leak on the switch circuit SM side which is OFF when the switch circuit SP side is ON as illustrated in FIG. 2.
  • Third Embodiment
  • As illustrated in FIG. 8, a temperature detection circuit 22 of a sensor apparatus 21 of a third embodiment includes a first constant current source 23 and a second constant current source 24 instead of the resistor elements Rd of the temperature detection circuit 4 of the first embodiment. One end of the first constant current source 23 is connected to a power source. One end of the second constant current source 24 is connected to ground. A common connection point between switch circuits SP1 and SM1 is connected to the other end of the first constant current source 23. A common connection point between switch circuits SP2 and SM2 is connected to the other end of the second constant current source 24.
  • According to the third embodiment configured in the above manner, an effect similar to the effect of the first embodiment can be obtained. The constant current sources 23 and 24 of the third embodiment are connected in parallel to the pressure sensor 2. Thus, a voltage applied to the pressure sensor 2 is not reduced as in a related art.
  • Fourth Embodiment
  • As illustrated in FIG. 9, in the fourth embodiment, the temperature P and the temperature M, which are measured to acquire temperature information in the above embodiments, are added to also acquire information of a pressure detected by a pressure sensor 2. When a condition (Rd=Rs/2) is set, and (the temperature P+the temperature M) is calculated, a result similar to the result of expression (1) is obtained.
  • Temperature P + Temperature M = 4 Rd R Rs 2 - R 2 + 2 RdRs Vdd 4 R Rs ( Rs Rd + 2 ) Vdd ( Rd >> R ) = R Rs Vdd ( Rd = Rs / 2 ) Expression 6
  • Further, expression (6) also corresponds to a pressure sensitivity of a sensor apparatus 1. The temperature sensitivity is obtained by expression (7).
  • Temperature sensitivity = d ( Temperature P - Temperature M ) dRs = d ( 2 Rs Rs + 2 Rd Vdd ) dRs = 4 Rd ( Rs + 2 Rd ) 2 Vdd Expression 7
  • When the expression (6) and the expression (7) where Rs=10 kΩ are calculated by changing a resistance value of a resistor element Rd of a temperature detection circuit 4, results shown in FIG. 10 are obtained. The results show that the temperature sensitivity is maximum when the condition (Rd=Rs/2) is satisfied.
  • As described, according to the fourth embodiment, a calculator 6 acquires information of a pressure detected by the pressure sensor 2 by adding the temperature P and the temperature M. Thus, it is possible to reduce the time required for a control sequence. Further, it is possible to maximize the temperature sensitivity by setting the resistance value of the resistor element Rd to half a resistance value of a resistor element Rs of the pressure sensor 2.
  • Fifth Embodiment
  • As illustrated in FIG. 11, a sensor apparatus 31 of a fifth embodiment includes two pairs of pressure sensors 2 and temperature detection circuits 4. One of the pairs includes a pressure sensor 2 (0) and a temperature detection circuit 4 (0), and the other pair includes a pressure sensor 2 (1) and a temperature detection circuit 4 (1). A voltage measurement portion 32 includes a sample hold circuit 33 which is built therein and includes a sample circuit portion 33S and a hold circuit portion 33H.
  • As illustrated in FIG. 12, the sample hold circuit 33 includes sample circuit portions 33S (0) and 33S (1) which correspond to pressure sensors 2 (0) and 2 (1), respectively. The sample circuit portion 33S includes switch circuits 41 p and 41 m as well as 42 p and 42 m of the input side, and 43 p and 43 m as well as 44 p and 44 m of the output side. A common connection point between the switch circuits 42 p and 42 m and a common connection point between the switch circuits 44 p and 44 m are both connected to ground. Capacitors 45 p and 45 m for sampling are connected between the switch circuits 41 p and 43 p and between the switch circuits 41 m and 43 m, respectively,
  • The hold circuit portion 33H includes a differential amplifier 46. A parallel circuit of a capacitor 47 p for holding and a switch circuit 48 p is connected between an inverting input terminal and a noninverting output terminal of the differential amplifier 46. A parallel circuit of a capacitor 47 m and a switch circuit 48 m is connected between a noninverting input terminal and an inverting output terminal of the differential amplifier 46. The switch circuits 43 p and 43 m are connected to the inverting input terminal and the noninverting input terminal of the differential amplifier 46, respectively.
  • A controller 35 illustrated in FIG. 11 also controls ON/OFF of each of the switch circuits of the sample hold circuit 33. A voltage signal held by the sample hold circuit 33 is input to an A/D converter 34, converted to digital data, and input to a calculator 6.
  • Next, an action of the fifth embodiment will be described. As an operation of the sample hold circuit 33 is a common operation, detailed description thereof will be omitted. As illustrated in FIG. 13, in a control sequence of the fifth embodiment, measurement of a pressure (0) of the pressure sensor 2 (0), measurement of a pressure (1) of the pressure sensor 2 (1), measurement of a temperature P (0), measurement of a temperature P (1), measurement of a temperature M (0), and measurement of a temperature M (1) are repeatedly executed.
  • In a first phase (A), the voltage measurement portion 32 samples a measurement result of the pressure (0) of the pressure sensor 2 (0). In the next phase (B), the voltage measurement portion 32 samples a measurement result of the pressure (1) of the pressure sensor 2 (1) in parallel with holding the measurement result of the pressure (0) of the pressure sensor 2 (0). In the next phase (C), the voltage measurement portion 32 holds the measurement result of the pressure (1) of the pressure sensor 2 (1) in parallel with sampling a measurement result of the pressure (0) of the pressure sensor 2 (0). The controller 35 switches each of the switch circuits of the temperature detection circuits 4 (0) and 4 (1) corresponding to the control sequence.
  • As described above, according to the fifth embodiment, in the configuration that includes the two pairs of pressure sensors 2 and temperature detection circuits 4, and samples and holds each measurement result by the voltage measurement portion 32, the control sequence can be shortened by performing sampling of a measurement result in one of the pairs in parallel with holding of a measurement result in the other pair.
  • Sixth Embodiment
  • In a sixth embodiment, the occurrence of a break between one of the differential output terminals Vinp and Vinm of the pressure sensor 2 and the voltage measurement portion 3, for example, in the configuration of the first embodiment is detected. As illustrated in FIGS. 14 and 15, when there is a break on the differential output terminal Vinp side, a temperature P and a temperature M are measured, and a difference therebetween is calculated in a manner similar to the first embodiment. A result of the calculation is as expressed by expressions (8) to (10).
  • Temperature P ( Vinp - Vinm ) = Vdd - 1 Rs + R + ( Rs - R ) Rd Rs - R + Rd * ( Rs - R ) Rd Rs - R + Rd Vdd Expression 8 Temperature M ( Vinp - Vinm ) = GND - Rs - R Rs - R + ( Rs + R ) Rd Rs + R + Rd Vdd Expression 9 Temperature P + Temperature M = 2 ( Rs 2 + RdRs - R 2 ) Rs 2 + 2 RdRs - R 2 Vdd 2 ( Rd Rs + 1 ) 2 Rd Rs + 1 Vdd ( Rs >> R ) = 1.5 Vdd ( Rd = Rs / 2 ) Expression 10
  • A result of expression (10) is 1.5 Vdd under the condition (Rd=Rs/2). That is, an extremely high voltage is detected. Thus, a break can be detected by setting an appropriate threshold and detecting the occurrence of the excessively high voltage.
  • FIGS. 16 and 17 illustrate a case where there is a break on the differential output terminal Vinm side. A temperature P and a temperature M are measured, and a difference therebetween is calculated in a manner similar to the case where there is a break on the differential output terminal Vinp side. A result of the calculation is as expressed by expressions (11) to (13).
  • Temperature P ( Vinp - Vinm ) = Rs + R Rs + R + ( Rs - R ) Rd Rs - R + Rd Vdd Expression 11 Temperature M ( Vinp - Vinm ) = 1 Rs - R + ( Rs + R ) Rd Rs + R + Rd * ( Rs + R ) Rd Rs + R + Rd Vdd - Vdd Expression 12 Temperature P + Temperature M = 2 ( Rs 2 + RdRs - R 2 ) Rs 2 + 2 RdRs - R 2 Vdd 2 ( Rd Rs + 1 ) 2 Rd Rs + 1 Vdd ( Rs >> R ) = 1.5 Vdd ( Rd = Rs / 2 ) Expression 13
  • A result of the expression (13) is also 1.5 Vdd under the condition (Rd=Rs/2). Thus, also in this case, a break can be detected in a similar manner.
  • As described above, according to the sixth embodiment, a calculator 6 is capable of detecting a break in the differential output terminal of the pressure sensor 2 by recognizing that the difference between the two voltages (the temperature P and the temperature M) exceeds an upper limit value.
  • Other Embodiments
  • The sensor is not limited to the pressure sensor, and may be any sensor that includes a resistor bridge circuit.
  • In the fifth embodiment, three or more pairs of pressure sensors 2 and temperature detection circuits 4 may be provided.
  • The embodiments may be implemented in an appropriately combined manner.
  • Aspects of the disclosure described herein are set forth in the following clauses.
  • It is considered that the constant current source is connected in series between a power source and the resistor bridge circuit in actuality, as illustrated in FIG. 18. The actual circuit needs to be operated between the power source and ground. Thus, when the direction of current is taken into consideration, the configuration should be as illustrated in FIG. 18 inevitably. Accordingly, a voltage applied to the resistor bridge circuit is reduced by an amount of a voltage drop in the constant current source. As a result, there arises a difficulty of deterioration of an S/N ratio caused by a reduction in sensor sensitivity.
  • It is an object of the present disclosure to provide a sensor apparatus capable of acquiring temperature information without lowering the sensor sensitivity.
  • According to one aspect of the present disclosure, a temperature detection circuit is configured to form a first path for supplying a current to one of positive-side and negative-side differential output terminals of a sensor that includes a resistor bridge circuit and a second path for draining a current from the other differential output terminal, the first path and the second path being switchable with respect to the two differential output terminals. A controller causes a voltage measurement portion to measure a voltage of each of the two differential output terminals for a case where the first path is formed in one of the differential output terminals and the second path is formed in the other differential output terminal by the temperature detection circuit and for a case where the second path is formed in the one differential output terminal and the first path is formed in the other differential output terminal by the temperature detection circuit. A calculator calculates a difference between the voltages of the two differential output terminals to acquire temperature information of the sensor. Such a configuration makes it possible to acquire temperature information of the sensor with the S/N ratio maintained without lowering the sensor sensitivity as in a related art.
  • According to one aspect of the present disclosure, the temperature detection circuit includes: a first series circuit connected between the positive-side differential output terminal and the power source and including a resistor element and a switch circuit; a second series circuit connected between the negative-side differential output terminal and the power source and including a resistor element and a switch circuit; a third series circuit connected between the positive-side differential output terminal and the ground and including a resistor element and a switch circuit; and a fourth series circuit connected between the negative-side differential output terminal and the ground and including a resistor element and a switch circuit. With such a configuration, it is possible to form the first path in one of the differential output terminals and form the second path in the other differential output terminal by simultaneously turning on only the switch circuits of the first and fourth series circuits. Further, it is possible to form the first path and the second path with the one differential output terminal and the other differential output terminal switched by simultaneously turning on only the switch circuits of the second and third series circuits.
  • While the present disclosure has been described based on the embodiments, it is to be understood that the present disclosure is not limited to the described embodiments and structures. The present disclosure also includes various modifications and modifications within the equivalent range thereof. In addition, various combinations or modes, and other combinations or modes including only one element, more, or less thereof are also included in the scope and idea range of the present disclosure.

Claims (8)

1. A sensor apparatus comprising:
a sensor that includes a resistor bridge circuit connected between a power source and ground, and detects a physical quantity;
a temperature detection circuit that provides
a first path for supplying a current to one of a positive-side differential output terminal and a negative-side differential output terminal of the resistor bridge circuit and
a second path for draining a current from another of the positive-side differential output terminal and the negative-side differential output terminal, the first path and the second path being switchable with respect to the positive-side differential output terminal and the negative-side differential output terminal;
a voltage measurement portion that measures a voltage of each of the differential output terminals;
a controller that causes the voltage measurement portion to measure the voltage of each of the differential output terminals for a case where the first path is provided in one of the differential output terminals and the second path is provided in a different one of the differential output terminals by the temperature detection circuit and for a case where the second path is provided in the one of the differential output terminals and the first path is provided in the different one of the differential output terminals by the temperature detection circuit; and
a calculator that calculates a difference between voltages of the differential output terminals to acquire temperature information of the sensor.
2. The sensor apparatus according to claim 1, wherein:
the temperature detection circuit includes:
a first series circuit connected between the positive-side differential output terminal and the power source and including a first resistor element and a first switch circuit;
a second series circuit connected between the negative-side differential output terminal and the power source and including a second resistor element and a second switch circuit;
a third series circuit connected between the positive-side differential output terminal and the ground and including a third resistor element and a third switch circuit; and
a fourth series circuit connected between the negative-side differential output terminal and the ground and including a fourth resistor element and a fourth switch circuit.
3. The sensor apparatus according to claim 2, wherein:
the temperature detection circuit includes a voltage dividing resistor circuit connected between the power source and the ground and including a first resistor element, a second resistor element, and a third resistor element;
the first series circuit and the second series circuit are connected to the power source through the first resistor element; and
the third series circuit and the fourth series circuit are connected to the ground through the third resistor element.
4. The sensor apparatus according to claim 2, wherein:
a resistance value of the resistor elements of the temperature detection circuit is half a resistance value of a resistor element of the resistor bridge circuit.
5. The sensor apparatus according to claim 1, wherein:
the temperature detection circuit includes:
a first constant current source having one end connected to the power source;
a second constant current source having one end connected to the ground;
a first switch circuit connected between the positive-side differential output terminal and a different end of the first constant current source;
a second switch circuit connected between the negative-side differential output terminal and a different end of the first constant current source;
a third switch circuit connected between the positive-side differential output terminal and a different end of the second constant current source; and
a fourth switch circuit connected between the negative-side differential output terminal and a different end of the second constant current source.
6. The sensor apparatus according to claim 1, wherein:
the calculator adds two target voltages for calculating the difference between voltages of the differential output terminals to acquire voltage data according to a pressure detected by the sensor.
7. The sensor apparatus according to claim 1, wherein:
the calculator detects a break in the differential output terminal when the difference between voltages of the differential output terminals exceeds an upper limit value.
8. A sensor apparatus comprising:
a sensor that includes a resistor bridge circuit connected between a power source and ground, and detects a physical quantity;
a temperature detection circuit that provides
a first path for supplying a current to one of a positive-side differential output terminal and a negative-side differential output terminal of the resistor bridge circuit and
a second path for draining a current from another of the positive-side differential output terminal and the negative-side differential output terminal, the first path and the second path being switchable with respect to the positive-side differential output terminal and the negative-side differential output terminal;
a voltage measurement circuit that measures a voltage of each of the differential output terminals;
a controller that connected with the temperature detection circuit and causes the voltage measurement portion to measure the voltage of each of the differential output terminals for a case where the first path is provided in one of the differential output terminals and the second path is provided in a different one of the differential output terminals by the temperature detection circuit and for a case where the second path is provided in the one of the differential output terminals and the first path is provided in the different one of the differential output terminals by the temperature detection circuit; and
a calculator that connected with the controller and the voltage measurement circuit, and calculates a difference between voltages of the differential output terminals to acquire temperature information of the sensor.
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20220291267A1 (en) * 2021-03-10 2022-09-15 Renesas Electronics America Inc. Active measurement correction of resistive sensors

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113311365A (en) * 2021-06-01 2021-08-27 深圳市思榕科技有限公司 Pressure sensor broken string detection circuitry

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05256716A (en) * 1992-03-13 1993-10-05 Mitsubishi Electric Corp Semiconductor apparatus
JP2898500B2 (en) 1993-01-29 1999-06-02 株式会社山武 Pressure sensor with temperature characteristic correction
DE4417228A1 (en) * 1994-05-17 1995-11-23 Michael Dr Altwein Strain gauge measuring arrangement, use of the same and modulation amplifier for such measuring arrangements
NO953285L (en) 1994-10-31 1996-05-02 Motorola Inc Method and apparatus for compensating by sensors
JPH0979875A (en) * 1995-09-11 1997-03-28 Nec San-Ei Instr Co Ltd Physical quantity measuring device and its measuring method
JP3520652B2 (en) 1996-02-08 2004-04-19 株式会社デンソー Semiconductor force sensor
WO2002033371A2 (en) * 2000-10-18 2002-04-25 Endevco Corporation Pressure sensor
JP4710119B2 (en) * 2000-10-27 2011-06-29 Nok株式会社 Sensor circuit
DE10133525B4 (en) * 2001-07-11 2010-08-05 Robert Bosch Gmbh Sensor with self-test function
CN1267710C (en) * 2002-10-23 2006-08-02 株式会社电装 Pressure sensing device with temp. sensor
JP2005274412A (en) * 2004-03-25 2005-10-06 Denso Corp Temperature sensor integrated type pressure sensor device
WO2006020814A2 (en) * 2004-08-10 2006-02-23 Robertshaw Controls Company Pressure and temperature measurement of a piezo-resistive device using differential channel of a ratiometric analog to digital converter
US7191072B2 (en) * 2004-08-10 2007-03-13 Robertshaw Controls Company Pressure and temperature measurement of a piezo-resistive device using differential channel of a ratiometric analog to digital converter
JP2006078310A (en) 2004-09-09 2006-03-23 Nippon Seiki Co Ltd Semiconductor sensor apparatus
CN201285331Y (en) * 2008-09-03 2009-08-05 伊玛精密电子(苏州)有限公司 Pressure temperature sensor
JP4720883B2 (en) * 2008-09-18 2011-07-13 株式会社豊田中央研究所 Pressure sensor output processing device and pressure sensor device
JP5230872B2 (en) * 2009-06-09 2013-07-10 株式会社デンソー Sensor system
US8701460B2 (en) 2011-03-31 2014-04-22 Freescale Semiconductor, Inc. Method and system to compensate for temperature and pressure in piezo resistive devices
JP5900536B2 (en) 2013-09-30 2016-04-06 株式会社デンソー Sensor signal detection device
JP6341119B2 (en) * 2015-03-03 2018-06-13 株式会社デンソー Sensor drive device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20220291267A1 (en) * 2021-03-10 2022-09-15 Renesas Electronics America Inc. Active measurement correction of resistive sensors
US11747379B2 (en) * 2021-03-10 2023-09-05 Renesas Electronics America, Inc. Active measurement correction of resistive sensors

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