JPH0340947B2 - - Google Patents

Info

Publication number
JPH0340947B2
JPH0340947B2 JP57104111A JP10411182A JPH0340947B2 JP H0340947 B2 JPH0340947 B2 JP H0340947B2 JP 57104111 A JP57104111 A JP 57104111A JP 10411182 A JP10411182 A JP 10411182A JP H0340947 B2 JPH0340947 B2 JP H0340947B2
Authority
JP
Japan
Prior art keywords
semiconductor wafer
measurement
shield plate
chuck top
insulating layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57104111A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58220438A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP57104111A priority Critical patent/JPS58220438A/ja
Publication of JPS58220438A publication Critical patent/JPS58220438A/ja
Publication of JPH0340947B2 publication Critical patent/JPH0340947B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
JP57104111A 1982-06-17 1982-06-17 半導体ウエハ測定載置台 Granted JPS58220438A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57104111A JPS58220438A (ja) 1982-06-17 1982-06-17 半導体ウエハ測定載置台

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57104111A JPS58220438A (ja) 1982-06-17 1982-06-17 半導体ウエハ測定載置台

Publications (2)

Publication Number Publication Date
JPS58220438A JPS58220438A (ja) 1983-12-22
JPH0340947B2 true JPH0340947B2 (enExample) 1991-06-20

Family

ID=14372012

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57104111A Granted JPS58220438A (ja) 1982-06-17 1982-06-17 半導体ウエハ測定載置台

Country Status (1)

Country Link
JP (1) JPS58220438A (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH067562B2 (ja) * 1986-12-01 1994-01-26 東京エレクトロン株式会社 プロ−バ用載置台の構造
JPS63151039A (ja) * 1986-12-16 1988-06-23 Hitachi Electronics Eng Co Ltd 誘電体絶縁層ステ−ジによるウエハｌｓｉの検査方法
US4884026A (en) * 1987-06-24 1989-11-28 Tokyo Electron Limited Electrical characteristic measuring apparatus
JPH0762691B2 (ja) * 1987-06-24 1995-07-05 東京エレクトロン株式会社 電気特性測定装置
US5084671A (en) * 1987-09-02 1992-01-28 Tokyo Electron Limited Electric probing-test machine having a cooling system
JP3565496B2 (ja) * 2000-04-13 2004-09-15 イビデン株式会社 セラミックヒータ、静電チャックおよびウエハプローバ
JP2006128351A (ja) * 2004-10-28 2006-05-18 Tokyo Seimitsu Co Ltd 容量測定システム及び容量測定方法
JP4912056B2 (ja) * 2006-06-22 2012-04-04 株式会社東京精密 プローバ用チャック
JP4965287B2 (ja) * 2007-03-14 2012-07-04 東京エレクトロン株式会社 載置台

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1565811A (en) * 1976-06-28 1980-04-23 Minnesota Mining & Mfg Luminescent phosphor materials
JPS5938449B2 (ja) * 1977-06-03 1984-09-17 株式会社日立製作所 パネル装置

Also Published As

Publication number Publication date
JPS58220438A (ja) 1983-12-22

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