JPS5958830A - ボンダ−用ワ−ク加熱装置 - Google Patents

ボンダ−用ワ−ク加熱装置

Info

Publication number
JPS5958830A
JPS5958830A JP57169394A JP16939482A JPS5958830A JP S5958830 A JPS5958830 A JP S5958830A JP 57169394 A JP57169394 A JP 57169394A JP 16939482 A JP16939482 A JP 16939482A JP S5958830 A JPS5958830 A JP S5958830A
Authority
JP
Japan
Prior art keywords
pawls
feed
cover
lid
lead frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57169394A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0236063B2 (enrdf_load_stackoverflow
Inventor
Hiroshi Ushiki
博 丑木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinkawa Ltd
Original Assignee
Shinkawa Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinkawa Ltd filed Critical Shinkawa Ltd
Priority to JP57169394A priority Critical patent/JPS5958830A/ja
Publication of JPS5958830A publication Critical patent/JPS5958830A/ja
Publication of JPH0236063B2 publication Critical patent/JPH0236063B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/83Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
    • H01L24/75Apparatus for connecting with bump connectors or layer connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/8319Arrangement of the layer connectors prior to mounting
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/838Bonding techniques
    • H01L2224/8385Bonding techniques using a polymer adhesive, e.g. an adhesive based on silicone, epoxy, polyimide, polyester
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01005Boron [B]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01082Lead [Pb]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/06Polymers
    • H01L2924/078Adhesive characteristics other than chemical
    • H01L2924/07802Adhesive characteristics other than chemical not being an ohmic electrical conductor

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Wire Bonding (AREA)
  • Die Bonding (AREA)
JP57169394A 1982-09-28 1982-09-28 ボンダ−用ワ−ク加熱装置 Granted JPS5958830A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57169394A JPS5958830A (ja) 1982-09-28 1982-09-28 ボンダ−用ワ−ク加熱装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57169394A JPS5958830A (ja) 1982-09-28 1982-09-28 ボンダ−用ワ−ク加熱装置

Publications (2)

Publication Number Publication Date
JPS5958830A true JPS5958830A (ja) 1984-04-04
JPH0236063B2 JPH0236063B2 (enrdf_load_stackoverflow) 1990-08-15

Family

ID=15885780

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57169394A Granted JPS5958830A (ja) 1982-09-28 1982-09-28 ボンダ−用ワ−ク加熱装置

Country Status (1)

Country Link
JP (1) JPS5958830A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010044287A1 (ja) * 2008-10-16 2010-04-22 株式会社新川 基板搬送装置及び基板搬送方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5681945A (en) * 1979-12-07 1981-07-04 Hitachi Ltd Assembling device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5681945A (en) * 1979-12-07 1981-07-04 Hitachi Ltd Assembling device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010044287A1 (ja) * 2008-10-16 2010-04-22 株式会社新川 基板搬送装置及び基板搬送方法
CN102177574A (zh) * 2008-10-16 2011-09-07 株式会社新川 基板运送装置及基板运送方法
KR101096485B1 (ko) 2008-10-16 2011-12-20 가부시키가이샤 신가와 기판 반송 장치 및 기판 반송 방법

Also Published As

Publication number Publication date
JPH0236063B2 (enrdf_load_stackoverflow) 1990-08-15

Similar Documents

Publication Publication Date Title
JPS5958830A (ja) ボンダ−用ワ−ク加熱装置
KR930006129B1 (ko) 반도체 장치의 제조방법 및 그 장치
US4986460A (en) Apparatus for manufacturing semiconductor devices
US4320865A (en) Apparatus for attachment of die to heat sink
JPS6250976B2 (enrdf_load_stackoverflow)
JPH0669050B2 (ja) ボンデイング装置用加熱装置
JPH0254664B2 (enrdf_load_stackoverflow)
JPS5919339A (ja) 加熱装置付きフイ−ダ機構
JPS62276840A (ja) ボンデイング装置
JPH0319223Y2 (enrdf_load_stackoverflow)
US4975050A (en) Workpiece heating and feeding device
JPS5925232A (ja) ワイヤボンディング装置
JPH05109793A (ja) ボンデイング装置用加熱装置
JP3242486B2 (ja) 半導体モールド装置
JPH07153783A (ja) 半導体製造装置
JP2569826B2 (ja) 半導体のワイヤボンディング装置
JPS5842617B2 (ja) ハンドウタイソウチノセイゾウソウチ
JP3282367B2 (ja) ワイヤボンディング装置
KR830000975Y1 (ko) 반도체 장치의 제조장치
JPS60164344A (ja) ペレツト供給装置
JP2817080B2 (ja) ボンディング装置
JPH0527977B2 (enrdf_load_stackoverflow)
JPH023625Y2 (enrdf_load_stackoverflow)
JPH01239864A (ja) 基板搬送装置
JPS6332254B2 (enrdf_load_stackoverflow)