JPS6236388B2 - - Google Patents

Info

Publication number
JPS6236388B2
JPS6236388B2 JP57168188A JP16818882A JPS6236388B2 JP S6236388 B2 JPS6236388 B2 JP S6236388B2 JP 57168188 A JP57168188 A JP 57168188A JP 16818882 A JP16818882 A JP 16818882A JP S6236388 B2 JPS6236388 B2 JP S6236388B2
Authority
JP
Japan
Prior art keywords
semiconductor substrate
probe
sample holding
case
stand
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57168188A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5957444A (ja
Inventor
Kunio Takaharu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimada Rika Kogyo KK
Original Assignee
Shimada Rika Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimada Rika Kogyo KK filed Critical Shimada Rika Kogyo KK
Priority to JP57168188A priority Critical patent/JPS5957444A/ja
Publication of JPS5957444A publication Critical patent/JPS5957444A/ja
Publication of JPS6236388B2 publication Critical patent/JPS6236388B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP57168188A 1982-09-27 1982-09-27 半導体基板測定用カセツト式ユニツト Granted JPS5957444A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57168188A JPS5957444A (ja) 1982-09-27 1982-09-27 半導体基板測定用カセツト式ユニツト

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57168188A JPS5957444A (ja) 1982-09-27 1982-09-27 半導体基板測定用カセツト式ユニツト

Publications (2)

Publication Number Publication Date
JPS5957444A JPS5957444A (ja) 1984-04-03
JPS6236388B2 true JPS6236388B2 (enExample) 1987-08-06

Family

ID=15863409

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57168188A Granted JPS5957444A (ja) 1982-09-27 1982-09-27 半導体基板測定用カセツト式ユニツト

Country Status (1)

Country Link
JP (1) JPS5957444A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS639945A (ja) * 1986-07-01 1988-01-16 Fujitsu Ltd 真空中の電気特性測定方法
US5084671A (en) * 1987-09-02 1992-01-28 Tokyo Electron Limited Electric probing-test machine having a cooling system

Also Published As

Publication number Publication date
JPS5957444A (ja) 1984-04-03

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