JPS58220438A - 半導体ウエハ測定載置台 - Google Patents

半導体ウエハ測定載置台

Info

Publication number
JPS58220438A
JPS58220438A JP57104111A JP10411182A JPS58220438A JP S58220438 A JPS58220438 A JP S58220438A JP 57104111 A JP57104111 A JP 57104111A JP 10411182 A JP10411182 A JP 10411182A JP S58220438 A JPS58220438 A JP S58220438A
Authority
JP
Japan
Prior art keywords
semiconductor wafer
measurement
chuck top
capacity
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57104111A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0340947B2 (enExample
Inventor
Tatsuji Oota
達司 太田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NIPPON MAIKURONIKUSU KK
Micronics Japan Co Ltd
Original Assignee
NIPPON MAIKURONIKUSU KK
Micronics Japan Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NIPPON MAIKURONIKUSU KK, Micronics Japan Co Ltd filed Critical NIPPON MAIKURONIKUSU KK
Priority to JP57104111A priority Critical patent/JPS58220438A/ja
Publication of JPS58220438A publication Critical patent/JPS58220438A/ja
Publication of JPH0340947B2 publication Critical patent/JPH0340947B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
JP57104111A 1982-06-17 1982-06-17 半導体ウエハ測定載置台 Granted JPS58220438A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57104111A JPS58220438A (ja) 1982-06-17 1982-06-17 半導体ウエハ測定載置台

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57104111A JPS58220438A (ja) 1982-06-17 1982-06-17 半導体ウエハ測定載置台

Publications (2)

Publication Number Publication Date
JPS58220438A true JPS58220438A (ja) 1983-12-22
JPH0340947B2 JPH0340947B2 (enExample) 1991-06-20

Family

ID=14372012

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57104111A Granted JPS58220438A (ja) 1982-06-17 1982-06-17 半導体ウエハ測定載置台

Country Status (1)

Country Link
JP (1) JPS58220438A (enExample)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63138745A (ja) * 1986-12-01 1988-06-10 Tokyo Electron Ltd プロ−バ用載置台の構造
JPS63151039A (ja) * 1986-12-16 1988-06-23 Hitachi Electronics Eng Co Ltd 誘電体絶縁層ステ−ジによるウエハｌｓｉの検査方法
JPS6472079A (en) * 1987-06-24 1989-03-16 Tokyo Electron Ltd Electrical characteristic measuring instrument
US4884026A (en) * 1987-06-24 1989-11-28 Tokyo Electron Limited Electrical characteristic measuring apparatus
US5084671A (en) * 1987-09-02 1992-01-28 Tokyo Electron Limited Electric probing-test machine having a cooling system
WO2001080307A1 (en) * 2000-04-13 2001-10-25 Ibiden Co., Ltd. Ceramic substrate
JP2006128351A (ja) * 2004-10-28 2006-05-18 Tokyo Seimitsu Co Ltd 容量測定システム及び容量測定方法
JP2008004730A (ja) * 2006-06-22 2008-01-10 Tokyo Seimitsu Co Ltd プローバ用チャック
JP2008227206A (ja) * 2007-03-14 2008-09-25 Tokyo Electron Ltd 載置台

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5330992A (en) * 1976-06-28 1978-03-23 Minnesota Mining & Mfg Luminescent phosphorescnt substances* composites thereof and sensitizing screens using same
JPS54153A (en) * 1977-06-03 1979-01-05 Hitachi Ltd Panel device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5330992A (en) * 1976-06-28 1978-03-23 Minnesota Mining & Mfg Luminescent phosphorescnt substances* composites thereof and sensitizing screens using same
JPS54153A (en) * 1977-06-03 1979-01-05 Hitachi Ltd Panel device

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63138745A (ja) * 1986-12-01 1988-06-10 Tokyo Electron Ltd プロ−バ用載置台の構造
JPS63151039A (ja) * 1986-12-16 1988-06-23 Hitachi Electronics Eng Co Ltd 誘電体絶縁層ステ−ジによるウエハｌｓｉの検査方法
JPS6472079A (en) * 1987-06-24 1989-03-16 Tokyo Electron Ltd Electrical characteristic measuring instrument
US4884026A (en) * 1987-06-24 1989-11-28 Tokyo Electron Limited Electrical characteristic measuring apparatus
US5084671A (en) * 1987-09-02 1992-01-28 Tokyo Electron Limited Electric probing-test machine having a cooling system
WO2001080307A1 (en) * 2000-04-13 2001-10-25 Ibiden Co., Ltd. Ceramic substrate
JP2006128351A (ja) * 2004-10-28 2006-05-18 Tokyo Seimitsu Co Ltd 容量測定システム及び容量測定方法
JP2008004730A (ja) * 2006-06-22 2008-01-10 Tokyo Seimitsu Co Ltd プローバ用チャック
JP2008227206A (ja) * 2007-03-14 2008-09-25 Tokyo Electron Ltd 載置台

Also Published As

Publication number Publication date
JPH0340947B2 (enExample) 1991-06-20

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