JPS5957444A - 半導体基板測定用カセツト式ユニツト - Google Patents

半導体基板測定用カセツト式ユニツト

Info

Publication number
JPS5957444A
JPS5957444A JP57168188A JP16818882A JPS5957444A JP S5957444 A JPS5957444 A JP S5957444A JP 57168188 A JP57168188 A JP 57168188A JP 16818882 A JP16818882 A JP 16818882A JP S5957444 A JPS5957444 A JP S5957444A
Authority
JP
Japan
Prior art keywords
semiconductor substrate
probe
sample holding
case
type unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57168188A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6236388B2 (enExample
Inventor
Kunio Kouji
高治　邦夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SPC Electronics Corp
Shimada Rika Kogyo KK
Original Assignee
SPC Electronics Corp
Shimada Rika Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SPC Electronics Corp, Shimada Rika Kogyo KK filed Critical SPC Electronics Corp
Priority to JP57168188A priority Critical patent/JPS5957444A/ja
Publication of JPS5957444A publication Critical patent/JPS5957444A/ja
Publication of JPS6236388B2 publication Critical patent/JPS6236388B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P74/00—

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP57168188A 1982-09-27 1982-09-27 半導体基板測定用カセツト式ユニツト Granted JPS5957444A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57168188A JPS5957444A (ja) 1982-09-27 1982-09-27 半導体基板測定用カセツト式ユニツト

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57168188A JPS5957444A (ja) 1982-09-27 1982-09-27 半導体基板測定用カセツト式ユニツト

Publications (2)

Publication Number Publication Date
JPS5957444A true JPS5957444A (ja) 1984-04-03
JPS6236388B2 JPS6236388B2 (enExample) 1987-08-06

Family

ID=15863409

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57168188A Granted JPS5957444A (ja) 1982-09-27 1982-09-27 半導体基板測定用カセツト式ユニツト

Country Status (1)

Country Link
JP (1) JPS5957444A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS639945A (ja) * 1986-07-01 1988-01-16 Fujitsu Ltd 真空中の電気特性測定方法
US5084671A (en) * 1987-09-02 1992-01-28 Tokyo Electron Limited Electric probing-test machine having a cooling system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS639945A (ja) * 1986-07-01 1988-01-16 Fujitsu Ltd 真空中の電気特性測定方法
US5084671A (en) * 1987-09-02 1992-01-28 Tokyo Electron Limited Electric probing-test machine having a cooling system

Also Published As

Publication number Publication date
JPS6236388B2 (enExample) 1987-08-06

Similar Documents

Publication Publication Date Title
US5172049A (en) IC test equipment
US4757255A (en) Environmental box for automated wafer probing
JPH07240447A (ja) 半導体ウエハ試験装置およびその方法
US3171187A (en) Method of manufacturing semiconductor devices
US3732722A (en) Material holder
JP2939355B2 (ja) プラズマ処理装置
JPH02232363A (ja) 加熱サンプルキャリヤ付き装置
JPS5957444A (ja) 半導体基板測定用カセツト式ユニツト
JPS5986235A (ja) 半導体基板の電気的特性測定方法
JP7213080B2 (ja) 載置台
US3376376A (en) Miniature transistor enclosed in a glass disc-shaped housing
JPH10189671A (ja) 半導体ウェーハのプロービングパッド構造
JP3025113B2 (ja) 低温ハンドラ
US2900584A (en) Transistor method and product
US2959718A (en) Rectifier assembly
US2979024A (en) Apparatus for fusing contacts onto semiconductive bodies
JP2000028641A (ja) プローブカード
KR100479846B1 (ko) 탐침형 깊은 준위 과도 전기 용량 분광기
US2691111A (en) Readily accessible temperature controlled piezoelectric device test oven
US3473124A (en) Method of electrically testing semiconductor elements retained under a pressure drawn film
JPS63217634A (ja) ウエフア上電子回路検査装置
US6762613B1 (en) Testing system and method of operation therefor including a test fixture for electrical testing of semiconductor chips above a thermal threshold temperature of an interlayer dielectric material
JPH0697242A (ja) プローブ装置
JPS6228758Y2 (enExample)
JPH0636637Y2 (ja) Ｉｃハンドラのインタフェイス結露防止装置